Porous components containing ceramic particles and their manufacturing method

Abstract

This invention provides a porous component containing ceramic particles that suppresses particle generation, exhibits good air permeability and low pressure loss, and a method for manufacturing the same. The porous component containing ceramic particles of this invention comprises: a cylindrical shell 2 with openings at both ends; a plurality of ceramic particles 3 filling the shell; and a pair of porous caps 4 sealing the ends of the cylindrical shell and encapsulating the ceramic particles inside the shell.

Description

Technical Field

[0001] This invention relates to a porous component containing ceramic particles and a method for manufacturing the same, particularly to a porous component containing ceramic particles that is filled with ceramic particles and sealed at both ends of the shell using a porous cover, and a method for manufacturing the same. Prior Technology

[0002] In semiconductor manufacturing equipment requiring extremely high cleanliness, filters made of various materials are used to remove particles and other contaminants. Among these, ceramic filters are particularly widely used due to their superior heat resistance, durability, and corrosion resistance. Ceramic filters are composed of porous ceramic bodies; for example, Patent Document 1 discloses a porous ceramic body that can be used as a component for semiconductor processing. The semiconductor processing component disclosed in Patent Document 1 is formed from a sintered porous ceramic body, wherein the porosity of the framework portion of the sintered porous ceramic body, created by stirring and foaming, is less than 5%, and the overall porosity is more than 50%.

[0003] Furthermore, ceramic filters, being porous materials, are particularly brittle and prone to defects during processing. Therefore, a housing is installed to facilitate handling before assembly into a semiconductor manufacturing device. That is, the porous ceramic body with interconnected air bubbles is housed within a housing (such as a hollow cylindrical outer tube) used for assembly into the semiconductor manufacturing device.

[0004] Patent Document 2 discloses a method for manufacturing a composite component comprising a porous ceramic body and a dense ceramic body surrounding it. Specifically, when integrating the porous ceramic body and the surrounding ceramic outer component, a sintered body is used as the porous ceramic body, and a calcined molded body is used as the ceramic outer component; the porous body and the outer component are assembled. Then, by calcining, the porous ceramic body and the surrounding dense ceramic body are integrated using the mechanical bonding force generated by the sintering shrinkage of the outer component molded body and the sintering of the porous body and the outer component, thereby manufacturing the composite component. [Prior Art Documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent No. 3894365 [Patent Document 2] Japanese Patent Application Publication No. 2003-238267 Summary of the Invention

[0006] [Problems to be Solved by the Invention] As disclosed in Patent Document 2, in the method of manufacturing a composite component comprising a porous ceramic body and a dense ceramic body surrounding it, the porous ceramic body of the main body is, like the porous ceramic body disclosed in Patent Document 1, a sintered porous ceramic body produced by stirring and foaming. However, when a porous body with a porosity of 50% or more is produced by stirring and foaming, the framework portion of the interconnected bubble-like pores must have extremely thin walls, which presents a problem of particle generation due to granulation. On the other hand, if the manufacturing process is carried out without thin walls to suppress particle generation, the porosity decreases and the permeability deteriorates, creating a new problem of time-consuming venting, even when installed in the exhaust section of a device.

[0007] Furthermore, in the case where the ceramic porous body is housed within a shell, in the method disclosed in Patent Document 2, the ceramic porous body is sometimes damaged during firing at the part where the ceramic cylinder and the ceramic porous body meet.

[0008] The present invention was made in view of the above circumstances. Instead of using a porous ceramic sintered body made by stirring and foaming, the present invention was conceived and completed by studying novel porous components and their manufacturing methods.

[0009] The purpose of this invention is to provide a novel porous component using ceramic particles and a method for manufacturing the same, and to provide a porous component incorporating ceramic particles that can suppress particle generation or has good air permeability and can reduce pressure loss, as well as a method for manufacturing the same. [Technical Means for Solving the Problem]

[0010] To solve the above problems, the porous component of the present invention containing ceramic particles has the following features: a cylindrical shell with openings at both ends; a plurality of ceramic particles filling the shell; and a pair of porous caps that seal the two ends of the cylindrical shell and enclose the ceramic particles inside the shell.

