Adsorption-type tubular membrane chemical filter device

Abstract

This invention relates to an adsorption-type tubular membrane chemical filter device, primarily used to treat airborne particulate pollutants (AMCs). It employs a design combining a frame and at least one set of membrane blocks housed within the frame. Each set of membrane blocks consists of at least two membrane sheets arranged together, with a flow channel between each sheet. Each membrane sheet comprises multiple tubular membrane adsorbents, each with multiple pore channels communicating with the flow channel. This allows the airflow of AMCs to enter the multiple pore channels of the tubular membrane adsorbents and flow along these channels, thereby increasing the adsorption capacity of the chemical filter while balancing performance efficiency, pressure loss, and lifespan. This design also meets the specifications required by advanced semiconductor nano-processing plants.

Description

Technical Field

[0001] This invention relates to an adsorption-type tubular membrane chemical filter device, particularly one that balances performance efficiency, pressure loss, and service life while meeting the specifications required by nanoprocess plants in the advanced semiconductor industry, and is suitable for clean rooms, dust-free rooms, or similar indoor spaces in the semiconductor, optoelectronic, or chemical-related industries. Prior Technology

[0002] As semiconductor manufacturing processes become increasingly precise, reaching 7nm, 5nm, and 3nm, and with increasingly smaller wire diameters, the cleanliness requirements for cleanrooms in the yellow light area are becoming more stringent. In addition to particulate contaminants, the cleanliness of gaseous contaminants is also crucial, especially organic micro-contaminants in AMC (Airborne Molecular Contamination). How to effectively control these contaminants at the ppb level to achieve the effect of purifying indoor air and reducing product defect rates can no longer rely on traditional filters such as HEPA or ULPA.

[0003] Semiconductor fabs (fabs) are complex system fabrication structures requiring cleanroom air circulation and control. For management and energy conservation, most of the air conditioning air within the fab is recirculated; however, this leads to an increasing amount of airborne molecular contaminants generated internally. These contaminants originate from chemicals, materials, equipment, and human personnel. Approximately 20% of the fresh air from outside the fab carries potential environmental airborne molecular contaminants. For decades, cleanrooms have focused on small particle control, but modern microelectronics requires stringent control of gaseous, airborne molecular contaminants (AMCs) as they impact products, processes, and equipment. Without AMC chemical filters, high-yield production of wafers with linewidths below 14nm is impossible in advanced semiconductor processes.

[0004] The problems with commercially available AMC chemical filters at home and abroad include: 1. They use granular adsorbent material, mainly composed of activated carbon, zeolite, or alumina particles. Most applications use disposable materials, resulting in excessive waste after saturation. 2. While some adsorbent in these granular materials is regenerated, it becomes ineffective after about 2-3 regenerations, or its performance deteriorates significantly after each regeneration, requiring replenishment. 3. The activated carbon in these granular adsorbents is applied in a stacked manner within the filter media panel. The adsorbent particles are perpendicular to the airflow direction, causing a large pressure drop (i.e., increased air conditioning power consumption) and high air resistance. This affects the filtration performance capacity of the fan. Generally, chemical filters must control the pressure drop to 80-120 Pa to adapt to fan filter units (FFUs), which greatly limits the filling height and amount of granular adsorbent. 4. These granular adsorbents are also prone to weathering into dust and deposition. Therefore, after the airflow passes through a chemical filter, a HEPA or ULPA filter needs to be installed to avoid dust particles from damaging the performance of the tool equipment. For example, if EUV contains particles, it will affect the absorption or refraction of light, resulting in defects in the chip performance.

[0005] Therefore, in view of the above-mentioned deficiencies, the inventors aim to propose an adsorption-type tubular membrane chemical filter device that is different from the traditional AMC chemical filter, allowing users to easily operate and assemble it. Thus, the inventors have devoted themselves to research, design and manufacture, in order to provide convenience to users. This is the motivation for the inventors to develop this invention. Summary of the Invention

[0006] The main objective of this invention is to provide an adsorption-type tubular membrane chemical filter device, primarily used to treat airborne particulate pollutants (AMCs). It employs a design combining a frame and at least one set of membrane blocks housed within the frame. Each set of membrane blocks is composed of at least two membrane sheets arranged together, with a flow channel between each sheet. Each membrane sheet is composed of multiple tubular membrane adsorbents, each with multiple pores connected to the flow channel. This allows the airflow of AMCs to enter the multiple pores of the tubular membrane adsorbents through the flow channel and flow along the direction of these pores, thereby increasing the adsorption capacity of the chemical filter. This design also balances performance efficiency, pressure loss, and service life, meeting the specifications required by advanced semiconductor nanofabrication plants, thus enhancing overall practicality.

