Substrate removal method and substrate transfer system

Abstract

The substrate removal method of the present invention includes: a first moving step, in which a robot arm is moved to insert an extension portion of the robot arm into the receiving container through the opening of the receiving container; a first detection step, in which the position of the edge of the substrate is determined by the substrate detection portion of the robot arm; a first stopping step, in which the movement of the robot arm is stopped; a calculation step, in which the tilt of the substrate relative to the robot arm is calculated based on the detected position of the edge of the substrate; a correction step, in which the position and posture of the robot arm are corrected based on the calculated tilt of the substrate while the extension portion is located in the receiving container; a substrate supporting step, in which the substrate is supported by the substrate supporting portion of the robot arm; and a removal step, in which the robot arm supporting the substrate is moved to remove the substrate from the receiving container.

Description

Substrate removal method and substrate transfer system The present invention relates to a substrate removal method and a substrate transfer system. Previously, in the manufacturing field of semiconductors and the like, there has been the following technology: An industrial substrate transfer robot provided in a substrate transfer device is used to take out a substrate (for example, a wafer, a glass substrate, etc.) from a container that houses the substrate, transfer it to various processing devices, and process the transferred substrate. The substrate transfer robot includes a robotic arm and a robotic hand mounted at the front end of the robotic arm, and the substrate is transferred while being held by the robotic hand. For example, as a method of transferring a substrate using a substrate transfer robot, various techniques have been disclosed regarding the following substrate removal method: In this substrate removal method, the robotic hand is inserted into a container that houses the substrate, and the substrate is supported from below, thereby lifting the substrate from the placement portion in the container and taking out the substrate from the container as the robotic arm moves. [Prior Art Documents] [Patent Documents] Patent Document 1: Japanese Patent Application Laid-Open No. 2001-135706 [Problems to be Solved by the Invention] In recent years, in the field of semiconductor devices, the integration degree of devices has increased, and on the other hand, the miniaturization of devices has also advanced. Along with this, as a packaging technology for devices with a high integration degree, a method called Panel Level Packaging (hereinafter, referred to as PLP) is becoming popular. PLP is a method of manufacturing a plurality of semiconductor packages together by arranging a plurality of wafers on a rectangular panel, and various industrial robots are used in the production line of semiconductor packages using PLP. In a front opening unified pod (FOUP) serving as a container for accommodating a substrate, placement portions (hereinafter referred to as slots) for the substrate are formed at equal intervals, and the substrate is placed on each slot. However, there are deviations in the size of the substrate (for example, the size in the horizontal direction), and due to reasons such as deviations in the size of the substrate, structure, and cost, the inside of the FOUP is configured to have a margin in the horizontal direction (front, back, left, and right) when the substrate is placed, and sometimes it cannot be positioned. Therefore, due to the posture when placing the substrate in the FOUP serving as the container or vibrations during transportation, etc., the substrate in the FOUP may sometimes be placed inclined relative to the FOUP on the horizontal plane (the case where the edge E1 and edge E2 of the substrate are not parallel to the inner wall surface of the container H; refer to FIG. 7). Here, there are portions on the lower surface of the substrate that can be contacted by the substrate support portion of the robot hand (hereinafter referred to as the contactable area), and non-contactable portions (hereinafter referred to as the non-contactable area). However, when the substrate is accommodated in the container in an inclined state on the horizontal plane, the position of the contactable area is also different. Therefore, when the robot hand supports the substrate in an inclined state at a fixed position (fixed support position), the substrate support portion of the robot hand contacts the non-contactable area of the substrate, and there is a risk of damage or adhesion of particles in the non-contactable area. Based on the above, there is a need to find a substrate removal method and a substrate transfer system using the substrate removal method that can avoid damage caused by the inclination of the substrate on the horizontal plane when removing the substrate accommodated in the container. Therefore, the present invention provides a substrate removal method that can improve the control stability when removing the substrate, and a substrate transfer system using the substrate removal method. [Means for Solving the Problem] In order to achieve the above object, according to the present invention, there is provided a substrate taking-out method. The substrate taking-out method takes out a substrate placed at a specified position in a storage container having an opening on one side in a first direction by means of a robot arm provided on a substrate transfer robot. The substrate taking-out method is characterized in that the robot arm includes a hand base portion, an extended portion extending from the hand base portion to one side in a second direction, a substrate detection portion provided on the extended portion, and a substrate support portion provided on the extended portion, and is controlled by a control device. The substrate taking-out method includes: a first moving step of moving the robot arm to the other side in the first direction and inserting the extended portion into the storage container through the opening; a first detecting step of determining the position of at least one linear edge portion of the substrate according to a change in the detection state of the substrate by the substrate detection portion in the first moving step; a first stopping step of stopping the movement of the robot arm toward the other side in the first direction; a calculating step of calculating the inclination of the substrate with respect to the robot arm based on the position of the edge portion of the substrate detected in the first detecting step; a correcting step of correcting the position and posture of the robot arm based on the inclination of the substrate calculated in the calculating step; a substrate supporting step of supporting the substrate by the substrate support portion; and a taking-out step of moving the robot arm supporting the substrate to one side in the first direction to take out the substrate from the storage container. In the correcting step, the correction is performed in a state where the extended portion of the robot arm is inside the storage container. In order to achieve the above object, according to the present invention, there is provided a substrate transfer system. The substrate transfer system includes: a substrate transfer robot including a robot arm for supporting a substrate and a moving mechanism for movably holding the robot arm; a substrate transfer module in which the substrate transfer robot is provided; and a control device for controlling the substrate transfer robot. The substrate transfer system is characterized in that the robot arm of the substrate transfer robot includes a hand base portion, an extended portion extending from the hand base portion to one side in a second direction, a substrate detection portion provided on the extended portion, and a substrate support portion provided on the extended portion, and is controlled by the control device. The control device controls the substrate transfer robot by the substrate taking-out method and takes out a substrate placed at a specified position in a storage container by using the robot arm. [Effects of the Invention] According to the present invention, the substrate taking-out method and the substrate transfer system applying the substrate taking-out method can correct the position and posture of the robot arm based on the inclination on the horizontal plane of the substrate stored in the storage container and take out the substrate after supporting the substrate. Here, with reference to the exemplary embodiments of the present invention, examples of the exemplary embodiments are shown in the accompanying drawings. Hereinafter, a description will be given of the flow of the robot arm 100 of the present embodiment, the substrate transfer robot 30 equipped with the robot arm 100, the substrate transfer system 20 to which the substrate transfer robot 30 is applied, and the substrate removal method of removing the substrate W using the robot arm 100 by combining FIGS. 1 to 12F. Here, the positions or operations of the substrate transfer system 20, the substrate transfer robot 30, and the accommodation container H for accommodating the substrate W are described with reference to the left-right direction X, the front-back direction Y, and the up-down direction Z of the spatial coordinate system XYZ, and the positions or operations of the robot arm 100 are described with reference to the left-right direction X1, the front-back direction Y1, and the up-down direction Z1 of the spatial coordinate system XYZ. The left-right direction X1, the front-back direction Y1, and the up-down direction Z1 of the robot arm 100 may sometimes coincide with the left-right direction X, the front-back direction Y, and the up-down direction Z depending on the posture of the robot arm 100, but may sometimes be inclined with respect to the left-right direction X, the front-back direction Y, and the up-down direction Z. Furthermore, this is only an example of the present invention, and the present invention is not limited thereto. First, with reference to FIGS. 1 to 3, the substrate transfer system 20 of the present embodiment, the substrate transfer robot 30 applied to the substrate transfer system 20, the robot arm 100 mounted on the substrate transfer robot 30, and the accommodation container H for accommodating the substrate W will be described. In the present embodiment, the substrate transfer system 20 includes: a substrate transfer robot 30 including a robot arm 100; a substrate transfer module 22 in which the substrate transfer robot 30 is provided; at least one load port C1 disposed on one side (for example, the front side) of the substrate transfer module 22; at least one processing device C2 disposed on the other side (for example, the rear side) of the substrate transfer module 22; and a control unit 24 that controls the substrate transfer robot 30. Here, the substrate transfer module 22 is, for example, an Equipment Front End Module (EFEM), the load port C1 is a device for placing and accommodating the accommodation container H (for example, FOUP) for accommodating the substrate W and opening and closing the door of the accommodation container H, and the processing device C2 is a device for processing the substrate W. The type of the processing device C2 can be selected according to the content of the steps for processing the substrate W (for example, processing required for semiconductor manufacturing steps such as ion implantation or etching). In other embodiments not shown, a load lock chamber may be further provided between the substrate transfer module 22 and the processing device C2. However, the present invention is not limited thereto. Specifically, the substrate transfer module 22 includes a housing 22a, a substrate transfer robot 30 disposed inside the housing 22a, a moving body 22b for moving the substrate transfer robot 30, and a guiding structure 22c for guiding the movement of the substrate transfer robot 30. The housing 22a is disposed between the load port C1 and the processing device C2 (or the load locking chamber), connecting the load port C1 and the processing device C2 (or the load locking chamber). Inside the housing 22a, components such as the moving body 22b, the guiding structure 22c, and the substrate transfer robot 30 are provided. The moving body 22b is mounted on a guiding structure 22c (e.g., a slide rail structure, a conveyor drive device, etc.) for guiding movement in the left-right direction X, and is disposed in the housing 22a so as to be able to move freely along the guiding structure 22c. The substrate transfer robot 30 is mounted on the moving