Multichannel manifold cold plate
Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Patents
- Current Assignee / Owner
- 3M INNOVATIVE PROPERTIES CO
- Filing Date
- 2022-03-15
- Publication Date
- 2026-08-01
AI Technical Summary
Current cooling methods for high-power electronic devices, such as forced air convection, are inadequate for maintaining acceptable operation temperatures, and microchannel-based liquid cooling solutions face challenges with high pressure drop due to reduced channel size.
A multi-channel manifold cold plate design with staggered inlets and outlets, interleaved inlet and outlet channels, and varying channel sizes to optimize coolant distribution, achieving low thermal resistance and pressure drop.
The design provides efficient and uniform coolant distribution across microchannels, reducing thermal resistance and pressure drop while maintaining effective heat transfer.
Smart Images

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Abstract
Description
Prior Technology
[0001] Currently, most chip components in electronic devices are cooled by forced air convection, but this cooling method is insufficient for next-generation, higher-power electronic devices that require efficient and dense cooling solutions to maintain acceptable operating temperatures. Liquid cooling of these electronic components (such as central processing units (CPUs)) using microchannel cold plates (also known as direct chip cooling) has been increasingly adapted as an effective cooling solution for server thermal management in data centers. The high cooling efficiency of microchannel-based cold plates can be achieved by reducing the channel size. However, reducing the channel size can lead to high voltage drops, which is a drawback for microchannel-based cooling solutions. Summary of the Invention
[0002] A first multi-channel manifold cold plate includes a cold plate and microchannels on the cold plate. A plurality of inlets on the microchannels deliver a cooling fluid to the microchannels, and a plurality of outlets on the microchannels receive the cooling fluid from the microchannels. The inlets and outlets are staggered.
[0003] A second multi-channel manifold cold plate includes a cold plate and microchannels on the cold plate. A main inlet is located on one side of the microchannels relative to the cold plate and includes an inlet channel in fluid communication with the main inlet, wherein a nozzle is located adjacent to the microchannels on the inlet channel. A main outlet is located on one side of the microchannels relative to the cold plate and includes an outlet channel in fluid communication with the main inlet, wherein a nozzle is located adjacent to the microchannels on the outlet channel.
[0004] The inlet channels and the outlet channels are interleaved. The main inlet delivers a cooling fluid to the cold plate microchannels via the manifold inlet channels and nozzles, and the main outlet receives the cooling fluid from the microchannels via the outlet channels and nozzles. Simple Explanation of the Diagram
[0005] 10: Multi-channel manifold 12: Cold Plate 14: Integrated circuit chip / chip 16: Cold Plate 18: Microchannel 20: Entrance 22: Exports 24: Cold Plate 26:Main entrance 28: Main Export 29: Entrance passage 30: Microchannel 32: Export Channel 54:Main entrance 56: Main Export 60: Entrance passage 62: Export Channel 64: Microchannel 66: Entrance passage 68: Inlet nozzle 70: Cold Plate 72: Exit Nozzle 74: Export Channel 90: Cold Plate 92: Microchannel 94: Channel 96: Cold Plate 98: Microchannel 100: Channel
[0006] [Figure 1] is a side view of the manifold cold plate. [Figure 2] is a perspective view of a multi-channel manifold flow pattern with three inlets and four outlets. [Figure 3] is a cross-sectional view showing the coolant distribution in the multi-channel manifold cold plate of Figure 2. [Figure 4A] is a side view of the entrance and exit located at the top of the manifold. [Figure 4B] is a perspective view showing the entrance path of the manifold channel in Figure 4A. [Figure 4C] is a perspective view showing the outlet path of the manifold channel in Figure 4A. [Figure 5] is a side view of a multi-channel flow manifold with three inlets and two outlets. [Figure 6A] is a perspective view showing the configuration and components of the inlet in the multi-channel manifold of Figure 5. [Figure 6B] is a perspective view showing the configuration and components of the outlet in the multi-channel manifold of Figure 5. [Figure 7A] is a perspective view of the two-section microchannel cold plate. [Figure 7B] is a perspective view of the four-segment microchannel cold plate. Implementation
[0007] Examples include manifold designs for thermal management of high-power-density electronic devices. These designs achieve low thermal resistance and low pressure drop. The manifolds can be attached to or integrated with microchannel cooling devices. These manifold designs can include a multi-channel manifold with multiple inlets and outlets for delivering cooling fluid to the microchannels; or a single main inlet and outlet with multiple distributed channels for delivering cooling fluid. Alternatively, these designs can be used without microchannels. The inlet-to-outlet ratio and the number of distributed channels can be configured to provide high cooling performance while maintaining a relatively low pressure drop. Varying the size of the distributed channels also helps to provide uniform flow across the microchannels.
[0008] Figure 1 is a side view of a multichannel manifold 10 used to provide cooling fluid or coolant to a cold plate 12 with microchannels for cooling integrated circuit chips 14 or other electronic components. A thermal interface material may be located between the cold plate 12 and the chip 14. These electronic components may be located, for example, in a data center or other location.
