Device for handling a test contact

TWI934191BActive Publication Date: 2026-08-01GERMAN PACKAGING TECH CO
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Patents
Current Assignee / Owner
GERMAN PACKAGING TECH CO
Filing Date
2024-03-13
Publication Date
2026-08-01

AI Technical Summary

Technical Problem

Existing test contact devices require customized receptacles for each type of test contact, limiting their versatility and precision in accommodating multiple test contacts with high density and small distances.

Method used

A device with a positioning system featuring at least two positioning surfaces, including an edge and a base contact surface, allows for precise and stable positioning of test contacts using edge and base abutment surfaces, enabling accommodation of various test contacts without the need for customized receptacles.

Benefits of technology

Enables reliable and defined operation of test contacts, allowing for flexible and precise positioning of multiple test contacts with enhanced stability and compatibility across different types, while maintaining electrical and positional accuracy.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to an apparatus (10) for operating an inspection contact (100), having a contact head (12) having an inspection contact receiving portion (14) at its contact end (16), wherein the inspection contact receiving portion (14) has a positioning device (18) having at least two, preferably three positioning surfaces (20, 22, 24) for positioning against the inspection contact (100) and for positioning the inspection contact (100) relative to the contact end (16) of the contact head (12), wherein at least one positioning surface (20, 22, 24) of the positioning device (18) is configured as a base abutment surface (20) and at least one other positioning surface of the positioning device (18) is configured as an edge abutment surface (22). Furthermore, the present invention relates to a production system (50) for manufacturing contact devices for inspecting semiconductor devices.
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Description

Technical Field

[0001] This invention relates to a device for operating an inspection contact, comprising a contact head having an inspection contact receiving portion at its contact end, wherein the inspection contact receiving portion has a positioning device having at least two positioning surfaces for positioning against the inspection contact and for positioning the inspection contact relative to the contact end of the contact head, wherein at least one positioning surface of the positioning device is configured as an edge contact surface and at least one other positioning surface of the positioning device is configured as a base contact surface. Furthermore, the invention includes a system according to one embodiment having at least one inspection contact and a device. Prior Technology

[0002] Inspection contacts are known for manufacturing inspection contact devices having multiple inspection contacts on a common inspection platform. The inspection contacts are positioned in a matrix arrangement corresponding to the wafers disposed in a wafer composite, making it possible to achieve defined contact between the individual wafers on the wafer plane via each inspection contact.

[0003] To manufacture a test contact device, each test contact is arranged in a desired matrix configuration corresponding to its contact arm or contact tip on a contact carrier forming a test circuit board and soldered to a contact surface formed on the test circuit board. Due to the high density of test contacts on each test circuit board and the resulting small spacing between them, particularly high requirements are placed on ensuring the test contacts are electrically reliable and accurately oriented and contacted on the test circuit board. For accurate orienting and contact of the test contacts on the test circuit board, high precision in accommodating the test contacts at the contact head of the device for operating the test contacts is necessary. Devices for operating the test contacts are known in various embodiments. For example, devices for manufacturing test contact devices are known in which the test contact receiving portion applies a negative pressure to the test contacts for holding and operating them. It is known that, to orient the test contacts relative to the contact head, the upper edge of the test contact is abutted against the contact head or a stop portion of the test contact receiving portion. However, in known devices for operating inspection contacts, for each design of the inspection contact, additional devices or inspection contact receptacles customized for the corresponding inspection contact are required, and the inspection contact receptacles are also reconstructed and replaced for each inspection contact that is geometrically different. Summary of the Invention

[0004] Based on the foregoing, the object of the present invention is to provide a device that overcomes the shortcomings of the prior art in accommodating inspection contacts. In particular, one object is to provide a device for the defined and reliable operation and accommodating of inspection contacts, which is widely applicable and can accommodate multiple different inspection contacts.

[0005] To achieve the aforementioned objective, a device having features according to an embodiment of the present invention is proposed. Furthermore, a system having such a device is proposed.

[0006] Advantageous embodiments of the invention are the subject of this invention. The scope of the invention includes all combinations consisting of at least two features disclosed herein and / or in the accompanying drawings. It should be understood that embodiments implemented for devices relate to the system according to the invention in an equivalent manner, and are not described separately for that system. It should be understood in particular that, within the scope of common linguistic practice, linguistic variations and / or semantic substitutions of corresponding terms, especially through the use of synonyms aided by generally known linguistic literature, are included in this disclosure but will not be exhaustively mentioned in their respective descriptions.

