Method of manufacturing display apparatus

Abstract

The present invention provides a method for manufacturing a display device using a mask assembly. The mask assembly includes: a mask frame; a mask plate on the mask frame and including a plurality of openings; at least two first mask plates on the mask frame and covering a portion of the plurality of openings in the mask plate; and at least two second mask plates on the mask frame and covering a portion of the plurality of openings in the mask plate. The at least two first mask plates and the at least two second mask plates define a deposition region including a portion of the plurality of openings in the mask plate by covering a portion of the plurality of openings in the mask plate, and the deposition region is divided into a first deposition region and a second deposition region.

Description

Technical Field

[0001] Cross - Reference to Related Applications This application claims the benefit and priority of Korean Patent Application No. 10 - 2018 - 0116584, filed on September 28, 2018, with the Korean Intellectual Property Office (KIPO), the entire contents of which are incorporated herein by reference.

[0002] Aspects of one or more embodiments relate to an apparatus, and more particularly, to a mask assembly and an apparatus for manufacturing a display device using the mask assembly. Prior Art

[0003] Mobile electronic devices have been widely used. Tablet personal computers (PCs) and small electronic devices such as smart phones have recently been widely used as mobile electronic devices.

[0004] Mobile electronic devices include a display device for providing visual information such as images to a user to support various functions. Recently, as other components for driving the display device have been miniaturized, the percentage of the display device in mobile electronic devices has gradually increased, and structures have been developed to bend at a predetermined angle from a flat state.

[0005] The display device may include a display area for displaying an image. The display area may be formed to have various shapes in order to manufacture various electronic devices. That is, the display area may be formed to have an irregular shape rather than a rectangular shape.

[0006] A mask assembly for forming a display area having an irregular shape may be thermally deformed or distorted by thermal deformation or applied tensile force, so that an existing mask assembly may be changed to have a value different from a design value. Summary of the Invention

[0007] According to aspects of one or more embodiments, there is provided a mask assembly that minimizes or reduces deformation, an apparatus for manufacturing a display device, and a display device.

[0008] Additional aspects will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the presented embodiments.

[0009] According to one or more embodiments, a mask assembly includes: a mask frame; a mask plate on the mask frame and including a plurality of openings; at least two first shielding plates on the mask frame and shielding a part of the plurality of openings in the mask plate, the at least two first shielding plates being spaced apart from each other; and at least two second shielding plates on the mask frame and shielding a part of the plurality of openings in the mask plate, each of the at least two second shielding plates being formed to have an angle (e.g., a predetermined angle) relative to each of the at least two first shielding plates, the at least two second shielding plates being spaced apart from each other, wherein the at least two first shielding plates and the at least two second shielding plates define a deposition area including a part of the plurality of openings in the mask plate by shielding a part of the plurality of openings in the mask plate, wherein the deposition area is divided into a first deposition area and a second deposition area by a straight line passing through the center of the space formed by two adjacent first shielding plates among the at least two first shielding plates and parallel to the longitudinal direction of the first shielding plate among the at least two first shielding plates, and the shapes of the first deposition area and the second deposition area are different from each other.

[0010] The first shielding plate may include: a first shielding plate main body portion; and a first protrusion protruding from the first shielding plate main body portion to have an angle (e.g., a predetermined angle) relative to the longitudinal direction of the first shielding plate main body portion.

[0011] The number of the first protrusions may be plural, and two of the plural first protrusions are located opposite each other relative to the first shielding plate main body portion.

[0012] Two first protrusions located opposite each other relative to the first shielding plate main body portion may have the same shape.

[0013] A part of at least one of the first shielding plate and the second shielding plate may be symmetric about a virtual center line parallel to the longitudinal direction of one of the first shielding plate or the second shielding plate.

[0014] The first shielding plate and the second shielding plate may be perpendicular to each other.

[0015] The second shielding plate may include: a second shielding plate main body portion; and a second protrusion protruding from the second shielding plate main body portion.

[0016] The number of the second protrusions may be plural, and two of the plural second protrusions are positioned opposite to each other with respect to the second shielding plate main body portion.

[0017] The first shielding plate may include: a first shielding plate main body portion; and a first protrusion protruding from the first shielding plate main body portion to have an angle (e.g., a predetermined angle) in a longitudinal direction with respect to the first shielding plate main body portion.

[0018] At least a part of the first protrusion and the second protrusion may overlap each other.

[0019] The first protrusion and the second protrusion may have different shapes.

[0020] The first protrusion and the second protrusion may have different areas.

[0021] According to one or more embodiments, an apparatus for manufacturing a display device includes: a deposition source; a mask assembly facing the deposition source to allow deposited material ejected from the deposition source to pass therethrough; a substrate support portion facing the mask assembly and supporting a substrate on which the deposited material passing through the mask assembly is deposited, wherein the mask assembly includes: a mask frame; a mask plate on the mask frame and including a plurality of openings; at least two first shielding plates on the mask frame and shielding a part of the plurality of openings in the mask plate, the at least two first shielding plates being spaced apart from each other; and at least two second shielding plates on the mask frame and shielding a part of the plurality of openings in the mask plate, each of the at least two second shielding plates being formed to have an angle (e.g., a predetermined angle) with respect to each of the at least two first shielding plates, the at least two second shielding plates being spaced apart from each other, wherein the at least two first shielding plates and the at least two second shielding plates define a deposition region including a part of the plurality of openings in the mask plate by shielding a part of the plurality of openings in the mask plate, wherein the deposition region is divided into a first deposition region and a second deposition region by a straight line passing through the center of the space formed by two adjacent first shielding plates among the at least two first shielding plates and parallel to the longitudinal direction of the first shielding plate among the at least two first shielding plates, and the shapes of the first deposition region and the second deposition region are different from each other.

[0022] The first shielding plate may include: a main body portion of the first shielding plate; and a first protrusion protruding from the main body portion of the first shielding plate at an angle (e.g., a predetermined angle) with respect to the longitudinal direction of the main body portion of the first shielding plate.

[0023] The first protrusion may include a plurality of first protrusions, and two of the plurality of first protrusions are positioned opposite to each other with respect to the main body portion of the first shielding plate.

[0024] Two first protrusions positioned opposite to each other with respect to the main body portion of the first shielding plate may have the same shape.

[0025] At least a part of one of the first shielding plate and the second shielding plate may be symmetric with respect to a virtual center line parallel to the longitudinal direction of one of the first shielding plate and the second shielding plate.

[0026] The first shielding plate and the second shielding plate may be perpendicular to each other.

[0027] The second shielding plate may include: a main body portion of the second shielding plate; and a second protrusion protruding from the main body portion of the second shielding plate.

[0028] The second protrusion may include a plurality of second protrusions, and two of the plurality of second protrusions are positioned opposite to each other with respect to the main body portion of the second shielding plate.

[0029] The first shielding plate may include: a main body portion of the first shielding plate; and a first protrusion protruding from the main body portion of the first shielding plate at an angle (e.g., a predetermined angle) with respect to the longitudinal direction of the main body portion of the first shielding plate.

[0030] At least a part of the first protrusion and the second protrusion may overlap each other.

[0031] The first protrusion and the second protrusion may have different shapes.

[0032] The first protrusion and the second protrusion may have different areas.

