Showerhead

TWD246095SActive Publication Date: 2026-08-11ASM IP HLDG BV
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Patent Information

Application Number
TW114305763
Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-06-12
Filing Date
2025-12-09
Publication Date
2026-08-11
Estimated Expiration
2040-12-08

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    Figure TWG2TB001906096_002
  • Figure TWG2TB001906096_003
    Figure TWG2TB001906096_003
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Abstract

【Item Uses】 This design is for a spray head used in semiconductor manufacturing processes. 【Design Description】 (omitted)
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Citation Information

Patent Citations

  • shower plate

    KR3010920780001S

  • shower plate

    KR3010920780002S

  • Showerhead for a semiconductor processing apparatus

    KR301093824S

  • gas distributor

    KR301099768S

  • Boat for substrate processing equipment

    KR301117371S