Semiconductor substrate holder part

TWD245952SActive Publication Date: 2026-08-01TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2026-01-20
Publication Date
2026-08-01

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    Figure TWG2TB001904743_003
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Abstract

【Item Uses】 The article used in this design is a semiconductor substrate holder for holding semiconductor wafers and other substrates. As shown in the reference diagram indicating the usage state, the article used in this design is installed in the processing chamber of a substrate processing apparatus, and the substrate is held in place by a protrusion. 【Design Description】 The parts represented by solid lines are the parts for which this design is claimed; the parts shown by dashed lines in the diagram are the parts for which this design is not claimed.
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