Dresser disk
TWD163004SActive Publication Date: 2014-09-11EBARA CORP
Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Designs
- Current Assignee / Owner
- Filing Date
- 2013-08-13
- Publication Date
- 2014-09-11
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Figure 1.1
Abstract
【Item Uses】 The item designed here is a dressing disc, a dressing disc for CMP devices used in semiconductor manufacturing; it is used to be fixed to a retainer by means of locating pins and magnets or vacuum adsorption. 【Design Description】 The article in this design is formed by fitting trimming blocks into circular holes in a disc. Once the convex jig presses against the central hole and holds the outer periphery of the article, it can easily detach from the aforementioned suction force. The difference in appearance between this derivative design and the original design is that the height of each trimming block in this design, as shown in the figures, is slightly different from that in the original design. Therefore, the difference between this design and the original design is minor and does not affect the similarity between the original design and the derivative design. Rear view and front view, rear view omitted. The left-side view is the same as the right-side view; therefore, the left-side view is omitted.
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Description
Item Uses
Design Description
Citation Information
Patent Citations
Magnetic abrasive conditioner
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