[0033] According to one or more embodiments, a method of manufacturing a display device includes: arranging a display substrate and a mask assembly in a chamber; aligning the display substrate with the mask assembly; and forming a deposition material pattern on the display substrate by supplying deposition material from a deposition source facing the mask assembly, wherein the mask assembly includes: a mask frame; a mask plate on the mask frame and including a plurality of openings; at least two first shielding plates on the mask frame and shielding a part of the plurality of openings in the mask plate, the at least two first shielding plates being spaced apart from each other; and at least two second shielding plates on the mask frame and shielding a part of the plurality of openings in the mask plate, each of the at least two second shielding plates being formed to have an angle (e.g., a predetermined angle) relative to each of the at least two first shielding plates, the at least two second shielding plates being spaced apart from each other, wherein the at least two first shielding plates and the at least two second shielding plates define a deposition area including a part of the plurality of openings in the mask plate by shielding a part of the plurality of openings in the mask plate, wherein the deposition area is divided into a first deposition area and a second deposition area by a straight line passing through the center of the space formed by two adjacent first shielding plates among the at least two first shielding plates and parallel to the longitudinal direction of a first shielding plate among the at least two first shielding plates, and the shapes of the first deposition area and the second deposition area are different from each other.

[0034] The first shielding plate may include: a first shielding plate main body portion; and a first protrusion protruding from the first shielding plate main body portion to have an angle (e.g., a predetermined angle) relative to the longitudinal direction of the first shielding plate main body portion.

[0035] The first protrusion may include a plurality of first protrusions, wherein two first protrusions among the plurality of first protrusions are positioned opposite to each other relative to the first shielding plate main body portion.

[0036] The two first protrusions positioned opposite to each other relative to the first shielding plate main body portion may have the same shape.

[0037] A part of at least one of the first shielding plate and the second shielding plate may be symmetric with respect to a virtual center line parallel to the longitudinal direction of one of the first shielding plate or the second shielding plate.

[0038] The first shielding plate and the second shielding plate may be perpendicular to each other.

[0039] The second shielding plate may include: a second shielding plate main body portion; and a second protrusion protruding from the second shielding plate main body portion.

[0040] The second protrusion may include a plurality of second protrusions, wherein two of the plurality of second protrusions are positioned opposite to each other with respect to the second shielding plate main body portion.

[0041] The first shielding plate may include: a first shielding plate main body portion; and a first protrusion protruding from the first shielding plate main body portion to have an angle (e.g., a predetermined angle) with respect to the longitudinal direction of the first shielding plate main body portion.

[0042] At least a part of the first protrusion and the second protrusion may overlap each other.

[0043] The first protrusion and the second protrusion may have different shapes.

[0044] The first protrusion and the second protrusion may have different areas.

[0045] According to one or more embodiments, a method of manufacturing a display device includes: disposing a display substrate and a mask assembly in a cavity; aligning the display substrate with the mask assembly; forming a deposition material pattern on the display substrate by supplying a deposition material from a deposition source facing the mask assembly, wherein the deposition material pattern formed on the display substrate is used to form a display area, the display area is divided into two areas by a straight line passing through the center of the display area, and the two areas of the display area are asymmetric with respect to each other.

[0046] The mask assembly may define a deposition area through which the deposition material is deposited on the display substrate such that the deposition area corresponds to the display area.

[0047] The mask assembly may include: a mask plate on a mask frame and including a plurality of openings; at least two first shielding plates on the mask frame and shielding a part of the plurality of openings of the mask plate, the at least two first shielding plates being spaced apart from each other; and at least two second shielding plates on the mask frame and shielding a part of the plurality of openings of the mask plate, the at least two second shielding plates having an angle (e.g., a predetermined angle) with respect to each of the at least two first shielding plates, the at least two second shielding plates being spaced apart from each other, wherein the at least two first shielding plates and the at least two second shielding plates define the deposition area.

[0048] According to one or more embodiments, a method of manufacturing a display device includes: disposing a display substrate and a mask assembly in a cavity; aligning the display substrate with the mask assembly; forming a deposition material pattern on the display substrate by supplying deposition material from a deposition source facing the mask assembly, wherein the deposition material pattern formed on the display substrate is used to form a display area, the display area includes a first display area and a second display area, the first display area is formed when a portion of the deposition material is shielded by a protrusion of a first shielding plate of the mask assembly, the protrusion of the first shielding plate of the mask assembly protrudes into a deposition area defined by the mask assembly; and the second display area is formed when a portion of the deposition material is shielded by a protrusion of a second shielding plate of the mask assembly, the protrusion of the second shielding plate of the mask assembly protrudes into the deposition area defined by the mask assembly. Brief Description of the Drawings

[0049] With reference to the accompanying drawings, these and / or other aspects will become apparent and easier to understand from the following description of some embodiments, in which: FIG. 1 is a perspective view of a mask assembly according to an embodiment; FIG. 2 is a plan view showing the first shielding plate of FIG. 1; FIG. 3 is a plan view showing the second shielding plate of FIG. 1; FIG. 4A is a plan view showing a deposition area of a general mask assembly; FIG. 4B is a plan view showing a deposition area of the mask assembly of FIG. 1; FIG. 5 is a cross-sectional view of a device for manufacturing a display device using the mask assembly of FIG. 1; FIG. 6 is a plan view of a display device manufactured by using the device of FIG. 5; FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 6; FIG. 8 is a plan view showing the second shielding plate of a mask assembly according to another embodiment; FIG. 9 is a plan view of a display device manufactured by using a mask assembly including the second shielding plate of FIG. 8; FIG. 10 is a plan view showing the second shielding plate of a mask assembly according to another embodiment; FIG. 11 is a plan view of a display device manufactured by using a mask assembly including the second shielding plate of FIG. 10; FIG. 12 is a plan view showing the first shielding plate and the second shielding plate of a mask assembly according to another embodiment; and FIG. 13 is a plan view of a display device manufactured by using a mask assembly including the first shielding plate and the second shielding plate of FIG. 12. Embodiments

[0050] This disclosure may include various embodiments and modifications, and some of its embodiments will be illustrated in the accompanying drawings and will be described in further detail herein. With the accompanying drawings, the effects and features of this disclosure and its attached methods will become apparent from the description of the following embodiments. However, this disclosure is not limited to the embodiments described below and can be implemented in various modes.

[0051] Now, some embodiments will be referred to in more detail, which are illustrated in the accompanying drawings. In the accompanying drawings, the same elements are represented by the same reference numerals, and no repeated description will be given thereto.

[0052] It should be understood that although terms such as "first", "second", etc. may be used herein to describe various elements, these elements should not be limited to these terms. These terms are used to distinguish one element from another.

[0053] As used herein, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are also intended to include the plural forms.

[0054] It should also be understood that the terms "comprises" and / or "comprising" as used herein specify the presence of features or components, but do not exclude the presence or addition of one or more other features or components.

[0055] It should also be understood that when a layer, region, or element is said to be "formed on" another layer, region, or element, it can be formed directly or indirectly on another layer, region, or element. That is, for example, one or more intermediate layers, regions, or elements may exist.

[0056] For ease of illustration, the dimensions of the elements may be exaggerated. In other words, for ease of illustration, the dimensions and thicknesses of the elements in the accompanying drawings may be arbitrarily drawn, and thus the following embodiments are not limited thereto.

[0057] When a certain embodiment can be implemented differently, the specific process sequence may be different from the described sequence. For example, two consecutively described processes may be performed substantially simultaneously, or in a sequence opposite to the described sequence.

[0058] It should be understood that when a layer, region, or component is referred to as "connected", the layer, region, or component can be directly connected, or can be indirectly connected through one or more intermediate layers, regions, or components therebetween. For example, when a layer, region, or component is electrically connected, the layer, region, or component can be directly electrically connected, or can be indirectly electrically connected through one or more intermediate layers, regions, or components therebetween.

[0059] As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. When an expression like "at least one of..." is placed before a list of elements, it modifies the entire list of elements, rather than a single element in the list.

[0060] For ease of description, spatial relative terms such as "beneath", "below", "lower", "above", "upper", and their like may be used herein to describe the relationship of one element or feature to another element or feature as illustrated in the figures. It should be understood, however, that spatial relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, an element described as "below" or "beneath" another element or feature will be oriented "above" the other element or feature. Thus, the exemplary term "below" can encompass both the lower and upper orientations. The device may be oriented in other directions (rotated 90 degrees or otherwise), and the spatial relative descriptions used herein are to be interpreted accordingly.