body 22b and can move (slide) in the left-right direction X by the moving body 22b and the guiding structure 22c. Thereby, the substrate transfer robot 30 can access either the load port C1 or the processing device C2 (or the load locking chamber) freely. In addition, the substrate transfer robot 30 includes a manipulator 100 for supporting the substrate W and a moving mechanism (e.g., including an arm portion 32, a main body portion 34, and an arm drive portion 36) for holding the manipulator 100 in a movable manner. The main body portion 34 is mounted on the moving body 22b and moves in the left-right direction X by the moving body 22b and the guiding structure 22c. The arm portion 32 is mounted at the upper end of the main body portion 34 so as to be able to extend, retract, rotate in a horizontal plane (a hypothetical horizontal plane formed by the left-right direction X and the front-back direction Y), and also be able to lift and lower in the up-down direction Z with respect to the main body portion 34. The arm drive portion 36 is, for example, a motor or a transmission mechanism built into the main body portion 34, which gives a driving force to the arm portion 32, but it can also be mounted outside the main body portion 34. The manipulator 100 is mounted at the front end of the arm portion 32. Therefore, the substrate transfer robot 30 not only moves in the left-right direction X via the main body portion 34 by the moving body 22b and the guiding structure 22c, but also drives the arm portion 32 via the arm drive portion 36, whereby the manipulator 100 can move freely (lift, rotate, move back and forth). As an example, the substrate W is, for example, a glass substrate for PLP, and is housed in a housing container H for housing the substrate W. The FOUP as the housing container H has, for example, multi-level (e.g., 12-level) slots S (shown in FIG. 3), and the substrate W is placed on each of the multi-level slots S, whereby a plurality of substrates W can be housed. The slot S is a plate member that protrudes from the inner wall of the housing container H and supports both end portions of the substrate W in the left-right direction X. Furthermore, the number of substrates W housed in the housing container H can be appropriately selected, and the present invention is not limited thereto. In addition, the FOUP as the housing container H is placed on the load port C1. By opening the door of the housing container H using the load port C1, the substrate W housed in the housing container H faces the inside of the frame 22a of the substrate transfer module 22. After opening the door of the housing container H, the substrate transfer robot 30 moves the arm member 32 via the arm drive unit 36 and moves the robot hand 100 below the corresponding substrate W. Then, by supporting the substrate W using the substrate support portion 140 of the robot hand 100 and moving the robot hand 100 to the outside of the housing container H, the substrate W is taken out from the housing container H and carried into the inside of the frame 22a. Therefore, the control device 24 of the substrate transfer system 20 can control the substrate transfer robot 30 by the substrate taking-out method described later and take out the substrate W placed at a specified position in the housing container H by the robot hand 100. In other embodiments not shown, structures such as the moving body 22b and the guiding structure 22c provided in the frame 22a of the substrate transfer module 22 may be omitted, and the substrate transfer robot 30 may be fixed to the frame 22a (for example, the main body 34 of the substrate transfer robot 30 is fixed to the lower part of the frame 22a). In this case, the substrate transfer robot 30 itself cannot move relative to the substrate transfer module 22, but the substrate W can be transferred between the load port C1 and the processing device C2 by the expansion and contraction, lifting, and rotation around the main body 34 of the arm portion 32 having a plurality of joints. The specific structures and the configuration relationship of the substrate transfer module 22, the load port C1, and the processing device C2 of the substrate transfer system 20, or the specific structure of the substrate transfer robot 30 can be adjusted as needed. The present invention is not limited thereto. Next, the shape of the substrate W will be described with reference to FIG. 4. FIG. 4 is a view of the substrate W observed from below (for example, a view when observing the side indicated by the arrow from the opposite side of the side indicated by the arrow in the vertical direction Z). The substrate W is a plate material having a rectangular shape with a thickness. Here, the bottom surface of the substrate W has a contactable contactable area R1 such as the substrate support portion 140 of the robot 100 in FIG. 2 or the groove S of the storage container H in FIG. 3, and a non-contactable non-contact area R2. In the present embodiment, four non-contact areas R2 are equally provided on the bottom surface of the substrate W, and the contactable area R1 (the hatched portion in FIG. 4) is provided so as to cover the periphery of each non-contact area R2. However, in other embodiments not shown, the number, size, relative position, etc. of the contactable area R1 and the non-contact area R2 may vary depending on the type or size of the substrate W. The present invention is not limited thereto. Next, with reference to FIGS. 5 to 6, the specific structure of the robot 100 in the present embodiment and the operation when taking out the substrate W will be described. In the present embodiment, the robot 100 can be applied to take out the substrate W placed at a specified position in the storage container H having an opening O on one side in the first direction (here, the side opposite to the side indicated by the arrow in the front-rear direction Y). Among them, the robot 100 of the substrate transfer robot 30 includes a hand base portion 110, an extended portion 120 extending from the hand base portion 110 to one side in the second direction (here, the side indicated by the arrow in the front-rear direction Y1), a substrate detection portion 130 provided on the extended portion 120, and a substrate support portion 140 provided on the extended portion 120, and is controlled by the control device 24. That is, the substrate taking-out method described below is a method of controlling the robot 100 of the substrate transfer robot 30 by the control device 24 and taking out the substrate W stored in the storage container H from the opening O by the robot 100 provided on the substrate transfer robot 30. Specifically, the robot hand 100 is mounted, for example, on the arm 32 of the substrate transfer robot 30, and transfers the substrate W while holding it according to the movement of the arm 32. Among them, the hand base portion 110 is connected to the arm 32 (shown in FIG. 2), and the extending portion 120 extends from the hand base portion 110 to one side in the second direction (the side indicated by the arrow in the front-rear direction Y1). In the present embodiment, two extending portions 120 separated in the third direction (here, the left-right direction X1) orthogonal to the second direction extend from the hand base portion 110, and the robot hand 100 is configured in a substantially Y shape. The substrate support portion 140 is provided on the extending portion 120 and can support the substrate W from the lower surface of the substrate W. As an example, a plurality of substrate support portions 140 are provided on the extending portion 120. For example, the substrate support portion 140 includes a first substrate support portion 140A, a second substrate support portion 140B, and a third substrate support portion 140C. Among them, the first substrate support portion 140A is provided on one side in the second direction (the side indicated by the arrow in the front-rear direction Y1) of the extending portion 120, that is, the front end side. The second substrate support portion 140B is provided on the other side in the second direction of the extending portion 120 (here, the side opposite to the side indicated by the arrow in the front-rear direction Y1), that is, the base end side. The third substrate support portion 140C is provided between the first substrate support portion 140A and the second substrate support portion 140B in the extending direction of the extending portion 120, that is, the second direction (front-rear direction Y1). In the present embodiment, the first substrate support portion 140A, the second substrate support portion 140B, and the third substrate support portion 140C are respectively provided on the two extending portions 120. In addition, in the present embodiment, as shown in FIG. 4, the lower surface of the substrate W has a contactable area R1 and a non-contactable area R2. Here, regarding the substrate support portion 140, when the robot hand 100 and the substrate W are in an appropriate positional relationship (for example, when the relative position and posture of the robot hand 100 with respect to the substrate W are in a specified position and posture), all the substrate support portions 140 are arranged so as to contact only the contactable area R1 of the substrate W in the substrate support step after the correction step described later. Furthermore, the robot hand 100 can also be provided with a restricting portion 150 as needed. The restricting portion 150 is used to restrict the position of the substrate W supported by the extending portion 120. For example, a first restricting portion 150A is provided on one side in the second direction of the extending portion 120 (the side indicated by the arrow in the front-rear direction Y1), that is, the front end side, and a second restricting portion 150B is provided on the other side in the second direction of the extending portion 120 (the side opposite to the side indicated by the arrow in the front-rear direction Y1), that is, the base end side. Thereby, when the substrate support portion 140 supports the substrate W, the first restricting portion 150A can abut against the end surface on the other side in the first direction of the substrate W (the side indicated by the arrow in the front-rear direction Y), and the second restricting portion 150B can abut against the end surface on one side in the first direction of the substrate W (here, the side opposite to the side indicated by the arrow in the front-rear direction Y). These substrate support portions 140 and the restricting portion 150 are provided on the upper surface 122 of the extending portion 120 (shown in FIG. 5) so as to be capable of being accommodated or deployed, and can be driven by a driving portion 160 provided on the hand base portion 110 or the extending portion 120. As an example, the driving source of the driving portion 160 is provided on the hand base portion 110 through a mounting plate 124. However, the number and installation position of the substrate support portions 140, the provision or non-provision of the restricting portion 150 and the driving portion 160, or the type and installation position of the driving portion 160, etc. can also be adjusted as needed. The present invention is not limited thereto. In addition, a substrate detection unit 130 is disposed in the extended setting unit 120 to detect the presence or absence of a substrate in the upper part of the substrate detection unit 130. The substrate detection unit 130 can determine the position of the edge E of the substrate W based on the switching of the detection status when the substrate detection unit 130 passes below the edge of the substrate W. Here, for the substrate W, a rectangular substrate (for example, a substantially rectangular shape) is taken as an example, but a substrate having a shape such as a polygon (for example, a hexagon) can also be used. The substrate W only needs to have at least one linear edge E. As shown in FIG. 6, in a state of being placed in the accommodation container H, the substrate W has: an edge E1, corresponding to one side in the first direction of the accommodation container H (the side opposite to the side indicated by the arrow in the front-rear direction Y) and close to the opening O; and an edge E2, corresponding to the other side in the first direction (the side indicated by the arrow in the front-rear direction Y) and away from the opening O. In contrast, the substrate transfer robot 30 moves the robot arm 100 to the other side in the first direction of the accommodation container H (the side indicated by the arrow in the front-rear direction Y), inserts the extended setting unit 120 into the accommodation container H from the opening O, and thereby determines the position of either the edge E1 or the edge E2 of the substrate W by using the