Probing head

Abstract

A probe head is disclosed, comprising a probe located in the form of a pin from a test target substrate toward a spatial conversion unit, the probe having a displacement portion and an elastic portion located near the spatial conversion unit and the test target substrate, respectively; and a lower plate and an upper plate sequentially located in the longitudinal direction of the probe, the lower plate and the upper plate being configured to surround the displacement portion, wherein the probe has an anchor protruding from the probe at the displacement portion.

Description

Technical Field

[0001] This invention claims priority to Korean Patent Application No. 10-2024-0057992, filed on April 30, 2024, and Korean Patent Application No. 10-2024-0100886, filed on July 30, 2024, the entire contents of which are incorporated herein by reference.

[0002] The present invention relates to a probe head configured such that when the target substrate is located below the spatial conversion unit of the probe card, the probe head is positioned between the spatial conversion unit and the target substrate, so as to make contact with the electrical pads of the spatial conversion unit and the substrate pads of the target substrate. Prior Technology

[0003] Generally, an electrical die sorting (EDS) process is performed between semiconductor front-end processes and semiconductor back-end processes. Here, the semiconductor front-end process is performed to repeatedly form semiconductor wafers on the target substrate for inspection. The semiconductor back-end process is performed to dicing the target substrate for inspection into semiconductor wafers and packaging the semiconductor wafers.

[0004] In addition, an EDS process is performed to inspect the electrical operation of the semiconductor wafers on the target substrate. That is, the EDS process is performed with the probe card and the target substrate mounted on an electrical testing device, and the electrical operation of the semiconductor wafers is inspected through the probe card.

[0005] Specifically, conventionally, as shown in Figure 1, the probe card 540 has test heads 100 and space conversion units 530 stacked in sequence. The test head 100 includes probes 50 and a lower plate 70 and an upper plate 90 configured to surround each individual probe 50.

[0006] During the EDS process, the test head 100 is mounted on an electrical testing apparatus (not shown) via a probe card 540 and a space conversion unit 530 to contact the space conversion unit 530 and the target substrate 570. The test head 100 has a plurality of probes 50 extending through a lower guide hole 65 in the lower plate 70 and an upper guide hole 85 in the upper plate 90.

[0007] In Figure 1, the probe 50 has a probe tip (not shown), an elastic portion 10, a displacement portion 30, and a probe tip 40 arranged sequentially along the longitudinal direction of the probe 50. The elastic portion 10 has an anchor 5 formed on each individual probe 50 between two adjacent probes 50.

[0008] The anchor 5 prevents the probe from separating from the lower plate 70 and the upper plate 90 during maintenance during the service life of the probe card 540. The displacement portion 30 has two variable holes 25 formed in each individual probe 50 and maintains its initial shape through the two variable holes 25 during movement of the elastic portion 10.

[0009] Although not shown, the probe 50 contacts the substrate pad 565 of the test target substrate 570 through the probe lower tip, contacts the electrical pad 525 of the space conversion unit 530 through the probe upper tip 40, and is squeezed by the space conversion unit 530 and the test target substrate 570, causing the elastic portion 10 to buckle.

[0010] In this case, the substrate pad 565 is located at the semiconductor wafer (not shown) on the inspection target substrate 570. During the buckling of the elastic portion 10 of the probe 50 between the space conversion unit 530 and the inspection target substrate 570, the probe 50 moves in three dimensions in the lower guide hole 65 of the lower plate 70 and the upper guide hole 85 of the upper plate 90.

[0011] However, during the buckling of the elastic portion 10 of probe 50, as shown in Figure 2, the test head 100 moves two adjacent probes 50 closer to each other, which increases the probability of contact between the two adjacent probes 50 using the anchor 5 of each individual probe 50. Contact between two adjacent probes 50 can produce a large number of physically good but electrically defective semiconductor wafers on the target substrate 570.

[0012] The presence of anchors 5 on the elastic portion 10 of probe 50 reduces the buckling characteristics of the elastic portion 10, making the length of the elastic portion 10 greater than that without anchors 5. Therefore, the increased length of the elastic portion 10 increases the resistance of probe 50, which in turn reduces the electrical characteristics of probe card 540. Summary of the Invention

[0013] The present invention was made in view of the above-mentioned problems, and the object of the present invention is to provide a probe head that, when the probe card and the test target substrate are mounted in an electrical testing device during the EDS process, is suitable for preventing contact between two adjacent probes and improving the electrical characteristics of the probe card when the elastic part of the probe buckles.

[0014] According to the present invention, the probe head is configured such that when the target substrate is located below the spatial conversion unit of the probe card, the probe head is located between the spatial conversion unit and the target substrate so as to contact the electrical pads of the spatial conversion unit and the substrate pads of the target substrate. The probe head includes a probe, which is located in the form of a pin from the target substrate toward the spatial conversion unit. The probe has a displacement portion and an elastic portion located near the spatial conversion unit and the target substrate, respectively. A lower plate and an upper plate are sequentially located in the longitudinal direction of the probe. The lower plate and the upper plate are configured to surround the displacement portion. The probe has an anchor protruding from the probe at the displacement portion, and the lower plate and the upper plate are located around the anchor so as to be spaced apart from each other on the probe.

[0015] The probe can be configured to be located at at least one of the lower plate and the upper plate; and to move relative to the lower plate and the upper plate when an external force is applied to at least one of the space conversion unit and the test target substrate, so as to be electrically connected to the electrical pads of the space conversion unit and the substrate pads of the test target substrate.

[0016] The displacement portion can be configured to have a straight shape on one side of the probe in the longitudinal direction of the probe; and to have a straight shape around the anchor while positioning the anchor on the other side of the probe in the longitudinal direction of the probe.

[0017] The displacement portion can be configured to have a displacement hole portion located between a lower plate and an upper plate in the longitudinal direction of the probe, the displacement hole portion extending toward the lower plate and the upper plate; and to have anchors around the displacement hole portion.

[0018] The displacement hole section may have two displacement holes formed in a straight line from the lower plate to the upper plate, and the two displacement holes are opened so that they have the same length in the longitudinal direction of the probe.

[0019] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate while facing the lower plate in the longitudinal direction of the probe; have a curved surface facing the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; and have a plane between the ramp and the curved surface in the longitudinal direction of the probe.

[0020] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; have a curved surface that faces the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; have a plane in the longitudinal direction of the probe between the ramp and the curved surface; and have an elastic hole formed on the anchor along the ramp, the plane and the curved surface.