[0061] Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which exemplary embodiments of the present inventive concept pertain. It should be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with the meaning in the relevant art and will not be interpreted in an idealized or overly formal manner, unless expressly so defined herein.

[0062] FIG. 1 is a perspective view of a mask assembly 150 according to an embodiment.

[0063] FIG. 2 is a plan view showing the first shielding plate of FIG. 1; FIG. 3 is a plan view showing the second shielding plate of FIG. 1; FIG. 4A is a plan view showing the deposition area of a general mask assembly; and FIG. 4B is a plan view showing the deposition area of the mask assembly 150 of FIG. 1.

[0064] Referring to FIGS. 1 to 4B, the mask assembly 150 may include a mask frame 151, a mask plate 152, a first shielding plate 153, and a second shielding plate 154.

[0065] In an embodiment, the mask frame 151 may be formed such that the frames in a plurality of frames are connected to each other to form an internal space. In an embodiment, the mask frame 151 may have a frame shape having an opening at its center. In another embodiment, the mask frame 151 may have a lattice shape, such as a window frame having a plurality of openings. For ease of explanation, the case where an opening is formed at the center of the mask frame 151 will be further described in detail below.

[0066] At least two mask plates 152 may be provided and may be provided on the mask frame 151 spaced apart from each other. In this case, the mask plates 152 may be arranged in a first direction (e.g., direction Y or direction X in FIG. 1). For ease of explanation, the case where the first direction is direction X in FIG. 1 will be further described in detail below.

[0067] Each of the mask plates 152 may include at least one opening 152-1. In particular, a plurality of openings 152-1 may be formed in the longitudinal direction of the mask plate 152. In an embodiment, the plurality of openings 152-1 may be spaced apart from each other at an interval (e.g., a predetermined interval) and may be formed in the entire surface of the mask plate 152.

[0068] The first shielding plate 153 may be located between the mask frame 151 and the mask plate 152. In an embodiment, a plurality of first shielding plates 153 may be provided and may be located on the mask frame 151 at intervals from each other. For example, the plurality of first shielding plates 153 may be spaced apart from each other in the longitudinal direction of the mask plate 152. Further, the first shielding plate 153 may be formed to have an angle (e.g., a predetermined angle) with respect to the mask plate 152. For example, the first shielding plate 153 may be disposed in a direction (e.g., direction X or direction Y in FIG. 1) perpendicular to the longitudinal direction of the mask plate 152. For the sake of explanation, the case where the first shielding plate 153 is disposed in direction Y in FIG. 1 will be further described in detail below.

[0069] In an embodiment, the first shielding plate 153 may be symmetric about a first center line C1 that is parallel to the longitudinal direction of the first shielding plate 153 and passes through the center of the first shielding plate 153. The first shielding plate 153 may include a first shielding plate main body portion 153-1 provided on the mask frame 151 and a first protrusion 153-2 protruding from the first shielding plate main body portion 153-1.

[0070] The first shielding plate main body portion 153-1 may have a straight plate shape. In this case, the first shielding plate main body portion 153-1 may be disposed in a direction (or a second direction, direction Y in FIG. 1) perpendicular to the longitudinal direction of the mask plate 152.

[0071] The first protrusion 153-2 may protrude from the first shielding plate main body portion 153-1 in the longitudinal direction of the mask plate 152. In this case, the first protrusion 153-2 may define a boundary of the deposition region S together with the first shielding plate main body portion 153-1. In this case, the first protrusion 153-2 may define the boundary of the deposition region S in any of various shapes. In particular, the first protrusion 153-2 may define an inclined portion or a curved portion in the boundary of the deposition region S, and the inclined portion or the curved portion has an angle (e.g., a predetermined angle) with respect to the first shielding plate main body portion 153-1. In this case, the first protrusion 153-2 may shield a part of the plurality of openings 152-1 of the mask plate 152. For example, the first protrusion 153-2 may shield a part of the opening 152-1 disposed at the boundary (or edge) of the deposition region S. In this case, the deposition material may pass through only a part of the opening 152-1.

[0072] In an embodiment, the first protrusion 153-2 may protrude from both sides of the first shielding plate main body portion 153-1 to have an angle (e.g., a predetermined angle) with respect to the longitudinal direction of the first shielding plate main body portion 153-1. In an embodiment, with respect to the first shielding plate main body portion 153-1, two first protrusions 153-2 may be provided on both sides of the first shielding plate main body portion 153-1. In this case, the two first protrusions 153-2 located on both sides of the first shielding plate main body portion 153-1 may have the same shape and the same size. In an embodiment, a plurality of first protrusions 153-2 may be provided. In this case, the plurality of first protrusions 153-2 may be divided into a plurality of groups, each group containing two first protrusions 153-2, and the first protrusions 153-2 of each group may be spaced apart from each other in the longitudinal direction of the first shielding plate main body portion 153-1. In this case, both sides of the first shielding plate 153 may be symmetric with respect to the first center line C1.

[0073] The second shielding plate 154 may be positioned to have an angle (e.g., a predetermined angle) with respect to the first shielding plate 153. In an embodiment, the second shielding plate 154 may be arranged perpendicular to the first shielding plate 153. The second shielding plate 154 may together with the first shielding plate 153 define a deposition area S. In this case, the second shielding plate 154 may be located between the mask frame 151 and the mask plate 152. In an embodiment, a plurality of second shielding plates 154 may be provided, and the plurality of second shielding plates 154 may be spaced apart from each other in the longitudinal direction of the first shielding plate 153.

[0074] In an embodiment, the second shielding plate 154 may be symmetric with respect to a second center line C2 that is parallel to the longitudinal direction of the second shielding plate 154 and passes through the center of the second shielding plate 154. The second shielding plate 154 may include a second shielding plate main body portion 154-1 and a second protrusion 154-2.

[0075] The second shielding plate main body portion 154-1 may have a straight plate shape. In this case, the second shielding plate main body portion 154-1 may be located in the longitudinal direction of the mask plate 152.

[0076] The second protrusion 154-2 can protrude from the second shielding plate main body portion 154-1 in the longitudinal direction of the first shielding plate main body portion 153-1. The second protrusion 154-2 can, together with the second shielding plate main body portion 154-1, define the boundary (or edge) of the deposition region S. In this case, the second protrusion 154-2 can define the boundary of the deposition region S in any of various shapes. For example, the second protrusion 154-2 can define an inclined portion or a curved portion in the boundary of the deposition region S, and the inclined portion or the curved portion has an angle (e.g., a predetermined angle) relative to the second shielding plate main body portion 154-1. In this case, like the first protrusion 153-2, the second protrusion 154-2 can shield a part of the plurality of openings 152-1.

[0077] The second protrusion 154-2 can be different from the first protrusion 153-2. For example, the shape of the second protrusion 154-2 can be different from the shape of the first protrusion 153-2. In another embodiment, the first protrusion 153-2 and the second protrusion 154-2 can have the same shape and different areas (or sizes). In this case, the first protrusion 153-2 and the second protrusion 154-2 can be formed to at least partially overlap each other. In another embodiment, only some of the plurality of first protrusions 153-2 can overlap the second protrusion 154-2.

[0078] The second protrusion 154-2 can protrude from the second shielding plate main body portion 154-1 to have an angle (e.g., a predetermined angle) relative to the longitudinal direction of the second shielding plate main body portion 154-1. In an embodiment, a plurality of second protrusions 154-2 can be provided. In this case, the plurality of second protrusions 154-2 can be divided into groups, with two second protrusions 154-2 in each group, and the plurality of groups can be spaced apart from each other in the longitudinal direction of the second shielding plate main body portion 154-1. Moreover, the two second protrusions 154-2 of each group can be positioned opposite to each other relative to the second shielding plate main body portion 154-1. In this case, the two opposite second protrusions 154-2 can have the same shape and the same size. In this case, both sides of the second shielding plate 154 can be symmetric with respect to the second center line C2.