substrate detection unit 130 that passes below the substrate W. The inclination of the substrate W relative to the robot arm 100 is calculated based on the determined position of either the edge E1 or the edge E2 of the substrate W, and the position and posture of the robot arm 100 are corrected based on the calculated inclination of the substrate W. Next, the substrate W is supported by the substrate support unit 140, and the robot arm 100 supporting the substrate W is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y) to take out the substrate W from the accommodation container H. The following example is given to illustrate the position where the substrate detection unit 130 is disposed in the extended setting unit 120. In the present embodiment as the first embodiment, the substrate detection unit 130 includes a first substrate detection unit 130a and a second substrate detection unit 130b. Among them, the first substrate detection unit 130a and the second substrate detection unit 130b are respectively disposed on one side (the side indicated by the arrow in the front-rear direction Y1) in the second direction of the two extending portions 120, that is, the front end side (the side of the extending portion 120 away from the hand base portion 110). That is, the first substrate detection unit 130a is disposed on the extending portion 120 on the other side (the opposite side of the side indicated by the arrow in the left-right direction X1) in the third direction among the two extending portions 120, and the second substrate detection unit 130b is disposed on the extending portion 120 on one side (here, the side indicated by the arrow in the left-right direction X1) in the third direction. In addition, the first substrate detection unit 130a and the second substrate detection unit 130b respectively disposed on the front end side of the two extending portions 120 are arranged side by side (arranged without offset) in the third direction (left-right direction X1). However, as in the deformation example described later (shown in FIG. 10), the second substrate detection unit 130b may be further disposed separately (that is, offset) from the first substrate detection unit 130a on one side (the side indicated by the arrow in the front-rear direction Y1) in the second direction. Alternatively, only one substrate detection unit 130 may be provided on the front end side, which is one side (the side indicated by the arrow in the front-rear direction Y1) in the second direction of the extending portion 120. In the second embodiment (refer to the examples shown in FIGS. 12A to 12F and the description hereinafter), the substrate detection unit 130 includes a first substrate detection unit 130a and a second substrate detection unit 130b. Among them, the first substrate detection unit 130a and the second substrate detection unit 130b are respectively disposed on the other side (the side opposite to the side indicated by the arrow in the front-rear direction Y1) in the second direction of the two extending portions 120, that is, the base end side (the side of the extending portion 120 close to the hand base portion 110). Similarly, the first substrate detection unit 130a and the second substrate detection unit 130b respectively disposed on the base end side of the two extending portions 120 may be arranged side by side (arranged without offset) in the third direction (left-right direction X1), may be offset in the second direction in an embodiment not shown, or only one substrate detection unit 130 may be provided on the base end side. The present invention is not limited thereto. Here, with reference to the first direction (longitudinal direction Y), the orientation of the opening O of the accommodation container H, the relative positions of the edge portions E1 and E2 of the substrate W placed in the accommodation container H, and the moving direction when the robot arm 100 is inserted into the accommodation container H are defined. With reference to the second direction (longitudinal direction Y1), the extending direction of the extending portion 120 of the robot arm 100 and the position of the substrate detection portion 130 provided on the extending portion 120 are defined. Preferably, at least when the robot arm 100 is inserted into the accommodation container H, the first direction (longitudinal direction Y) and the second direction (longitudinal direction Y1) are parallel. That is, as shown in FIG. 6, the longitudinal direction Y and the longitudinal direction Y1 coincide. In this way, the robot arm 100 inserts the extending portion 120 extending to one side in the second direction (the side indicated by the arrow in the longitudinal direction Y1) into the accommodation container H from the opening O toward the other side in the first direction (the side indicated by the arrow in the longitudinal direction Y), and determines, by means of the substrate detection portion 130 provided on one side in the second direction (the side indicated by the arrow in the longitudinal direction Y1), i.e., the front end side, or the other side in the second direction (the side opposite to the side indicated by the arrow in the longitudinal direction Y1), i.e., the base end side, the position of either the edge portion E1 corresponding to one side in the first direction of the substrate W (the side opposite to the side indicated by the arrow in the longitudinal direction Y) or the edge portion E2 corresponding to the other side in the first direction (the side indicated by the arrow in the longitudinal direction Y), and calculates the inclination of the substrate W with respect to the robot arm 100 based on the determined position of either the edge portion E1 or the edge portion E2 of the substrate W. After correcting the position and posture of the robot arm 100 based on the calculated inclination of the substrate W, the second direction (longitudinal direction Y1) serving as the reference of the robot arm 100 is not limited to being parallel to the first direction (longitudinal direction Y) serving as the reference of the accommodation container H. The second direction (longitudinal direction Y1) of the corrected robot arm 100 is preferably parallel to the center line L of the substrate W in the placed state (as will be described later). Here, the center line L is a line that is orthogonal to the edge portions E1 and E2 and connects the edge portions E1 and E2. Regarding the position of the substrate inspection unit 130 provided in the extension unit 120, in the first embodiment (shown in FIGS. 5 to 6), the substrate inspection unit 130 is provided on one side (the side indicated by the arrow in the front-rear direction Y1) of the second direction of the extension unit 120, that is, the front end side, and includes a first substrate inspection unit 130a and a second substrate inspection unit 130b that are separately provided in a third direction (left-right direction X1) orthogonal to the second direction (front-rear direction Y1). In contrast, in the second embodiment (refer to the example shown in FIGS. 12A to 12F and the description hereinafter), the substrate inspection unit 130 is provided on the other side (the side opposite to the side indicated by the arrow in the front-rear direction Y1) of the second direction of the extension unit 120, that is, the base end side, and includes a first substrate inspection unit 130a and a second substrate inspection unit 130b that are separately provided in a third direction (left-right direction X1) orthogonal to the second direction (front-rear direction Y1). In addition, the substrate W has: an edge portion E1, corresponding to one side of the first direction of the accommodation container H (the side opposite to the side indicated by the arrow in the front-rear direction Y), and located at a position close to the opening O; and an edge portion E2, corresponding to the other side of the first direction (the side indicated by the arrow in the front-rear direction Y), and located at a position far from the opening O. Therefore, for the position of the substrate inspection unit 130 and the position of the predetermined edge portion E to be inspected, there are different parts in the operations of each step of the substrate removal method. Therefore, the substrate removal method of the present invention will be described through the following several examples. The substrate removal method in this embodiment will be described with reference to FIGS. 7 and 8. The substrate removal method is a substrate removal method in which a substrate W placed at a specified position in a storage container H having an opening O on one side in the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y) is removed by a robot hand 100 provided on a substrate transfer robot 30, and includes the following steps. First movement step S01: Move the robot hand 100 to the other side in the first direction (the side indicated by the arrow in the front-rear direction Y), and insert the extension portion 120 under the substrate W in the storage container H from the opening O. First detection step S02: In the first movement step S01, determine the position of at least one linear edge E (either edge E1 or edge E2) of the substrate W based on the change in the detection state of the substrate W by the substrate detection unit 130. First stop step S03: Stop the movement of the robot hand 100 toward the other side in the first direction (the side indicated by the arrow in the front-rear direction Y). Calculation step S04: Calculate the inclination of the substrate W relative to the robot hand 100 based on the position of the edge E (either edge E1 or edge E2) of the substrate W detected in the first detection step S02. Correction step S05: Correct the position and posture of the robot hand 100 based on the position of the edge E determined in the first detection step S02 and the inclination of the substrate W calculated in the calculation step S04. Substrate support step S06: The substrate support portion 140 abuts against the lower side of the substrate W, and the robot hand 100 supports the substrate W. Removal step S07: Move the robot hand 100 supporting the substrate W to one side in the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y) to remove the substrate W from the storage container H. In addition, the correction step S05 includes: an inclination correction step S051 for correcting the posture of the robot hand 100; a second movement step S052 for moving the robot hand 100 so that the substrate detection unit 130 provided on the front end side faces the edge E2 of the substrate W; and a second stop step S053 for stopping the movement in the second movement step S052 of the robot hand 100 when the substrate support portion 140 is located under the substrate W and the substrate detection unit 130 detects the position of the substrate W after the inclination correction step S051 is completed. Here, a substrate removal method (shown in FIGS. 9A to 9F) will be described in which the edge portion E2 of the substrate W located at a position away from the opening O is detected by the substrate detection unit 130 provided at the front end side of the extension unit 120 via the robot 100 (shown in FIGS. 5 to 6) of the first embodiment, and the inclination is corrected to remove the substrate. Here, in order to describe the detection of the substrate detection unit 130, components such as the substrate support unit 140 are omitted from the robot 100 shown in FIGS. 9A to 9D, but it is not limited thereto. First, as shown in FIG. 9A, in the first movement step S01, the robot 100 is moved to the other side in the first direction (the side indicated by the arrow in the front-rear direction Y) so that the extension unit 120 is inserted from the opening O below the substrate W in the accommodation container H. Here, preferably, when the robot 100 is inserted into the accommodation container H, the robot 100 is controlled such that the first direction (front-rear direction Y) of the accommodation container H and the second direction (front-rear direction Y1) of the robot 100 are parallel. In addition, the first detection step S02 determines the position of the edge portion E2 of the substrate W based on the change in the detection state of the substrate W by the substrate detection unit 130 in the first movement step S01. That is, the first detection step S02 is executed when the substrate detection unit 130 provided on the extension unit 120 passes below the edge portion E2 of the substrate W during the movement of the robot 100 in the first movement step S01. In addition, as shown in FIG. 9B, in the first stop step S03, the movement of the robot 100 toward the other side in the first direction (the side indicated by the arrow in the front-rear direction Y) is stopped. That is, when the first stop step S03 