Hybrid bearing stage

Abstract

A hybrid bearing stage includes at least one guide rail, a carriage translatably coupled to the at least one guide rail, a plurality of air bearings disposed about the carriage, and a mechanical bearing assembly coupled to the at least one guide rail. The mechanical bearing assembly includes a mechanical bearing guide extending along a length of the at least one guide rail, a plurality of bearing blocks coupled to the mechanical bearing guide, a mounting block coupled to the carriage and positioned adjacent the plurality of bearing blocks, and a flexure mechanism extending between the mounting block and the plurality of bearing blocks. The plurality of bearing blocks apply a damping force to the carriage via contact between the plurality of bearing blocks and the mounting block.

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