[0011] The porous component containing the aforementioned ceramic particles, as thus constructed, is not a porous body created by stirring and foaming, but rather consists of a plurality of ceramic particles filling the shell. Therefore, it does not have the thin-walled portion that would occur when forming the previous porous body through stirring and foaming, thus suppressing the undesirable situation of particle generation due to granulation of the thin-walled portion. Alternatively, the porous component containing ceramic particles of the present invention can achieve good air permeability and reduce pressure loss by keeping the average pore size of the porous cap and the particle size of the aforementioned ceramic particles within a specific range.

[0012] Ideally, the particle size of the ceramic particles is between 100 μm and 800 μm. Furthermore, ideally, the ratio of the ceramic particles filling the area relative to the length connecting the two ends of the shell is between 34% and 95%. Also ideally, the average pore size of the porous cap is between 22 μm and 200 μm, and the porosity is between 20% and 40%.

[0013] Thus, by making the particle size of the ceramic particles between 100 μm and 800 μm, and more preferably between 600 μm and 800 μm, and by making the ratio of the ceramic particles to the filling area of ​​the shell between 34% and 95% of the length of the two ends of the shell, and by making the average pore size of the porous cap between 22 μm and 200 μm, good air permeability can be achieved and pressure loss can be reduced.

[0014] Furthermore, to solve the above-mentioned problems, the manufacturing method of the porous component containing the aforementioned ceramic particles of the present invention has the following features: it includes the following steps: filling a plurality of ceramic particles into a cylindrical shell open at both ends; and sealing the two ends of the cylindrical shell with a pair of porous caps, thereby sealing the ceramic particles inside the shell. According to this method, the porous component containing ceramic particles of the present invention can be manufactured. [Effects of the Invention]

[0015] According to the present invention, a porous component containing ceramic particles that can suppress particle generation or has good air permeability and can reduce pressure loss can be obtained, as well as a method for manufacturing the same. Simple Explanation of the Diagram

[0016] Figure 1 is a cross-sectional view schematically showing the structure of the porous component of the present invention. Figures 2(a) to (d) are cross-sectional views used to illustrate the manufacturing method of the porous component of Figure 1. Figure 3 is a diagram showing the schematic structure of the evaluation apparatus for the evaluation embodiments and comparative examples. Implementation

[0017] The following description uses figures to illustrate the porous component containing ceramic particles and its manufacturing method according to the present invention. Figure 1 is a cross-sectional view schematically showing the structure of the porous component containing ceramic particles of the present invention. The porous component 1 containing ceramic particles shown in Figure 1 can be used, for example, as a ceramic filter utilizing continuous pores, a heat insulation material utilizing a structure containing pores, a light diffuser plate that allows light to diffuse uniformly and then pass through, or a component for a semiconductor manufacturing apparatus used in plasma processing steps, etc.

[0018] The porous component 1 containing ceramic particles in Figure 1 includes: a cylindrical outer cylinder component 2 with openings at both ends; ceramic particles 3 filled in the outer cylinder component 2; and a pair of porous caps 4 that seal the openings at both ends of the outer cylinder component 2. That is, it is configured such that ceramic particles 3 are contained and filled in the outer cylinder component 2, which serves as a shell.

[0019] Ideally, the outer cylinder component 2 is formed of a resin with high heat resistance or a resin with low dielectric constant (e.g., Teflon (registered trademark)), or quartz. For example, it is formed with a diameter (outer diameter) d1 of 50 mm, a length L of 80 mm, and a thickness t1 of 5 mm. The outer cylinder component 2 is not limited to a cylindrical shape, but can also be a angular column with a polygonal cross-section.

[0020] The ceramic particles 3 filling the outer cylinder member 2 are merely contained within it. The ceramic particles 3 are preferably formed of silicon dioxide, and their shape is preferably fragmented powder or spherical. Furthermore, the filling area ratio of the ceramic particles 3 within the outer cylinder member 2 is 34% to 95% relative to the length L connecting the two ends of the outer cylinder member 2. Moreover, the filling area ratio refers to the length between one pair of porous caps within the outer cylinder member relative to the length L connecting the two ends of the outer cylinder member 2, i.e., the length of the filled ceramic particles. Here, when the length L connecting the two ends of the outer cylinder member 2 is defined as a specific length, if the filling area ratio decreases, the ratio (length) of the porous cap 4 increases. On the other hand, if the filling area ratio increases, the ratio (length) of the porous cap 4 decreases.