is executed, the first movement step S01 ends. Specifically, in the first moving step S01, the robot arm 100 is moved toward the other side of the first direction (the side indicated by the arrow in the front-rear direction Y) to insert the extended installation portion 120 under the substrate W, and the substrate detection portion 130 provided on the front end side of the extended installation portion 120 protrudes from under the substrate W, whereby the substrate detection portion 130 passes under the edge portion E2 of the substrate W. That is, the extended installation portion 120 is moved until the substrate detection portion 130 provided on the front end side of the extended installation portion 120 protrudes from the edge portion E2 of the substrate W. In this case, in the first detection step S02, based on the switching of the detection signals before and after the substrate detection portion 130 passes under the edge portion E2 of the substrate W, it is determined that the detection state of the substrate detection portion 130 with respect to the substrate W has changed, and the position of the edge portion E2 is determined. For example, in the first detection step S02, based on the switching of the detection signals from on to off before and after the substrate detection portion 130 passes under the edge portion E2 of the substrate W on the other side of the first direction of the substrate W (the switching of the state where the substrate detection portion 130 determines that there is the substrate W to the state where it determines that there is no substrate W), the position of the edge portion E2 on the other side of the first direction of the substrate W, which is on the movement path of the substrate detection portion 130, is determined. Further, in the first stop step S03, the movement of the robot arm 100 is stopped at the position where the substrate detection portion 130 protrudes from under the substrate W toward the other side of the first direction (the side indicated by the arrow in the front-rear direction Y). The operations from the first moving step S01 to the first stop step S03 change as shown in FIGS. 9A to 9B, and the first detection step S02 is executed between the first moving step S01 and the first stop step S03. As an example, the execution timing of the first stop step S03 is immediately after the position of the edge portion E2 is determined by the first detection step S02, but it may also be set to the timing when a predetermined time has elapsed after the movement of the robot arm 100 after the position of the edge portion E2 is determined by the first detection step S02, or the timing when the robot arm 100 has moved a predetermined distance after the position of the edge portion E2 is determined by the first detection step S02. The present invention is not limited to this. After the first stop step S03, while maintaining the extended setting part 120 of the robot arm 100 inside the accommodation container H and below the substrate W, the calculation step S04 and the correction step S05 are executed. Specifically, the calculation step S04 calculates the inclination of the substrate W relative to the robot arm 100 based on the position of the edge E2 of the substrate W detected in the first detection step S02. As an example, in the calculation step S04, the direction and amount of inclination of the substrate W on the horizontal plane are calculated. Further, in the correction step S05, the position and posture of the robot arm 100 are corrected based on the inclination of the substrate W calculated in the calculation step S04. In the correction step S05, the correction is performed while the extended setting part 120 of the robot arm 100 is inside the accommodation container H. That is, the position and posture of the robot arm 100 are corrected while the robot arm 100 inserted into the accommodation container H is inside the accommodation container H. As an example, in the present embodiment, a first substrate detection part 130a and a second substrate detection part 130b, which are substrate detection parts 130, are arranged side by side at the front end part of the extended setting part 120 of the robot arm 100. Therefore, as shown in FIG. 9B, when the substrate W placed on the accommodation container H is inclined relative to the robot arm 100, the first substrate detection part 130a and the second substrate detection part 130b pass below the edge E2 of the substrate W at different times or positions. Thereby, as shown in FIG. 7, the first detection step S02 includes: a third detection step S021 of determining the position of the edge E2 of the substrate W located on the movement path of the first substrate detection part 130a based on the change in the detection state of the substrate W by the first substrate detection part 130a; and a fourth detection step S022 of determining the position of the edge E2 of the substrate W located on the movement path of the second substrate detection part 130b based on the change in the detection state of the substrate W by the second substrate detection part 130b. For example, in the third detection step S021, the position of the edge E2 of the substrate W on the other side in the first direction is detected by the switching of the detection signal of the first substrate detection part 130a from on to off (from having the substrate W to not having the substrate W) before and after passing below the edge E2 of the substrate W on the other side in the first direction, and in the fourth detection step S022, the position of the edge E2 of the substrate W on the other side in the first direction is detected by the switching of the detection signal of the second substrate detection part 130b from on to off (from having the substrate W to not having the substrate W) before and after passing below the edge E2 of the substrate W on the other side in the first direction. Then, in the first stop step S03, after the third detection step and the fourth detection step are completed, the movement of the robot arm 100 in the first direction to the other side in the first moving step S01 is stopped at the position where both the first substrate detection part 130a and the second substrate detection part 130b protrude from below the substrate W. Therefore, as shown in FIG. 9B, when the position of the edge portion E2 on the movement path of the first substrate detection unit 130a determined in the third detection step S021 is set as the first edge position P1, and the position of the edge portion E2 on the movement path of the second substrate detection unit 130b determined in the fourth detection step S022 is set as the second edge position P2, in the calculation step S04, based on the first distance information corresponding to the difference D1 in the second direction (front-rear direction Y1) between the first edge position P1 and the second edge position P2, and the second distance information corresponding to the separated distance D2 in the third direction (left-right direction X1) between the first substrate detection unit 130a and the second substrate detection unit 130b, the inclination direction and the inclination amount of the substrate W with respect to the third direction of the robot 100 are calculated (for example, the inclination angle θ shown in FIG. 9B). Then, in the correction step S05, the inclination correction step S051 (shown in FIG. 9C) is executed. Based on the inclination direction and the inclination amount calculated in the calculation step S04, the robot 100 is rotated clockwise or counterclockwise on the horizontal plane. As shown in FIG. 9C, the posture is corrected so that the third direction of the robot 100 is parallel to the edge portion E2 of the substrate W. In addition, at this time, when the substrate W having a rectangular shape is adopted, the second direction (front-rear direction Y1) of the robot 100 is parallel to the center line L of the substrate W. Here, the center line L is a line that is orthogonal to the edge portion E1 and the edge portion E2 and connects the edge portion E1 and the edge portion E2. The operation of the robot 100 in the second movement step S052 is shown in FIG. 9D. In the second movement step S052, the robot 100 is moved so as to face the opening O of the accommodation container H, and the substrate detection unit 130 in a state of protruding from the edge portion E2 of the substrate W is moved downward of the substrate W. For example, in FIG. 9D, the robot 100 is moved in a direction parallel to the second direction (front-rear direction Y1 which is the extending direction of the extending portion 120 of the robot 100), but it may also be moved to one side of the first direction (the opposite side of the side indicated by the arrow in the front-rear direction Y), and in addition, it can also include cases other than linear operations. In addition, for the inclination correction step S051 and the second movement step S052, they can be executed simultaneously or in the order of first performing the inclination correction step S051 (FIG. 9C) and then performing the second movement step S052 (FIG. 9D). In the case of executing the inclination correction step S051 and the second movement step S052 simultaneously, the rotation in the inclination correction step S051 of the robot 100 and the movement in the second movement step S052 are executed simultaneously (combining the operations of FIGS. 9C and 9D). Then, as shown in FIG. 9D, in the second stop step S053, the movement of the robot 100 toward the opening O of the accommodation container H is stopped in a state where the substrate detection unit 130 is located below the substrate W. That is, at the time of executing the second stop step S053, the second movement step S052 is ended. Regarding the execution means of the second stop step S053, as an example, the second movement step S052 further includes a second detection step S0521. In the second detection step S0521, a change in the detection state of the substrate W by the substrate detection unit 130 is detected. That is, in the second detection step S0521, the substrate detection unit 130 passes under the edge E2 on the other side of the substrate W in the first direction (the side indicated by the arrow in the front-rear direction Y), and determines the position of the edge E2 on the other side of the substrate W in the first direction based on the switching of the detection signal from disconnection to connection (the switching of the substrate detection unit 130 from determining that there is no substrate W to determining that there is a substrate W). Then, in the second stop step S053, after the substrate detection unit 130 passes under the edge E2 on the other side of the substrate W in the first direction in the second detection step S0521 and the detection signal is switched from disconnection to connection (switched from no substrate W to having a substrate W), the movement in the second movement step S052 of the robot 100 is stopped. In addition, the second detection step S0521 further includes: a fifth detection step S0522 of determining the position of the edge E2 of the substrate W located on the moving path of the first substrate detection unit 130a according to the change in the detection status of the substrate W by the first substrate detection unit 130a; and a sixth detection step S0523 of determining the position of the edge E2 of the substrate W located on the moving path of the second substrate detection unit 130b according to the change in the detection status of the substrate W by the second substrate detection unit 130b. For example, in the fifth detection step S0522, the position of the edge E2 of the substrate W on the other side in the first direction is detected by the switching of the detection signal from disconnection to connection (from no substrate W to having substrate W) before and after the first substrate detection unit 130a passes under the edge E2 of the substrate W on the other side in the first direction, and it is detected whether the first substrate detection unit 130a passes through the edge E2 of the substrate W and returns below the substrate W. In the sixth detection step S0523, the position of the edge E2 of the substrate W on the other side in the first direction is detected by the switching of the detection signal from disconnection to connection (from no substrate W to having substrate W) before and after the second substrate detection unit 130b passes under the edge E2 of the substrate W on the other side in the first direction, and it is detected whether the second substrate detection unit 130b passes through the edge E2 of the substrate W and returns below the substrate W. In addition, the position of the edge E2 determined in the fifth detection step S0522 is set as the third edge position P3, and the