[0079] A plurality of first shielding plates 153 and a plurality of second shielding plates 154 can define at least one deposition area S. In this case, a deposition area S can refer to an area where deposition material passes through a plurality of openings 152-1 in a space formed by two adjacent first shielding plates 153 and two adjacent second shielding plates 154. The deposition area S can have an irregular shape that does not include a rectangular shape or a square shape. For example, the deposition area S can have a triangular shape, a polygonal shape, an elliptical shape, or a circular shape. In this case, the irregular shape of the deposition area S can refer to a case where a first deposition area S1 and a second deposition area S2 located on both sides of a third center line C3 with respect to the third center line C3 have different shapes.

[0080] The deposition area S can be divided into a first deposition area S1 and a second deposition area S2 by a third center line C3 that is parallel to the first shielding plate 153 and passes through the center of the deposition area S. In this case, the first deposition area S1 and the second deposition area S2 can have different shapes. That is, the first deposition area S1 and the second deposition area S2 can be asymmetric with respect to each other about the third center line C3. In an embodiment, an edge portion of the first deposition area S1 can be round. In contrast, an edge portion of the second deposition area S2 can be inclined.

[0081] In an embodiment, the first shielding plate 153, the second shielding plate 154, and the mask plate 152 can be formed of different materials. For example, the first shielding plate 153 and the second shielding plate 154 can include austenitic stainless steel, and the mask plate 152 can include a nickel-iron alloy (e.g., Invar).

[0082] In a method of manufacturing the mask assembly 150 according to an embodiment, the first shielding plate 153 and the second shielding plate 154 can be located on the mask frame 151 and then fixed to the mask frame 151.

[0083] More specifically, after the second shielding plate 154 is located on the mask frame 151, the second shielding plate 154 can be stretched. In this case, since both sides of the second shielding plate 154 are symmetric with respect to the second center line C2, distortion or local deformation can be prevented even when a tensile force is applied. In addition, when the deposition material passes through the second shielding plate 154, due to the deposition material at high temperature, deformation of the second shielding plate 154 occurs uniformly over some extent of the entire second shielding plate 154, and because of the symmetric shape of the second shielding plate 154, both sides of the second shielding plate 154 can be deformed equally with respect to the second center line C2, so that distortion or excessive local deformation of the second shielding plate 154 can be prevented or substantially prevented.

[0084] Both ends of the second shielding plate 154 can be fixed to the mask frame 151 while being inserted into the mask frame 151.

[0085] The first shielding plate 153 can be located on the mask frame 151 and then fixed to the mask frame 151, just like the second shielding plate 154. In this case, a tensile force can also be applied to the first shielding plate 153. In this case, since both sides of the first shielding plate 153 are symmetric with respect to the first center line C1, when the first shielding plate 153 is stretched, the entire first shielding plate 153 can be deformed almost equally.

[0086] Generally, when forming a deposition region with an irregular shape by using only the first shielding plate, the shapes of the first protrusions on both sides of the main body portion of the first shielding plate must be different from each other. In this case, when the first shielding plate is stretched or when the first shielding plate is heated by the high-temperature deposition material, due to the asymmetric shape of the first shielding plate, the change rates in each part of the first shielding plate are different from each other, thereby forming a deposition region with a value different from the design value. Accordingly, since a light-emitting region different from the design shape is formed on the display substrate, defects may occur and the quality may be reduced.

[0087] However, in this embodiment, since the first shielding plate 153 and the second shielding plate 154 are formed such that both sides of each of the first shielding plate 153 and the second shielding plate 154 are symmetric with respect to the center line parallel to their respective longitudinal directions as described above, deformation during stretching or deposition of the deposition material can be minimized or reduced. In addition, since the second protrusion 154-2 of the second shielding plate 154 overlaps the first protrusion 153-2 of the first shielding plate 153, a deposition region S with an irregular shape can be formed.

[0088] When the first shielding plate 153 and the second shielding plate 154 are placed as described above, at least a part of the first protrusion 153-2 may overlap at least a part of the second protrusion 154-2. In this case, a part of the second protrusion 154-2 may protrude outside the first protrusion 153-2. Accordingly, the second protrusion 154-2 may form a boundary of the second deposition region S2, and the boundary of the second deposition region S2 is different from the boundary of the first deposition region S1 formed by the first protrusion 153-2 in the first deposition region S1.

[0089] In an embodiment, the first shielding plate 153 and the second shielding plate 154 may be located on the mask frame 151, and then the mask plate 152 may be positioned as described above. In this case, the first shielding plate 153 and the second shielding plate 154 may be stacked alternately on the mask frame 151, or the second shielding plate 154 and the first shielding plate 153 may be stacked alternately on the mask frame 151. For ease of explanation, the case where the mask frame 151, the second shielding plate 154, and the first shielding plate 153 are stacked alternately will be further described in detail below.

[0090] The mask plate 152 may be located in the same direction as one of the first shielding plate 153 and the second shielding plate 154. For ease of explanation, the case where the mask plate 152 is located in the same direction as the second shielding plate 154 will be further described in detail below.

[0091] The stretched mask plate 152 may be located on the mask frame 151 and may be fixed to the mask frame 151.

[0092] Accordingly, since the deformation of the first shielding plate 153 during the manufacture of the mask assembly 150 is minimized or reduced, a deposition region S similar to or the same as a pre-designed deposition region may be formed.

[0093] FIG. 5 is a cross-sectional view of an apparatus for manufacturing a display device using the mask assembly 150 of FIG. 1.

[0094] Referring to FIG. 5, according to an embodiment, an apparatus 100 for manufacturing a display device may include a cavity 110, a first support portion 120, a second support portion 130, a mask assembly 150, a source unit 140, a magnetic unit 160, a vision unit 170, and a pressure adjustment unit 180.

[0095] An internal space may be formed in the cavity 110, and the cavity 110 may have an opening portion. In this case, a gate valve 110-1 may be provided at the opening portion of the cavity 110. In this case, the opening portion of the cavity 110 may be opened or closed according to the operation of the gate valve 110-1.

[0096] The first support portion 120 may allow the display substrate D to be mounted thereon and may support the display substrate D. In an embodiment, the first support portion 120 may have a plate shape fixed inside the cavity 110. In another embodiment, the first support portion 120 may allow the display substrate D to be mounted thereon and may linearly shuttle in the cavity 110. In another embodiment, the first support portion 120 may include an electrostatic chuck or an adhesive chuck fixed to or elevatable with respect to the cavity 110. For ease of explanation, the following will further describe in detail assuming that the first support portion 120 has a plate shape fixed inside the cavity 110.

[0097] The mask assembly 150 may be mounted on the second support portion 130. In this case, the second support portion 130 may be located in the cavity 110. The second support portion 130 may finely adjust the position of the mask assembly 150. In this case, the second support portion 130 may include other drivers or alignment units to move the mask assembly 150 in different directions.

[0098] The source unit 140 may face the mask assembly 150. In this case, a deposition material may be accommodated in the source unit 140, and the deposition material may be evaporated or sublimated by applying heat to the deposition material. The source unit 140 may be fixed inside the cavity 110 or may be located in the cavity 110 to linearly move in one direction. For ease of explanation, the following will further describe in detail assuming that the source unit 140 is fixed inside the cavity 110.