[0021] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; have a curved surface facing the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; have a plane in the longitudinal direction of the probe between the ramp and the curved surface; have an elastic hole formed on the anchor along the ramp, the plane and the curved surface; and allow the elastic hole to communicate with a displacement hole located around the anchor so as to be close to the anchor.

[0022] The anchor can be configured to have a first curved surface facing the lower plate in the longitudinal direction of the probe, the first curved surface being bent to stand upright at the probe; a second curved surface facing the upper plate in the longitudinal direction of the probe, the second curved surface being bent to stand upright at the probe; and a plane between the first curved surface and the second curved surface in the longitudinal direction of the probe.

[0023] The anchor can be configured to: have a first curved surface facing the lower plate in the longitudinal direction of the probe, the first curved surface being bent to stand upright at the probe; have a second curved surface facing the upper plate in the longitudinal direction of the probe, the second curved surface being bent to stand upright at the probe; have a plane between the first curved surface and the second curved surface in the longitudinal direction of the probe; and have an elastic hole formed on the anchor along the first curved surface, the plane and the second curved surface.

[0024] The anchor can be configured to: have a first curved surface facing the lower plate in the longitudinal direction of the probe, the first curved surface being bent to stand upright at the probe; have a second curved surface facing the upper plate in the longitudinal direction of the probe, the second curved surface being bent to stand upright at the probe; have a plane between the first curved surface and the second curved surface in the longitudinal direction of the probe; have an elastic hole formed on the anchor along the first curved surface, the plane and the second curved surface; and allow the elastic hole to communicate with a displacement hole located around the anchor so as to be close to the anchor.

[0025] The anchor can be configured to have a first horizontal plane facing the lower plate in the longitudinal direction of the probe, the first horizontal plane being at an angle to the probe; a second plane facing the upper plate in the longitudinal direction of the probe, the second plane being at an angle to the probe; and a curved surface between the first plane and the second plane in the longitudinal direction of the probe.

[0026] The anchor can be configured to: have a first horizontal plane facing the lower plate in the longitudinal direction of the probe, the first horizontal plane being at an angle to the probe; have a second horizontal plane facing the upper plate in the longitudinal direction of the probe, the second horizontal plane being at an angle to the probe; have a curved surface between the first horizontal plane and the second horizontal plane in the longitudinal direction of the probe; and have an elastic hole formed on the anchor along the first horizontal plane, the curved surface and the second horizontal plane.

[0027] The anchor can be configured to: have a first horizontal plane facing the lower plate in the longitudinal direction of the probe, the first horizontal plane being at an angle to the probe; have a second horizontal plane facing the upper plate in the longitudinal direction of the probe, the second horizontal plane being at an angle to the probe; have a curved surface between the first and second horizontal planes in the longitudinal direction of the probe; have an elastic hole formed on the anchor along the first horizontal plane, the curved surface, and the second horizontal plane; and allow the elastic hole to communicate with a displacement hole located around the anchor so as to be close to the anchor.

[0028] The anchor can be configured to have an inclined surface that is tilted relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; to have a horizontal surface that faces the upper plate in the longitudinal direction of the probe, the horizontal surface being at an angle to the probe; and to have a curved surface in the longitudinal direction of the probe between the inclined surface and the horizontal surface.

[0029] The anchor can be configured to have an inclined surface that is tilted relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; to have a horizontal surface that faces the upper plate in the longitudinal direction of the probe, the horizontal surface being at an angle to the probe; to have a curved surface in the longitudinal direction of the probe between the inclined surface and the horizontal surface; and to have an elastic hole formed in the anchor along the inclined surface, the curved surface and the horizontal surface.

[0030] The anchor can be configured to: have an inclined surface that is tilted relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; have a horizontal surface that faces the upper plate in the longitudinal direction of the probe, the horizontal surface being at an angle to the probe; have a curved surface in the longitudinal direction of the probe between the inclined surface and the horizontal surface; have an elastic hole formed on the anchor along the inclined surface, the curved surface and the horizontal surface; and allow the elastic hole to communicate with a displacement hole located around the anchor so as to be close to the anchor.

[0031] The anchor can be configured to have a first inclined surface that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; a second inclined surface that is inclined relative to the probe toward the upper plate and faces the upper plate in the longitudinal direction of the probe; and a curved surface between the first and second inclined surfaces in the longitudinal direction of the probe.

[0032] The anchor can be configured to have a first inclined surface that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; a second inclined surface that is inclined relative to the probe toward the upper plate and faces the upper plate in the longitudinal direction of the probe; a curved surface between the first and second inclined surfaces in the longitudinal direction of the probe; and an elastic hole formed on the anchor along the first inclined surface, the curved surface and the second inclined surface.

[0033] The anchor can be configured to: have a first inclined surface that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; have a second inclined surface that is inclined relative to the probe toward the upper plate and faces the upper plate in the longitudinal direction of the probe; have a curved surface in the longitudinal direction of the probe between the first and second inclined surfaces; have an elastic hole formed on the anchor along the first inclined surface, the curved surface and the second inclined surface; and allow the elastic hole to communicate with a displacement hole located around the anchor so as to be close to the anchor.

[0034] The displacement hole section may have two displacement holes formed in a straight line from the lower plate toward the upper plate, and the two displacement holes are opened so that they have different lengths along the longitudinal direction of the probe.

[0035] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate while facing the lower plate in the longitudinal direction of the probe; have a curved surface facing the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; and have a plane between the ramp and the curved surface in the longitudinal direction of the probe.

[0036] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; have a curved surface that faces the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; have a plane in the longitudinal direction of the probe between the ramp and the curved surface; and have an elastic hole formed on the anchor along the ramp, the plane and the curved surface.

[0037] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; have a curved surface facing the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; have a plane in the longitudinal direction of the probe between the ramp and the curved surface; have an elastic hole formed on the anchor along the ramp, the plane and the curved surface; and allow the elastic hole to communicate with a displacement hole located around the anchor so as to be close to the anchor.

[0038] The displacement hole portion may have displacement holes located in the lower region, middle region, and upper region of the displacement hole portion, and the displacement holes are opened so that the middle region has a larger size than the lower and upper regions along the longitudinal direction of the probe.

[0039] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate while facing the lower plate in the longitudinal direction of the probe; have a curved surface facing the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; and have a plane between the ramp and the curved surface in the longitudinal direction of the probe.