[0007] In a first aspect, the present invention relates to an apparatus for operating a test contact, the apparatus having a contact head with a test contact receiving portion at its contact end, wherein the test contact receiving portion has a positioning device having at least two, preferably three, positioning surfaces for positioning against the test contact and for positioning the test contact relative to the contact end of the contact head. The apparatus is characterized in that at least one positioning surface of the positioning device is configured as an edge abutment surface and at least one other positioning surface of the positioning device is configured as a base abutment surface. Therefore, the apparatus advantageously achieves precise and oriented positioning of the test contact relative to the contact head by positioning the test contact at the base abutment surface using the base of the test contact and at the edge abutment surface using another edge of the test contact. Within the scope of the invention, the edge abutment surface is a surface different from the base abutment surface, preferably not coinciding with the base abutment surface and more preferably spaced apart from it. Even more preferably, the edge abutment surface and the base abutment surface are arranged at a predetermined angle relative to each other. For example, the edge abutment surface can be oriented vertically, i.e., at a 90° angle relative to the base abutment surface. The configuration of at least three locating surfaces advantageously allows the inspection contact to be received particularly precisely in the inspection contact receiving portion. Furthermore, the base abutment surface and the edge abutment surface can be configured relative to each other such that the base abutment surface is not closed off at its upper side by the edge abutment surface, but rather the edge abutment surface is more precisely positioned on the side of the base abutment surface. The terms “upper,” “lower,” “above,” “below,” and “upper side” and “lower side” within the scope of the invention relate to the device for operating the inspection contact in the use position. Preferably, the foregoing terms relate to spatial extension in the vertical direction, provided the device is in the use position. The term “surface” within the scope of the invention preferably refers to a flat surface. The base abutment surface is preferably rectangular.

[0008] To properly accommodate the inspection contact, the inspection contact can form direct contact with the base abutment surface via its mounting base. The base abutment surface is configured such that the inspection contact rests planarly against the base abutment surface. The base abutment surface is preferably complementary to the mounting base. The mounting base is preferably constructed in the form of a rectangular plate. An edge abutment surface serves to fix the inspection contact relative to the base abutment surface, allowing the inspection contact to move on the base abutment surface until it abuts against the edge abutment surface. After the inspection contact abuts against the base abutment surface and against the edge abutment surface, movement of the inspection contact is preferably prevented in at least two directions.

[0009] As recognized within the scope of this invention, although the positioning device is substantially complementary to the inspection contacts, the positioning surfaces can be configured relative to each other such that multiple different inspection contacts can be accommodated by means of the device according to the invention. In particular, for this purpose, the positioning surfaces can be configured relative to each other such that the total width, total height, and / or material thickness of the inspection contacts to be accommodated are not limited or bounded by the positioning device.

[0010] Here, the term "at least one" is understood to mean that the device according to the invention may include one or more of the relevant components or surfaces.

[0011] According to a preferred embodiment, the positioning device has at least one stop edge, which forms an edge abutment surface preferably perpendicular to the base abutment surface. Advantageously, by forming a solid stop edge, movement of the inspection contact is reliably prevented in at least one direction when abutting against the edge abutment surface formed by the stop edge, and a defined stop surface is created. Preferably, the positioning device includes two stop edges to prevent wedging or tilting, thereby preventing mispositioning. The stop edges are preferably configured such that the edge abutment surface is perpendicular to the base abutment surface. Thus, the inspection contact can abut against the base abutment surface by means of its base and against the stop edge by means of its side edges. Preferably, the stop edge and therefore also the edge abutment surface are located below the upper side of the base abutment surface, making the device widely usable because the height of the inspection contact to be accommodated is not limited by the positioning device.

[0012] The stop edge can have an edge thickness equal to or greater than the material thickness of the inspection contact. This design allows the edge of the inspection contact to be resting against the stop edge to be supported across the entire material thickness of the inspection contact, thus providing extremely stable support.

[0013] It is conceivable that the stop protruding relative to the base abutment surface includes a stop edge. In other words, the stop edge is formed at the stop protruding relative to the base abutment surface. The term "protruding" within the scope of this invention means that the stop extends parallel to and / or along the direction of the normal to the base abutment surface.

