Multi-layer filter manufacturing method and filter device manufacturing method

Abstract

A multi-layer filter and its manufacturing method are provided, as well as a filter device comprising the multi-layer filter and its manufacturing method. The multi-layer filter includes a first mesh layer, a filter layer, and a second mesh layer, wherein the filter layer is sandwiched between the first and second mesh layers. The materials of the first and second mesh layers are selected from metals, alloys, or metal oxides, and the material of the filter layer is selected from glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool. The multi-layer filter does not contain any adhesive material. The filter device includes the multi-layer filter and a frame. The multi-layer filter is fixed in the frame, and the frame is made of metals, alloys, or metal oxides. The filter device does not contain any adhesive material.

Description

Technical Field

[0001] This invention relates to a multi-layer filter screen and its manufacturing method, as well as a filter screen device including such a multi-layer filter screen and its manufacturing method. In particular, it relates to a multi-layer filter screen that can be used in high-temperature environments with low smoke emission, its manufacturing method, and a filter screen device including such a multi-layer filter screen and its manufacturing method. Prior Technology

[0002] In industrial manufacturing sectors such as semiconductor manufacturing, high-temperature ovens are commonly used for processes like defoaming to further improve product yield. These high-temperature ovens are typically equipped with filter devices to meet internal cleanliness requirements. These filter devices usually consist of a frame and a filter screen.

[0003] After a period of operation, contaminants may adhere to or become trapped inside the oven, including the inner walls, pipes, and filter devices, which is detrimental to maintaining cleanliness. Therefore, there is a concept of heating the airflow in a high-temperature oven to a temperature, for example, above 450°C, to break down and remove organic contaminants from the oven's interior, including the inner walls, pipes, and filter devices. However, conventional filter manufacturing and the fixing of the filter to the frame use adhesive materials such as glue. These adhesive materials also decompose at high temperatures, not only generating additional contamination but also potentially damaging the filter itself and the structure of the filter device. Summary of the Invention

[0004] The purpose of this invention is to provide a multi-layer filter screen and its manufacturing method, as well as a filter screen device including the multi-layer filter screen and its manufacturing method, which can be used in high-temperature environments and avoid pollution and structural damage caused by high temperatures.

[0005] Another objective of this invention is to provide a filter device and its manufacturing method, which can be used in high-temperature environments to avoid pollution and structural damage caused by high temperatures.

[0006] The multi-layer filter of the present invention includes a first mesh layer, a filter layer, and a second mesh layer, wherein the filter layer is sandwiched between the first mesh layer and the second mesh layer. The materials of the first mesh layer and the second mesh layer are selected from metal, alloy, or metal oxide. The material of the filter layer is selected from glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool. The multi-layer filter does not contain adhesive materials.

[0007] The multilayer filter manufacturing method of the present invention includes providing a first mesh layer, a filter layer, and a second mesh layer, wherein the materials of the first mesh layer and the second mesh layer are selected from metals, alloys, or metal oxides; forming a plurality of wave structures using a folding method, and sandwiching the filter layer between the first mesh layer and the second mesh layer; and without using adhesive materials.

[0008] The filter device of the present invention includes a multi-layer filter and a frame. The multi-layer filter includes a first mesh layer, a filter layer, and a second mesh layer, wherein the filter layer is sandwiched between the first mesh layer and the second mesh layer, the multi-layer filter is fixed in the frame, and the material of the frame is selected from metal, alloy, or metal oxide, and the filter device does not contain adhesive material.

[0009] In one embodiment, the multi-layer filter screen forms a plurality of wave structures by means of folding, and the filter layer is sandwiched between the first mesh layer and the second mesh layer.

