Semiconductor substrate holder part
TWD246481SActive Publication Date: 2026-09-01TOKYO ELECTRON LTD
Patent Information
- Application Number
- TW115300257
- Authority / Receiving Office
- TW · TW
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2025-08-01
- Filing Date
- 2026-01-20
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2041-01-19
Smart Images
Figure TWG2TB001909631_001 
Figure TWG2TB001909631_002 
Figure TWG2TB001909631_003
Abstract
【Item Uses】 The article used in this design is a semiconductor substrate holder for holding semiconductor wafers and other substrates. As shown in the reference diagram indicating the usage state, the article used in this design is installed in the processing chamber of a substrate processing apparatus, and the substrate is held in place by a protrusion. 【Design Description】 The solid lines represent the parts for which this design is claimed; the dashed lines shown in the diagram represent the parts for which this design is not claimed. A single-point chain line merely represents the boundary between the parts for which this design is claimed and the parts for which this design is not claimed; the single-point chain line itself represents the parts for which this design is not claimed.
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Citation Information
Patent Citations
End effector
TWD234110S