[0014] To separate the stop edge and edge abutment surface from the base abutment surface, the stop body may have at least two legs. Preferably, the stop body has two legs. In other words, the stop body is L-shaped. It is conceivable that the first leg extends laterally from the base abutment surface in connection with it, and the second leg is oriented perpendicular to the base abutment surface. An edge abutment surface or stop edge may be formed at the second leg, which is oriented perpendicular to the base abutment surface. These legs are preferably directly connected to each other. More preferably, the first leg is directly adjacent to the base abutment surface.

[0015] According to a preferred embodiment, the positioning device has at least one stop on each side of the base abutment surface, thereby enabling accurate and stable positioning of the inspection contact at the positioning device. The stop can be configured on both sides of the base abutment surface such that the positioning device at least partially has a substantially U-shaped cross-section.

[0016] To increase the contact surface of the inspection contact at the positioning device, it is advisable that the positioning device include a contact body extending laterally relative to the base contact surface. Preferably, the edge of the contact body forms an additional contact surface in a plane with the base contact surface. This advantageously increases the contact surface of the inspection contact, thereby stabilizing the inspection contact at the positioning device. Preferably, the positioning device has two contact bodies extending laterally relative to the base contact surface. More preferably, these two contact bodies are disposed on both sides of the base contact surface.

[0017] In a preferred embodiment, the base abutment surface may have a base abutment surface height, the stop body may have a stop body height, and the abutment body may have an abutment body height, wherein the base abutment surface height is greater than the stop body height and / or greater than the sum of the stop body height and the abutment body height. This is therefore preferred in a visually illustrative manner. h BA> h AK and / or h BA> h AK+ h ANL in h BA: Height of the base against the surface, h AK: Stop height, h ANL: Height of the object being pressed against. The preferred option satisfies two conditions.

[0018] In another improvement of the invention, it is conceivable that the positioning device has a total width and the base abutment surface has a base abutment surface width, wherein the base abutment surface width is less than the total width. It has been recognized within the scope of the invention that, in order to reliably accommodate the inspection contact, the base abutment surface width and the total width of the positioning device need to be matched. According to the invention, the inspection contact is planarly abutted against the base abutment surface. In particular, in order to configure the device for wide applicability to different inspection contacts, additional elements of the positioning device, such as stops or abutments, can be formed on both sides of the base abutment surface, which increase the total width of the positioning device. Especially when abutments are provided on both sides of the base abutment surface, it is feasible in a simple manner and method to position the inspection contact relative to the inspection contact receiving portion by having the base of the inspection contact abut against the base abutment surface and at least partially pushed between the stops until the edge of the inspection contact abuts against the edge abutment surface of the stop. Preferably, the total width is formed by the width of the stop and / or the abutment and the width of the base abutment surface. It is conceivable that the stop and the abutment have the same width. The terms "base abutment surface width" and "total width" respectively refer to the spatial extension parallel to the lower edge of the inspection contact receiving portion or contact head. Preferably, the foregoing terms refer to the spatial extension along the horizontal direction, provided the device is in the use position.

[0019] In one embodiment of the invention, the positioning device can be constructed as a single piece to eliminate the need for connection parts and / or installation steps. Preferably, the positioning device, the inspection contact receiver, and / or the contact head are constructed as a single piece. In other words, the contact head, the inspection contact receiver, and the positioning device are preferably constructed as a single piece. However, it is also conceivable that the contact head, the inspection contact receiver, and the positioning device are constructed as multiple pieces, wherein these are more preferably detachably connected to allow for easy replacement of the positioning device.

[0020] According to a preferred embodiment, the contact head has at least one transmission channel for transmitting heat energy and / or for transmitting negative pressure, wherein the contact head has a check contact receiving portion in the region of the channel opening at its contact end. As long as the contact head has a transmission channel for transmitting heat energy, it is advantageous to discretely introduce heat energy into the desired absorption region of the check contact while the check contact is oriented accordingly relative to the channel opening, so as to achieve a reliable and distortion-free setting of the check contact on the contact carrier. As long as the contact head has at least one transmission channel for transmitting negative pressure, the check contact can be held at the contact head in a simple and reliable manner by means of negative pressure after being oriented relative to the contact head by means of a positioning device. Preferably, the contact head has at least one transmission channel for transmitting heat energy and for transmitting negative pressure. It has been recognized within the scope of the invention that an advantageous single transmission channel can be used not only for transmitting heat energy but also for transmitting negative pressure. The channel opening is preferably formed by a discharge funnel of the transmission channel and has an open cross-section corresponding to the size of the absorption cross-section of the absorption region of the check contact. By using the corresponding geometric configuration of the channel opening, and with relatively little technical effort, it is feasible to pre-define the surface of the inspection contact for the absorption area of ​​the inspection contact.