[0010] In one embodiment, the frame includes a first side frame, a second side frame, a third side frame, and a fourth side frame that are sequentially adjacent to each other. The first side frame and the third side frame are located on opposite sides, as are the second side frame and the fourth side frame. The multi-layer filter includes a first side edge, a second side edge, a third side edge, and a fourth side edge that are sequentially adjacent to and respectively fixed to the first side frame, the second side frame, the third side frame, and the fourth side frame. The first side edge, the third side edge, and the edges of a plurality of wave structures extend along a first direction, the second side edge and the fourth side edge extend along a second direction that forms an angle with the first direction, and the opposite ends of each of the plurality of wave structures are respectively connected to the second side edge and the fourth side edge.

[0011] In one embodiment, the first side frame includes a first groove with a first opening facing the multilayer filter screen, and the first side can be fixed to the first side frame by being inserted into the first groove through the first opening.

[0012] In one embodiment, the second side frame includes a second A side frame and a second B side frame. The second A side frame has a second A fitting portion facing the second B side frame, and the second B side frame has a second B fitting portion facing the second A side frame. The second A fitting portion and the second B fitting portion can fit into each other and correspond to the shapes of the opposite sides of the plurality of wave structures near one of the second side edges, respectively, so as to clamp and fix the second side edge between the two.

[0013] The method for manufacturing a filter device according to the present invention includes providing a multi-layer filter, the multi-layer filter including a first mesh layer, a filter layer, and a second mesh layer, wherein the filter layer is sandwiched between the first mesh layer and the second mesh layer, the materials of the first mesh layer and the second mesh layer are selected from metal, alloy, or metal oxide, and the material of the filter layer is selected from glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool; providing a frame, the material of the frame being selected from metal, alloy, or metal oxide; and fixing the multi-layer filter in the frame; and without using adhesive materials.

[0014] In one embodiment, the step of providing a multilayer filter screen includes forming a plurality of wave structures using a folding method, and sandwiching a filter layer between a first mesh layer and a second mesh layer.

[0015] In one embodiment, the temperature of the folding blade in the folding method is greater than 150°C, and the folding speed is less than 10 meters per minute.

[0016] In one embodiment, the step of securing the multi-layer filter to the frame includes securing it to the first side frame by inserting the first side edge into the first groove through the first opening.

[0017] In one embodiment, the step of fixing the multi-layer filter in the frame includes clamping and fixing the second side between the second A fitting portion and the second B fitting portion.

[0018] In one embodiment, the method of manufacturing the filter device further includes heating the multi-layer filter to a temperature greater than or equal to 160°C before the step of fixing the multi-layer filter to the frame.

[0019] In one embodiment, the method of manufacturing the filter device further includes heating the frame to a temperature greater than or equal to 250°C before the step of fixing the multi-layer filter to the frame.

[0020] In one embodiment, the method of manufacturing the filter device further includes, after the step of fixing the multi-layer filter screen in the frame, heating the filter device to a temperature greater than or equal to 250°C. Simple Explanation of the Diagram

[0021] Figure 1 is a schematic diagram of an embodiment of the filter device of the present invention.

[0022] Figure 2 is an exploded view of an embodiment of the filter device of the present invention.

[0023] Figure 3 is a cross-sectional view of line AA' in Figure 1.

[0024] Figure 4 is an enlarged view of region 610 in Figure 3.

[0025] Figure 5A is a schematic flowchart of an embodiment of the multi-layer filter manufacturing method of the present invention.

[0026] Figure 5B is a schematic diagram of an embodiment of manufacturing a multi-layer filter screen according to the present invention.

[0027] Figures 6 to 8 are schematic diagrams of embodiments of the filter manufacturing device of the present invention.

[0028] Figures 8A to 8C are schematic diagrams of different embodiments of the filter device of the present invention.

[0029] Figure 9 is a schematic flowchart of an embodiment of the filter screen device manufacturing method of the present invention.