position of the edge E2 determined in the sixth detection step S0523 is set as the fourth edge position P4 (shown in FIG. 9D). The correction step S05 may further include an inclination correction completion confirmation step S0524. In the inclination correction completion confirmation step S0524, based on the difference in the moving direction of the second moving step S052 between the third edge position P3 and the fourth edge position P4, it is determined whether the correction of the robot 100 for the inclination of the substrate W has been completed. As another example, in the calculation step S04, the first stop position is further calculated based on the position of the edge E2 of the substrate W detected in the first detection step S02. In the second stop step S053, when the robot 100 reaches the first stop position, the movement in the second moving step S052 is stopped. In this case, the second detection step S0521 can be omitted. Therefore, the execution timing of the second stop step S053 (i.e., the position of the robot 100 when the second moving step S052 ends) can be determined using the substrate detection unit 130 and by the second detection step S0521, or can be determined by the calculation step S04. The present invention is not limited thereto. When describing in detail, in the tilt correction step S051 for correcting the tilt of the substrate W by the robot 100, the robot 100 is rotated so that the edge E2 on the other side in the first direction of the substrate W is parallel to the third direction of the robot 100 (the left - right direction X1 which is the width direction of the extension part 120). Therefore, in the robot 100 after the tilt correction step S051, the distance from the first substrate detection part 130a to the edge E2 of the substrate W is equal to the distance from the second substrate detection part 130b to the edge E2 of the substrate W. In particular, since the first substrate detection part 130a and the second substrate detection part 130b are arranged side by side at positions separated in the third direction, in the tilt correction completion confirmation step S0524, preferably, the position in the second direction (front - back direction Y1) of the third edge position P3 of the edge E2 of the substrate W determined by the first substrate detection part 130a coincides with the position in the moving direction of the second moving step S052 of the fourth edge position P4 of the edge E2 of the substrate W determined by the second substrate detection part 130b, and it is determined that the tilt correction is completed. Therefore, in the tilt correction completion confirmation step S0524, based on whether the positions in the moving direction of the second moving step S052 of the third edge position P3 based on the first substrate detection part 130a and the fourth edge position P4 based on the second substrate detection part 130b are the same (that is, the difference between the third edge position P3 and the fourth edge position P4 becomes 0), it is determined whether the correction of the robot 100 for the tilt of the substrate W is completed. Therefore, it is preferable to execute the tilt correction completion confirmation step S0524 during the second moving step S052. That is, regarding the tilt correction step S051 and the second moving step S052, they are executed in the order of first performing the tilt correction step S051, then performing the second moving step S052. During the execution of the second moving step S052, the second detection step S0521 (divided into the fifth detection step S0522 and the sixth detection step S0523 in the case of having two substrate detection parts 130) and the tilt correction completion confirmation step S0524 are executed. Then, in the second stop step S053, the movement in the second moving step S052 of the robot 100 is stopped. In addition, a modification of the first embodiment is illustrated in FIG. 10. In the modification of the first embodiment, the second substrate detection unit 130b is further disposed separately (i.e., offset) from the first substrate detection unit 130a on one side in the second direction (the side where the extension unit 120 extends from the hand base unit 110 and the side indicated by the arrow in the front-rear direction Y1). FIG. 10 is a diagram showing the state in the second stop step S053 of the modification of the first embodiment, corresponding to FIG. 9D showing the state in the second stop step S053 of the first embodiment. In this case, when performing the tilt correction step S051 for correcting the tilt of the substrate W by the robot 100, the robot 100 is rotated so that the edge E2 on the other side in the first direction of the substrate W is parallel to the third direction (the left-right direction X1 which is the width direction of the extension unit 120) of the robot 100. Therefore, when performing the second movement step S052, during the movement of the robot 100 toward the opening O of the storage container H, either the first substrate detection unit 130a or the second substrate detection unit 130b disposed offset passes under the edge E2 of the substrate W first. Therefore, in the second stop step S053, it is preferably to stop the movement in the second movement step S052 of the robot 100 at a position where either the first substrate detection unit 130a or the second substrate detection unit 130b detects the substrate W and the other does not detect the substrate W. That is, it is also possible to determine that the substrate support unit 140 has returned below the substrate W by detecting the substrate W with either the first substrate detection unit 130a or the second substrate detection unit 130b, and execute the second stop step S053 to stop the movement of the robot 100. Thereby, when supporting and transporting the substrate W described later, it is possible to detect the offset of the substrate W with respect to the robot 100 to one side and the other side in the second direction. Here, when the first substrate detection unit 130a and the second substrate detection unit 130b are disposed offset, the second stop step S053 may be executed after both the first substrate detection unit 130a and the second substrate detection unit 130b pass under the substrate W and detect the substrate W. The present invention is not limited to this. As described above, as shown in FIG. 4, on the lower surface of the substrate W, there are a contactable area R1 and a non-contactable area R2. Here, the substrate support portion 140 corrects the position and posture of the robot arm 100 by the correction step S05 to form an appropriate positional relationship. Thereby, all the substrate support portions 140 only contact the contactable area R1 of the substrate W in the substrate support step S06. Next, the substrate W can be supported by the substrate support portion 140, and the substrate W can be taken out from the storage container H. Specifically, as shown in FIG. 9E, in the substrate support step S06, the substrate W is supported by the substrate support portion 140. For example, the substrate support portion 140 provided on the extension portion 120 and capable of moving (provided on the upper surface 122 of the extension portion 120 in a manner capable of being stored or deployed) is deployed until it contacts the lower surface of the substrate W, or the robot arm 100 is moved in the vertical direction Z until the substrate support portion 140 provided on the extension portion 120 and incapable of moving contacts the lower surface of the substrate W, and the substrate W is supported by the substrate support portion 140. At this time, the substrate support portion 140 only contacts the contactable area R1 of the substrate W to support the substrate W (as shown in FIG. 9E). Then, the substrate support portion 140 or the robot arm 100 is further moved in the vertical direction Z to lift the substrate W from the groove S of the storage container H to release the contact between the substrate W and the storage container H. Here, the substrate W is placed in the storage container H in a placed posture on the groove S serving as a placement member of the storage container H. In the substrate support step S06, the robot arm 100 is operated in such a manner that the substrate W is lifted upward from the groove S serving as a placement member while maintaining the placed posture, without destroying the relative position between the substrate W and the corrected robot arm 100. Then, as shown in FIG. 9F, in the taking-out step S07, the robot arm 100 supporting the substrate W is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y) to take out the substrate W from the accommodation container H. Here, in the taking-out step S07, with the substrate W lifted by the substrate support portion 140 maintained in the placed posture, the robot arm 100 is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y), and the substrate W is taken out from the accommodation container H through the opening O facing one side in the first direction. Therefore, in the substrate taking-out method and the substrate transfer system 20 applying the substrate taking-out method shown in FIGS. 7, 8, 9A to 9F, and 10, after correcting the position and posture of the robot arm 100 based on the inclination of the substrate W, the substrate support portion 140 of the robot arm 100 contacts and supports the area of the substrate W that can be contacted, and the substrate W can be taken out from the accommodation container H while supporting the substrate W, so damage caused by the inclination of the substrate W can be avoided. In addition, since the correction of the position and posture of the robot arm 100 based on the inclination of the substrate W is performed in a state where the extended portion 120 of the robot arm 100 is located inside the accommodation container H, a large movement of the robot arm 100 before taking out the substrate W is not required, thereby improving the control stability when taking out the substrate W and shortening the time for taking out the substrate W. In addition, in the first embodiment, as an example of the substrate taking-out method when the substrate detection portion 130 provided on the front end side of the extended portion 120 detects the edge portion E2 of the substrate W located at a position away from the opening O, it has been described, but as shown in FIGS. 11A to 11D, it can also be the substrate taking-out method when the substrate detection portion 130 provided on the front end side of the extended portion 120 detects the edge portion E1 of the substrate W located at a position close to the opening O. Here, in order to explain the operation during the detection of the substrate detection portion 130, the robot arm 100 shown in FIGS. 11A to 11D omits components such as the substrate support portion 140, but is not limited thereto. As shown in FIG. 11A, in the first movement step S01, the robot arm 100 is moved to the other side in the first direction (the side indicated by the arrow in the front-rear direction Y) to insert the extended portion 120 into the accommodation container H from the opening O. Here, in the first movement step S01 of this embodiment, the same operation as the first movement step S01 in the first embodiment shown in FIG. 9A can be performed. In addition, in the first detection step S02, the position of the edge portion E1 of the substrate W is determined based on the change in the detection state of the substrate W by the substrate detection portion 130 in the first movement step S01. Then, as shown in FIG. 11B, in the first stop step S03, after the first detection step S02, the movement of the robot arm 100 toward the other side in the first direction (the side indicated by the arrow in the front-rear direction Y) is stopped. Specifically, as shown in FIG. 11A, in the first moving step S01, by inserting the extending portion 120 toward the other side in the first direction (the side indicated by the arrow in the front-rear direction Y) under the substrate W, the substrate detection unit 130 provided on the front end side of the extending portion 120 passes under the edge portion E1 of the substrate W. In this case, in the first detection step S02, based on the switching of the detection signals before and after the substrate detection unit 130 passes under the edge portion E1 of the substrate W, it is determined that the detection state of the substrate detection unit 130 with respect to the substrate W has changed, and the position of the edge portion E1 is determined. For example, in the first detection step S02, based on the switching of the detection signals before and after the substrate detection unit 130 passes under the edge portion E1 on one side in the first direction of the substrate W from being disconnected to