[0021] According to an advantageous improvement, the base abutment surface of the positioning device at least partially surrounds the opening cross-section of the channel opening. This ensures that energy input to the base of the inspection contact required for contact can be made and / or that the base of the inspection contact is reliably fixed at the inspection contact receiving portion during the manufacture of the inspection contact device. Preferably, the base abutment surface of the positioning device completely surrounds the opening cross-section of the channel opening, whereby the absorption area of ​​the inspection contact is located within the discharge funnel of the channel opening, thereby allowing heat energy to be loaded onto a particularly large portion of the inspection contact surface in a simple manner and / or allowing the inspection contact to be held by means of a negative pressure by means of the inspection contact's complete coverage of the opening cross-section.

[0022] In a second aspect, the present invention relates to a production system for manufacturing inspection contact devices for inspecting and / or manufacturing semiconductor devices, having apparatus according to any embodiment of the invention, and having at least one inspection contact configured in a cantilever form, wherein the inspection contact has a fixed base that can be abutted against a base abutting surface and a contact arm connected to the fixed base. Preferably, a contact tip is provided at the free end of the contact arm. Besides manufacturing inspection contact devices, the production system can also be used for repairing inspection contact devices, wherein, as is known to those skilled in the art, the inspection contact can also be accommodated and operated in a desired orientation for repairing the inspection contact device.

[0023] According to an advantageous embodiment of the production system, the inspection contact and the device for operating the inspection contact work together such that the fixing base of the inspection contact covers the opening of the transmission channel when the inspection contact is abutting against the base surface. Preferably, the inspection contact completely locks the opening of the channel when it is abutting against the base surface of the positioning device. Thus, the inspection contact can be held at the positioning device in a simple manner and method by loading the inspection contact with negative pressure via the transmission channel.

[0024] According to a preferred embodiment of the production system, the inspection contact has a protrusion disposed below the contact arm, wherein the protrusion can abut against an edge abutment surface and / or abut against abutment body. The protrusion of the contact arm can abut against the stop edge of a stop body, forming an edge abutment surface at the stop body. By means of a stop at the stop edge, the inspection contact can be oriented at the positioning device in a simple manner and method. The abutment surface of the inspection contact at the positioning device can be increased, as long as the protrusion of the inspection contact abuts against the abutment body. Preferably, protrusions are provided on both sides of the base of the inspection contact. More preferably, the protrusion can abut against not only the edge abutment surface but also the abutment body. Most preferably, the inspection contact has two protrusions on both sides of the base of the inspection contact, and the positioning device also has two stops and two abutments, which are respectively disposed on both sides of the abutment surface of the base of the positioning device. Each protrusion of the inspection contact can abut against the stops and abutments of the positioning device, respectively, so as to achieve particularly precise orientation of the inspection contact. Since the inspection contact and the cantilever extending at the upper edge are substantially cross-shaped and the upper edge does not need to abut against the stops, because the protrusion of the inspection contact can abut against the edge of the stops of the positioning device, the positioning device can be used flexibly and widely, especially since there is no height limit for the inspection contact to be positioned.

[0025] It should be understood that the previously mentioned and further described embodiments and examples can be constructed individually or in any combination thereof without departing from the scope of the invention. Similarly, it should be understood that the previously mentioned and further described embodiments and examples relate to the production system or related equipment according to the invention in equivalent or at least similar ways and methods, without needing to be described separately. Simple Explanation of the Diagram

[0026] Embodiments of the invention are schematically shown in the accompanying drawings and illustrated exemplarily below.

[0027] The attached diagram shows:

[0028] [Figure 1] shows an isometric view of a schematic embodiment of a device according to the invention having accommodating inspection contacts;

[0029] [Figure 2] A front view showing a detailed view of the device according to the invention, according to Figure 1, without inspection contacts;

[0030] [Figure 3] A front view showing a detailed view of the device according to the invention based on Figure 1;

[0031] [Figure 4] shows an isometric detailed view of the device according to the invention based on Figure 1; and

[0032] [Figure 5] shows a detailed view of the side of the device according to the invention according to Figure 1. Implementation

[0033] Figure 1 illustrates an apparatus 10 according to the invention for operating an inspection contact 100, the apparatus having the inspection contact 100 according to the invention, thereby constituting a production system 50. To accommodate the inspection contact 100, an inspection contact receiving portion 14 with a positioning device 18 is provided at the contact end 16 of the contact head 12. To hold the inspection contact 100 at the positioning device 18, the inspection contact 100 can be loaded with negative pressure via a transfer channel 34.

