wafer holding cell

Abstract

【Item Uses】 This item is installed and used in the processing tank of a wafer processing apparatus, as shown in reference figures 1 and 2, to hold the wafer within the processing tank. 【Design Description】 This work relates to a novel design for a wafer holding unit. The wafer holding unit of this invention is shown in the attached figure. Its overall shape design is novel and beautiful. It is the best and most reasonable design based on the functional requirements. It has not been seen in publications or publicly used before the application, and meets the requirements of a design patent. The parts indicated by solid lines are the portions for which a design patent is sought. This includes perspective views, enlarged views of portions A-B, and enlarged views of portions C-D, with specific details provided for the parts for which a design patent is sought. The portions indicated by dashed lines are the portions for which a design patent is not sought.

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