[0021] When the filling ratio of ceramic particles 3 in the outer cylinder component 2 is less than 34%, the ratio of the porous cover body 4 with length L connecting the two ends of the outer cylinder component 2 increases, which may lead to higher pressure loss. Furthermore, when the filling ratio of ceramic particles 3 in the outer cylinder component 2 exceeds 95%, the ratio of the porous cover body 4 with length L connecting the two ends of the outer cylinder component 2 decreases, which may lead to damage to the porous cover body 4.

[0022] The ceramic particles 3 preferably have a maximum particle size of 800 μm or less. If the maximum particle size exceeds 800 μm, the gaps between particles become larger, the holding force between particles weakens, and they are more likely to move within the outer cylinder component, potentially causing damage (breakage) to the porous cover. Furthermore, when used as a light diffuser or heat insulation material, the heat insulation or light diffusion effect may be weakened. Moreover, to suppress pressure loss, it is ideal that the minimum particle size of the ceramic particles 3 is 100 μm or more, and more preferably 600 μm or more. Therefore, the ideal range for the particle size of each ceramic particle 3 is 100 μm to 800 μm, and more preferably 600 μm to 800 μm.

[0023] Furthermore, ceramic particles 3 can be classified using sieves. For example, ceramic particles larger than 600 μm and smaller than 800 μm can be classified using sieves with mesh sizes of 600 μm and 800 μm. That is, ceramic particles larger than 600 μm and smaller than 800 μm can be obtained as ceramic particles that pass through a sieve with a mesh size of 800 μm but not through a sieve with a mesh size of 600 μm.

[0024] Furthermore, a pair of porous caps 4, used to seal the openings at both ends of the outer cylinder component 2 and to seal the ceramic particles 3 inside the outer cylinder component 2, are formed of porous resin or silicon dioxide. The porous caps 4 are joined to the inner circumferential surface of the outer cylinder component 2 by their outer periphery. Specifically, hand-reeling portions 2a are formed on the inner circumferential surfaces at both ends of the outer cylinder component 2, and adhesive 5 is filled on the side of the hand-reeling portions 2a. That is, the porous caps 4 are joined to the inner circumferential surface of the outer cylinder component 2 by the adhesive 5. Here, it is shown that the hand-reeling portions 2a are formed on the inner circumferential surfaces at both ends of the outer cylinder component 2, but it is not particularly limited to the hand-reeling portions 2a. A stepped portion filled with adhesive 5 may also be formed on the side of the porous caps 4, or a stepped portion may not be formed on either the outer cylinder component 2 or the porous caps 4, and the joining may be performed. Furthermore, the adhesive 5 is not particularly limited as long as it has heat resistance; for example, epoxy-based or silicon dioxide-based adhesives can be used. Also, when the porous cap 4 is formed by resin, it can be formed, for example, by PTFE. Also, when the porous cap 4 is formed by silicon dioxide, it can be formed, for example, by the sol-gel method.

[0025] The average pore size of the porous cap 4 is preferably between 22 μm and 200 μm, and the porosity is between 20% and 40%. If the average pore size is less than 22 μm or the porosity is less than 20%, good air permeability may not be achieved, leading to increased pressure loss. On the other hand, if the average pore size exceeds 200 μm or the porosity exceeds 40%, the risk of particle generation increases. Furthermore, the average pore size and porosity of the porous cap can be determined using a mercury porosimeter, just like the average pore size and porosity of a porous material.

[0026] Furthermore, ideally, the ratio of the average pore size of the porous cap to the particle size of the ceramic particles is 1:1.1 to 1:80. By achieving this ratio, good air permeability can be obtained, and pressure loss can be reduced.

[0027] Furthermore, the thickness t2 of the porous cover 4 is preferably 2 mm to 20 mm per piece. If the thickness t2 of the porous cover 4 is less than 2 mm, there is a risk of breakage due to weakened strength. On the other hand, if the thickness t2 of the porous cover 4 exceeds 20 mm, there is a risk of increased pressure loss. Moreover, the planar shape of the porous cover 4 is formed corresponding to the cross-sectional shape of the outer cylinder member 2.

[0028] The porous component 1 thus constructed does not have a porous body created by stirring and foaming, but is formed by a plurality of ceramic particles 3 filling the outer cylinder component 2. Furthermore, since the porosity of the porous cover 4 sealing both ends of the outer cylinder component 2 is more than 20% and less than 40%, there is no thin-walled portion that would occur when the previous porous body is formed by stirring and foaming, thus suppressing the undesirable situation of particles being generated due to granulation.