[0099] The magnetic unit 160 can be positioned in the cavity 110 to face the display substrate D. In this case, the magnetic unit 160 can apply a magnetic force to the mask plate 152, such that the mask assembly 150 is forced toward the display substrate D. In particular, the magnetic unit 160 can prevent or substantially prevent warpage of the mask plate 152, and can keep the mask plate 152 adjacent to the display substrate D. Moreover, the magnetic unit 160 can uniformly maintain the interval between the mask plates 152 in the longitudinal direction of the mask plate 152.

[0100] The vision unit 170 can be located on the cavity 110, and can obtain an image of the positions of the display substrate D and the mask assembly 150. In an embodiment, the vision unit 170 can include a camera for obtaining an image of the display substrate D and the mask assembly 150. The positions of the display substrate D and the mask assembly 150 can be determined based on the image obtained by the vision unit 170, and the second support part 130 can finely adjust the position of the mask assembly 150 based on the image.

[0101] The pressure regulating unit 180 can be connected to the cavity 110, and can regulate the internal pressure of the cavity 110. For example, the pressure regulating unit 180 can regulate the internal pressure of the cavity 110 to be equal to or similar to the atmospheric pressure. Additionally, the pressure regulating unit 180 can regulate the internal pressure of the cavity 110 to be equal to or similar to a vacuum.

[0102] The pressure regulating unit 180 can include a connecting pipe 181 connected to the cavity 110 and a pump 182 provided on the connecting pipe 181. In this case, according to the operation of the pump 182, external air can be introduced through the connecting pipe 181, or the gas in the cavity 110 can be guided to the outside through the connecting pipe 181.

[0103] The device 100 can be used to manufacture the display device described below. More specifically, when the pressure regulating unit 180 regulates the internal pressure of the cavity 110 to be equal to or similar to the atmospheric pressure, the gate valve 110-1 can be operated to open the opening part of the cavity 110.

[0104] Next, the display substrate D can be introduced into the cavity 110 from outside the cavity 110. In this case, the display substrate D can be introduced into the cavity 110 in any of various ways. For example, the display substrate D can be introduced into the cavity 110 from outside the cavity 110 via a robotic arm located outside the cavity 110. In another embodiment, when the first support portion 120 is formed to be shuttlable, the first support portion 120 can be taken out of the cavity 110, the display substrate D can be mounted on the first support portion 120 through another robotic arm located outside, and the first support portion 120 can be introduced into the cavity 110 from outside the cavity 110. For ease of explanation, the following will assume the case where the display substrate D is introduced into the cavity 110 from outside the cavity 110 via a robotic arm located outside the cavity 110 and will describe it in further detail.

[0105] The mask assembly 150 can be located in the cavity 110. In another embodiment, like the display substrate D, the mask assembly 150 can be introduced into the cavity 110 from outside the cavity 110. However, for ease of explanation, the following will assume the state where the mask assembly 150 is located in the cavity 110 and will describe in further detail the case where only the display substrate D is introduced into the cavity 110 from outside the cavity 110.

[0106] Once the display substrate D is introduced into the cavity 110, the display substrate D can be mounted on the first support portion 120. In this case, the vision unit 170 can obtain an image of the positions of the display substrate D and the mask assembly 150. In an embodiment, the vision unit 170 can obtain an image of the first alignment marks of the display substrate D and the second alignment marks of the mask assembly 150.

[0107] The positions of the display substrate D and the mask assembly 150 can be determined based on the first alignment marks and the second alignment marks. In this case, the device 100 can include other controllers (not shown) and can determine the positions of the display substrate D and the mask assembly 150.

[0108] When the determination of the positions of the display substrate D and the mask assembly 150 is completed, the second support portion 130 can finely adjust the position of the mask assembly 150.

[0109] Next, the source unit 140 can be operated to supply deposition material to the mask assembly 150, and the deposition material passing through the plurality of openings 152-1 can be deposited on the display substrate D. In this case, the pump 182 can absorb the gas inside the chamber 110 and can discharge the gas outside the chamber 110, so as to keep the internal pressure of the chamber 110 at a level equal to or similar to a vacuum.

[0110] In this case, the deposition material can pass through the openings (not shown) in the deposition area and can be deposited on the display substrate D. In this case, the mask assembly 150 can provide a deposition area that is the same as or similar to the designed deposition area described above.

[0111] Accordingly, the apparatus 100 can deposit the deposition material on the same or a similar designed area on the display substrate D. In addition, the apparatus 100 can manufacture an accurate display device including an emission area having an irregular shape.

[0112] FIG. 6 is a plan view of a display device manufactured by the apparatus 100 of FIG. 5; and FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 6.

[0113] Referring to FIGS. 6 and 7, the display device 20 can include a display area DA defined on the substrate 21 and a non-display area NDA located outside the display area DA. In an embodiment, the organic light-emitting device (OLED) 28 can be located in the display area DA, and the power line (not shown) can be located in the non-display area NDA. In addition, the pad portion C can be located in the non-display area NDA.

[0114] A plurality of deposition material patterns (not shown) passing through the deposition area can be located in the display area DA. In this case, the display area DA can have an irregular shape. In an embodiment, the display area DA can be formed such that both sides of the display area DA are asymmetric with respect to a fourth center line C4 passing through the center of the display area DA. In this case, the center of the display area DA can be the point where the longest line segment and the shortest line segment among the line segments connecting two random points on the boundary of the display area DA intersect each other. In addition, the fourth center line C4 can be parallel to the first center line (not shown) of the first mask plate (not shown).

[0115] The display area DA can be divided into a first display area DA1 and a second display area DA2 by the fourth center line C4. In this case, the shapes and sizes (or areas) of the first display area DA1 and the second display area DA2 can be different from each other.

[0116] The display device 20 may include a display substrate D, an intermediate layer 28-2 located on the display substrate D, and a counter electrode 28-3 located on the intermediate layer 28-2. In addition, the display device 20 may include a thin film encapsulation layer E formed on the counter electrode 28-3.

[0117] The display substrate D may include a substrate 21, thin film transistors (TFTs), a passivation film 27, and a pixel electrode 28-1.

[0118] The substrate 21 may be formed of a plastic material, or may be formed of a metal material such as stainless steel (SUS) or titanium (Ti). Additionally, the substrate 21 may be formed of polyimide (PI). For ease of explanation, the following will assume the case where the substrate 21 is formed of PI and will describe it in further detail.

[0119] The TFTs may be formed on the substrate 21, the passivation film 27 may be formed to cover the TFTs, and the OLEDs 28 may be formed on the passivation film 27.

[0120] A buffer layer 22 formed of an organic compound and / or an inorganic compound may be further formed on the top surface of the substrate 21 by using SiO x (x≥1) or SiN x (x ≥1).

[0121] In an embodiment, after an active layer 23 having a predetermined pattern is formed on the buffer layer 22, the active layer 23 is covered by a gate insulating layer 24. The active layer 23 includes a source region 23-1 and a drain region 23-3, and further includes a channel region 23-2 located between the source region 23-1 and the drain region 23-3.

[0122] The active layer 23 may include any of various materials. For example, the active layer 23 may include an inorganic semiconductor material such as amorphous silicon or crystalline silicon. Alternatively, the active layer 23 may include an oxide semiconductor. Alternatively, the active layer 23 may include an organic semiconductor material. However, for ease of explanation, the following will assume the case where the active layer 23 is formed of amorphous silicon and will describe it in further detail.

[0123] In an embodiment, the active layer 23 may be formed by forming an amorphous silicon film on the buffer layer 22; crystallizing the amorphous silicon film into a polysilicon film; and patterning the polysilicon film. The source region 23-1 and the drain region 23-3 of the active layer 23 are doped with impurities according to the type of TFT such as a driving TFT (not shown) or a switching TFT (not shown).

[0124] The gate electrode 25 corresponding to the active layer 23 and the interlayer insulating layer 26 covering the gate electrode 25 are formed on the top surface of the gate insulating layer 24.

