Carrier ring with substrate support assemblies for plasma chamber

Abstract

【Item Uses】 (slightly). 【Design Description】 Top perspective view 1 is a top perspective view of a support ring with three base plate support assemblies, which are installed in the initial position in the support ring; The bottom perspective view 1 is a bottom perspective view of the support ring with three base plate support components shown in the top perspective view 1. Top perspective view 2 is a top perspective view of a support ring with three base plate support assemblies, which are installed in the final position in the support ring; The bottom-view perspective 2 is a bottom-view perspective view of the support ring with three base plate support components shown in the top-view perspective 2; The bottom perspective view 3 is another bottom perspective view of the bearing ring with three base plate support components shown in the top perspective view 2; The enlarged view is a partial enlarged view of a portion of the bottom-view perspective 3, which shows in detail one of the three base plate support components in the bearing ring; The top view is the top view of the support ring with three base plate support components shown in the top perspective figure 2; The bottom view is a top view of the support ring with three base plate support components, as shown in the top perspective figure 2. The front view is a top-view perspective view of the bearing ring with three base plate support components, as shown in the perspective view 2. The rear view is a top-view perspective view of the bearing ring with three base plate support components, as shown in the perspective view 2. The left-side view is a top-view perspective view of the support ring with three base plate support assemblies, as shown in perspective figure 2; and The right-side view is a top-view perspective view of the support ring with three base plate support assemblies, as shown in the perspective figure 2. The dashed broken lines in the diagram represent parts of the object that are not recommended for design. The design shown in top perspective 1, bottom perspective 1, top perspective 2, bottom perspective 2, bottom perspective 3, enlarged view, top view, bottom view, front view, rear view, left view, and right view is characterized by three slots in the support ring, and three base plate support assemblies are respectively installed in the slots in the support ring. In addition to the slots in the support ring, the design shown in top perspective 1, bottom perspective 1, top perspective 2, bottom perspective 2, bottom perspective 3, enlarged view, top view, bottom view, front view, rear view, left view, and right view is further characterized by the oblong portion on each substrate support assembly. As shown and illustrated, this design is a decorative design for a carrier ring with a substrate support assembly for a plasma chamber used in semiconductor manufacturing equipment.

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