[0034] Figure 2 illustrates an apparatus 10 according to the present invention for operating an inspection contact 100. To accommodate the contact contact 100, an inspection contact receiving portion 14 is provided at the contact end 16 of the contact head 12. The inspection contact receiving portion 14 includes a positioning device 18, which further has a base abutment surface 20, an edge abutment surface 22, and an additional abutment surface 24. The inspection contact 100 can abut against the positioning device 18 such that the inspection contact 100 is planarly abutted against the base abutment surface 20 and also against the additional abutment surfaces 24 on both sides of the base abutment surface 20. To prevent movement of the inspection contact 100 along a vertical line extending longitudinally, which is equivalent to the transmission channel 34 in the embodiment shown here, the positioning device 18 has two stops 38 provided on both sides of the base abutment surface 20, in addition to the abutment bodies 36 extending on both sides. These stops respectively constitute the edge abutment surfaces 22, where the edge of the inspection contact 100 can abut. According to the illustrated embodiment, the edge abutment surface 22 is oriented perpendicular to the base abutment surface 20 and points downward in the illustrated use position. The stop 28 constituting the edge abutment surface 22 is substantially L-shaped and has legs 30, 32, wherein the first leg 30 extends laterally from the base abutment surface 20 and the second leg 32 extends from the plane of the base abutment surface 20. Therefore, the inspection contact 100 can be positioned at the positioning device 18 in a simple manner and method, by placing the inspection contact on the base abutment surface 20 and moving it to the stop 28. To hold the inspection contact 100 at the positioning device 18, the inspection contact 100 can be loaded with negative pressure via the transmission channel 34. As can be seen from the overview of Figures 2 and 3, the inspection contact 100, when properly abutting the positioning device 18, completely locks the channel opening 36 of the transmission channel 34 because the base abutment surface 20 completely surrounds the opening cross-section 38 of the channel opening 36. Therefore, the inspection contact 100 can be held at the positioning device 18 in a simple manner and by means of negative pressure. It can also be seen from Figure 2 that the height h BA of the base abutment surface 20 is greater than the sum of the height h AK of the stop 28 and the height h ANL of the abutment 40. It is also seen that the stop 28 and the abutment 40 are disposed below the upper side 42 of the base abutment surface 20, wherein the abutment 40 is also disposed below the stop 28. In this embodiment, the total width b ges of the positioning device 18 is derived from the width of the abutment 40 and the width b BA of the base abutment surface 20, wherein the abutment 40 and the stop 28 have the same width in this embodiment.

[0035] Figures 3 to 5 show an apparatus 10 according to the invention for operating an inspection contact 100, the apparatus having the inspection contact 100 according to the invention, thereby constituting a production system 50. The inspection contact 100 has a fixed base 102 and two protrusions 106 provided on both sides of the fixed base 102. A protruding contact arm 104 is provided in the upper region of the fixed base 102, wherein the upper edge of the contact arm 104 laterally extends the upper edge of the fixed base 102 forming the upper edge 112 of the inspection contact. The fixed base 102 is substantially cross-shaped with the protrusions 106 of the inspection contact 100 and the contact arm 104 protruding at the upper edge 112 of the inspection contact. A contact tip 108 for contact is provided at the contact arm 104. From the overview with Figure 2, it can be seen that the inspection contact 100 abuts against the base abutment surface 20 of the positioning device 18 in Figures 3 to 5 by means of the fixed base 102. Furthermore, the protrusion 106 rests planarly against the additional abutment surface 24 of the abutment body 40. The upper edge 108 of the protrusion 106 rests against the stop edge 26 of the stop body 28. To orient the inspection contact 100 relative to the contact head 12 by means of the positioning device 18, it is not necessary for the upper edge 112 of the inspection contact to rest against the stop, because the upper edge 110 of the protrusion 106 of the inspection contact 100 can rest against the stop edge 26 of the stop body 28. Therefore, the device 10 and, in particular, the positioning device 18 can be used flexibly and extensively, because there is no height limit for the inspection contact 100 to be positioned. Here, it can be seen, particularly from Figures 4 and 5, that the stop edge 26 has an edge thickness greater than the material thickness of the inspection contact 100, in order to ensure that the inspection contact 100 is reliably supported at the stop body 28. Furthermore, as can be seen from the overview in Figures 3 to 5, the channel opening 36 in the inlet contact head 12 of the transmission channel 34 is closed by the inspection contact 100 when it is properly abutting against the positioning device 18, so that the inspection contact 100 can be held at the positioning device 18 via the transmission channel 34 when loaded with negative pressure, and can then be moved to the location provided for contacting the inspection contact 100.