[0029] In particular, by making the particle size of ceramic particles 3 preferably 100 μm or more and 800 μm or less, more preferably 600 μm or more and 800 μm or less, making the ratio of the filling area of ​​ceramic particles 3 to the outer cylinder component 2 34% or more and 95% relative to the length L of the two ends connecting the outer cylinder component 2, and making the average pore size of the porous cover body 4 preferably 22 μm or more and 200 μm or less, more preferably 22 μm or more and 150 μm or less, good air permeability can be achieved and pressure loss can be reduced.

[0030] Furthermore, the ceramic particles 3 filling the outer cylinder component 2 are merely contained and filled within it, thus preventing a large gap from forming between the outer cylinder component 2 and the ceramic particles 3. Also, since the ceramic particles 3 are not fired after being contained and filled within the outer cylinder component 2, damage to the ceramic particles 3 tightly adhering to the outer cylinder component 2 can be prevented. Moreover, the ceramic particles 3 filling the outer cylinder component 2 can be fixed. As a method of fixing, filling can be performed while the ceramic particles 3 are pre-coated with a light-curing adhesive. By fixing the ceramic particles 3, even when vibration is applied after filling, no deviation will occur.

[0031] Next, the manufacturing method of the porous component with ceramic particles of the present invention will be described using FIG2. First, a hand-reeling portion 2a is formed on the inner circumferential surface of both ends of the outer cylinder component 2, which is formed from a resin with high heat resistance (e.g., Teflon) or quartz. The outer cylinder component 2 is formed, for example, with a diameter (outer diameter) d1 of 50 mm, an inner diameter d3 of 40 mm, a length L of 80 mm, and a thickness t1 of 5 mm. The diameter d2 of the hand-reeling portion 2a is 42 mm, and the depth t2 is 5 mm. Then, as shown in FIG2(a), an epoxy adhesive 5 is applied to the side surface of the hand-reeling portion 2a of the porous component 1. As shown in FIG2(b), the porous cover 4 is installed on the porous component 1 and dried at 80°C for 3 hours.

[0032] Furthermore, the porous cover 4 is pre-formed in such a way that the top view of the porous cover 4 corresponds to the shape of the hand-reeling part 2a of the outer cylinder member 2, and the outer diameter of the porous cover 4 is approximately the same as the inner diameter of the hand-reeling part 2a of the outer cylinder member 2, so that the porous cover 4 can be fitted into the end of the outer cylinder member 2.

[0033] Next, as shown in Figure 2(c), the outer cylinder component 2 is placed on a vibratory machine 10 (e.g., product name VIBRATORY PACKER) in an upside-down state. This results in the previously attached porous cover 4 (4A) being positioned at the bottom of the outer cylinder component 2. Then, ceramic particles 3 are introduced into the outer cylinder component 2 until they are positioned at the same level as the bottom surface of the hand-reeling section 2a.

[0034] Next, the vibrator 10 is activated and vibrated at a frequency of 60 Hz for about 1 minute. If the surface of the added ceramic particles sinks, additional ceramic particles are added, and the vibrator 10 is activated again at a frequency of 60 Hz for about 1 minute. This process of adding and replenishing ceramic particles and vibrating with the vibrator 10 is repeated until the surface of the added ceramic particles after vibration is at the same position as the bottom surface of the hand-reeling section 2a. In this way, the large gaps between the ceramic particles 3 filling the outer cylinder component 2 are eliminated, and the gaps between the ceramic particles 3 are made uniform.

[0035] Then, as shown in Figure 2(d), an epoxy adhesive 5 is applied to the side of the hand-reeling part 2a of the porous component 1, and the porous cover 4 (4B) is installed on the porous component 1 and dried at 80°C for 3 hours. By performing the above steps, the porous component 1 with ceramic particles shown in Figure 1 is manufactured.

[0036] In this way, ceramic particles 3 with a particle size of 100 μm to 800 μm, more preferably 600 μm to 800 μm, are introduced into the manufactured porous component. The final filling ratio of the ceramic particles 3 within the outer cylinder component 2 relative to the length L connecting the two ends of the outer cylinder component 2 is 34% to 95%. [Example]

[0037] The following description, based on embodiments, illustrates the porous component containing ceramic particles and its manufacturing method according to the present invention.