[0030] Figures 10A to 10D are schematic flowcharts of different embodiments of the filter screen device manufacturing method of the present invention. Implementation

[0031] The following specific embodiments, in conjunction with the accompanying drawings, illustrate the implementation of the connection components disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. However, the following disclosure is not intended to limit the scope of protection of this invention. Those skilled in the art can implement this invention in other different embodiments based on different viewpoints and applications without departing from the spirit of the invention. In the drawings, the thicknesses of layers, films, panels, regions, etc., are enlarged for clarity. Throughout the specification, the same reference numerals denote the same elements. It should be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected" to another element, it may be directly on or connected to the other element, or an intermediate element may also be present. Conversely, when an element is referred to as being "directly on" or "directly connected" to another element, no intermediate element is present. As used herein, "connection" can refer to physical and / or electrical connection. Furthermore, "electrical connection" or "coupling" can refer to the presence of other elements between two elements.

[0032] It should be understood that although the terms "first," "second," "third," etc., may be used herein to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, and / or parts should not be limited by these terms. These terms are used only to distinguish one element, component, region, layer, or part from another. Therefore, "first element," "component," "region," "layer," or "part" discussed below may be referred to as a second element, component, region, layer, or part without departing from the teachings of this document.

[0033] Furthermore, relative terms such as "below" or "bottom" and "above" or "top" may be used herein to describe the relationship between one element and another, as illustrated in the figures. It should be understood that relative terms are intended to include different orientations of the device beyond those shown in the figures. For example, if a device in one figure is flipped, an element described as being "below" the other element will be oriented "above" the other element. Thus, the exemplary term "below" can include both "below" and "above" orientations, depending on the specific orientation of the figure. Similarly, if a device in one figure is flipped, an element described as being "below" or "below" the other element will be oriented "above" the other element. Thus, the exemplary term "below" or "below" can include both "above" and "below" orientations.

[0034] As used herein, “about,” “approximately,” or “substantially” includes the value and the average value within an acceptable range of deviations from a particular value as determined by one of ordinary skill in the art, taking into account the measurement under discussion and a particular number of errors associated with the measurement (i.e., limitations of the measurement system). For example, “about” may mean within one or more standard deviations of the value, or within ±30%, ±20%, ±10%, ±5%. Furthermore, the use of “about,” “approximately,” or “substantially” herein may be chosen based on the optical, etched, or other properties to select a more acceptable range of deviations or standard deviations, and may not require a single standard deviation to apply to all properties.

[0035] As shown in Figures 1 and 2, the filter device 900 of the present invention includes a multi-layer filter 100 and a frame 200. The multi-layer filter 100 is fixed within the frame 200, and the filter device 900 contains no adhesive material. The "fixing" refers to using physical mechanical forces such as locking, clamping, or riveting to secure the multi-layer filter 100 to the frame 200. In other words, the multi-layer filter 100 is fixed to the frame 200 without the use of adhesive material, therefore there is no adhesive material between the multi-layer filter 100 and the frame 200. Furthermore, the material of the frame 200 is selected from metals, alloys, or metal oxides.

[0036] Figure 3 is a cross-sectional view along line AA' in Figure 1, and Figure 4 is an enlarged view of region 610 in Figure 3. As shown in the embodiment in Figure 4, the multi-layer filter 100 includes a first mesh layer 101, a filter layer 103, and a second mesh layer 102. The filter layer 103 is sandwiched between the first mesh layer 101 and the second mesh layer 102. The materials of the first mesh layer 101 and the second mesh layer 102 are selected from metals, alloys, or metal oxides. The filter layer 103 is selected from glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool without adhesive materials. Viewed from different angles, the filter layer 103 is composed of uniformly distributed glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool, for example, it can be glass fiber cloth, ceramic fiber cloth, metal wool cloth, alloy wool cloth, or metal oxide wool cloth. Furthermore, the multi-layer filter 100 does not contain adhesive materials. In other words, no adhesive material is used to fix the layers of the multi-layer filter 100 within or between the layers; therefore, no adhesive material exists in the multi-layer filter 100. Adhesive material generally refers to any material with adhesive properties or used for adhesion / bonding, and can be organic or inorganic. In one embodiment, the filter layer is made of glass fiber with a thickness of 2 mm and a density of 120 kg / m³. The first and second mesh layers are made of 304 stainless steel with a thickness of 0.5 mm, a mesh size of 18*20 meshes, and a diamond-shaped mesh.

