Carrier ring with substrate support assemblies for plasma chamber

Abstract

【Item Uses】 (slightly). 【Design Description】 The top perspective view is a top perspective view of a support ring with three base plate support assemblies, which are installed in the support ring; The bottom-view perspective 1 is a bottom-view perspective view of the support ring with three base plate support components, as shown in the top-view perspective view. The bottom-view perspective 2 is another bottom-view perspective of the support ring with three base plate support components shown in the top-view perspective; The enlarged view is a partial enlarged view of a portion of the bottom-view perspective 2, which shows in detail one of the three base plate support components in the bearing ring; The top view is a top-view perspective of the support ring with three base plate support components, as shown in the top-view perspective view. The bottom view is a top-view perspective view of the support ring with three base plate support components. The front view is a top-view perspective view of the support ring with three base plate support components; The rear view is a top-view perspective view of the support ring with three base plate support components. The left-side view is a top-view perspective view of the support ring with three base plate support assemblies; and The right-side view is a top-view perspective view of the support ring with three base plate support assemblies. The dashed broken lines in the diagram represent parts of the object that are not recommended for design. The design shown in the top perspective, bottom perspective 1, bottom perspective 2, enlarged view, top view, bottom view, front view, rear view, left view, and right view is characterized by three grooves on the bottom surface of the support ring, and three base plate support assemblies are respectively installed in the grooves in the support ring. In addition to the grooves in the support ring, the design shown in the top perspective view, bottom perspective view 1, bottom perspective view 2, enlarged view, top view, bottom view, front view, rear view, left view, and right view is further characterized by the dovetail portion on each substrate support assembly. As shown and illustrated, this design is a decorative design for a carrier ring with a substrate support assembly for a plasma chamber used in semiconductor manufacturing equipment.

Images