[0125] After the contact holes H1 are formed in the interlayer insulating layer 26 and the gate insulating layer 24, the source electrode 27-1 and the drain electrode 27-2 are formed on the interlayer insulating layer 26 to contact the source region 23-1 and the drain region 23-3, respectively.

[0126] The passivation film 27 is formed on the TFT, and the pixel electrode 28-1 of the OLED 28 is formed on the passivation film 27. The pixel electrode 28-1 contacts the drain electrode 27-2 of the TFT through a via hole H2 formed in the passivation film 27. The passivation film 27 may be formed of an inorganic material and / or an organic material, and may have a single-layer or multi-layer structure. The passivation film 27 may be formed as a planarization film to have a flat top surface regardless of the curvature of the underlying film, or may be formed to bend along the curvature of the underlying film. In an exemplary embodiment, the passivation film 27 is formed of a transparent insulating material to achieve a resonance effect.

[0127] After the pixel electrode 28-1 is formed on the passivation film 27, a pixel defining film 29 made of an organic material and / or an inorganic material is formed to cover the pixel electrode 28-1 and the passivation film 27, and the pixel defining film 29 has an opening through which the pixel electrode 28-1 is exposed.

[0128] The intermediate layer 28-2 and the counter electrode 28-3 are at least formed on the pixel electrode 28-1. In another embodiment, the counter electrode 28-3 may be formed on the entire surface of the display substrate D. In this case, the counter electrode 28-3 may be formed on the intermediate layer 28-2 and the pixel defining film. For ease of explanation, the following will assume the case where the counter electrode 28-3 is formed on the intermediate layer 28-2 and the pixel defining film 29 and will be further described in detail.

[0129] In an embodiment, the pixel electrode 28-1 serves as an anode, and the counter electrode 28-3 serves as a cathode. However, the polarities of the pixel electrode 28-1 and the counter electrode 28-3 may be reversed.

[0130] The pixel electrode 28-1 and the counter electrode 28-3 are insulated from each other by an intermediate layer 28-2, and the organic emission layer emits light by applying voltages of different polarities to the intermediate layer 28-2.

[0131] The intermediate layer 28-2 may include an organic emission layer. Optionally, the intermediate layer 28-2 may include an organic emission layer and may further include at least one of a hole injection layer (HIL), a hole transport layer, an electron transport layer, and an electron injection layer. However, this embodiment is not limited thereto, and the intermediate layer 28-2 may include an organic emission layer and may further include any functional layer among various other functional layers (not shown).

[0132] In this case, the intermediate layer 28-2 may be formed by the device 100 for manufacturing the display device 20.

[0133] A plurality of intermediate layers 28-2 may be provided, and the plurality of intermediate layers 28-2 may form a display area DA. In particular, the plurality of intermediate layers 28-2 may form a display area DA having a shape other than a rectangle and a square. In this case, the plurality of intermediate layers 28-2 may be spaced apart from each other in the display area DA.

[0134] The areas of some of the plurality of intermediate layers 28-2 may be different from the areas of other intermediate layers among the plurality of intermediate layers 28-2. For example, the areas of some of the plurality of intermediate layers 28-2 may be smaller than the areas of other intermediate layers among the plurality of intermediate layers 28-2. The intermediate layer 28-2 having an area smaller than the areas of other intermediate layers 28-2 among the plurality of intermediate layers 28-2 may be formed at the boundary of a shielding portion (not shown).

[0135] One unit pixel may include a plurality of sub-pixels, and the plurality of sub-pixels may emit light of various colors. For example, the plurality of sub-pixels may include sub-pixels that emit red light, green light, and blue light, or may include sub-pixels that emit red light, green light, blue light, and white light (not shown).

[0136] The sub-pixel may include an intermediate layer 28-2. In this case, when a sub-pixel is formed, the intermediate layer 28-2 may be formed by the device 100.

[0137] The thin film encapsulation layer E may include a plurality of inorganic layers, or an inorganic layer and an organic layer.

[0138] The organic layer of the thin film encapsulation layer E may be formed of a polymer, and in an exemplary embodiment, may have a single-layer or multi-layer structure formed of any one of polyethylene terephthalate, polyimide, polycarbonate, epoxy resin, polyethylene, and polyacrylate. In an exemplary embodiment, the organic layer of the thin film encapsulation layer E may be formed of polyacrylate. In further details, the organic layer may include a polymerized monomer composition having monomers of diacrylate-based and monomers of triacrylate-based. Monomers of monoacrylate-based may be further included in the monomer composition. Additionally, a conventional photoinitiator such as TPO may be further included in the monomer composition, but the present embodiment is not limited thereto.

[0139] The inorganic layer of the thin film encapsulation layer E may include a single-layer or multi-layer structure having a metal oxide or a metal nitride. In an embodiment, the inorganic layer of the thin film encapsulation layer E may include any one of SiNx, Al2O3, SiO2, and TiO2.

[0140] In an embodiment, the uppermost layer exposed to the outside in the thin film encapsulation layer E may be an inorganic layer to prevent or substantially prevent moisture from penetrating into the OLED28.

[0141] The thin film encapsulation layer E may include at least one sandwich structure in which at least one organic layer is inserted between at least two inorganic layers. Alternatively, the thin film encapsulation layer E may include at least one sandwich structure in which at least one inorganic layer is inserted between at least two organic layers. Alternatively, the thin film encapsulation layer E may include a sandwich structure in which at least one organic layer is inserted between at least two inorganic layers and a sandwich structure in which at least one inorganic layer is inserted between at least two organic layers.

[0142] In an embodiment, the thin film encapsulation layer E may include a first inorganic layer, a first organic layer, and a second inorganic layer that are alternately formed on the OLED 28.

[0143] Alternatively, the thin film encapsulation layer E may include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, and a third inorganic layer that are alternately formed on the OLED 28.

[0144] Alternatively, the thin film encapsulation layer E may include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, a third inorganic layer, a third organic layer, and a fourth inorganic layer that are alternately formed on the OLED 28.

[0145] In an embodiment, a halogenated metal layer including LiF may be further included between the OLED 28 and the first inorganic layer. When the first inorganic layer is formed by sputtering, the halogenated metal layer can prevent or substantially prevent damage to the OLED 28.

[0146] The first organic layer may be formed to have an area smaller than that of the second inorganic layer. The second organic layer may be formed to have an area smaller than that of the third inorganic layer.

[0147] Accordingly, the display device 20 may have a display area DA having a shape other than a rectangle and a square. In addition, the display device 20 may have a display area DA that is the same as or similar to the designed display area.

[0148] FIG. 8 is a plan view of a second shielding plate of a mask assembly according to another embodiment; and FIG. 9 is a plan view of a display device manufactured by using the mask assembly including the second shielding plate of FIG. 8.

[0149] Referring to FIGS. 8 and 9, a mask assembly (not shown) may include a mask frame (not shown), a first shielding plate (not shown), a second shielding plate 154A, and a mask plate (not shown). In this case, the mask frame, the first shielding plate, and the mask plate may be the same as or similar to the descriptions with reference to FIGS. 1 to 4, and thus no repeated description will be given thereof.

[0150] The second shielding plate 154A may include a second shielding plate main body portion 154A-1 and a second protrusion 154A-2. In this case, the second shielding plate main body portion 154A-1 and the second protrusion 154A-2 may be similar to those described in FIGS. 1 to 4, and the shape of the second protrusion 154A-2 may be different from that described in FIGS. 1 to 4. In this case, the second protrusion 154A-2 may have a shape similar to a part of a circular shape. In this case, the second protrusion 154A-2 may be formed to face a first protrusion (not shown) and may shield a part of the first protrusion.

