Dresser disk

Abstract

【Item Uses】 The item designed here is a dressing disc, a dressing disc for CMP devices used in semiconductor manufacturing; it is used to be fixed to a retainer by means of locating pins and magnets or vacuum adsorption. 【Design Description】 This derivative design involves securing the trimming block to the flat surface of the disc using countersunk screws. Once the convex jig presses against the central hole and holds the outer periphery of the object, it can easily detach from the aforementioned suction force. The differences in appearance between this derivative design and the original design are as follows: as shown in the top and bottom views, and the AA-line cross-sectional view, the number of trimming blocks differs, and the shape of the disc and the installation method of the disc and trimming block are slightly different. Furthermore, the trimming block in this derivative design is installed using a screw-in method. Therefore, the differences between this design and the original design are minor and do not affect the similarity between the original and derivative designs. The rear view is the same as the front view, so the rear view is omitted. The left view is the same as the right view; the left view is omitted.

Description

Item Uses

Design Description

Images