[0038] (Example 1) In Example 1, a porous component 1 with ceramic particles, as shown in FIG. 1, was used. Specifically, the ceramic particles 3 had a particle size of 600-800 μm (average particle size 700 μm). The outer cylinder component 2 had a diameter (outer diameter) d1 of 50 mm, an inner diameter d3 of 40 mm, a length L of 80 mm, and a thickness t1 of 5 mm. The hand-reeling part 2a had a diameter d2 of 42 mm and a depth t2 of 5 mm. The ratio of the ceramic particle-filled area within the outer cylinder component 2 to the length L connecting the two ends of the outer cylinder component 2 was 88%. Furthermore, the porous cover 4 was formed of silicon dioxide using a sol-gel method, with an average pore size of 38 μm and a porosity of 40%. The porous cover 4 is pre-formed in such a way that the top view of the porous cover 4 corresponds to the shape of the hand-reeling part 2a of the outer cylinder member 2, and the outer diameter of the porous cover 4 is approximately the same as the inner diameter of the hand-reeling part 2a of the outer cylinder member 2, so that the porous cover 4 can be fitted into the end of the outer cylinder member 2.

[0039] Pressure loss (Pa) was measured by allowing N2 gas to flow into the porous component 1 from the porous cover 4A at one end of the porous component 1 at a flow rate of 50 ml / min and discharging it from the porous cover 4B at the other end of the porous component 1. The measurement was performed using the circuit shown in Figure 3. Pressure loss was assessed by observing the flow meter while a specified flow rate of nitrogen gas was flowing through it and reading the differential pressure using a differential pressure gauge. Furthermore, particle counts were performed by using an air-floating particle counter to count the number of particles detected within one minute. The results of Example 1 are shown in Table 1.

[0040] (Comparative Example 1) As Comparative Example 1, silica powder (average particle size: 600 μm) was used to form a cylindrical porous body with an average pore size of 150 μm, a diameter of 40 mm and a length of 80 mm, by means of a sol-gel method. This body was inserted into an outer cylinder component with the same shape as in Example 1 (diameter d1 is 50 mm, inner diameter d3 is 40 mm, and length L is 80 mm). Pressure loss and particle number were measured under the same conditions as in Example 1. The results of Comparative Example 1 are shown in Table 1.

[0041] (Examples 2-9) The average pore size of the porous cover and the particle size of the ceramic particles were varied as shown in Table 1. Otherwise, the particle count was used to evaluate the particles, similar to Example 1. Furthermore, the pressure loss (Pa) was measured by allowing N2 gas to flow into the porous component 1 from the porous cover 4A at one end of the porous component 1 at a flow rate of 50 ml / min and then discharging it from the porous cover 4B at the other end of the porous component 1.

[0042] [Table 1] Average pore size (μm) of the porous cap (porous body in Comparative Example 1). Porosity (%) of porous cap Particle size (μm) of ceramic particles Average particle size (μm) of ceramic particles Ceramic particle filling area ratio (ratio relative to the length L of the outer cylinder component) (%) Particles produced (number) Differential pressure (Pa) at a flow rate of 50 ml / min Comparative Example 1 150 40 - 600 - 30 160 Example 1 38 40 600~800 700 88 0 90 Example 2 84 40 500~700 600 88 0 41 Example 3 100 40 120~200 160 88 0 34 Example 4 100 40 100~200 150 88 0 216 Example 5 150 40 200~400 300 88 30 108 Example 6 150 40 600~800 700 88 30 twenty three Example 7 twenty two 40 600~800 700 88 0 155 Example 8 twenty two 40 100~200 150 88 0 155 Example 9 20 40 100~200 150 88 0 171

[0043] In Examples 1-9, no large gaps were generated between the shell and the ceramic particles, and no damage was confirmed between the shell and the ceramic particles. Furthermore, in Examples 1-9 other than Examples 4 and 9, as shown in Table 1, the pressure loss in the N2 gas flow rate of Example 1 was lower than that of Comparative Example 1 (the previous porous material). Also, in any of Examples 1-9, the number of particles generated was the same as or less than that in Comparative Example 1. In particular, in Examples 1-9 other than Examples 4 and 9, a reduction in both the number of particles generated and the differential pressure, as seen in Comparative Example 1, was confirmed.