being connected (the substrate detection unit 130 switches from a state of determining that there is no substrate W to a state of determining that there is a substrate W), the position of the edge portion E1 on one side in the first direction of the substrate W located on the moving path of the substrate detection unit 130 is determined. The first detection step S02 corresponding to the edge portion E1 of the substrate W here can adopt the same detection method as the first detection step S02 corresponding to the edge portion E2 of the substrate W described above (for example, including the third detection step S021 based on the first substrate detection unit 130a and the fourth detection step S022 based on the second substrate detection unit 130b). In addition, as shown in FIG. 11B, in the first stop step S03, the movement of the robot 100 is stopped at a place where the substrate detection unit 130 is located under the substrate W (the substrate detection unit 130 does not protrude from under the substrate W, and it is determined that there is a substrate W). The operations from the first moving step S01 to the first stop step S03 change as shown in FIGS. 11A to 11B, and the first detection step S02 is executed between the first moving step S01 and the first stop step S03. Regarding the execution timing of the first stop step S03, as an example, it can be executed at a time point when a predetermined time has elapsed after the movement of the robot 100 after the position of the edge portion E1 is determined by the first detection step S02, or at a time point when the robot 100 moves to a predetermined distance after the position of the edge portion E1 is determined by the first detection step S02. In addition, in other embodiments not shown, in the first stop step S03, the robot 100 can also be moved to a position where the substrate detection unit 130 protrudes from under the substrate W as shown in FIG. 9B. The present invention is not limited to this. In addition, in calculation step S04, based on the position of the edge E1 of the substrate W detected in the first detection step S02, the inclination of the substrate W with respect to the robot 100 is calculated. In correction step S05, based on the inclination of the substrate W calculated in calculation step S04, the position and posture of the robot 100 are corrected, and it includes: an inclination correction step S051 for correcting the posture of the robot 100; a second movement step S052 for moving the robot 100 such that the substrate detection unit 130 provided on the front end side faces the edge E2 of the substrate W; and a second stop step S053 for stopping the movement in the second movement step S052 of the robot 100 at the position where the substrate support unit 140 is located below the substrate W and the substrate detection unit 130 detects the substrate W after the inclination correction step S051 is completed. As an example, as shown in FIG. 11C, in the inclination correction step S051, based on the direction and amount of the inclination calculated in the calculation step S04, the posture of the robot 100 on the horizontal plane is corrected. For example, the posture of the robot 100 is corrected such that one side of the edge E1 in the first direction of the substrate W is parallel to the third direction of the robot 100 (for example, rotating the robot 100 in the plane formed by the left-right direction X and the front-back direction Y). The inclination correction step S051 corresponding to the edge E1 of the substrate W here can also adopt the same method as the inclination correction step S051 corresponding to the edge E2 of the substrate W described above (for example, performing an inclination correction completion confirmation step S0524 in the second movement step S052). In addition, as shown in FIG. 11D, in the second movement step S052, the robot 100 is moved such that the substrate detection unit 130 located below the substrate W faces the edge E2 of the substrate W. For example, in FIG. 11D, the robot 100 is moved in a direction parallel to the second direction (the front-back direction Y1 which is the extending direction of the extended setting unit 120 of the robot 100), but it can also be moved to one side of the first direction (the opposite side of the side indicated by the arrow in the front-back direction Y). As shown in FIG. 11D, in the second stop step S053, the movement of the robot 100 in the second movement step S052 is stopped. Here, as an example, the execution timing of the second stop step S053 can be set to the timing when the robot 100 reaches the first stop position calculated in the calculation step S04 based on the position of the edge E1 of the substrate W. The present invention is not limited to this. Accordingly, after correcting the position and posture of the robot 100 inclined with respect to the substrate W by the steps from FIG. 11A to FIG. 11D, the substrate support step S06 shown in FIG. 9E and the take-out step S07 shown in FIG. 9F described above can be executed to take out the substrate W from the accommodation container H while supporting it. That is, even if the edges detected by the substrate detection unit 130 provided on the front end side of the extended setting unit 120 are different according to the steps from FIG. 11A to FIG. 11D, the substrate W can be taken out from the accommodation container H while being supported by the same means as the substrate support step S06 shown in FIG. 9E and the take-out step S07 shown in FIG. 9F described above. It can be understood from this that in the first embodiment in which the substrate detection unit 130 is provided at the front end of the extended setting unit 120 of the robot 100, either one of the edge E1 and the edge E2 of the substrate W can be detected in the first detection step S02. In addition, when the edge E2 is detected, the stop position of the first stop step S03 is the position where the substrate detection unit 130 protrudes from the substrate W, and the moving direction of the second moving step S052 is the direction in which the extended setting unit 120 faces the opening O of the accommodation container H (for example, one side in the first direction), and the substrate detection unit 130 that protrudes from the substrate W returns to the lower side of the substrate W. In contrast, when the edge E1 is detected, the stop position of the first stop step S03 can be the position where the substrate detection unit 130 is located below the substrate W (not protruding), or the position where the substrate detection unit 130 protrudes from the substrate W. In addition, the moving direction of the second moving step S052 can be the direction in which the substrate detection unit 130 located below the substrate W faces the other side in the first direction, or the direction in which the substrate detection unit 130 that protrudes from the substrate W returns to the lower side of the substrate W. The present invention is not limited to this. Next, with reference to FIGS. 12A to 12F, a method for taking out a substrate related to the second embodiment will be described. In the second embodiment, the substrate detection unit 130 is provided on the other side in the second direction of the extension unit 120 (the side opposite to the side indicated by the arrow in the front-rear direction Y1), that is, the proximal end side (the side of the extension unit 120 close to the hand base 110), and includes a first substrate detection unit 130a and a second substrate detection unit 130b that are separately provided in the third direction (left-right direction X1) orthogonal to the second direction (front-rear direction Y1). In this case, it is difficult for the substrate detection unit 130 provided on the proximal end side of the extension unit 120 to pass through the edge E2 of the substrate W away from the opening O. Therefore, it is not good to detect the edge E2 of the substrate W away from the opening O by the substrate detection unit 130 provided on the proximal end side of the extension unit 120, but it is not excluded. Preferably, the substrate detection unit 130 provided on the proximal end side of the extension unit 120 passes under the edge E1 close to the opening O, whereby the position of the edge E1 of the substrate W close to the opening O is determined by the substrate detection unit 130 provided on the proximal end side of the extension unit 120. Here, in order to explain the detection of the substrate detection unit 130, components such as the substrate support unit 140 are omitted from the robot 100 shown in FIGS. 12A to 12D, but it is not limited thereto. First, as shown in FIG. 12A, in the first movement step S01, the robot 100 is moved to the other side in the first direction (the side indicated by the arrow in the front-rear direction Y), and the extension unit 120 is inserted into the accommodation container H from the opening O. Here, in the first movement step S01 of the present embodiment, the same operation as the first movement step S01 shown in FIG. 9A may be performed. In addition, the first detection step S02 determines the position of the edge E1 of the substrate W according to the change in the detection state of the substrate W by the substrate detection unit 130 in the first movement step S01. Then, as shown in FIG. 12B, in the first stop step S03, the movement of the robot 100 toward the other side in the first direction (the side indicated by the arrow in the front-rear direction Y) is stopped. Specifically, as shown in FIG. 12A, in the first moving step S01, by moving the robot 100 toward the other side of the first direction (the side indicated by the arrow in the front-rear direction Y) and inserting the extension portion 120 under the substrate W, the substrate detection unit 130 provided on the proximal end side of the extension portion 120 passes under the edge E1 of the substrate W. In this case, in the first detection step S02, based on the switching of the detection signals before and after the substrate detection unit 130 passes under the edge E1 of the substrate W, it is determined that the detection state of the substrate detection unit 130 with respect to the substrate W has changed, and the position of the edge E1 is determined. For example, in the first detection step S02, based on the switching of the detection signal from off to on before and after the substrate detection unit 130 passes under the edge E1 of the substrate W on one side in the first direction of the substrate W (the switching of the substrate detection unit 130 from determining that there is no substrate W to determining that there is a substrate W), the position of the edge E1 on one side in the first direction of the substrate W, which is on the moving path of the substrate detection unit 130, is determined. The first detection step S02 corresponding to the edge E1 of the substrate W here may further include a third detection step S021 using the first substrate detection unit 130a and a fourth detection step S022 using the second substrate detection unit 130b. In addition, as shown in FIG. 12B, in the first stop step S03, the movement of the robot 100 is stopped at the location where the substrate detection unit 130 is under the substrate W. The operations from the first moving step S01 to the first stop step S03 change as shown in FIGS. 12A to 12B, and the first detection step S02 is executed between the first moving step S01 and the first stop step S03. Regarding the timing of execution of the first stop step S03 here, as an example, it may be immediately after the position of the edge E1 is determined by the first detection step S02, or may be the timing when the movement of the robot 100 has passed a predetermined time after the position of the edge E1 is determined by the first detection step S02, or the timing when the robot 100 has moved to a predetermined distance after the position of the edge E1 is determined by the first detection step S02. The present invention is not limited to this. After the first stop step S03, while keeping the extended setting part 120 of the robot arm 100 inside the accommodation container H and below the substrate W, the calculation step S04 and the correction step S05 are executed. Specifically, in the calculation step S04, based on the position of the edge E1 of the substrate W detected in the first detection step S02, the inclination of the substrate W with respect to the robot arm 100 is calculated. As an example, in the calculation step S04, the direction and amount of inclination of the substrate W on the horizontal plane are calculated. Further, in the correction step S05, based on the inclination of the substrate W calculated in the calculation step S04, the position and posture of the robot arm 100 are corrected, and it includes: an inclination correction