[0007] Another objective of this invention is to provide an adsorption-type tubular membrane chemical filter device, wherein the tubular membrane adsorbent material is made of at least one polymer and at least one powdered adsorbent, and the pore channel diameter of the tubular membrane adsorbent material is 0.5mm~1.5mm, and the length of the tubular membrane adsorbent material is more than 50 times the pore channel diameter, and the surface area of ​​the tubular membrane adsorbent material is greater than 500m² / m³, wherein the tubular membrane adsorbent material and the pore channel are circular, elliptical, triangular, quadrilateral, pentagonal, hexagonal or multi-faceted. The membrane material has a polygonal shape and multiple micron-sized pores on the membrane wall of the pore channel. For most gas molecules, the diameter is about 0.1~1nm. These pores are large enough to form a large number of micron-sized pores, so the surface area is also large, allowing gas molecules to diffuse freely within them. The mass transfer effect is fast, and the tubular membrane adsorbent material can withstand high temperatures of 150~220℃. Therefore, the tubular membrane adsorbent material can be used for high-temperature desorption and is reusable, which is in line with the spirit of environmental protection and reuse, thereby increasing the overall usability.

[0008] Another object of the present invention is to provide an adsorption-type tubular membrane chemical filter device, wherein the frame system has a first side, a second side, a third side and a fourth side, and the upper edge and the lower edge of the first side each extend a protrusion, and the protrusions extending from the upper edge and the lower edge of the first side abut against the corresponding membrane block to form a first side flow channel. Furthermore, the protrusions extending from the upper edge and the lower edge of the first side each have an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape or at least one polygonal shape. Furthermore, each of the upper and lower edges of the second side extends a protrusion, which abuts against the corresponding membrane block to form a second side flow channel. Each of the protrusions extending from the upper and lower edges of the second side has an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape. The third and fourth sides of the frame are connected to the baffle, allowing the airflow of airborne particulate pollutants (AMCs) to enter the plurality of pores in the tubular membrane adsorbent material along the flow channel, and then flow towards the first and second side flow channels, respectively, rather than directly through the radial direction of the membrane wall thickness of the tubular membrane adsorbent material. The surface velocity (in the concept of air tower velocity) of the airflow surface perpendicular to the airflow direction is less than 0.5 m / s, resulting in an air pressure difference of <100 Pa for each membrane block, thereby increasing the overall flowability.

[0009] To further understand the features, characteristics, and technical content of this invention, please refer to the following detailed description and accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit the invention. Simple Explanation of the Diagram

[0010]

[0011] Figure 1 is a schematic diagram of the structure of this group of membrane blocks, which consists of two membrane blocks arranged together.

[0012] Figure 2 is an enlarged schematic diagram of the tubular membrane adsorption material inside the sheet / membrane block.

[0013] Figure 3 is a schematic diagram of the structure of this group of membrane blocks, which consists of three membrane blocks arranged together.

[0014] Figure 4 is a schematic diagram of the structure of four membrane blocks and the direction of airflow.

[0015] Figure 5 is a schematic diagram of the structure of four membrane blocks combined with the frame. Implementation

[0016] Please refer to Figures 1-5, which are schematic diagrams of embodiments of the present invention. The preferred embodiment of the adsorption-type tubular membrane chemical filter device of the present invention is used in clean rooms, dust-free rooms or similar indoor spaces in the semiconductor industry, optoelectronic industry or chemical-related industries, and can take into account performance efficiency, pressure loss and service life, while meeting the requirements of nanoprocess plants in the advanced semiconductor industry.