[0009] Figure 2 is a perspective view of a multi-channel manifold configuration with three inlets 20 and four outlets 22 on a cold plate 16 having microchannels 18. Figure 3 is a cross-sectional view showing the coolant distribution within the multi-channel manifold between the inlets 20 and outlets 22. As shown, the inlets 20 and outlets 22 are located on the microchannels 18, for example, at a 90° angle or substantially perpendicular to the microchannels 18, to achieve the desired flow length and distribution of the coolant.
[0010] Furthermore, inlets 20 and outlets 22 are staggered, meaning that these inlets and outlets alternate. These inlets and outlets can be staggered on a one-to-one basis, with one inlet alternating with one outlet, or on other bases, such as two inlets alternating with one outlet, or one inlet alternating with two outlets. The staggered type of inlets and outlets can be determined, for example, based on the desired coolant flow and distribution between the microchannels. This configuration of inlets and outlets provides an effective reduction in the coolant flow length from inlet to outlet and guides the introduction of coolant flow at the inlet location.
[0011] Figure 4A is a side view of the inlet and outlet at the top of the manifold passage. Figures 4B and 4C are perspective views of the inlet and outlet paths of the manifold passage in Figure 4A, respectively. As shown in Figure 4A, this manifold has a main inlet 26, which provides cooling fluid to inlet passage 29 and subsequently to microchannels 30 on the cold plate 24. Figure 4B shows the main inlet 26 providing cooling fluid to two inlet passages 29 for delivery of cooling fluid via inlet nozzles to the microchannels 30. Figure 4C shows two outlet passages 32 for receiving cooling fluid from the microchannels 30 and delivering cooling fluid to the main outlet 28.
[0012] The configurations shown in Figures 4A to 4C have the same number of inlet and outlet channels, providing distribution channels between the main inlet to the manifold channel and the main outlet. The coolant flow and distribution pattern is indicated by the arrows in Figures 4A to 4C. As shown, the main inlet 26 and main outlet 28 are located, for example, at a 90° angle to or substantially perpendicular to the microchannel 30, to achieve the desired flow length and distribution of the coolant.
[0013] The inlet channel 29 and outlet channel 32 are staggered, meaning that these inlet channels and outlet channels alternate. This staggering can be, for example, a one-to-one basis or other basis, as depicted in Figures 2 and 3. The inlet and outlet distribution channels help to efficiently distribute coolant into the manifold microchannels. Furthermore, the distribution channels with nozzles introduce coolant impact onto the microchannels, thereby enhancing heat transfer efficiency.
[0014] Figure 5 is a side view of a multi-channel flow manifold having three inlet channels 60 and two outlet channels 62 for supplying cooling fluid to microchannels 64. In the configuration shown in Figure 5, one inlet channel is located at the center of the manifold, and the other two inlet channels are located at either end or side of the manifold. The outlet channels are located between the center and the end inlet channels.
[0015] Figures 6A and 6B are perspective views illustrating the configuration and components of the inlet and outlet of the multi-channel manifold in Figure 5, respectively. As shown in Figure 6A, a main inlet 54 provides cooling fluid to three inlet channels 66, each having an inlet nozzle 68 that delivers cooling fluid to microchannels 64 on the cold plate 70. As shown in Figure 6B, a main outlet 56 receives cooling fluid from two outlet channels 74, each having an outlet nozzle 72 that receives cooling fluid from the microchannels 64 on the cold plate 70.
[0016] As shown in the figure, the main inlet 54 and the main outlet 56 are located, for example, at a 90° angle to or substantially perpendicular to the microchannel 64, to achieve the desired flow length and distribution of the coolant. The inlet channel 66 is staggered with the outlet channel 74, meaning that the inlet channels and the outlet channels alternate. This staggering can be, for example, a one-to-one foundation or other foundations, as described in Figures 2 and 3.
[0017] The following configurations of the multichannel manifolds shown in Figures 6A and 6B offer the advantages of both low pressure drop and low thermal resistance. The inlet and outlet channels can include spray nozzles or snouts, as shown. The central inlet channel can be 1 mm wide, and the end inlet channels can be 250 μm or 500 μm wide to provide a lower pressure drop and thermal resistance than central flow in the multichannel manifold, while maintaining a similar or more uniform temperature gradient from the heat source. Both inlet channel width configurations (250 μm for the central inlet channel and 500 μm for the end inlet channels) provide low pressure drop.
[0018] The manifold distribution inlet and outlet channels can have different sizes. The central inlet channel can be smaller (with a width less than that of the outer inlet channels) for better flow distribution uniformity. The spray nozzles or orifices of the central inlet channel can also have varying sizes for better fluid distribution uniformity. Depending on, for example, the desired coolant flow and distribution pattern, the outlet channel can be designed in a manner similar to or different from the inlet channel.