[0040] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; have a curved surface that faces the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; have a plane in the longitudinal direction of the probe between the ramp and the curved surface; and have an elastic hole formed on the anchor along the ramp, the plane and the curved surface.

[0041] The anchor can be configured to: have a ramp that is inclined relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; have a curved surface facing the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the ramp at the probe; have a plane in the longitudinal direction of the probe between the ramp and the curved surface; have an elastic hole formed on the anchor along the ramp, the plane and the curved surface; and allow the elastic hole to communicate with a displacement hole around the anchor. Simple Explanation of the Diagram

[0042] Figure 1 is a schematic diagram of a traditional probe card.

[0043] Figure 2 is a virtual view showing the positional relationship between the probe, lower plate, and upper plate during the EDS process, using a simulation of the probe card in Figure 1.

[0044] Figure 3 is a schematic diagram showing the probe card according to the present invention.

[0045] Figure 4 is a schematic diagram showing the shape of the probe in the probe head of Figure 3.

[0046] Figure 5 is a schematic diagram showing the probes located on the lower and upper plates of the probe head in Figure 3.

[0047] Figure 6 is a schematic diagram showing the first variation of the probe in Figure 5.

[0048] Figure 7 is a schematic diagram showing a second variation of the probe in Figure 5.

[0049] Figure 8 is a schematic diagram showing the third variation of the probe in Figure 5.

[0050] Figure 9 is a schematic diagram showing the fourth variation of the probe in Figure 5.

[0051] Figure 10 is a schematic diagram showing the fifth variation of the probe in Figure 5.

[0052] Figure 11 is a schematic diagram showing the sixth variant of the probe in Figure 5.

[0053] Figure 12 is a schematic diagram showing the seventh variant of the probe in Figure 5.

[0054] Figure 13 is a schematic diagram showing the eighth variant of the probe in Figure 5.

[0055] Figure 14 is a schematic diagram showing the ninth variation of the probe in Figure 5.

[0056] Figure 15 is a schematic diagram showing the tenth variation of the probe in Figure 5.

[0057] Figure 16 is a schematic diagram showing the eleventh variation of the probe in Figure 5.

[0058] Figure 17 is a schematic diagram showing the twelfth variant of the probe in Figure 5.

[0059] Figure 18 is a schematic diagram showing the thirteenth variant of the probe in Figure 5.

[0060] Figure 19 is a schematic diagram showing the fourteenth variation of the probe in Figure 5. Implementation

[0061] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, enabling those skilled in the art to readily implement the invention.

[0062] Figure 3 is a schematic diagram showing the probe card according to the present invention, and Figure 4 is a schematic diagram showing the shape of the probe in the probe head of Figure 3.

[0063] Additionally, Figure 5 is a schematic diagram showing the probes located on the lower and upper plates of the probe head in Figure 3.

[0064] In this case, Figures 3 to 5 are described with reference to Figure 1.

[0065] Referring to Figures 3 to 5, the probe 510 according to the present invention is configured such that, when the target substrate 570 is located below the space conversion unit 530 of the probe card 550, referring to Figures 1 and 3, the probe is located between the space conversion unit 530 and the target substrate 570, so as to be able to contact the electrical pad 525 of the space conversion unit 530 and the substrate pad 565 of the target substrate 570.

[0066] Therefore, referring to Figures 3 and 4, the probe head 510 includes a probe 163 located in the form of a pin from the test target substrate 570 toward the spatial conversion unit 530. The probe has a displacement portion 143 and an elastic portion 110 located near the spatial conversion unit 530 and the test target substrate 570, respectively. A lower plate 480 and an upper plate 500 are sequentially located in the longitudinal direction of the probe 163, and the lower plate and the upper plate are configured to surround the displacement portion 143.

[0067] Here, probe 163 has an anchor 121 that protrudes from probe 163 at displacement portion 143, as shown in Figures 3 to 5. Referring to Figures 3 to 5, lower plate 480 and upper plate 500 are located around anchor 121 so as to be spaced apart from each other on probe 163.

[0068] The probe 163 is located on at least one of the lower plate 480 and the upper plate 500 in FIG3, and when an external force is applied to at least one of the space conversion unit 530 and the inspection target substrate 570, the probe moves relative to the lower plate 480 and the upper plate 500, and is electrically connected to the electrical pad 525 of the space conversion unit 530 and the substrate pad 565 of the inspection target substrate 570.

[0069] That is, the probe 163 contacts the electrical pad 525 of the space conversion unit 530 through the probe tip 150, and contacts the substrate pad 565 of the test target substrate 570 through the probe tip (not shown). Referring to Figures 3 to 5, the displacement portion 143 has a straight shape on one side of the probe 163 in the longitudinal direction of the probe 163, and has a straight shape around the anchor 121 while positioning the anchor 121 on the other side of the probe 163 in the longitudinal direction of the probe 163.

[0070] Referring to Figures 4 and 5, the displacement portion 143 has a displacement hole portion 134 located between the lower plate 480 and the upper plate 500 in the longitudinal direction of the probe 163, the displacement hole portion extending toward the lower plate 480 and the upper plate 500; and has an anchor 121 around the displacement hole portion 134.

[0071] In Figures 4 and 5, the displacement hole portion 134 has two displacement holes 132 forming a straight line from the lower plate 480 toward the upper plate 500, and the two displacement holes are opened to have the same length along the longitudinal direction of the probe 163. The displacement hole portion 134 has a plurality of beams b, which are located between and surround the two displacement holes 132, forming an elastic body using the plurality of beams b connected in parallel. From a physics perspective, the parallel synthesis of the elastic moduli of the elastic body may make it difficult for the displacement portion 143 to move proportionally with the increase of the number of individual beams b.

[0072] Referring to Figures 3 to 5, the anchor 121 has an inclined surface that is inclined toward the upper plate 500 relative to the probe 163 and faces the lower plate 480 in the longitudinal direction of the probe 163; it has a curved surface that faces the upper plate 500 in the longitudinal direction of the probe 163, and the curved surface is bent to be more inclined than the inclined surface at the probe 163; and it has a plane between the inclined surface and the curved surface in the longitudinal direction of the probe 163.

[0073] Meanwhile, probe 163 can replace probe 50 in Figure 1.

[0074] Figure 6 is a schematic diagram showing the first variation of the probe in Figure 5.

[0075] Referring to FIG6, the probe 166 of the first variant according to the present invention is similar to the probe 163 of FIG5, but the anchor 125 of the probe 166 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0076] Therefore, in order to highlight the present invention, the displacement portion 146, displacement hole portion 136 and anchor 125 in FIG6 are represented by different element symbols than the displacement portion 143, displacement hole portion 134 and anchor 121 in FIG5.