[0017] The adsorption-type tubular membrane chemical filter device of the present invention mainly includes a frame 10 and at least one set of membrane blocks 20 (as shown in Figures 1 to 5) for treating airborne micro-molecular pollutants (AMCs). These airborne micro-molecular pollutants (AMCs) include volatile organic compounds (VOCs), alkaline gases (BASEs), acidic gases (ACIDs), etc. In particular, in high-tech (such as semiconductor) manufacturing plants, for the purpose of management and energy conservation, the air in the air conditioning in the plant is recycled. The plant will generate micro-molecular pollutants (AMCs) from production equipment (machines), production materials (wafers), chemical raw materials, operators, etc. In addition to the micro-molecular pollutants (AMCs) generated inside the plant, the plant will also contain fresh air supplied from outside the plant, which also contains potential ambient air micro-molecular pollutants (AMCs).

[0018] The present invention mainly comprises at least one set of membrane blocks 20 within the frame 10. Each set of membrane blocks 20 is composed of at least two or more membrane blocks 21 and 22 arranged together (as shown in Figure 1). The frame 10 is made of a metal material (such as iron or stainless steel), and each membrane block 21 and 22 is composed of a plurality of root canal-type membrane adsorbent materials 30. At least one adhesive 40 is provided between each membrane block 21 and 22 and the plurality of root canal-type membrane adsorbent materials 30 (as shown in Figure 2). The adhesive 40 is any one or a combination of inorganic and organic adhesives. The inorganic material used in the inorganic adhesive is iron oxide, copper oxide, barium titanate, lead titanate, aluminum oxide, silicon dioxide, or aerogel. Aerogel), bentonite (e.g., potassium bentonite, sodium bentonite, calcium bentonite, and aluminum bentonite), porcelain clay (e.g., Al₂O₃·2SiO₂·2H₂O), hypoglaze (e.g., 20% Al₂O₃, 70% SiO₂, 0.8% Fe₂O₃, 2.3% K₂O, 1.6% Na₂O), calcium silicate (e.g., Ca₃SiO₅, Ca₃Si₂O₇, and CaSiO₃), magnesium silicate (e.g., Mg₃Si₄O₁₀… The organic adhesive is formulated with at least one of the following groups: OH)2), sodium silicate (e.g., Na2SiO3 and its hydrate), anhydrous sodium sulfate, zirconium silicate (e.g., ZrSiO4), opaque zirconium (e.g., 53.89% SiO2, 4.46% Al2O3, 12.93% ZrO2, 9.42% CaO, 2.03% MgO, 12.96% ZnO, 3.73% K2O, 0.58% Na2O), and silicon carbide. Furthermore, the organic materials used in the organic adhesive are primarily composed of at least one of the following groups: silicone, resin, water glass, polymer materials, and epoxy resin. The adhesive 40 allows the plurality of root canal membrane adsorbent materials 30 to be joined together, and the root canal membrane adsorbent material 30 is any shape, such as circular, elliptical, triangular, quadrilateral, pentagonal, hexagonal or polygonal. When the plurality of root canal membrane adsorbent materials 30 are arranged and joined together, they can be tightly joined together by the adhesive 40, so as to facilitate the combination.

[0019] Furthermore, the plurality of root canal-type membrane adsorbent materials 30 in the membrane blocks 21 and 22 are made of at least one polymer (not shown) and at least one powdered adsorbent (not shown). The polymer is composed of polysulfone (PSF), polyethersulfone (PESF), polyvinylidene fluoride (PVDF), polyphenylsulfone (PPSU), polyacrylonitrile, cellulose acetate, cellulose diacetate, polyimide (PI), polyetherimide, polyamide, polyvinyl alcohol, polylactic acid, polyglycolic acid, poly(lactic-co-glycolic acid), polycaprolactone, polyvinyl pyrrolidone, ethylene vinyl alcohol, polydimethylsiloxane, polytetrafluoroethylene, and cellulose acetate. The adsorbent is composed of at least one of the groups consisting of acetate (CA). The powdered adsorbent is any one of zeolite powder, activated carbon powder, and resin powder, with a powder size of 1µm to 20µm. The mixture of the polymer and the powdered adsorbent is dissolved in a solvent and then prepared using a phase transfer method, which is a wet process. Furthermore, the tubular membrane adsorbent 30, by weight (wt%), contains at least 50 wt% of the powdered adsorbent. Its advantage is a 20-30 times increase in service life. In advanced semiconductor manufacturing plants, for the adsorption of ppb-level volatile organic compounds (VOCs), currently commercially available chemical filters require replacement every 1-2 weeks to ensure wafer production yield, making this replacement cycle somewhat short. With the design of the ratio of the tubular membrane adsorbent 30 to the powder adsorbent in this invention, it can bear a higher amount of the powder adsorbent while the pressure loss is within the allowable range, and it can have a lifespan of up to 20 to 40 weeks or more, which greatly improves the replacement cycle and improves practicality.

