Wafer cleaning equipment

TWD246712SActive Publication Date: 2026-09-11SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
TW115301244
Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-12-18
Filing Date
2026-03-13
Publication Date
2026-09-11
Estimated Expiration
2041-03-12

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  • Figure TWG2TB001911435_001
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    Figure TWG2TB001911435_002
  • Figure TWG2TB001911435_003
    Figure TWG2TB001911435_003
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Abstract

【Item Uses】 This product is a wafer cleaning device with a top-mounted anti-fall fence. 【Design Description】 The dotted lines shown in the diagram represent the parts that are not recommended for design in this case. The design of this project is novel and unique. Through the unique design of the wafer cleaning device, a visual effect that was never seen before in previous technologies can be displayed.
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Citation Information

Patent Citations

  • Cleaning device and cleaning method

    TW200636841A

  • Breathing filter unit for n2 gas purge, and purge device for n2 gas purging semiconductor wafer housing container equipped with the filter unit

    TW201219102A

  • Wafer cleaning equipment

    TWD234766S