[0044] (Examples 10-13) The average pore size and the ratio of ceramic particle filling areas of the porous cover were varied as shown in Table 2. Otherwise, as in Example 1, particle count was used to evaluate the particles. Furthermore, N2 gas was introduced into the porous component 1 from the porous cover 4A at one end of the porous component 1 at a flow rate of 50 L / min, and discharged from the porous cover 4B at the other end of the porous component 1, and the pressure loss (Pa) was measured. The results are shown in Table 2.

[0045] [Table 2] Average pore size (μm) of porous cap Porosity (%) of porous cap Particle size (μm) of ceramic particles Average particle size (μm) of ceramic particles Ceramic particle filling area ratio (%) Particles produced (number) Differential pressure (Pa) at a flow rate of 50 ml / min Example 10 38 40 600~800 700 30 0 410 Example 11 38 40 600~800 700 95 0 32 Example 12 38 40 600~800 700 75 0 158 Example 13 100 40 600~800 700 34 0 158

[0046] In Examples 10-13, no large gaps were generated between the shell and the ceramic particles, and no damage was found between the shell and the ceramic particles. As shown in Table 2, when the filling ratio of ceramic particles was 34% to 95% (Examples 11-13), the differential pressure was found to be reduced compared to Comparative Example 1.

[0047] (Examples 14-20) The average pore size and porosity of the porous cap were varied as shown in Table 3. Otherwise, as in Example 1, particle count was used for evaluation. Furthermore, N₂ gas was introduced into the porous component 1 from the porous cap 4A at one end of the porous component 1 at a flow rate of 50 ml / min, and discharged from the porous cap 4B at the other end of the porous component 1, and the pressure loss (Pa) was measured. The results are shown in Table 3.

[0048] [Table 3] Average pore size (μm) of porous cap Porosity (%) of porous cap Ceramic particle filling area ratio (%) Particles produced (number) Differential pressure (Pa) at a flow rate of 50 ml / min Example 14 10 30 88 0 342 Example 15 200 30 88 50 17 Example 16 100 20 88 0 34 Example 17 100 40 88 0 34 Example 18 100 45 88 30 34 Example 19 twenty two 20 88 0 155 Example 20 20 40 88 0 171

[0049] In Examples 14-20, no large gaps were generated between the shell and the ceramic particles, and no damage was confirmed between the shell and the ceramic particles. Furthermore, as shown in Table 3, when the average pore size of the porous cap was 22 μm to 200 μm or the porosity of the porous cap was 20% to 40%, it was confirmed that the number of particles generated was reduced compared to Comparative Example 1, or the differential pressure was reduced compared to Comparative Example 1.

[0050] 1: Porous components containing ceramic particles 2: Outer cylinder components (shell) 2a: Hand-reeling section 3: Ceramic particles 4: Porous cap 4A: Porous cap 4B: Porous cap 5: Adhesive d1: Diameter (outer diameter) d2: diameter d3:inner diameter L: Length t1: Thickness t2: thickness

Claims

1. A porous component for a semiconductor manufacturing apparatus containing silicon dioxide particles, characterized in that it comprises: a cylindrical shell with openings at both ends; a plurality of silicon dioxide particles filling the shell; and a pair of porous caps that seal the ends of the cylindrical shell, thereby encapsulating the silicon dioxide particles inside the shell; wherein the average pore size of the porous caps is 22 μm or more and 200 μm or less, and the porosity is 20% or more and 40% or less.

2. The porous component for a semiconductor manufacturing apparatus having silicon dioxide particles as claimed in claim 1, wherein the particle size of the silicon dioxide particles is 100 μm or more and 800 μm or less.

3. The porous component for a semiconductor manufacturing apparatus containing silicon dioxide particles as claimed in claim 1 or 2, wherein the ratio of the filled area of ​​the silicon dioxide particles to the length of the two ends connecting the housing is 34% or more and 95% or less.

4. The porous component for a semiconductor manufacturing apparatus containing silicon dioxide particles as claimed in claim 1, wherein the ratio of the average pore size of the porous cover to the particle size of the silicon dioxide particles is 1:1.1 to 1:

80.

5. A method for manufacturing a porous component for a semiconductor manufacturing apparatus containing silicon dioxide particles, which is the method for manufacturing a porous component for a semiconductor manufacturing apparatus containing silicon dioxide particles as claimed in any one of claims 1 to 4, characterized by comprising the following steps: filling a plurality of silicon dioxide particles into a cylindrical shell open at both ends; and sealing the two ends of the cylindrical shell by means of a pair of porous caps, thereby sealing the silicon dioxide particles inside the shell.

Images