Dressing pellet for dresser disk

TWD163005SActive Publication Date: 2014-09-11EBARA CORP
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Filing Date
2013-08-13
Publication Date
2014-09-11

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    Figure 1.1
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Abstract

【Item Uses】 The item designed here is a trimming block for trimming discs, which is used in CMP devices for semiconductor manufacturing; for example, it is fitted into a circular hole provided on the flat part of a disc to form a trimming disc. 【Design Description】 The bottom surface of this design is used for finishing and processing. The difference in appearance between this derivative design and the original design is that the overall height of the circumference of this design, as shown in the figures, is slightly different from that of the original design. Therefore, the difference between this design and the original design is minor and does not affect the similarity between the original design and the derivative design. The rear view, left side view, and right side view are the same as the front view and are all omitted.
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Description

Item Uses

Design Description

Citation Information

Patent Citations

  • Diamond grinding wheel for trimming device

    TW545320U

  • Magnetic abrasive conditioner

    TWM425739U

  • Chemical mechanical polishing pad dresser

    TWM429982U

Cited By

  • Inner cylinder for exhaust treatment device

    TWD176440S