[0020] Furthermore, the tubular membrane adsorbent 30 is provided with a plurality of pore channels 31 (as shown in Figure 2). These pore channels 31 extend from one end of the tubular membrane adsorbent 30 to the other end to form a channel, and are evenly distributed across the tubular membrane adsorbent 30. The diameter of each pore channel 31 is 0.5 mm to 1.5 mm, and the length of the tubular membrane adsorbent 30 is more than 50 times the diameter of the pore channels 31. The surface area of ​​the tubular membrane adsorbent 30 is greater than 500 m² / m³, and the pore channels 31 are circular, elliptical, triangular, quadrilateral, or pentagonal. The tubular membrane adsorbent 30 has any shape, such as hexagonal or polygonal, and presents a plurality of micron-sized pores (not shown) on the membrane wall of the pore channel 31. For most gas molecules, the diameter is about 0.1~1nm. These pores are large enough to form a large number of micron-sized pores, so the surface area is also large, allowing gas molecules to diffuse freely within them, resulting in fast mass transfer. In addition, the tubular membrane adsorbent 30 can withstand high temperatures of 150~220℃. Therefore, the tubular membrane adsorbent 30 can be used for high-temperature desorption and is reusable, which is in line with the spirit of environmental protection and reuse, thereby increasing the overall usability.

[0021] When the present invention provides at least one set of membrane blocks 20 within the frame 10, and the set of membrane blocks 20 is composed of at least two or more membrane blocks 21 and 22 arranged together (as shown in Figure 1), a flow channel 23 is provided between the membrane block 21 and the membrane block 22. The flow channel 23 communicates with the plurality of pore channels 31 of the tubular membrane adsorption material 30, and a baffle 50 is provided on one side of the flow channel 23. The one side is either the top or the bottom, mainly designed to match the airflow direction. The baffle 50 is made of metal (such as iron, stainless steel, etc.) or other materials (such as wood, plastic, etc.), and is not limited to the scope of the present invention.

[0022] The frame 10 has a first side 11, a second side 12, a third side 13, and a fourth side 14 (as shown in Figure 1). The upper edge and lower edge of the first side 11 each extend a protrusion 111, so that the first side 11 of the frame 10 can have a space in the extended protrusion 111. The protrusions 111 extending from the upper edge and lower edge of the first side 11 abut against the corresponding sheet 21 to form a first side flow channel 112. The protrusions 111 extending from the upper edge of the first side 11 and the protrusions extending from the lower edge of the first side 11 (not shown) each have an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape (not shown). Furthermore, the upper edge and lower edge of the second side 12 each extend a protrusion 121 (as shown in Figure 1), so that the second side 12 of the frame 10 can have a space in the extended protrusion 121. The protrusions 121 extending from the upper edge and lower edge of the second side 12 abut against the corresponding sheet film 22 to form a second side flow channel 122. The protrusions 121 extending from the upper edge of the second side 12 and the protrusions extending from the lower edge of the second side 12 (not shown) each have an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape (not shown).

[0023] Furthermore, the third side 13 and the fourth side 14 of the frame 10 are connected to the baffle 50 (as shown in Figure 1). The connection method can be any of the following: welding, bonding, riveting, nailing, or snap-fitting, or it can be integrally formed, which is not limited to the scope of this invention. This allows the airflow of airborne particulate pollutants (AMCs) to enter the plurality of pore channels 31 of the tubular membrane adsorbent material 30 along the flow channel 23, and then flow towards the first side flow channel 112 and the second side flow channel 122 respectively (refer to Figure 4), rather than directly passing through the radial direction of the membrane wall thickness of the tubular membrane adsorbent material 30. The surface velocity (the surface velocity in the concept of air tower velocity) of the airflow surface perpendicular to the airflow direction is less than 0.5 m / s, resulting in an air pressure difference of <100 Pa for each membrane block 21, 22, thereby increasing the overall flowability.

