Conveying equipment, plating equipment, and grinding equipment

Abstract

The purpose of this invention is to make it easier to peel the substrate from the pad and to prevent foreign matter from adhering to the substrate. The conveying device provided by this invention includes: a conveying mechanism for conveying a substrate Wf; a hand 720 mounted on the conveying mechanism; an adsorption pad 730 connected to a vacuum source 790 mounted on the hand 720, including: a tapered sealing lip 734a for vacuum adsorption of the substrate Wf; and a release member 737 disposed between the hand 720 and the sealing lip 734a. The release member 737 is configured to contract when the substrate Wf is vacuum adsorbed by the sealing lip 734a, and to extend and press the sealing lip 734a when the vacuum adsorption of the substrate Wf stops.

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