[0036] 10: Equipment used for operating and inspecting contacts 12: Contact head 14: Inspect the contact housing 16: Contact end 18: Positioning device 20: Base against surface 22: Edge against surface 24: Additional backing 26: Stop edge 28: Stop body 30: First Leg 32: Second leg 34: Transmission Channel 36: Passage entrance 38: Opening cross-section 40: Attached body 42: The upper side of the base surface 50: Production System 100: Check contacts 102: Fixed base 104: Contact Arm 106: Protruding part 108: Contact tip 110: Upper edge of the protruding part 112: Check the upper edge of the contact. h BA: Base contact surface height h AK: Stop body height h ANL: Height of the object being touched b ges: Total width b BA: Width of the base contact surface

Claims

1. A device (10) for operating an inspection contact (100), the device (10) having a contact head (12) having an inspection contact receiving portion (14) at its contact end (16), wherein the inspection contact receiving portion (14) has a positioning device (18) having at least two positioning surfaces (20, 22, 24) for positioning against the inspection contact (100) and for positioning the inspection contact (100) relative to the contact end (16) of the contact head (12), wherein, At least one positioning surface (20, 22, 24) of the positioning device (18) is configured as a base abutment surface (20) and at least one additional positioning surface of the positioning device (18) is configured as an edge abutment surface (22), wherein the positioning device (18) has at least one stop edge (26) constituting the edge abutment surface (22), wherein the stop edge (26) includes a stop body (28) protruding relative to the base abutment surface (20), and wherein the stop body (28) has at least two legs (30, 32).

2. The device for operating inspection contacts according to claim 1, wherein, The stop edge (26) has an edge thickness equal to or greater than the material thickness of the inspection contact (100).

3. The device for operating the inspection contacts according to claim 1, wherein, The positioning device (18) has at least one stop (28) on both sides of the base contact surface (20).

4. The device for operating inspection contacts according to claim 1, wherein, The positioning device (18) includes a mating body (40) that extends laterally relative to the mating surface (20) of the base.

5. The device for operating inspection contacts according to claim 1, wherein, The base abutment surface (20) has a base abutment surface height (hBA), the stop body (28) has a stop body height (hAK), and the abutment body (40) has an abutment body height (hANL), wherein the base abutment surface height (hBA) is greater than the stop body height (hAK) and / or greater than the sum of the stop body height (hAK) and the abutment body height (hANL).

6. The device for operating inspection contacts according to claim 1, wherein, The positioning device (18) has a total width (bges) and the base abutment surface (20) has a base abutment surface width (bBA), wherein the base abutment surface width (bBA) is smaller than the total width (bges).

7. The device for operating inspection contacts according to claim 1, wherein, The positioning device (18) is a single piece.

8. The device for operating inspection contacts according to claim 1, wherein, The contact head (12) has at least one transmission channel (34) for transmitting heat energy and / or for transmitting negative pressure, wherein the contact head (12) has the inspection contact receiving portion (14) in the region of the channel opening (36) of the transmission channel (34) at its contact end (16).

9. The device for operating inspection contacts according to claim 8, wherein, The base abutment surface (20) of the positioning device (18) at least partially surrounds the opening cross section (38) of the channel opening (36).

10. The device for operating inspection contacts according to claim 1, wherein, The positioning device (18) has three positioning surfaces (20, 22, 24), and the edge abutment surface (22) is oriented perpendicular to the base abutment surface (20).

11. A production system (50) for manufacturing an inspection contact device for inspecting semiconductor devices, having a device (10) according to any one of the preceding claims, and having at least one inspection contact (100) configured in a cantilever form, wherein the inspection contact (100) has a fixed base (102) that can abut against a base abutment surface (20) and a contact arm (104) connected to the fixed base (102).

12. The production system according to claim 11, wherein, The fixed base (102) of the inspection contact (100) covers the channel opening (36) when it is abutting against the base abutting surface (20).

13. The production system according to claim 11 or 12, wherein, The inspection contact (100) has a protrusion (106) disposed below the contact arm (104), wherein the protrusion (106) is capable of abutting against the edge abutting surface (22) and / or the protrusion (106) is capable of abutting against the abutting body (36).