[0077] More specifically, the anchor 125 has an inclined surface that is inclined relative to the probe 166 toward the upper plate 500 (FIG. 5) and faces the lower plate 480 (FIG. 5) in the longitudinal direction of the probe 166; has a curved surface facing the upper plate 500 in the longitudinal direction of the probe 166, and the curved surface is bent to be more inclined than the inclined surface at the probe 166; has a plane in the longitudinal direction of the probe 166 between the inclined surface and the curved surface; and has an elastic hole 123 formed on the anchor 125 along the inclined surface, the plane and the curved surface.

[0078] At this point, the anchor 125 forms an elastic body that is parallel to the angular boundaries between the inclined plane, the plane, and the curved surface, as well as the inner surface of the elastic hole 123. From a physics perspective, the parallel synthesis of the elastic moduli of the elastic bodies may make it difficult for the anchor 125 to deform as the opening area of ​​the elastic hole 123 increases.

[0079] Figure 19 is a schematic diagram showing the fourteenth variation of the probe in Figure 5.

[0080] Referring to FIG19, the probe 169 of the fourteenth variant according to the present invention is similar to the probe 163 of FIG5, but the anchor 129 of the probe 169 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0081] Therefore, in order to highlight the present invention, the displacement portion 149, displacement hole portion 139 and anchor 129 in FIG19 are represented by different element symbols than the displacement portion 143, displacement hole portion 134 and anchor 121 in FIG5.

[0082] More specifically, the anchor 129 has an inclined surface that is inclined toward the upper plate 500 relative to the probe 169 and faces the lower plate 480 in the longitudinal direction of the probe 169; a curved surface that faces the upper plate 500 in the longitudinal direction of the probe 169, and the curved surface is bent to be more inclined than the inclined surface at the probe 169; a plane between the inclined surface and the curved surface in the longitudinal direction of the probe 169; an elastic hole 127 formed on the anchor 129 along the inclined surface, the plane and the curved surface; and allows the elastic hole 127 to communicate with a displacement hole 132 located around the anchor 129 so as to be close to the anchor 129.

[0083] Figure 7 is a schematic diagram showing a second variation of the probe in Figure 5.

[0084] Referring to FIG7, the probe 214 of the second variant according to the present invention is similar to the probe 163 of FIG5, but the anchor 173 of the probe 214 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0085] Therefore, in order to highlight the present invention, the probe tip 200, displacement portion 194, displacement hole portion 186, displacement hole 183 and anchor 173 in FIG7 are represented by different element symbols than the probe tip 150, displacement portion 143, displacement hole portion 134, displacement hole 132 and anchor 121 in FIG5.

[0086] More specifically, the anchor 173 has a first curved surface facing the lower plate 480 in the longitudinal direction of the probe 214, and the first curved surface is bent to stand upright at the probe 214; has a second curved surface facing the upper plate 500 in the longitudinal direction of the probe 214, the second curved surface is bent to stand upright at the probe 214; and has a plane between the first curved surface and the second curved surface in the longitudinal direction of the probe 214.

[0087] Figure 8 is a schematic diagram showing the third variation of the probe in Figure 5.

[0088] Referring to FIG8, the probe 218 of the third variant according to the present invention is similar to the probe 163 of FIG5, but the anchor 179 of the probe 218 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0089] Here, to highlight the invention, the displacement portion 198, displacement hole portion 189 and anchor 179 in FIG8 are represented by different element symbols than the displacement portion 194, displacement hole portion 186 and anchor 173 in FIG7.

[0090] More specifically, the anchor 179 has a first curved surface facing the lower plate 480 in the longitudinal direction of the probe 218, and the first curved surface is bent to stand upright at the probe 218; has a second curved surface facing the upper plate 500 in the longitudinal direction of the probe 218, and the second curved surface is bent to stand upright at the probe 218; has a plane between the first curved surface and the second curved surface in the longitudinal direction of the probe 218; and has an elastic hole formed on the anchor 179 along the first curved surface, the plane and the second curved surface.

[0091] Meanwhile, although not shown in the figure, the variant of probe 218 has a shape similar to probe 218 and can allow the elastic hole 176 to communicate with the displacement hole 183 located around the anchor 179 so as to be close to the anchor 179, similar to Figure 19.

[0092] Figure 9 is a schematic diagram showing the fourth variation of the probe in Figure 5.

[0093] Referring to FIG9, the probe 264 of the fourth variant according to the present invention is similar to the probe 163 of FIG5, but the anchor 223 of the probe 264 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0094] Therefore, in order to highlight the present invention, the probe tip 250, displacement portion 244, displacement hole portion 236, displacement hole 233 and anchor 223 in FIG9 are represented by different element symbols than the probe tip 150, displacement portion 143, displacement hole portion 134, displacement hole 132 and anchor 121 in FIG5.

[0095] More specifically, the anchor 223 has a first horizontal surface facing the lower plate 480 in the longitudinal direction of the probe 264, and the first horizontal surface is at an angle to the probe 264; a second horizontal surface facing the upper plate 500 in the longitudinal direction of the probe 264, and the second horizontal surface is at an angle to the probe 264; and a curved surface between the first horizontal surface and the second horizontal surface in the longitudinal direction of the probe 264.

[0096] Figure 10 is a schematic diagram showing the fifth variation of the probe in Figure 5.

[0097] Referring to FIG10, the probe 268 of the fifth variant according to the present invention is similar to the probe 163 of FIG5, but the anchor 229 of the probe 268 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0098] Here, to highlight the present invention, the displacement portion 248, displacement hole portion 239 and anchor 229 in FIG10 are represented by different element symbols than the displacement portion 244, displacement hole portion 236 and anchor 223 in FIG9.

[0099] More specifically, the anchor 229 has a first horizontal surface facing the lower plate 480 in the longitudinal direction of the probe 268, and the first horizontal surface is at an angle to the probe 268; a second horizontal surface facing the upper plate 500 in the longitudinal direction of the probe 268, and the second horizontal surface is at an angle to the probe 268; a curved surface in the longitudinal direction of the probe 268 between the first horizontal surface and the second horizontal surface; and an elastic hole 226 formed on the anchor 229 along the first horizontal surface, the curved surface and the second horizontal surface.

