Wafer processing condition setting disk

TWD246713SActive Publication Date: 2026-09-11SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
TW115301245
Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-12-18
Filing Date
2026-03-13
Publication Date
2026-09-11
Estimated Expiration
2041-03-12

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  • Figure TWG2TB001911436_001
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    Figure TWG2TB001911436_002
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    Figure TWG2TB001911436_003
Patent Text Reader

Abstract

【Item Uses】 This item is installed in the wafer holding section of the chamber of a wafer cleaning apparatus for the user to set the processing conditions of the solution, etc., when performing liquid treatment on the wafer. 【Design Description】 The dotted lines shown in the diagram represent the parts that are not recommended for design in this case. This design is novel and unique. By using a uniquely designed wafer processing condition setting panel, it can display visual effects that were never seen before in previous technologies.
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Citation Information

Patent Citations

  • Wafer holder

    TWD238203S