[0024] In a second embodiment of the present invention, the frame 10 is provided with at least one set of membrane blocks 60, and the set of membrane blocks 60 is composed of three membrane blocks arranged in a series, namely a first membrane block 61, a second membrane block 62, and a third membrane block 63 (as shown in Figure 3). A first flow channel 64 is provided between the first membrane block 61 and the second membrane block 62. The first flow channel 64 is connected to the plurality of pore channels 31 of the tubular membrane adsorbent material 30, and a first baffle 71 is provided on one side of the first flow channel 64. The first baffle 71 is positioned at the bottom in this embodiment, primarily designed to match the airflow direction. A second flow channel 65 is provided between the second membrane block 62 and the third membrane block 63. This second flow channel 65 communicates with the plurality of pore channels 31 of the tubular membrane adsorption material 30. A second baffle 72 is provided on one side of the second flow channel 65, where one side is either the top or bottom. In this embodiment, the second baffle 72 is positioned at the top, primarily designed to match the airflow direction. The first baffle 71 and the second baffle 72 are made of metal (such as iron, stainless steel, etc.) or other materials (such as wood, plastic, etc.), not limited to the scope of this invention.

[0025] The frame 10 has a first side 11, a second side 12, a third side 13, and a fourth side 14 (as shown in Figure 3). The upper edge and the lower edge of the first side 11 each extend a protrusion 111, so that the first side 11 of the frame 10 can have a space in the extended protrusion 111. The protrusions 111 extending from the upper edge and the lower edge of the first side 11 abut against the first membrane block 61 to form a first side flow channel 112. The protrusions 111 extending from the upper edge of the first side 11 and the protrusions extending from the lower edge of the first side 11 (not shown) each have an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape (not shown). Furthermore, a protrusion 121 extends from the upper edge and the lower edge of the second side 12 (as shown in Figure 3), so that the second side 12 of the frame 10 can have a space in the extended protrusion 121. The protrusions 121 extending from the upper edge and the lower edge of the second side 12 abut against the third membrane block 63 to form a second side flow channel 122. The protrusions 121 extending from the upper edge of the second side 12 and the protrusions extending from the lower edge of the second side (not shown) are each provided with an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape (not shown).

[0026] Furthermore, the third side 13 and the fourth side 14 of the frame 10 are connected to the first middle baffle 71 and the second middle baffle 72 (as shown in Figure 3). The connection method can be any of the following: welding, bonding, riveting, nailing, snapping, or integral molding, and is not limited to the scope of this invention. This allows the airflow of airborne particulate pollutants (AMCs) to enter the plurality of pore channels 31 of the tubular membrane adsorbent material 30 along the first middle flow channel 64 and the second middle flow channel 65, and then flow towards the first side flow channel 112 and the second side flow channel 122 respectively (refer to Figure 4), rather than directly through the radial direction of the membrane wall thickness of the tubular membrane adsorbent material 30. The surface velocity (the surface velocity in the concept of air tower velocity) of the ventilation surface perpendicular to the airflow direction is less than 0.5 m / s, resulting in an air pressure difference of <100 Pa between the first membrane block 61, the second membrane block 62, and the third membrane block 63, thereby increasing the overall flowability.