[0100] Meanwhile, although not shown in the figure, the variant of probe 268 has a shape similar to probe 268 and allows the elastic hole 226 to communicate with the displacement hole 233 located around the anchor 229 so as to be close to the anchor 229, similar to Figure 19.

[0101] Figure 11 is a schematic diagram showing the sixth variant of the probe in Figure 5.

[0102] Referring to FIG11, the probe 314 of the sixth variant of the present invention is similar to the probe 163 of FIG5, but the anchor 273 of the probe 314 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0103] Therefore, in order to highlight the present invention, the probe tip 300, displacement portion 294, displacement hole portion 286, displacement hole 283 and anchor 273 in FIG11 are represented by different element symbols than the probe tip 150, displacement portion 143, displacement hole portion 134, displacement hole 132 and anchor 121 in FIG5.

[0104] More specifically, the anchor 273 has an inclined surface that is tilted toward the upper plate 500 relative to the probe 314 and faces the lower plate 480 in the longitudinal direction of the probe 314; has a horizontal surface facing the upper plate 500 in the longitudinal direction of the probe 314, the horizontal surface being at an angle to the probe 314; and has a curved surface in the longitudinal direction of the probe 314 between the inclined surface and the horizontal surface.

[0105] Figure 12 is a schematic diagram showing the seventh variant of the probe in Figure 5.

[0106] Referring to FIG12, the probe 318 of the seventh variant of the present invention is similar to the probe 163 of FIG5, but the anchor 279 of the probe 318 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0107] Here, to highlight the invention, the displacement portion 298, displacement hole portion 289 and anchor 279 in FIG12 are represented by different element symbols than the displacement portion 294, displacement hole portion 286 and anchor 273 in FIG11.

[0108] More specifically, the anchor 279 has an inclined surface that is tilted toward the upper plate 500 relative to the probe 318 and faces the lower plate 480 in the longitudinal direction of the probe 318; a horizontal surface that faces the upper plate 500 in the longitudinal direction of the probe 318, the horizontal surface being at an angle to the probe 318; a curved surface in the longitudinal direction of the probe 318 between the inclined surface and the horizontal surface; and an elastic hole formed on the anchor 279 along the inclined surface, the curved surface and the horizontal surface.

[0109] Meanwhile, although not shown in the figure, the variant of probe 318 has a shape similar to probe 318 and allows the elastic hole 276 to communicate with the displacement hole 283 located around the anchor 279 so as to be close to the anchor 279, similar to Figure 19.

[0110] Figure 13 is a schematic diagram showing the eighth variant of the probe in Figure 5.

[0111] Referring to FIG13, the probe 364 of the eighth variant according to the present invention is similar to the probe 163 of FIG5, but the anchor 323 of the probe 364 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0112] Therefore, in order to highlight the present invention, the probe tip 350, displacement portion 344, displacement hole portion 336, displacement hole 333 and anchor 323 in FIG13 are represented by different element symbols than the probe tip 150, displacement portion 143, displacement hole portion 134, displacement hole 132 and anchor 121 in FIG5.

[0113] More specifically, the anchor 323 has a first inclined surface that is inclined relative to the probe 364 toward the upper plate 500 and faces the lower plate 480 in the longitudinal direction of the probe 364; a second inclined surface that is inclined relative to the probe 364 toward the upper plate 500 and faces the upper plate 500 in the longitudinal direction of the probe 364; and a curved surface between the first and second inclined surfaces in the longitudinal direction of the probe 364.

[0114] Figure 14 is a schematic diagram showing the ninth variation of the probe in Figure 5.

[0115] Referring to FIG14, the probe 368 of the ninth variant of the present invention is similar to the probe 163 of FIG5, but the anchor 329 of the probe 368 has a different shape than the anchor 121 of the probe 163 of FIG5.

[0116] Here, to highlight the invention, the displacement portion 348, displacement hole portion 339 and anchor 329 in FIG14 are represented by different element symbols than the displacement portion 344, displacement hole portion 336 and anchor 323 in FIG13.

[0117] More specifically, the anchor 329 has a first inclined surface that is inclined relative to the probe 368 toward the upper plate 500 and faces the lower plate 480 in the longitudinal direction of the probe 368; a second inclined surface that is inclined relative to the probe 368 toward the upper plate 500 and faces the upper plate 500 in the longitudinal direction of the probe 368; a curved surface between the first and second inclined surfaces in the longitudinal direction of the probe 368; and an elastic hole 326 formed on the anchor 329 along the first inclined surface, the curved surface and the second inclined surface.

[0118] Meanwhile, although not shown in the figure, the variant of probe 368 has a shape similar to probe 368 and allows the elastic hole 326 to communicate with the displacement hole 333 located around the anchor 329 so as to be close to the anchor 329, similar to Figure 19.

[0119] Figure 15 is a schematic diagram showing the tenth variation of the probe in Figure 5.

[0120] Referring to FIG15, the probe 414 of the tenth variant of the present invention is similar to the probe 163 of FIG5, but the positional relationship between the displacement hole portion 386 at the displacement portion 394 of the probe 414 and the anchor 373 is different from the positional relationship between the displacement hole portion 134 at the displacement portion 143 of the probe 163 of FIG5 and the anchor 121.

[0121] Therefore, in order to highlight the present invention, the probe tip 400, displacement portion 394, displacement hole portion 386, displacement hole 383 and anchor 373 in FIG15 are represented by different element symbols than the probe tip 150, displacement portion 143, displacement hole portion 134, displacement hole 132 and anchor 121 in FIG5.

[0122] More specifically, the displacement hole portion 386 has two displacement holes 383 formed in a straight line from the lower plate 480 toward the upper plate 500, the two displacement holes 383 being opened to have different lengths along the longitudinal direction of the probe 414.

[0123] Additionally, the anchor 373 has an inclined surface that is inclined toward the upper plate 500 relative to the probe 414 and faces the lower plate 480 in the longitudinal direction of the probe 414; a curved surface that faces the upper plate 500 in the longitudinal direction of the probe 414, the curved surface being bent to be more inclined than the inclined surface at the probe 414; and a plane between the inclined surface and the curved surface in the longitudinal direction of the probe 414.

[0124] Figure 16 is a schematic diagram showing the eleventh variation of the probe in Figure 5.

[0125] Referring to FIG16, the probe 418 of the eleventh variant of the present invention is similar to the probe 163 of FIG5, but the positional relationship between the displacement hole portion 389 at the displacement portion 398 of the probe 418 and the anchor 379 is different from the positional relationship between the displacement hole portion 134 at the displacement portion 143 of the probe 163 of FIG5 and the anchor 121.

