Seal member for use in semiconductor production apparatus
TWD197505SActive Publication Date: 2019-05-11VALQUA LTD
Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Designs
- Current Assignee / Owner
- Filing Date
- 2018-05-15
- Publication Date
- 2019-05-11
Smart Images
Figure TWG2TB001472744_001 
Figure TWG2TB001472744_002 
Figure TWG2TB001472744_003
Abstract
【Item Uses】 This design is a sealing material for semiconductor manufacturing equipment, suitable for use in semiconductor manufacturing equipment such as CVD or dry etching equipment. As shown in the reference figure of the usage state of this design, the sealing material for semiconductor manufacturing equipment is inserted into the trench of the semiconductor manufacturing equipment. 【Design Description】 This design is a derivative design of patent application No. 107302676. The rear view is the same as the front view, so it is omitted. The left side view is the same as the right side view, so it is omitted. The bottom view is the same as the top view, so it is omitted. The AA section view is a cross-sectional view at line AA in the top view. The BB enlarged cross-sectional view is a diagram that enlarges the BB line portion of the AA cross-sectional view.
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Description
Item Uses
Design Description
Citation Information
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