[0027] In a third embodiment of the present invention, the frame 10 is provided with at least one set of membrane blocks 80, and the set of membrane blocks 80 is composed of four membrane blocks arranged in a series, namely a first membrane block 81, a second membrane block 82, a third membrane block 83, and a fourth membrane block 84 (as shown in Figures 4 and 5). A first central flow channel 85 is provided between the first membrane block 81 and the second membrane block 82. The first central flow channel 85 is connected to the plurality of pore channels 31 of the tubular membrane adsorbent material 30. A first central baffle 91 is provided on one side of the first central flow channel 85, wherein one side is either the top or the bottom. In this embodiment, the first central baffle 91 is provided on the bottom, mainly for design purposes to match the airflow direction. A second central flow channel 86 is provided between the second membrane block 82 and the third membrane block 83. The second flow channel 86 is connected to the plurality of pore channels 31 of the tubular membrane adsorption material 30, and a second baffle 92 is provided on one side of the second flow channel 86. The one side can be the top or the bottom. In this embodiment, the second baffle 92 is set on the top, mainly to match the airflow direction. Furthermore, a third flow channel 87 is provided between the third membrane block 83 and the fourth membrane block 84. A third baffle 93 is provided on one side of the third flow channel 87. The one side can be the top or the bottom. In this embodiment, the third baffle 93 is set on the bottom, mainly to match the airflow direction. The first baffle 91, the second baffle 92, and the third baffle 93 are made of metal (such as iron, stainless steel, etc.) or other materials (such as wood, plastic materials, etc.), which is not limited to the content of this invention.

[0028] The frame 10 has a first side 11, a second side 12, a third side 13, and a fourth side 14 (as shown in Figures 4 and 5). The upper and lower edges of the first side 11 each extend a protrusion 111, so that the first side 11 of the frame 10 can have a space in the extended protrusion 111. The protrusions 111 extending from the upper and lower edges of the first side 11 abut against the first membrane block 81 to form a first side flow channel 112. The protrusions 111 extending from the upper edge of the first side 11 and the protrusions extending from the lower edge of the first side 11 (not shown) each have an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape (not shown). Furthermore, a protrusion 121 extends from the upper edge and the lower edge of the second side 12 (as shown in Figures 4 and 5), so that the second side 12 of the frame 10 can have a space in the extended protrusion 121. The protrusions 121 extending from the upper edge and the lower edge of the second side 12 abut against the fourth membrane block 84 to form a second side flow channel 122. The protrusions 121 extending from the upper edge of the second side 12 and the protrusions extending from the lower edge of the second side (not shown) are each provided with an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape (not shown).

[0029] Furthermore, the third side 13 and the fourth side 14 of the frame 10 are connected to the first middle baffle 91, the second middle baffle 92 and the third middle baffle 93 (as shown in Figures 4 and 5). The connection method can be any one of welding, bonding, riveting, nailing and snapping, or it can be integrally formed, which is not limited to the content of this invention. The airflow of airborne particulate pollutants (AMCs) is directed along the first central flow channel 85, the second central flow channel 86, and the third central flow channel 87 into the plurality of pore channels 31 of the tubular membrane adsorbent material 30, and then flows towards the first side flow channel 112 and the second side flow channel 122 respectively (as shown in Figure 4), instead of directly passing through the radial direction of the membrane wall thickness of the tubular membrane adsorbent material 30. The surface velocity (the surface velocity in the concept of empty tower velocity) of the ventilation surface perpendicular to the airflow direction is less than 0.5 m / s, resulting in an air pressure difference of <100 Pa between the first membrane block 81, the second membrane block 82, the third membrane block 83, and the fourth membrane block 84, thereby increasing the overall flowability.

[0030] Finally, when the aforementioned membrane block 20 is composed of at least two membrane blocks 21 and 22, when the aforementioned membrane block 60 is composed of three membrane blocks (first membrane block 61, second membrane block 62, and third membrane block 63), or when the aforementioned membrane block 80 is composed of four membrane blocks (first membrane block 81, second membrane block 82, third membrane block 83, and fourth membrane block 84), the protrusion 111 extending from the upper edge of the first side 11 and the protrusion (not shown) extending from the lower edge of the first side 11 are each provided with at least one circular, at least one elliptical, at least one triangular, at least one quadrilateral, or at least one polygonal opening (not shown), and the upper edge of the second side 12... The protrusion 121 extending from the edge and the protrusion extending from the lower edge of the second side 12 (not shown) are each provided with an opening (not shown) of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape, so that the airflow of airborne micromolecular pollutants (AMC) enters the plurality of pore channels 31 of the tubular membrane adsorbent material 30 along the flow channel 23, the first middle flow channel 64 and the second middle flow channel 65, the first middle flow channel 85 and the second middle flow channel 86 and the third middle flow channel 87, and then flows out through the opening (not shown) when it flows in the direction of the first side flow channel 112 and the second side flow channel 122 respectively (refer to Figure 4).