[0126] Here, to highlight the invention, the displacement portion 398, displacement hole portion 389 and anchor 379 in FIG16 are represented by different element symbols than the displacement portion 394, displacement hole portion 386 and anchor 373 in FIG15.

[0127] More specifically, the displacement hole portion 389 has two displacement holes 383 formed in a straight line from the lower plate 480 toward the upper plate 500, the two displacement holes being opened to have different lengths along the longitudinal direction of the probe 418.

[0128] Additionally, the anchor 379 has an inclined surface that is inclined toward the upper plate 500 relative to the probe 418 and faces the lower plate 480 in the longitudinal direction of the probe 418; a curved surface that faces the upper plate 500 in the longitudinal direction of the probe 418, the curved surface being bent to be more inclined than the inclined surface at the probe 418; a plane between the inclined surface and the curved surface in the longitudinal direction of the probe 418; and an elastic hole 376 formed on the anchor 379 along the inclined surface, the plane, and the curved surface.

[0129] Meanwhile, although not shown in the figure, the variant of probe 418 has a shape similar to probe 418 and can allow the elastic hole 376 to communicate with the displacement hole 383 located around the anchor 379 so as to be close to the anchor 379, similar to Figure 19.

[0130] Figure 17 is a schematic diagram showing the twelfth variant of the probe in Figure 5.

[0131] Referring to FIG17, the probe 464 of the twelfth variant of the present invention is similar to the probe 163 of FIG5, but the positional relationship between the displacement hole portion 436 at the displacement portion 444 of the probe 464 and the anchor 423 is different from the positional relationship between the displacement hole portion 134 at the displacement portion 143 of the probe 163 of FIG5 and the anchor 121.

[0132] Therefore, in order to highlight the present invention, the probe tip 450, displacement portion 444, displacement hole portion 436, displacement hole 433 and anchor 423 in FIG17 are represented by different element symbols than the probe tip 150, displacement portion 143, displacement hole portion 134, displacement hole 132 and anchor 121 in FIG5.

[0133] More specifically, the displacement hole portion 436 has a displacement hole 433 located in the lower region, middle region and upper region of the displacement hole portion 436, the displacement hole 433 being opened so that it has a larger size in the middle region than in the lower region and the upper region along the longitudinal direction of the probe 464.

[0134] Additionally, the anchor 423 has an inclined surface that is inclined toward the upper plate 500 relative to the probe 464 and faces the lower plate 480 in the longitudinal direction of the probe 464; a curved surface that faces the upper plate 500 in the longitudinal direction of the probe 464, the curved surface being bent to be more inclined than the inclined surface at the probe 464; and a plane between the inclined surface and the curved surface in the longitudinal direction of the probe 464.

[0135] Figure 18 is a schematic diagram showing the thirteenth variant of the probe in Figure 5.

[0136] Referring to FIG18, the probe 468 of the thirteenth variant of the present invention is similar to the probe 163 of FIG5, but the positional relationship between the displacement hole portion 439 at the displacement portion 448 of the probe 468 and the anchor 429 is different from the positional relationship between the displacement hole portion 134 at the displacement portion 143 of the probe 163 of FIG5 and the anchor 121.

[0137] Here, to highlight the invention, the displacement portion 448, displacement hole portion 439 and anchor 429 in FIG18 are represented by different element symbols than the displacement portion 444, displacement hole portion 436 and anchor 423 in FIG17.

[0138] More specifically, the displacement hole portion 439 has a displacement hole 433 located in the lower region, middle region and upper region of the displacement hole portion 439, the displacement hole 433 being opened so that it has a larger size in the middle region than in the lower region and the upper region along the longitudinal direction of the probe 468.

[0139] Additionally, the anchor 429 has an inclined surface that is inclined toward the upper plate 500 relative to the probe 468 and faces the lower plate 480 in the longitudinal direction of the probe 468; a curved surface that faces the upper plate 500 in the longitudinal direction of the probe 468, the curved surface being bent to be more inclined than the inclined surface at the probe 468; a flat surface in the longitudinal direction of the probe 468 between the inclined surface and the curved surface; and an elastic hole 426 formed on the anchor 429 along the inclined surface, the flat surface and the curved surface.

[0140] As can be clearly seen from the above description, the probe of the present invention is configured such that when the target substrate is located below the space conversion unit of the probe card, the probe is located between the space conversion unit and the target substrate, so as to contact the electrical pads of the space conversion unit and the substrate pads of the target substrate.

[0141] The probe includes a probe having an elastic portion and a displacement portion located sequentially between the test target substrate and the spatial conversion unit; and a lower plate and an upper plate located sequentially in the longitudinal direction of the probe and surrounding the displacement portion.

[0142] No anchors are installed in the elastic part, two displacement holes are formed in the displacement part, and anchors are installed in the displacement part. A lower plate and an upper plate are installed around the anchors at the probe.

[0143] Therefore, during the EDS process, when the probe card and the test target substrate are mounted on the electrical testing device, when the elastic part of the probe bends, the anchor moves from the elastic part to the displacement part, which can prevent contact between two adjacent probes. Furthermore, since there is no anchor at the elastic part, the length of the elastic part can be reduced while improving the buckling characteristics of the elastic part, thereby improving the electrical characteristics of the probe card.

[0144] 5,121,125,129,173,179,223,229,273,279,323,329,373,379,423,429: Anchor pins 10,110: Elastic portion 25: Variable aperture 30,143,146,149,194,198,244,248,294,298,344,348,394,398,444,448: Displacement portion 40, 150, 200, 250, 300, 350, 400, 450: Detection tip 50,163,166,169,214,218,264,268,314,318,364,368,414,418,464,468: probe 65: Lower guide hole 70,480: Lower plate 85: Upper guide hole 90,500:On board 100: Test Head 123,127,176,226,276,326,376,426: Elastic holes 132,183,233,283,333,383,433: Displacement holes 134,136,139,186,189,236,239,286,289,336,339,386,389,436,439: Displacement hole section 510: Probe head 525: Electrical pad 530: Spatial Conversion Unit 540, 550: Probe Card 565:Substrate pad 570: Inspect the target substrate b: Liang