[0037] Furthermore, since there is no adhesive material in the multi-layer filter 100 or between the multi-layer filter 100 and the frame 200, the deterioration and fuming of the adhesive material caused by high temperatures, resulting in particulate and volatile organic gas pollution, as well as structural damage such as changes in the porosity of the filter layers of the multi-layer filter 100 itself, layer-to-layer separation, and / or separation of the multi-layer filter 100 from the frame 200, can be avoided. In other words, the multi-layer filter 100 and filter device 900 of the present invention do not use any adhesive material, and there is no problem of adhesive material releasing gas and causing pollution at high temperatures. Therefore, the theoretical upper limit of the operating temperature depends on the temperature resistance of the materials of the first mesh layer, the filter layer, the second mesh layer, and the frame itself. On the other hand, in embodiments where the filter layer 103 uses glass fiber as the material, glass fiber is a brittle and easily broken material, but it has high tensile strength. Although it is not easily damaged by wind, it is at risk of breaking under direct contact or compression. Moreover, its diameter is only on the micrometer scale, and contact with the skin or respiratory tract may cause allergic reactions, inflammation, or other adverse reactions. Therefore, providing a first mesh layer 101 and a second mesh layer 102 on both sides of the filter layer 103 can protect both the material itself and the user.

[0038] As shown in the embodiment of FIG4, the multi-layer filter 100 can form a plurality of wave structures 400 by folding, and the filter layer 103 is sandwiched between the first mesh layer 101 and the second mesh layer 102. More specifically, as shown in the embodiment of FIG5A, the manufacturing method of the multi-layer filter of the present invention includes, for example, the following steps.

[0039] Step 1100: A first mesh layer, a filter layer, and a second mesh layer are provided. The materials of the first and second mesh layers are selected from metals, alloys, or metal oxides. The material of the filter layer is selected from glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool. None of the first, filter, or second mesh layers contain adhesive materials. As shown in Figure 5B, the first mesh layer 101, filter layer 103, and second mesh layer 102 can be provided in a roll state.

[0040] Step 1200 involves forming a plurality of wave structures using a folding method, sandwiching a filter layer between the first and second mesh layers without using adhesive material. As shown in Figure 5B, the first mesh layer 101, filter layer 103, and second mesh layer 102 can be pulled out from a roll and enter the folding device 700. Through the up-and-down movement of the interlocking folding blades 710, 720, and 730, a plurality of wave structures are formed, while the filter layer 103 is sandwiched between the first mesh layer 101 and the second mesh layer 102. In one embodiment, the operating temperature (the temperature inside the folding device 700 or the temperature of the folding blades 710, 720, and 730) is greater than 150°C, and the folding speed is less than 10 meters per minute.

[0041] The multi-layer filter 100 is manufactured using the above-described folding method because the first mesh layer 101 and the second mesh layer 102, made of materials such as stainless steel, provide good mechanical strength and limiting effect. Therefore, after folding, multiple wave structures can be formed to form a basic shape. Even if the filter layer 103, such as glass fiber needled cotton, does not use organic or inorganic additives (adhesives, shaping agents) as adhesive materials, its expansion when subjected to external force folding can be reduced, avoiding the reduction in particle interception ability due to increased gaps caused by expansion. In other words, the multi-layer filter 100 manufactured using the above-described folding method is more conducive to controlling the expansion and / or pore density of the filter layer, and it can have good and stable dust-blocking performance. In addition, the filter area can be increased to reduce pressure loss. However, in different embodiments, based on manufacturing, design, or usage requirements, the multi-layer filter 100 can be formed by methods other than folding, such as directly and sequentially flattening and stacking the first mesh layer 101, filter layer 103, and second mesh layer 102, and then clamping and fixing them with a frame.