step S051 for correcting the posture of the robot arm 100; a second movement step S052 for moving the robot arm 100 such that the substrate detection part 130 provided on the base end side faces the edge E1 of the substrate W; and a second stop step S053 for stopping the movement in the second movement step S052 of the robot arm 100 at the position where the substrate support part 140 is below the substrate W and the substrate detection part 130 detects the substrate W after the inclination correction step S051 is completed. In the correction step S05, the correction is performed while the extended setting part 120 of the robot arm 100 is inside the accommodation container H. That is, the position and posture of the robot arm 100 are corrected while the robot arm 100 inserted into the accommodation container H is inside the accommodation container H. As an example, as shown in FIG. 12C, in the tilt correction step S051, based on the direction and amount of the tilt calculated in the calculation step S04, the posture of the robot arm 100 on the horizontal plane is corrected. For example, the posture of the robot arm 100 is corrected such that the edge E1 on one side in the first direction of the substrate W is parallel to the third direction (left - right direction X1) of the robot arm 100 (for example, the robot arm 100 is rotated in the plane formed by the left - right direction X and the front - rear direction Y). Then, as shown in FIG. 12D, in the second movement step S052, the robot arm 100 is moved so as to face the opening O of the accommodation container H. In the second stop step S053, at the position where the substrate detection unit 130 is near the edge E1 of the substrate W and it is determined that there is a substrate W, the movement of the robot arm 100 facing the opening O in the second movement step S052 is stopped. For example, the robot arm 100 is moved along a linear path to one side in the first direction (for example, the side opposite to the side indicated by the arrow in the front - rear direction Y), and it can also include cases other than the first direction (the front - rear direction Y, which is parallel to the groove S for placing the substrate W in the accommodation container H), the second direction (the front - rear direction Y1, which is parallel to the extending direction of the extending portion 120 of the robot arm 100), or a linear motion. In addition, for the tilt correction step S051 and the second movement step S052, they can be executed simultaneously or in the order of first performing the tilt correction step S051 (FIG. 12C) and then performing the second movement step S052 (FIG. 12D). Then, as shown in FIG. 12D, in the second stop step S053, the movement of the robot arm 100 facing the opening O of the accommodation container H is stopped. That is, at the time of executing the second stop step S053, the second movement step S052 ends. In addition, in the second movement step S052 of the second embodiment, after the inclination correction step S051 shown in FIG. 12C is completed, the robot arm 100 is moved so as to face the opening O. During this process, the substrate detection unit 130 passes under the edge E1 of the substrate W, and detects the position of the edge E1 of the substrate W by switching the detection signal from on to off (switching from having the substrate W to not having the substrate W), and then stops the movement of the robot arm 100 facing the opening O. Then, the robot arm 100 starts to move again toward the other side in the first direction (the side indicated by the arrow in the front-rear direction Y), the substrate detection unit 130 passes under the edge E1 of the substrate W, and detects the position of the edge E1 of the substrate W by switching the detection signal from off to on (switching from not having the substrate W to having the substrate W), and then stops the movement of the robot arm 100 toward the other side in the first direction. Thus, in the case of the second embodiment, in the second movement step S052 after the inclination correction step S051, the robot arm 100 returns (moves toward the opening O) or advances (moves toward the other side in the first direction), and the robot arm 100 can be stopped at the position where the substrate detection part shown in FIG. 12D is near the edge E1 and the substrate W is detected. In addition, as another embodiment, there is a case where the first stop position is calculated based on the position of the edge E1 detected in the first movement step S01, and in the second movement step S052, the movement stops when the robot arm 100 reaches the first stop position. Specifically, in the calculation step S04, further based on the position of the edge E1 of the substrate W detected in the first movement step S01, the first stop position where the substrate detection unit 130 is near the edge E1 of the substrate W and is in a state where it is determined that there is a substrate W is calculated. In the second stop step S053, when the robot arm 100 reaches the first stop position, the movement in the second movement step S052 is stopped. In this case, the second detection step S0521 (including the fifth detection step S0522 using the first substrate detection unit 130a and the sixth detection step S0523 using the second substrate detection unit 130b) described above can also be omitted. Therefore, the execution timing of the second stop step S053 (that is, the position of the robot arm 100 when the second movement step S052 ends) can be determined by the second detection step S0521 (using the substrate detection unit 130), or can be determined by the calculation step S04. The present invention is not limited to this. In addition, the correction step S05 corresponding to the edge E1 of the substrate W here can also adopt means including the inclination correction completion confirmation step S0524. Thus, after correcting the position and posture of the robot 100 for the tilt of the substrate W through the steps from FIGS. 12A to 12D, the substrate support step S06 shown in FIG. 12E and the take-out step S07 shown in FIG. 12F can be executed to take out the substrate W from the accommodation container H while supporting the substrate W. The substrate support step S06 shown in FIG. 12E and the take-out step S07 shown in FIG. 12F can also adopt the same means as the substrate support step S06 shown in FIG. 9E and the take-out step S07 shown in FIG. 9F (the position of the substrate detection unit 130 is different). That is, through the steps from FIGS. 9A to 11D and using the substrate detection unit 130 provided on the front-end side of the extension unit 120, detection can be performed with the edge E (either the edge E1 or the edge E2) as the basis for correction, or through the steps from FIGS. 12A to 12F and using the substrate detection unit 130 provided on the base-end side of the extension unit 120, detection can be performed with the edge E (preferably the edge E1) as the basis for correction. Accordingly, it can be known that the substrate detection unit 130 can be provided at the front-end portion of the extension unit 120 of the robot 100 (the first embodiment), and the substrate detection unit 130 can also be provided at the base-end portion of the extension unit 120 of the robot 100 (the second embodiment). In addition, in other embodiments not shown, multiple substrate detection units 130 can be provided at the front-end portion and the base-end portion of the extension unit 120 of the robot 100, or can be provided between the front-end portion and the base-end portion. As long as the substrate detection unit 130 passes through the position of at least one linear edge E (either the edge E1 or the edge E2) of the substrate W, determines the position of the edge E (either the edge E1 or the edge E2), corrects the position and posture of the robot 100 based on the tilt of the substrate W, and then the substrate support portion 140 of the robot 100 contacts the area where it can contact the substrate W, it is possible to take out the substrate W from the accommodation container H while supporting it. The present invention is not limited thereto. Finally, it should be noted that the above embodiments are only used for the description of the technical solutions of the present invention and are not limited thereto. The present invention is described in detail with reference to the above embodiments. However, for those skilled in the art, it is of course understandable that for the technical solutions described in the above embodiments, corrections can still be made or equivalent replacements can be made for some or all of the technical features. However, these corrections or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention. [Industrial Applicability] The substrate take-out method of the present invention and the substrate transfer system applying the substrate take-out method can improve the control stability when taking out the substrate and shorten the time for taking out the substrate W. 20: Substrate transfer system 22: Substrate transfer module 22a: Housing 22b: Movable body 22c: Guide structure 24: Control unit / control device 30: Substrate transfer robot 32: Arm part / arm member 34: Main body part 36: Arm drive part 100: Manipulator 110: Hand base part 120: Extension part 122: Upper surface 124: Mounting plate 130: Substrate detection part 130a: First substrate detection part 130b: Second substrate detection part 140: Substrate support part 140A: First substrate support part 140B: Second substrate support part 140C: Third substrate support part 150: Restriction part 150A: First restriction part 150B: Second restriction part 160: Drive part C1: Load port C2: Processing device D1: Difference D2: Distance E: Edge part E1: Edge part E2: Edge part H: Accommodating container L: Center line O: Opening P1: First edge position P2: Second edge position P3: Third edge position P4: Fourth edge position R1: Contactable area R2: Non-contactable area S: Groove S01: First movement step S02: First detection step S021: Third detection step S022: Fourth detection step S03: First stop step S04: Calculation step S05: Correction step S051: Tilt correction step S052: Second movement step S0521: Second detection step S0522: Fifth detection step S0523: Sixth detection step S0524: Tilt correction completion confirmation step S053: Second stop step S06: Substrate support step S07: Taking-out step W: Substrate X: Left-right direction X1: Left-right direction Y: Front-back direction Y1: Front-back direction Z: Up-down direction Z1: Up-down direction θ: Tilt angle FIG. 1 is a perspective view showing a substrate transfer system according to an embodiment of the present invention. FIG. 2 is a perspective explanatory view of a substrate transfer robot included in the substrate transfer system shown in FIG. 1. FIG. 3 is an explanatory view of a container placed on a load port included in the substrate transfer system shown in FIG. 1. FIG. 4 is a plan explanatory view of a contactable area and a non-contactable area of the substrate shown in FIG. 2. FIG. 5 is a perspective explanatory view of a robot hand mounted on the substrate transfer robot shown in FIG. 1. FIG. 6 is a plan explanatory view when the robot hand shown in FIG. 5 takes out a substrate stored in a container. FIG. 7 is a flowchart of a substrate taking-out method using the robot hand shown in FIG. 5. FIG. 8 is a flowchart of a correction step of the substrate taking-out method shown in FIG. 7. FIGS. 9A to 9F are plan explanatory views of the relative positions of the robot hand, the container, and the substrate corresponding to the respective steps of the substrate taking-out method shown in FIGS. 7 and 8 in the first embodiment. FIG. 10 is a plan explanatory view of the relative positions of the robot hand, the container, and the substrate corresponding to the substrate support step of the substrate taking-out method in a modification of the first embodiment. FIGS. 11A to 11D are plan explanatory views of the relative positions of the robot hand, the container, and the substrate corresponding to the respective steps of the substrate taking-out method in another modification of the first embodiment shown in FIGS. 9A to 9F. FIGS. 12A to 12F are plan explanatory views of the relative positions of the robot hand, the container, and the substrate corresponding to the respective steps of the substrate taking-out method shown in FIGS. 7 and 8 in the second embodiment. 20: Substrate transfer system 22: Substrate transfer module 22a: Frame 22b: Moving body 22c: Guiding structure 24: Control unit 30: Substrate transfer robot 32: Arm part 34: Main body part 100: Robot hand C1: Load port C2: Processing device H: Accommodating container W: Substrate X: Left - right direction Y: Front - back direction Z: Up - down direction

