Wafer cleaning equipment

TWD246711SActive Publication Date: 2026-09-11SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
TW115301243
Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-12-18
Filing Date
2026-03-13
Publication Date
2026-09-11
Estimated Expiration
2041-03-12

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  • Figure TWG2TB001911434_001
    Figure TWG2TB001911434_001
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    Figure TWG2TB001911434_002
  • Figure TWG2TB001911434_003
    Figure TWG2TB001911434_003
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Abstract

【Item Uses】 This item is a wafer cleaning device. 【Design Description】 The dotted lines shown in the diagram represent the parts that are not recommended for design in this case. The design of this project is novel and unique. Through the unique design of the wafer cleaning device, a visual effect that was never seen before in previous technologies can be displayed.
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Citation Information

Patent Citations

  • Cleaning device and cleaning method

    TW200636841A

  • Breathing filter unit for n2 gas purge, and purge device for n2 gas purging semiconductor wafer housing container equipped with the filter unit

    TW201219102A

  • Wafer cleaning equipment

    TWD234766S