[0042] As shown in the embodiment of Figure 6, the frame 200 includes a first side frame 210, a second side frame 220, a third side frame 230, and a fourth side frame 240 that are sequentially adjacent to each other. The first side frame 210 and the third side frame 230 are located on opposite sides, and the second side frame 220 and the fourth side frame 240 are located on opposite sides. The multi-layer filter 100 includes a first side edge 110, a second side edge 120, a third side edge 130, and a fourth side edge 140 that are sequentially adjacent to and respectively fixed to the first side frame 210, the second side frame 220, the third side frame 230, and the fourth side frame 240. The first side edge 110, the third side edge 130, and the edges 410 of the plurality of wave structures extend along a first direction 601, the second side edge 120 and the fourth side edge 140 extend along a second direction 602 that forms an angle θ with the first direction 601, and the opposite ends of each of the plurality of wave structures are connected to the second side edge 120 and the fourth side edge 140, respectively. The included angle θ is, for example, 90°, that is, the multi-layer filter 100 and the frame 200 are rectangular, but not limited to this.

[0043] Figure 7 is an enlarged schematic diagram of region 620 in Figure 6. As shown in the embodiments of Figures 6 and 7, the first side frame 210 includes a first opening 211A facing the first groove 211 of the multi-layer filter 100, and the first side 110 can be embedded in the first groove 211 and fixed in the first side frame 210. The third side frame 230 includes a third opening 231A facing the third groove 231 of the multi-layer filter 100, and the third side 130 can be embedded in the third groove 231 and fixed in the third side frame 230.

[0044] As shown in the embodiment of FIG6, the second side frame 220 includes a second A side frame 221 and a second B side frame 222. The second A side frame 221 has a second A fitting portion 221A facing the second B side frame 222, and the second B side frame 222 has a second B fitting portion 222B facing the second A side frame 221. The second A fitting portion 221A and the second B fitting portion 222B can fit together and correspond to the shapes of the opposite sides of the plurality of wave structures near one of the second side edges 120, so as to clamp and fix the second side edge 120 between the second A fitting portion 221A and the second B fitting portion 222B. Similarly, the fourth side frame 240 includes a fourth A side frame 241 and a fourth B side frame 242. The fourth A side frame 241 has a fourth A fitting portion 241A facing the fourth B side frame 242, and the fourth B side frame 242 has a fourth B fitting portion 242B facing the fourth A side frame 241. The fourth A fitting portion 241A and the fourth B fitting portion 242B can fit together, and their shapes correspond to the opposite sides of the plurality of wave structures near the fourth side 140, respectively, so as to clamp and fix the fourth side 140 between the fourth A fitting portion 241A and the fourth B fitting portion 242B. Viewed from different angles, the second A fitting portion 221A and the second B fitting portion 222B are respectively the parts on the comb-shaped structure extending vertically from the second A side frame 221 and the second B side frame 222 into the multi-layer filter 100, corresponding to the opposite sides of the plurality of wave structures. The fourth A fitting portion 241A and the fourth B fitting portion 242B are respectively the parts on the comb-shaped structure extending vertically from the fourth side frame 240 and the fourth B side frame 242 into the multi-layer filter 100, corresponding to the opposite sides of the plurality of wave structures.

[0045] Then, as shown in the embodiment of FIG8, the second A side frame 221, the second B side frame 222 (see FIG6), one end of the first side frame 210 near the second A side frame 221, and one end of the third side frame 230 near the second A side frame 221 are fixed with the second C side frame 223, and the fourth A side frame 241, the fourth B side frame 242, one end of the first side frame 210 near the fourth A side frame 241, and one end of the third side frame 230 near the fourth A side frame 241 are fixed with the fourth C side frame 243 to form the filter device 900 shown in FIG1. ​​Through the above, the multi-layer filter 100 formed by folding has corresponding grooves and fitting portions corresponding to the wave shape on its sides for fixing, thus reducing structural deformation during fixing and improving the fixing effect.