[0019] Table 1 provides parameters for two exemplary designs based on the configurations shown in Figures 6A to 6B.
[0020] The following are illustrative materials and configurations used for the manifolds described herein.
[0021] The inlet, outlet, main inlet, main outlet, channel, and nozzle can be made of various materials with low thermal conductivity, such as injection-molded plastics, composite materials, or low thermal conductivity metals. For example, these components can be made of copper with high thermal conductivity. Copper can be treated to reduce the risk of oxidation (e.g., nickel plating, passivation, etc.). Other possible materials are aluminum, silver, and eutectic alloys of silver and copper.
[0022] Cold plates can be made of, for example, copper or other metals with high thermal conductivity.
[0023] Cold plate microchannels can be integrally formed with a cold plate through machining, or formed on the cold plate through lamination (3D printing) or electroplating. Alternatively, cold plate microchannels can be attached to separate components on the cold plate. Cold plate microchannels may include fins, such as the fins shown in microchannel 30 in Figure 4A. The fins are generally continuous and parallel to each other across a section of the cold plate for cooling. Alternatively, the fins may be discontinuous, non-parallel, or curved or wavy in cross-section. Fins or other microchannel structures can be segmented as shown in Figures 7A and 7B. Figure 7A is a perspective view of a cold plate 90 with two segmented microchannels 92 forming channel 94. Figure 7B is a perspective view of a cold plate 96 with four segmented microchannels 98 forming channel 100. The cold plate microchannel can have, for example, a channel with a pitch of about 200 micrometers and a width of 100 micrometers, or a pitch of up to 600 micrometers and a width of 300 micrometers. The width of the microchannel can be, for example, from 50 micrometers to 1000 micrometers, and the height is from 100 micrometers to 5 mm.
Claims
1. A multi-channel manifold cold plate comprising: a cold plate; microchannels, etc., attached to the cold plate; a plurality of inlets, etc., attached to the microchannels for delivering a cooling fluid to the microchannels, the central inlet having a width smaller than the width of the outer inlets; and a plurality of outlets, etc., attached to the microchannels for receiving the cooling fluid from the microchannels, wherein the inlets and outlets are staggered.
2. As in request item 1, the number of one of the outlets is greater than the number of one of the inlets.
3. A multi-channel manifold as requested in item 1, wherein the inlets are interleaved with the outlets on a one-to-one basis.
4. A multichannel manifold as requested in claim 1, wherein the inlets are substantially perpendicular to the microchannels.
5. A multichannel manifold as claimed in claim 1, wherein the outlets are substantially perpendicular to the microchannels.
6. A multichannel manifold as claimed in claim 1, wherein the microchannels comprise fins.
7. A multichannel manifold as requested in item 1, wherein the microchannels are segmented.
8. A multichannel manifold as requested in item 7, wherein the segmented microchannels form a channel.
9. A multi-channel manifold cold plate comprising: a cold plate; microchannels, etc., attached to the cold plate; a main inlet attached to one side of the microchannels opposite to the cold plate; a plurality of inlet channels in fluid communication with the main inlet, the central inlet channel having a width smaller than the width of the outer inlet channels; a plurality of inlet nozzles adjacent to the microchannels on the inlet channels; a main outlet attached to one side of the microchannels opposite to the cold plate; a plurality of outlet channels in fluid communication with the main outlet; and a plurality of outlet nozzles adjacent to the microchannels on the outlet channels, wherein the inlet channels and the outlet channels are interleaved, the main inlet delivers a cooling fluid to the microchannels via the inlet channels and the inlet nozzles, and the main outlet receives the cooling fluid from the microchannels via the outlet channels and the outlet nozzles.
10. The multi-channel manifold cold plate as claimed in claim 9, wherein the number of one of the inlet channels is equal to the number of one of the outlet channels.
11. The multi-channel manifold cold plate as claimed in claim 9, wherein the number of one of the inlet channels is greater than the number of one of the outlet channels.
12. The multi-channel manifold cold plate as claimed in claim 9, wherein the inlet channels are interleaved with the outlet channels on a one-to-one basis.
13. The multi-channel manifold cold plate as claimed in claim 9, wherein the main inlet is substantially perpendicular to the microchannels.
14. The multi-channel manifold cold plate as claimed in claim 9, wherein the main outlet is substantially perpendicular to the microchannels.
15. The multi-channel manifold cold plate of claim 9, wherein the plurality of inlet nozzles are spaced apart from the microchannels.
16. The multi-channel manifold cold plate of claim 9, wherein the plurality of outlet nozzles are spaced apart from the microchannels.
17. The multi-channel manifold cold plate of claim 9, wherein the microchannels comprise fins.
18. The multi-channel manifold cold plate as requested in item 9, wherein the microchannels are segmented.
19. The multi-channel manifold cold plate of claim 18, wherein the segmented microchannels form a channel.