Vacuum process pulse detection fixture

TWD247111SActive Publication Date: 2026-10-01FORCERA MATERIALS CO LTD
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Patent Information

Application Number
TW115303403
Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Filing Date
2026-07-17
Publication Date
2026-10-01
Estimated Expiration
2041-07-16

Smart Images

  • Figure TWG2TB001914742_001
    Figure TWG2TB001914742_001
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    Figure TWG2TB001914742_002
  • Figure TWG2TB001914742_003
    Figure TWG2TB001914742_003
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Abstract

【Item Uses】 A fixture for mounting a vacuum process probe workpiece, which is an analytical workpiece used in semiconductor manufacturing equipment. Viewed from above, the fixture has a through-hole with a specific profile for placing the vacuum process probe workpiece. Viewed from below, the fixture has an inclined recess for inserting and securing the vacuum process probe onto another component. Therefore, the vacuum process probe fixture designed in this paper has both a unique structural design and visual effect. 【Design Description】 The vacuum process probe fixture of this design is shown in the figure.
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Citation Information

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