[0046] In different embodiments, the frame 200' may have different configurations based on manufacturing, design, or usage requirements. As shown in the embodiments of Figures 8A and 8B, the first side 110 can be fixed to the first side frame 210' by being inserted into the first groove 211' through the first opening 211A', and the third side 130 can be fixed to the third side frame 230' by being inserted into the third groove 231' through the third opening 231A'. The second side frame 220' includes a second A side frame 221' and a second B side frame 222'. The second A side frame 221' has a second A fitting portion 221A' facing the second B side frame 222', and the second B side frame 222' has a second B fitting portion 222B' facing the second A side frame 221'. The second A fitting portion 221A' and the second B fitting portion 222B' can fit together and correspond to the shapes of the opposite sides of a plurality of wave structures near one of the second side 120's sides. The fourth side frame 240' includes a fourth A side frame 241' and a fourth B side frame 242'. The fourth A side frame 241' has a fourth A fitting portion 241A' facing the fourth B side frame 242', and the fourth B side frame 242' has a fourth B fitting portion 242B' facing the fourth A side frame 241'. The fourth A fitting portion 241A' and the fourth B fitting portion 242B' can fit together and correspond to the shapes of the opposite sides of the plurality of wave structures near one of the fourth side edges 140.

[0047] Accordingly, as shown in the embodiments of Figures 8B and 8C, after the first side 110 and the third side 130 are respectively fixed to the first side frame 210' and the third side frame 230', the second B side frame 222' and the second A side frame 221' can be sequentially arranged on opposite sides of the plurality of wave structures near one of the second side 120, and the side wall 221S of the second A side frame 221' is locked inwardly to the side wall 222S of the second B side frame 222', thereby clamping and fixing the second side 120 to the... Between the second A fitting portion 221A' and the second B fitting portion 222B'; and the fourth B side frame 242' and the fourth A side frame 241' are sequentially disposed on opposite sides of the plurality of wave structures near one of the fourth side edges 140, and are locked inwardly to the side wall 242S of the fourth B side frame 242' by the side wall 241S of the fourth A side frame 241', thereby clamping and fixing the fourth side edge 140 between the fourth B fitting portion 242B' and the fourth A fitting portion 241A'.

[0048] Furthermore, as shown in the embodiment of FIG9, the manufacturing method of the filter device of the present invention includes, for example, the following steps.

[0049] Step 2100: A multi-layer filter screen is provided, comprising a first mesh layer, a filter layer, and a second mesh layer, wherein the filter layer is sandwiched between the first mesh layer and the second mesh layer. The materials of the first and second mesh layers are selected from metals, alloys, or metal oxides, and the material of the filter layer is selected from glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool. Furthermore, the first mesh layer, the filter layer, and the second mesh layer do not contain any adhesive materials. More specifically, a multi-layer filter screen 100 as shown in Figure 6 is provided.

[0050] Step 2200: Provide a frame member, the material of which is selected from metal, alloy, or metal oxide. More specifically, provide frame member 200 as shown in Figure 6.

[0051] Step 2300: The multi-layer filter is fixed in the frame without using adhesive material. More specifically, as shown in FIG7, the opposite two sides of the multi-layer filter 100 are embedded in the grooves of the side frame of the adjacent frame 200, and as shown in FIG8, the other two opposite sides of the multi-layer filter 100 are fixed with a wavy fitting portion.

