Viewport sensor and method for monitoring semiconductor device fabrication

Abstract

A viewport sensor includes a housing structured to couple to a port of a semiconductor process chamber and including a first end exposed to an interior of the process chamber and an opposing second end positioned outside of the s process chamber. The viewport sensor includes a piezo viewport including a first side exposed to an environment of a process chamber and a second facing an environment outside of the process chamber. At least one transparent electrode is positioned centrally on the first side of the piezo viewport and forms two or more contact pads peripherally positioned on the piezo viewport.

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