[0151] In this case, both sides of the first shielding plate may be symmetric with respect to a first center line (not shown), and both sides of the second shielding plate 154A may be symmetric with respect to a second center line C2. As described above, when the first shielding plate and the second shielding plate 154A are stretched and fixed to the mask frame, at least one of the first shielding plate and the second shielding plate 154A may not be distorted.

[0152] Accordingly, the mask assembly may allow the deposition material to pass therethrough to reach a designed deposition area.

[0153] When the deposition material is deposited on a display substrate (not shown) by using the mask assembly, the display area DA of FIG. 9 may be provided. In this case, the display device 20 may be formed in the same manner as in FIG. 7. In this case, the non-display area NDA may be located around the display area DA, and the pad portion C may be located in the non-display area NDA.

[0154] The display area DA can be divided into a first display area DA1 and a second display area DA2 by a fourth center line C4. In this case, the first display area DA1 and the second display area DA2 can have different shapes and different sizes as shown in FIG. 9. In this case, the corners of the first display area DA1 can be bent inward into a circular shape. On the contrary, the corners of the second display area DA2 can be bent outward into a circular shape. In this case, at least one of the corners of the first display area DA1 and the corners of the second display area DA2 can have at least one radius of curvature. In an embodiment, when the corners of the first display area DA1 have a radius of curvature and the corners of the second display area DA2 have a radius of curvature, the radius of curvature of the corners of the first display area DA1 and the curvature of the corners of the second display area DA2 can be different from each other. In another embodiment, when the corners of the first display area DA1 have a plurality of radii of curvature and the corners of the second display area DA2 have a plurality of radii of curvature, at least one of the radii of curvature of the corners of the first display area DA1 and at least one of the radii of curvature of the corners of the second display area DA2 can be different from each other.

[0155] Accordingly, the display device 20 can have a display area DA having a fine irregular shape that is the same as or similar to the designed shape.

[0156] FIG. 10 is a plan view showing a second shielding plate of a mask assembly according to another embodiment; and FIG. 11 is a plan view showing a display device manufactured by using the mask assembly including the second shielding plate of FIG. 10.

[0157] Referring to FIGS. 10 and 11, the mask assembly (not shown) can include a mask frame (not shown), a first shielding plate (not shown), a second shielding plate 154B, and a mask plate (not shown). In this case, the mask frame, the first shielding plate, and the mask plate can be the same as or similar to the descriptions in FIGS. 1 to 4, and thus no repeated description will be given to them.

[0158] The second shielding plate 154B can include a second shielding plate main body portion 154B-1 and a second protrusion 154B-2. In this case, the second shielding plate main body portion 154B-1 can be similar to that described in FIGS. 1 to 4, and the shape of the second protrusion 154B-2 can be different from that described in FIGS. 1 to 4. In this case, the second protrusion 154B-2 can have a quadrangular shape. In this case, the second protrusion 154B-2 can shield a part of the first protrusion.

[0159] In this case, both sides of the first shielding plate may be symmetric with respect to a first center line (not shown), and both sides of the second shielding plate 154B may be symmetric with respect to a second center line C2. In this case, when the first shielding plate and the second shielding plate 154B are stretched and fixed to a mask frame (not shown) as described above, at least one of the first shielding plate and the second shielding plate 154B is not distorted.

[0160] Accordingly, the mask assembly can allow the deposition material to pass therethrough to reach a designed deposition area.

[0161] When the deposition material is deposited on a display substrate (not shown) by using the mask assembly, the display area DA of FIG. 11 can be provided. In this case, the display device 20 can be formed in the same manner as in FIG. 7. In this case, the non-display area NDA can be located around the display area DA, and the pad portion C can be located in the non-display area NDA.

[0162] The display area DA may include a first display area DA1 and a second display area DA2 with respect to a fourth center line C4. In this case, the first display area DA1 and the second display area DA2 may have different shapes and different sizes as shown in FIG. 11. For example, the corner portion of the first display area DA1 may be stepped, and the corner portion of the second display area DA2 may be rounded.

[0163] Accordingly, the display device 20 can have a display area DA having a fine irregular shape that is the same as or similar to the designed shape.

[0164] FIG. 12 is a plan view illustrating a first shielding plate and a second shielding plate of a mask assembly according to another embodiment; and FIG. 13 is a plan view illustrating a display device manufactured by using the mask assembly including the first shielding plate and the second shielding plate of FIG. 12.

[0165] Referring to FIGS. 12 and 13, a mask assembly (not shown) may include a mask frame (not shown), a first shielding plate 153C, a second shielding plate 154C, and a mask plate (not shown). In this case, the mask frame and the mask plate may be the same as or similar to those described with respect to FIGS. 1 to 4, and thus repeated description thereof will not be given.

[0166] The first shielding plate 153C may include a first shielding plate main body portion 153C-1 and a first protrusion 153C-2. In this case, the first shielding plate main body portion 153C-1 and the first protrusion 153C-2 are the same as or similar to those described in FIGS. 1 to 4, and thus no detailed description thereof will be given.

[0167] The second shielding plate 154C may include a second shielding plate main body portion 154C-1 and a second protrusion 154C-2. In this case, the second shielding plate main body portion 154C-1 and the second protrusion 154C-2 may be similar to those described in FIGS. 1 to 4. In this case, since the second protrusion 154C-2 is formed relative to the first protrusion 153C-2, the second protrusion 154C-2 may shield a part of the first protrusion 153C-2. In this case, the shapes of the circular portions of the first protrusion 153C-2 and the second protrusion 154C-2 may be different from each other. For example, the radius of curvature R1 of the circular portion of the first protrusion 153C-2 and the radius of curvature R2 of the circular portion of the second protrusion 154C-2 may be different from each other.

[0168] In this case, both sides of the first shielding plate 153C may be symmetric with respect to the first center line C1, and both sides of the second shielding plate 154C may be symmetric with respect to the second center line C2. In this case, as described above, when the first shielding plate 153C and the second shielding plate 154C are stretched and fixed to the mask frame, at least one of the first shielding plate 153C and the second shielding plate 154C is not distorted.

[0169] Accordingly, the mask assembly can allow the deposition material to pass through it to reach the designed deposition area.

[0170] When the deposition material is deposited on a display substrate (not shown) by using the mask assembly, the display area DA in FIG. 13 can be provided. In this case, the display device 20 can be formed in the same manner as in FIG. 7. In this case, the non-display area NDA may be located around the display area DA, and the pad portion C may be located in the non-display area NDA.

[0171] The display area DA can be divided into a first display area DA1 and a second display area DA2 by a fourth center line C4. In this case, the first display area DA1 and the second display area DA2 can have different shapes and different sizes as shown in FIG. 13. In this case, the corners of the first display area DA1 and the corners of the second display area DA2 can protrude outside the display area DA. In this case, at least one of the first display area DA1 and the second display area DA2 can have at least one radius of curvature. In an embodiment, when the first display area DA1 has a radius of curvature R1' and the second display area DA2 has a radius of curvature R2', the radius of curvature R1' of the first display area DA1 and the radius of curvature R2' of the second display area DA2 can be different from each other. In another embodiment, when the first display area DA1 has a plurality of radii of curvature R1' and the second display area DA2 has a plurality of radii of curvature R2', at least one of the radii of curvature R1' of the first display area and at least one of the radii of curvature R2' of the second display area DA2 can be different from each other. In particular, when the deposition material is shielded by the first protrusion 153C-2, the first display area DA1 can be formed. Additionally, when the deposition material is shielded by the second protrusion 154C-2, the second display area DA2 can be formed. That is, the first protrusion 153C-2 can affect the formation of the first display area DA1, and the second protrusion 154C-2 can affect the formation of the second display area DA2.

[0172] Accordingly, the display device 20 can have a display area DA having a fine irregular shape that is the same as or similar to the designed shape.