[0052] As shown in the embodiment of FIG10A, step 2100 includes providing a multi-layered filter screen made using a folding method. In other words, step 2100 includes step 1100, providing a first mesh layer, a filter layer, and a second mesh layer. The materials of the first mesh layer and the second mesh layer are selected from metals, alloys, or metal oxides. The material of the filter layer is selected from glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool. The first mesh layer, the filter layer, and the second mesh layer do not contain adhesive materials. Step 1200 involves forming a plurality of wave structures using a folding method and sandwiching the filter layer between the first mesh layer and the second mesh layer without using adhesive materials.

[0053] As shown in the embodiment of Figure 10B, the manufacturing method of the filter device of the present invention further includes step 2110, performed before step 2300, in which the multi-layer filter is heated to a temperature greater than or equal to 160°C. Furthermore, the filter layer, made of materials such as glass fiber needled cotton, is manufactured using a knitting method, where fibers are bundled together and woven. During this process, organic matter from the raw materials or the environment may adhere to the glass fibers. Therefore, pre-heating can decompose the organic matter, preventing smoke and organic gas release pollution during initial use.

[0054] As shown in the embodiment of Figure 10C, the manufacturing method of the filter device of the present invention further includes step 2210, performed before step 2300, to heat the frame to a temperature greater than or equal to 250°C, thereby reducing smoke and gas emission pollution. Furthermore, residual stress in the metal material after processing may cause workpiece deformation, dimensional changes, or intergranular corrosion damage, rendering the protective effect of the surface oxide layer ineffective. Therefore, applying heat treatment to the frame after assembly can make the frame more stable. Before heating, the frame must be cleaned to avoid oil contamination. Heating is performed according to the characteristics of different materials; for example, for a frame made of 304 stainless steel, the heating temperature can be 250°C to 450°C.

[0055] As shown in the embodiment of Figure 10D, the filter device manufacturing method of the present invention further includes step 2400 after step 2300, heating the filter device to a temperature greater than or equal to 250°C. Furthermore, the aforementioned heating operation on the multi-layer filter or frame can be performed directly on the entire filter device after the multi-layer filter is fixed to the frame to form the filter device.

[0056] The present invention has been described by the above-described embodiments; however, these embodiments are merely examples for implementing the present invention. It must be noted that the disclosed embodiments do not limit the scope of the present invention. Conversely, modifications and equivalents encompassing the spirit and scope of the claims are all included within the scope of the present invention.

[0057] 100: Multi-layer filter 101: First layer 102: Second layer 103: Filter layer 110: First side 120: Second side 130: Third side 140: Fourth side 200: Frame 200': Frame 210: First side frame 210': First side frame 211: First Groove 211': First groove 211A: First opening 211A': First opening 220: Second side frame 220': Second side frame 221: Second A side frame 221': Second A side frame 221A: Second A fitting part 221A': Second A fitting part 221S: Sidewall 222: Second B side frame 222': Second B side frame 222B: Second B fitting part 222B': Second B-joint 222S: Sidewall 223: Second C-side frame 230: Third side frame 230': Third side frame 231: Third Groove 231': Third groove 231A: Third opening 231A': Third opening 240: Fourth side frame 240': Fourth side frame 241: Fourth A side frame 241': Fourth A side frame 241A: Fourth A-jointing part 241A': Fourth A-jointing part 241S: Sidewall 242: Fourth B side frame 242': Fourth B side frame 242B: Fourth B-joint 242B': Fourth B-joint 242S: Sidewall 243: Fourth C-side frame 400: Wave structure 410: Edge 700: Folding device 710: Folding Knife 720: Folding Knife 730: Folding Knife 601: First Direction 602: Second Direction 610: Area 620: Area 900: Filter device 1100: Steps 1200: Steps 2100: Steps 2110: Steps 2200: Steps 2210: Steps 2300: Steps 2400: Steps θ: included angle

Claims

1. A method for manufacturing a multilayer filter screen, comprising: providing a first mesh layer, a filter layer, and a second mesh layer, wherein the materials of the first mesh layer and the second mesh layer are selected from metals, alloys, or metal oxides; forming a plurality of wave structures with fixed shapes based on their own mechanical strength and having a limiting effect on the filter layer using a folding method, and sandwiching the filter layer between the first mesh layer and the second mesh layer; and wherein the multilayer filter screen manufacturing method does not use adhesive materials, and there are no adhesive materials in or between the first mesh layer, the second mesh layer, and the filter layer.

