Sample stage
TWD247393SActive Publication Date: 2026-10-21RIGAKU CORP
Patent Information
- Application Number
- TW115300873
- Authority / Receiving Office
- TW · TW
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2025-09-02
- Filing Date
- 2026-02-24
- Publication Date
- 2026-10-21
- Estimated Expiration
- 2041-02-23
Smart Images
Figure TWG2TB001918009_001 
Figure TWG2TB001918009_002 
Figure TWG2TB001918009_003
Abstract
【Item Uses】 This product is a sample stage for holding samples such as semiconductor wafers. The proposed design comprises three suction ports located at the periphery for adsorbing and holding the sample, and a central portion for supporting the sample. These suction ports and the central portion work together to hold the sample and function as a single unit, thus forming a unified design. Furthermore, the central portion is configured to slightly subside according to the shape of the sample when it is placed on the sample. 【Design Description】 The dotted lines shown in the diagram represent the parts that are not recommended for design in this case.
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Citation Information
Patent Citations
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