[0173] The mask assembly according to one or more embodiments of the present disclosure can maintain a shape that is the same as or similar to the initial designed shape.

[0174] The apparatus and method for manufacturing a display device according to one or more embodiments of the present disclosure can manufacture a display device having a display area with an irregular shape that is the same as or similar to the designed shape.

[0175] The apparatus and method for manufacturing a display device according to one or more embodiments of the present disclosure can manufacture a display device in which the outermost portion of the display area is not distorted.

[0176] Although one or more embodiments have been described with reference to the accompanying drawings, those of ordinary skill in the art will understand that various changes in form and detail may be made without departing from the spirit and scope set forth in the following claims.

[0177] 100: Device 110: Chamber 110-1: Gate valve 120: First support part 130: Second support part 140: Source unit 150: Mask assembly 151: Mask frame 152: Mask plate 152-1: Opening 153,153C: First shielding plate 153-1,153C-1: First shielding plate main body part 153-2,153C-2: First protrusion 154,154A,154B,154C: Second shielding plate 154-1,154A-1,154B-1,154C-1: Second shielding plate main body part 154-2,154A-2,154B-2,154C-2: Second protrusion 160: Magnetic unit 170: Visual unit 180: Pressure regulating unit 181: Connecting pipe 182: Pump 20: Display device 21: Substrate 22: Buffer layer 23: Active layer 23-1: Source region 23-2: Channel region 23-3: Drain region 24: Gate insulating layer 25: Gate electrode 26: Interlayer insulating layer 27: Passivation film 27-1: Source electrode 27-2: Drain electrode 28: OLED 28-1: Pixel electrode 28-2: Intermediate layer 28-3: Counter electrode 29: Pixel definition film C: Pad portion C1: First center line C2: Second center line C3: Third center line C4: Fourth center line D: Display substrate DA: Display area DA1: First display area DA2: Second display area E: Thin film encapsulation layer H1: Contact hole H2: Through hole NDA: Non-display area R1, R1', R2, R2': Radius of curvature S: Deposition area S1: First deposition area S2: Second deposition area VII-VII: Line segment X, Y, Z: Directions

Claims

1. A method of manufacturing a display device, comprising: disposing a display substrate and a mask assembly in a cavity; aligning the display substrate with the mask assembly; and forming a deposition material pattern on the display substrate by supplying a deposition material from a deposition source facing the mask assembly, wherein the mask assembly comprises: a mask frame; a mask plate disposed on the mask frame and including a plurality of openings; at least two first mask plates disposed on the mask frame and covering a portion of the plurality of openings in the mask plate, the at least two first mask plates being spaced apart from each other, and each of the at least two first mask plates including a first protrusion; and at least two second mask plates disposed on the mask frame and covering a portion of the plurality of openings in the mask plate, each of the at least two second mask plates being formed to have an angle relative to each of the at least two first mask plates and overlapping at least a portion therewith, the at least two second mask plates being spaced apart from each other, and each of the at least two second mask plates including a second protrusion; The at least two first shielding plates and the at least two second shielding plates define a deposition region including a portion of the plurality of openings in the shielding plates by shielding a portion of the plurality of openings in the shielding plates. The deposition region is divided into a first deposition region and a second deposition region by a straight line passing through the center of the space formed by two adjacent first shielding plates and parallel to the longitudinal direction of one of the first shielding plates. The shapes of the first deposition region and the second deposition region are different from each other. The shapes of the at least two first shielding plates and the at least two second shielding plates are respectively set to be symmetrical on both sides of a center line parallel to the longitudinal direction of their main body.

2. The method as described in claim 1, wherein the first shielding plate comprises: a first shielding plate body portion; and the first protrusion protruding from the first shielding plate body portion to have an angle relative to the longitudinal direction of the first shielding plate body portion.

3. The method as described in claim 2, wherein the first protrusion comprises a plurality of first protrusions, wherein two of the plurality of first protrusions face each other relative to the main body portion of the first shielding plate.

4. The method as described in claim 3, wherein the two first protrusions facing each other relative to the first shielding body portion have the same shape.

5. The method as described in claim 1, wherein at least a portion of at least one of the at least two first shielding plates and at least a portion of at least one of the at least two second shielding plates are symmetrical to each other with respect to a virtual centerline parallel to the longitudinal direction.

6. The method as described in claim 1, wherein the first shielding plate and one of the at least two second shielding plates are perpendicular to each other.

7. The method as claimed in claim 1, wherein one of the at least two second shielding plates comprises: a second shielding plate body portion; and the second protrusion protrudes from the second shielding plate body portion.

8. The method as described in claim 7, wherein the second protrusion comprises a plurality of second protrusions, wherein two of the plurality of second protrusions face each other relative to the second shielding plate body portion.

9. The method as described in claim 7, wherein the first shielding plate comprises: a first shielding plate body portion; and the first protrusion protruding from the first shielding plate body portion to have an angle relative to the longitudinal direction of the first shielding plate body portion.

10. The method as described in claim 9, wherein at least a portion of the first protrusion and the second protrusion overlap each other.

11. The method as described in claim 9, wherein the first protrusion and the second protrusion have different shapes.

12. The method as described in claim 9, wherein the first protrusion and the second protrusion have different areas.

13. A method of manufacturing a display device, comprising: disposing a display substrate and a mask assembly in a cavity; aligning the display substrate with the mask assembly; and forming a deposition material pattern on the display substrate by supplying a deposition material from a deposition source facing the mask assembly, wherein the deposition material pattern formed on the display substrate is used to form a display area, the display area being divided into two regions by a straight line passing through the center of the display area, and the two regions of the display area being asymmetrical; wherein the mask assembly comprises: a mask plate located on a mask frame and including a plurality of openings; At least two first shielding plates, located on the shielding frame and covering a portion of the plurality of openings in the shielding plates, the at least two first shielding plates being spaced apart from each other, and each of the at least two first shielding plates including a first protrusion; and at least two second shielding plates, located on the shielding frame and covering a portion of the plurality of openings in the shielding plates, each of the at least two second shielding plates being formed to have an angle relative to each of the at least two first shielding plates and overlapping at least a portion therewith, the at least two second shielding plates being spaced apart from each other, and each of the at least two second shielding plates including a second protrusion; wherein the shapes of the at least two first shielding plates and the at least two second shielding plates are respectively configured to be symmetrical to each other on both sides of a center line parallel to the longitudinal direction of their main body portions.

14. The method of claim 13, wherein the masking assembly defines a deposition region through which the deposition material is deposited on the display substrate, such that the deposition region corresponds to the display region.

15. The method as described in claim 14, wherein the at least two first shielding plates and the at least two second shielding plates define the deposition area.

16. A method of manufacturing a display device, comprising: disposing a display substrate and a mask assembly in a cavity; aligning the display substrate with the mask assembly; and forming a deposition material pattern on the display substrate by supplying a deposition material from a deposition source facing the mask assembly, wherein the deposition material pattern formed on the display substrate is for forming a display area, the display area including a first display area and a second display area, the first display area being formed when a portion of the deposition material is shielded by a protrusion of a first shielding plate of the mask assembly, the protrusion of the first shielding plate of the mask assembly protruding into a deposition area defined by the mask assembly, and the second display area being formed when a portion of the deposition material is shielded by a protrusion of a second shielding plate of the mask assembly, the protrusion of the second shielding plate of the mask assembly protruding into the deposition area defined by the mask assembly, wherein the first shielding plate includes a first protrusion and the second shielding plate includes a second protrusion. The first shielding plate and the second shielding plate overlap each other at least a portion thereof, and the shapes of the first shielding plate and the second shielding plate are respectively set to be symmetrical on both sides of a center line parallel to the longitudinal direction of their main body.

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