2. The method for manufacturing a multi-layer filter as described in claim 1, wherein the operating temperature in the folding method is greater than 150°C and the folding speed is less than 10 meters / minute.

3. A method for manufacturing a filter device, comprising: providing a multi-layer filter, the multi-layer filter comprising a first mesh layer, a filter layer, and a second mesh layer, wherein the first mesh layer and the second mesh layer each comprise a plurality of wave structures whose shape is fixed based on their own mechanical strength and which have a limiting effect on the filter layer, the filter layer being sandwiched between the first mesh layer and the second mesh layer, the materials of the first mesh layer and the second mesh layer being selected from metal, alloy, or metal oxide, and the material of the filter layer being selected from glass fiber, ceramic fiber, metal wool, alloy wool, or metal oxide wool, comprising forming the plurality of wave structures using a folding method, and sandwiching the filter layer between the first mesh layer and the second mesh layer; providing a frame member, the material of the frame member being selected from metal, alloy, or metal oxide; and fixing the multi-layer filter device in the frame member; and wherein the method for manufacturing the filter device does not use adhesive materials, and there are no adhesive materials within or between the first mesh layer, the second mesh layer, the filter layer, and the frame member.

4. The method for manufacturing a filter device as claimed in claim 3, wherein the operating temperature in the folding method is greater than 150°C and the folding speed is less than 10 meters / minute.

5. A method for manufacturing a filter device as described in claim 3, wherein, The frame includes a first side frame, a second side frame, a third side frame, and a fourth side frame that are sequentially adjacent to each other. The first side frame and the third side frame are located on opposite sides, and the second side frame and the fourth side frame are located on opposite sides. The multi-layer filter includes a first side edge, a second side edge, a third side edge, and a fourth side edge that are sequentially adjacent to and respectively fixed to the first side frame, the second side frame, the third side frame, and the fourth side frame. The edge of the first side edge, the third side edge, and the edge of the plurality of wave structures extend along a first direction. The second side edge and the fourth side edge extend along a second direction that forms an angle with the first direction. The opposite ends of each of the plurality of wave structures are respectively connected to the second side edge and the fourth side edge.

6. The method of manufacturing a filter device as claimed in claim 5, wherein the first side frame includes a first opening facing a first groove of the multi-layer filter, and the step of fixing the multi-layer filter in the frame includes fixing the first side into the first groove via the first opening.

7. The method of manufacturing a filter device as claimed in claim 5, wherein the second side frame includes a second A side frame and a second B side frame, the second A side frame has a second A fitting portion facing the second B side frame, the second B side frame has a second B fitting portion facing the second A side frame, the second A fitting portion and the second B fitting portion are interlocking and respectively correspond to the shapes of the opposite sides of the plurality of wave structures near one of the second side edges, and the step of fixing the multi-layer filter in the frame includes clamping and fixing the second side edge between the second A fitting portion and the second B fitting portion.

8. The method of manufacturing a filter device as claimed in claim 3, further comprising, prior to the step of fixing the multi-layer filter screen in the frame, heating the multi-layer filter screen to a temperature greater than or equal to 160°C.

9. The method of manufacturing a filter device as claimed in claim 3, further comprising heating the frame to a temperature greater than or equal to 250°C before the step of fixing the multi-layer filter in the frame.

10. The method of manufacturing a filter device as claimed in claim 3, further comprising, after the step of fixing the multi-layered filter in the frame, heating the filter device to a temperature greater than or equal to 250°C.

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