Claims

1. A substrate removal method, wherein a substrate placed at a predetermined position in a receiving container having an opening on one side in a first direction is removed by a robotic arm disposed on a substrate transport robot, the substrate removal method being characterized in that the robotic arm includes a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion disposed on the extension portion, and a substrate support portion disposed on the extension portion, and is controlled by a control device, the substrate removal method comprising: a first moving step, wherein the robotic arm is moved to the other side of the first direction to insert the extension portion into the receiving container through the opening; a first detection step, wherein in the first moving step, the position of at least one linear edge of the substrate is determined based on a change in the detection status of the substrate by the substrate detection portion; and a first stopping step, wherein the movement of the robotic arm toward the other side of the first direction is stopped. The calculation step involves calculating the tilt of the substrate relative to the robotic arm based on the position of the edge of the substrate detected in the first detection step. The correction step involves correcting the position and posture of the robotic arm based on the tilt of the substrate calculated in the calculation step; the substrate support step involves supporting the substrate by the substrate support part. The process includes a removal step, in which the robotic arm supporting the substrate moves to one side in the first direction to remove the substrate from the receiving container. The correction step is performed while the extended portion of the robotic arm is located within the receiving container. The correction step includes: a tilt correction step to correct the posture of the robotic arm; and a second movement step to move the robotic arm such that the substrate detection portion faces the edge of the substrate in the first direction. And a second stopping step, after the tilt correction step is completed, when the substrate support is located below the substrate and the substrate detection unit detects the position of the substrate, the movement of the robot in the second moving step is stopped. In the first moving step, the substrate detection unit passes below the edge of the substrate by moving the extended setting part toward the other side of the first direction. In the first detection step, the detection status of the substrate detection unit on the substrate is determined to have changed based on the switching of the detection signal before and after the substrate detection unit passes below the edge of the substrate, so as to determine the position of the edge. In the first stopping step, the movement of the robot is stopped at the position where the substrate detection unit protrudes from below the substrate toward the other side of the first direction. In the second moving step, the robot moves toward the opening of the receiving container. In the second stopping step, the movement of the robot in the second moving step is stopped after the substrate detection unit passes below the edge located on the other side of the first direction of the substrate and the detection signal switches from off to on.

2. The substrate removal method as described in claim 1, wherein, In the first detection step, the position of the edge on the other side of the first direction of the substrate is detected by switching the detection signal from on to off as the substrate detection unit passes below the edge on the other side of the first direction of the substrate.

3. The substrate removal method as described in claim 1, wherein, In the calculation step, the direction and amount of tilt on the horizontal plane of the substrate are calculated. The tilt correction step corrects the posture of the robot on the horizontal plane based on the calculated direction and amount of tilt.

4. The substrate removal method as described in claim 1, wherein, The second moving step further includes a second detection step, in which the substrate detection unit detects changes in the detection status of the substrate, and in the second stopping step, after the second detection step, the movement of the robot arm in the second moving step is stopped.

5. The substrate removal method as described in claim 1, wherein, The tilt correction step and the second movement step are executed simultaneously or in the order of performing the tilt correction step first and then the second movement step.

6. The substrate removal method as described in claim 1, wherein, In the tilt correction step, the posture of the robot is corrected by making the edge of one or the other side of the first direction of the substrate parallel to a third direction orthogonal to the second direction of the robot.

7. The substrate removal method as described in claim 1, wherein, The substrate is placed in the container in a mounting posture on the mounting member of the container. In the substrate supporting step, the substrate is lifted upward from the mounting member while maintaining the mounting posture. In the removal step, while the substrate, which has been lifted by the substrate support, is maintained in the mounting posture, the robot arm is moved to one side in the first direction to remove the substrate from the container.

8. The substrate removal method as described in claim 1, wherein, The substrate detection unit includes a first substrate detection unit and a second substrate detection unit disposed separately from the first substrate detection unit in a third direction orthogonal to the second direction. The first detection step includes: a third detection step, determining the position of the edge of the substrate based on the change in the detection status of the substrate by the first substrate detection unit; and a fourth detection step, determining the position of the edge of the substrate based on the change in the detection status of the substrate by the second substrate detection unit, taking the position of the edge determined in the third detection step as a first edge position, and taking the position of the edge determined in the fourth detection step as a second edge position. In the calculation step, based on first distance information corresponding to the difference between the first edge position and the second edge position in the second direction, and second distance information corresponding to the distance of separation of the first substrate detection unit and the second substrate detection unit in the third direction, the direction and amount of tilt of the substrate relative to the robot arm in the third direction are calculated.

9. The substrate removal method as described in claim 8, wherein, In the first stopping step, the movement of the robot arm in the first moving step to the other side of the first direction is stopped at the position where both the first substrate detection unit and the second substrate detection unit protrude from below the substrate. Regarding the tilt correction step and the second moving step, they are executed in the order of performing the tilt correction step first and then the second moving step. The second moving step further includes: a fifth detection step, which determines the position of the edge of the substrate based on the change in the detection status of the substrate by the first substrate detection unit; and a sixth detection step, which determines the position of the edge of the substrate based on the change in the detection status of the substrate by the second substrate detection unit, taking the position of the edge determined in the fifth detection step as the third edge position, and taking the position of the edge determined in the sixth detection step as the fourth edge position. The correction step further includes a tilt correction completion confirmation step, in which the robot arm determines that the tilt correction of the substrate has been completed based on the difference between the third edge position and the fourth edge position.

10. The substrate removal method as described in claim 8, wherein, The second substrate detection unit is further disposed separately from the first substrate detection unit on one side of the second direction. In the second stopping step, the movement of the robot arm in the second moving step is stopped when one of the first substrate detection unit and the second substrate detection unit detects the substrate and the other does not detect the substrate.

11. A substrate removal method, wherein a substrate placed at a predetermined position in a receiving container having an opening on one side in a first direction is removed by a robotic arm disposed on a substrate transport robot, the substrate removal method being characterized in that the robotic arm includes a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion disposed on the extension portion, and a substrate support portion disposed on the extension portion, and is controlled by a control device, the substrate removal method comprising: a first moving step, wherein the robotic arm is moved to the other side in the first direction to insert the extension portion into the receiving container through the opening; a first detection step, wherein in the first moving step, the position of at least one linear edge of the substrate is determined based on a change in the detection status of the substrate by the substrate detection portion; and a first stopping step, wherein the movement of the robotic arm toward the other side in the first direction is stopped. The calculation step involves calculating the tilt of the substrate relative to the robotic arm based on the position of the edge of the substrate detected in the first detection step. The correction step involves correcting the position and posture of the robotic arm based on the tilt of the substrate calculated in the calculation step; the substrate support step involves supporting the substrate by the substrate support part. The process includes a removal step, in which the robotic arm supporting the substrate moves to one side in the first direction to remove the substrate from the receiving container. The correction step is performed while the extended portion of the robotic arm is located within the receiving container. The correction step includes: a tilt correction step to correct the posture of the robotic arm; and a second movement step to move the robotic arm such that the substrate detection portion faces the edge of the substrate in the first direction. And a second stopping step, after the tilt correction step is completed, when the substrate support is located below the substrate and the substrate detection unit detects the position of the substrate, the movement of the robot in the second moving step is stopped. In the calculation step, a first stopping position is further calculated based on the position of the edge of the substrate. In the second stopping step, when the robot reaches the first stopping position, the movement in the second moving step is stopped.

12. A substrate transfer system, comprising: A substrate transport robot includes a robotic arm for supporting a substrate and a moving mechanism for holding the robotic arm in a freely movable manner. A substrate transfer module, comprising a substrate transfer robot disposed therein; and a control device for controlling the substrate transfer robot, the substrate transfer system being characterized in that the manipulator of the substrate transfer robot comprises a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion disposed on the extension portion, and a substrate support portion disposed on the extension portion, and is controlled by the control device, the control device controlling the substrate transfer robot by means of a substrate removal method as described in any one of claims 1 to 11 and using the manipulator to remove a substrate placed at a predetermined position within a receiving container.

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