Seal member for use in semiconductor production apparatus

Abstract

【Item Uses】 This article is a sealing material for semiconductor manufacturing equipment, suitable for use in semiconductor equipment such as CVD or dry etching equipment. As shown in the reference figure illustrating the use of this article, the sealing material for semiconductor manufacturing equipment is inserted into the groove of a first component of the semiconductor manufacturing equipment to seal between the first component and the second component. 【Design Description】 This design is a derivative design of patent application No. 108301849. The rear view is the same as the front view, so it is omitted. The left side view is the same as the right side view, so it is omitted. The AA section view is a cross-sectional view at line AA in the top view. The BB enlarged cross-sectional view is a magnified view of the BB line portion in the AA cross-sectional view.

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