Claims

1. A probe head configured such that, when a target substrate is located below a space conversion unit of a probe card, the probe head is positioned between the space conversion unit and the target substrate, so as to contact the electrical pads of the space conversion unit and the substrate pads of the target substrate, the probe head comprising: A probe, in the form of a pin, is positioned from the aforementioned test target substrate toward the aforementioned spatial conversion unit. The probe has a displacement portion and an elastic portion located near the aforementioned spatial conversion unit and the aforementioned test target substrate, respectively. A lower plate and an upper plate are sequentially located in the longitudinal direction of the probe. The lower plate and the upper plate are configured to surround the aforementioned displacement portion. The probe has an anchor protruding from the probe at the aforementioned displacement portion, and the lower plate and the upper plate are located around the anchor so as to be spaced apart from each other on the probe. The displacement portion is configured to have a displacement hole portion located between the lower plate and the upper plate in the aforementioned longitudinal direction of the probe, the displacement hole portion extending toward the lower plate and the upper plate. The probe also has the anchor around the aforementioned displacement hole portion. The displacement hole portion has two displacement holes formed in a straight line from the lower plate toward the upper plate, the two displacement holes being opened to have the same length along the aforementioned longitudinal direction of the probe. The anchor is configured to have an inclined surface that is inclined relative to the probe toward the aforementioned upper plate while facing the lower plate in the aforementioned longitudinal direction of the probe. The probe has a curved surface facing the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the inclined surface at the probe; a plane is provided between the inclined surface and the curved surface in the longitudinal direction of the probe; an elastic hole is formed on the anchor along the inclined surface, the plane and the curved surface; and the elastic hole is provided to communicate with the displacement hole located around the anchor so as to be close to the anchor.

2. The probe head as described in claim 1, wherein, The aforementioned probe is configured to be located at at least one of the aforementioned lower plate and the aforementioned upper plate; and to move relative to the aforementioned lower plate and the aforementioned upper plate when an external force is applied to at least one of the aforementioned space conversion unit and the aforementioned test target substrate, so as to be electrically connected to the aforementioned electrical pad of the aforementioned space conversion unit and the aforementioned substrate pad of the aforementioned test target substrate.

3. The probe head as described in claim 1, wherein, The aforementioned displacement portion is configured to have a straight shape on one side of the aforementioned probe in the aforementioned longitudinal direction; and to have a straight shape around the aforementioned anchor, while positioning the aforementioned anchor on the other side of the aforementioned probe in the aforementioned longitudinal direction.

4. A probe head configured such that, when a target substrate is located below a space conversion unit of a probe card, the probe head is positioned between the space conversion unit and the target substrate, so as to contact the electrical pads of the space conversion unit and the substrate pads of the target substrate, the probe head comprising: A probe, in the form of a pin, is positioned from the aforementioned target substrate toward the aforementioned spatial conversion unit. The probe has a displacement portion and an elastic portion located near the aforementioned spatial conversion unit and the aforementioned target substrate, respectively. A lower plate and an upper plate are sequentially located in the longitudinal direction of the probe. The lower plate and the upper plate are configured to surround the aforementioned displacement portion. The probe has an anchor protruding from the probe at the aforementioned displacement portion, and the lower plate and the upper plate are located around the anchor so as to be spaced apart from each other on the probe. The displacement portion is configured to have a displacement hole portion located between the lower plate and the upper plate in the aforementioned longitudinal direction of the probe, the displacement hole portion extending toward the lower plate and the upper plate. The probe also has the anchor around the aforementioned displacement hole portion. The displacement hole portion has two displacement holes formed in a straight line from the lower plate toward the upper plate, the two displacement holes being opened to have the same length along the aforementioned longitudinal direction of the probe. The anchor is configured to: The device comprises: a first curved surface facing the lower plate in the longitudinal direction of the probe, the first curved surface being bent to stand upright at the probe; a second curved surface facing the upper plate in the longitudinal direction of the probe, the second curved surface being bent to stand upright at the probe; a plane between the first curved surface and the second curved surface in the longitudinal direction of the probe; an elastic hole formed on the anchor along the first curved surface, the plane, and the second curved surface; and allowing the elastic hole to communicate with the displacement hole located around the anchor so as to be close to the anchor.

5. A probe head configured such that, when a target substrate is located below a space conversion unit of a probe card, the probe head is positioned between the space conversion unit and the target substrate, so as to contact the electrical pads of the space conversion unit and the substrate pads of the target substrate, the probe head comprising: A probe, in the form of a pin, is positioned from the aforementioned target substrate toward the aforementioned spatial conversion unit. The probe has a displacement portion and an elastic portion located near the aforementioned spatial conversion unit and the aforementioned target substrate, respectively. A lower plate and an upper plate are sequentially located in the longitudinal direction of the probe. The lower plate and the upper plate are configured to surround the aforementioned displacement portion. The probe has an anchor protruding from the probe at the aforementioned displacement portion, and the lower plate and the upper plate are located around the anchor so as to be spaced apart from each other on the probe. The displacement portion is configured to have a displacement hole portion located between the lower plate and the upper plate in the aforementioned longitudinal direction of the probe, the displacement hole portion extending toward the lower plate and the upper plate. The probe also has the anchor around the aforementioned displacement hole portion. The displacement hole portion has two displacement holes formed in a straight line from the lower plate toward the upper plate, the two displacement holes being opened to have the same length along the aforementioned longitudinal direction of the probe. The anchor is configured to: The device comprises: a first horizontal plane facing the lower plate in the longitudinal direction of the probe, the first horizontal plane being at an angle to the probe; a second horizontal plane facing the upper plate in the longitudinal direction of the probe, the second horizontal plane being at an angle to the probe; a curved surface between the first and second horizontal planes in the longitudinal direction of the probe; an elastic hole formed on the anchor along the first horizontal plane, the curved surface, and the second horizontal plane; and a device that allows the elastic hole to communicate with the displacement hole located around the anchor so as to be close to the anchor.