[0031] Therefore, the present invention is mainly used to treat airborne particulate pollutants (AMCs) through a combination design of a frame 10 and at least one set of membrane blocks 20. The set of membrane blocks 20 is disposed within the frame 10 and is composed of at least two or more membrane blocks 21 and 22 arranged (as shown in Figure 1). A flow channel 23 is provided between the membrane blocks 21 and 22. Each membrane block 21 and 22 is composed of a plurality of tubular membrane adsorbent materials 30, and the tubular membrane adsorbent materials 30 are provided with The multiple pore channels 31 (as shown in Figure 2) are connected to the flow channel 23, allowing the airflow of airborne particulate pollutants (AMCs) to enter the multiple pore channels 31 of the tubular membrane adsorbent material 30 through the flow channel 23 and flow along the direction of the multiple pore channels 31 of the tubular membrane adsorbent material 30. This improves the adsorption capacity of the chemical filter and balances performance efficiency, pressure loss, and service life. It also meets the requirements of nano-processing plants in the advanced semiconductor industry, thereby increasing the overall practicality.

[0032] The above detailed description should make it clear to those skilled in the art that the present invention can indeed achieve the aforementioned objectives and has met the requirements of the Patent Law. Therefore, an invention patent application is hereby filed.

[0033] However, the above description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the specification of the present invention should still fall within the scope of the patent of the present invention.

[0034]

[0035] 10: Frame

[0036] 11: First side

[0037] 111: Protrusion

[0038] 112: First sideflow channel

[0039] 12: Second side

[0040] 121: Protrusion

[0041] 122: Second sideflow channel

[0042] 13: Third side

[0043] 14: Fourth side

[0044] 20: Membrane Blocks

[0045] 21: Sheet / Piece

[0046] 22: Sheet / Piece

[0047] 23: Flow Channel

[0048] 30: Tubular membrane adsorption material

[0049] 31: Hole Channel

[0050] 40: Adhesive

[0051] 50: baffle

[0052] 60: Membrane Blocks

[0053] 61: The first membrane block

[0054] 62: Second membrane piece

[0055] 63: The third membrane piece

[0056] 64: First Midstream Channel

[0057] 65: Second Midstream Channel

[0058] 71: First middle baffle

[0059] 72: Second middle baffle

[0060] 80: Membrane Blocks

[0061] 81: The first membrane block

[0062] 82: Second membrane piece

[0063] 83: The third membrane piece

[0064] 84: Fourth membrane piece

[0065] 85: First Midstream Channel

[0066] 86: Second Midstream Channel

[0067] 87: Third Midstream Channel

[0068] 91: First middle baffle

[0069] 92: Second middle baffle

[0070] 93: Third middle baffle

Claims

1. An adsorption-type tubular membrane chemical filter device for treating airborne particulate pollutants (AMC), comprising: A frame; And at least one set of membrane blocks, which are disposed within the frame, and the set of membrane blocks are composed of at least two or more membrane blocks arranged together, and a flow channel is provided between the membrane blocks, one side of which is provided with a baffle. Each membrane block is composed of a plurality of tubular membrane adsorbent materials, each tubular membrane adsorbent material having a plurality of pore channels communicating with the flow channel. The tubular membrane adsorbent material is made of at least one polymer and at least one powdered adsorbent.

2. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein the frame system further has a first side, a second side, a third side and a fourth side, the upper edge and the lower edge of the first side each extend a protrusion, and the protrusions extending from the upper edge and the lower edge of the first side abut against the corresponding membrane block to form a first side flow channel.

3. The adsorption-type tubular membrane chemical filter device as described in claim 2, wherein the upper edge and lower edge of the second side each extend a protrusion, and the protrusions extending from the upper edge and lower edge of the second side abut against the corresponding membrane block to form a second side flow channel.

4. The adsorption-type tubular membrane chemical filter device as described in claim 2, wherein the third and fourth sides of the frame are further connected to the baffle.

5. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein when the membrane block is further configured as three pieces, namely a first membrane block, a second membrane block and a third membrane block, a first intermediate flow channel is provided between the first membrane block and the second membrane block, and a first intermediate baffle is provided on one side of the first intermediate flow channel; a second intermediate flow channel is provided between the second membrane block and the third membrane block, and a second intermediate baffle is provided on one side of the second intermediate flow channel.

6. The adsorption-type tubular membrane chemical filter device as described in claim 5, wherein the frame system further has a first side, a second side, a third side and a fourth side, the upper edge and the lower edge of the first side each extending a protrusion, the protrusions extending from the upper edge and the lower edge of the first side abutting against the first membrane block to form a first side flow channel.

7. The adsorption-type tubular membrane chemical filter device as described in claim 6, wherein the upper edge and lower edge of the second side each extend a protrusion, and the protrusions extending from the upper edge and lower edge of the second side abut against the third membrane block to form a second side flow channel.

8. The adsorption-type tubular membrane chemical filter device as described in claim 6, wherein the third and fourth sides of the frame are further connected to the first and second intermediate baffles.

9. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein when the membrane block is further configured as four blocks, namely a first membrane block, a second membrane block, a third membrane block and a fourth membrane block, a first intermediate flow channel is provided between the first membrane block and the second membrane block, and a first intermediate baffle is provided on one side of the first intermediate flow channel; a second intermediate flow channel is provided between the second membrane block and the third membrane block, and a second intermediate baffle is provided on one side of the second intermediate flow channel; a third intermediate flow channel is provided between the third membrane block and the fourth membrane block, and a third intermediate baffle is provided on one side of the third intermediate flow channel.

10. The adsorption-type tubular membrane chemical filter device as described in claim 9, wherein the frame system further has a first side, a second side, a third side and a fourth side, the upper edge and the lower edge of the first side each extending a protrusion, the protrusions extending from the upper edge and the lower edge of the first side abutting against the first membrane block to form a first side flow channel.

11. The adsorption-type tubular membrane chemical filter device as described in claim 10, wherein the upper edge and lower edge of the second side each extend a protrusion, and the protrusions extending from the upper edge and lower edge of the second side abut against the fourth membrane block to form a second side flow channel.

12. The adsorption-type tubular membrane chemical filter device as described in claim 10, wherein the third side and the fourth side are further connected to the first intermediate baffle, the second intermediate baffle and the third intermediate baffle.

13. The adsorption-type tubular membrane chemical filter device as described in claims 2, 6 or 10, wherein the protrusion extending from the upper edge of the first side and the protrusion extending from the lower edge of the first side are further provided with at least one opening of any one of the following shapes: circular, elliptical, triangular, quadrilateral or polygonal.

14. The adsorption-type tubular membrane chemical filter device as described in claims 3, 7 or 11, wherein the protrusion extending from the upper edge of the second side and the protrusion extending from the lower edge of the second side are further provided with at least one opening of any one of the following shapes: circular, elliptical, triangular, quadrilateral or polygonal.

15. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein the membrane sheet is further provided with at least one adhesive between a plurality of tubular membrane adsorption materials, the adhesive being any one or a combination of inorganic adhesives or organic adhesives.

16. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein the powdered adsorbent is further any one of zeolite powder, activated carbon powder, and resin powder, the powder of the powdered adsorbent is any one of 1um to 20um, and the powdered adsorbent accounts for more than 50wt%.

17. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein the plurality of pore channels of the tubular membrane adsorption material further have a pore channel diameter of 0.5 mm to 1.5 mm.

18. The adsorption-type tubular membrane chemical filter device as described in claim 17, wherein the tubular membrane adsorption material is further wherein the length is more than 50 times the diameter of the pore channel.

19. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein the tubular membrane adsorption material further has a surface area greater than 500 m² / m³.

20. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein the tubular membrane adsorption material is further shaped as any one of circular, elliptical, triangular, quadrilateral, pentagonal, hexagonal or polygonal.

21. The adsorption-type tubular membrane chemical filter device as described in claim 1, wherein the pore channel is further shaped as any one of circular, elliptical, triangular, quadrilateral, pentagonal, hexagonal or polygonal, and a plurality of micron-sized pores are present on the membrane wall of the pore channel.

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