6. A probe head configured such that, when a target substrate is located below a space conversion unit of a probe card, the probe head is positioned between the space conversion unit and the target substrate to contact the electrical pads of the space conversion unit and the substrate pads of the target substrate, the probe head comprising: A probe, in the form of a pin, is positioned from the aforementioned test target substrate toward the aforementioned spatial conversion unit. The probe has a displacement portion and an elastic portion located near the aforementioned spatial conversion unit and the aforementioned test target substrate, respectively. A lower plate and an upper plate are sequentially located in the longitudinal direction of the probe. The lower plate and the upper plate are configured to surround the aforementioned displacement portion. The probe has an anchor protruding from the probe at the aforementioned displacement portion, and the lower plate and the upper plate are located around the anchor so as to be spaced apart from each other on the probe. The displacement portion is configured to have a displacement hole portion located between the lower plate and the upper plate in the aforementioned longitudinal direction of the probe, the displacement hole portion extending toward the lower plate and the upper plate. The probe also has the anchor around the aforementioned displacement hole portion. The displacement hole portion has two displacement holes formed in a straight line from the lower plate toward the upper plate, the two displacement holes being opened to have the same length along the aforementioned longitudinal direction of the probe. The anchor is configured to have an inclined surface that is inclined relative to the probe toward the aforementioned upper plate while facing the lower plate in the aforementioned longitudinal direction of the probe. The probe has a horizontal plane facing the upper plate in the longitudinal direction of the probe, the horizontal plane being at an angle to the probe; it has a curved surface in the longitudinal direction of the probe between the inclined plane and the horizontal plane; it has an elastic hole formed on the anchor along the inclined plane, the curved surface and the horizontal plane; and it allows the elastic hole to communicate with the displacement hole located around the anchor so as to be close to the anchor.

7. A probe head configured such that, when a target substrate is located below a space conversion unit of a probe card, the probe head is positioned between the space conversion unit and the target substrate to contact the electrical pads of the space conversion unit and the substrate pads of the target substrate, the probe head comprising: A probe, in the form of a pin, is positioned from the aforementioned test target substrate toward the aforementioned spatial conversion unit. The probe has a displacement portion and an elastic portion located near the aforementioned spatial conversion unit and the aforementioned test target substrate, respectively. A lower plate and an upper plate are sequentially located in the longitudinal direction of the probe. The lower plate and the upper plate are configured to surround the aforementioned displacement portion. The probe has an anchor protruding from the probe at the aforementioned displacement portion, and the lower plate and the upper plate are located around the anchor so as to be spaced apart from each other on the probe. The displacement portion is configured to have a displacement hole portion located between the lower plate and the upper plate in the aforementioned longitudinal direction of the probe, the displacement hole portion extending toward the lower plate and the upper plate. The anchor has the aforementioned anchor around the displacement hole portion. The displacement hole portion has two displacement holes formed in a straight line from the lower plate toward the upper plate. The two displacement holes are opened to have the same length along the aforementioned longitudinal direction of the probe. The anchor is configured to have a first inclined surface that is inclined relative to the probe toward the aforementioned upper plate and faces the aforementioned lower plate in the aforementioned longitudinal direction of the probe. It has a second inclined surface that is inclined relative to the aforementioned probe toward the aforementioned upper plate and faces the aforementioned upper plate in the aforementioned longitudinal direction of the aforementioned probe; it has a curved surface in the aforementioned longitudinal direction of the aforementioned probe between the aforementioned first inclined surface and the aforementioned second inclined surface; and it has an elastic hole formed on the aforementioned anchor along the aforementioned first inclined surface, the aforementioned curved surface and the aforementioned second inclined surface.

8. The probe head as described in claim 7, wherein, The aforementioned anchor is configured to allow the aforementioned elastic hole to communicate with the aforementioned displacement hole located around the aforementioned anchor, so as to be close to the aforementioned anchor.

9. A probe head configured such that, when a target substrate is located below a space conversion unit of a probe card, the probe head is positioned between the space conversion unit and the target substrate to contact the electrical pads of the space conversion unit and the substrate pads of the target substrate, the probe head comprising: A probe, in the form of a pin, is positioned from the aforementioned test target substrate toward the aforementioned spatial conversion unit. The probe has a displacement portion and an elastic portion located near the aforementioned spatial conversion unit and the aforementioned test target substrate, respectively. A lower plate and an upper plate are sequentially located in the longitudinal direction of the probe. The lower plate and the upper plate are configured to surround the aforementioned displacement portion. The probe has an anchor protruding from the probe at the aforementioned displacement portion, and the lower plate and the upper plate are located around the anchor so as to be spaced apart from each other on the probe. The displacement portion is configured to have a displacement hole portion located between the lower plate and the upper plate in the aforementioned longitudinal direction of the probe, the displacement hole portion extending toward the lower plate and the upper plate. The probe also has the anchor around the aforementioned displacement hole portion. The displacement hole portion has two displacement holes formed in a straight line from the lower plate toward the upper plate, the two displacement holes being opened to have different lengths along the aforementioned longitudinal direction of the probe. The anchor is configured to have an inclined surface that is inclined relative to the probe toward the upper plate while facing the lower plate in the aforementioned longitudinal direction of the probe. The probe has a curved surface facing the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the inclined surface at the probe; a plane is provided between the inclined surface and the curved surface in the longitudinal direction of the probe; an elastic hole is formed on the anchor along the inclined surface, the plane and the curved surface; and the elastic hole is provided to communicate with the displacement hole located around the anchor so as to be close to the anchor.

10. A probe head configured such that, when a target substrate is located below a space conversion unit of a probe card, the probe head is positioned between the space conversion unit and the target substrate to contact the electrical pads of the space conversion unit and the substrate pads of the target substrate, the probe head comprising: A probe, in the form of a pin, is positioned from the aforementioned target substrate toward the aforementioned spatial conversion unit. The probe has a displacement portion and an elastic portion located near the aforementioned spatial conversion unit and the aforementioned target substrate, respectively. A lower plate and an upper plate are sequentially located in the longitudinal direction of the probe. The lower plate and the upper plate are configured to surround the displacement portion. The probe has an anchor protruding from the probe at the displacement portion, and the lower plate and the upper plate are located around the anchor so as to be spaced apart from each other on the probe. The displacement portion is configured to have a displacement hole portion located between the lower plate and the upper plate in the aforementioned longitudinal direction of the probe, the displacement hole portion extending toward the lower plate and the upper plate. It also has the anchor around the displacement hole portion. The displacement hole portion has displacement holes located in a lower region, a middle region, and an upper region of the displacement hole portion. The displacement hole is opened to have a larger size in the middle region than in the lower and upper regions along the aforementioned longitudinal direction of the probe. The anchor is configured to... The anchor has an inclined surface that is tilted relative to the probe toward the upper plate and faces the lower plate in the longitudinal direction of the probe; a curved surface that faces the upper plate in the longitudinal direction of the probe, the curved surface being bent to be more inclined than the inclined surface at the probe; a plane between the inclined surface and the curved surface in the longitudinal direction of the probe; an elastic hole formed on the anchor along the inclined surface, the plane and the curved surface; and allows the elastic hole to communicate with the displacement hole around the anchor.

Images