Conductive slip ring and semiconductor process equipment

Abstract

This application discloses a conductive slip ring and a semiconductor manufacturing process apparatus. The disclosed conductive slip ring is applied to the process chamber of a semiconductor manufacturing process apparatus. The conductive slip ring includes a housing, a fixed electrical connection portion, and a rotating electrical connection portion. The housing has a cavity and a first mounting hole communicating with the cavity. The housing is used for a sealed connection with the process chamber, so that the cavity is in sealed communication with the chamber space of the process chamber. The fixed electrical connection portion is sealed and fitted with the first mounting hole. The first end of the fixed electrical connection portion extends into the cavity and is rotatably connected to the rotating electrical connection portion. The second end of the fixed electrical connection portion is located outside the housing and is used for electrical connection with a power source. The rotating electrical connection portion is rotatably disposed inside the housing and is used for electrical connection with electrical components inside the process chamber.

Description

Technical Field

[0001] This application belongs to the technical field of semiconductor process equipment, and specifically relates to a conductive slip ring and semiconductor process equipment. Prior Art

[0002] In the film forming process, while the carrier seat holds the wafer, it rotates the wafer to obtain a film with a relatively uniform thickness. However, in addition to the loading function, the carrier seat also has other functions such as heating function and radio frequency function. To realize some of these functions, it is necessary to supply power to the rotating carrier seat so that the electrical devices inside the carrier seat can work. It can be seen that the rotary power supply technology is the core technology to realize some functions of the carrier seat.

[0003] Since the carrier seat is located in the process space of the process chamber, and the process space needs to maintain a vacuum environment during the process, while the power supply is arranged outside the process chamber. This structure requires the electrical devices to pass through the process chamber when electrically connected to the power supply. In order not to damage the vacuum environment of the process space, related technologies use a magneto-fluid structure to achieve sealed isolation between the process space and the external environment of the process chamber. However, using a magneto-fluid structure to achieve sealed isolation has the problem of poor sealing effect, which is more likely to cause communication between the process space and the external environment of the process chamber, resulting in process failure.

[0004] Of course, not limited to these problems faced by the electrical devices inside the carrier seat when using the rotary power supply technology, the structures that need to supply power through the rotary power supply technology in other areas inside the process chamber will also encounter similar or the same technical problems. Summary of the Invention

[0005] The present invention discloses a conductive slip ring and semiconductor process equipment to solve the problem of poor sealing effect in the related technology where a magneto-fluid structure is used to achieve sealing between the process space and the external environment of the process chamber.

[0006] To solve the above technical problems, the present invention provides the following technical solutions:

[0007] In a first aspect, an embodiment of the present application discloses a conductive slip ring, which is applied to a process chamber of semiconductor processing equipment. The conductive slip ring includes a housing, a fixed electrical connection part, and a rotating electrical connection part, where: the housing has a housing cavity and a first mounting hole communicating with the housing cavity, and the housing is used for sealing connection with the process chamber so that the housing cavity is in sealed communication with the chamber space of the process chamber; the fixed electrical connection part is in sealed cooperation with the first mounting hole, and a first end of the fixed electrical connection part extends into the housing cavity and is electrically connected to the rotating electrical connection part in a relatively rotatable manner. A second end of the fixed electrical connection part is located outside the housing and is used for electrical connection with a power source; the rotating electrical connection part is rotatably disposed inside the housing and is used for electrical connection with an electrical device inside the process chamber.

[0008] In a second aspect, an embodiment of the present application discloses a semiconductor processing equipment, which includes a process chamber, a carrier, and the conductive slip ring described above. The carrier is rotatably disposed inside the process chamber, and an electrical device is disposed inside the carrier. The housing is in sealed connection with the process chamber, and the housing cavity communicates with the chamber space of the process chamber. The rotating electrical connection part is connected to the carrier and is electrically connected to the electrical device inside the carrier.

[0009] The technical solution adopted by the present invention can achieve the following technical effects:

[0010] While the conductive slip ring disclosed in the embodiment of the present application can realize the rotating power supply technology, it can also form a sealed isolation between the overall space formed after the housing cavity communicates with the chamber space and the external environment where the power source is located through the sealed cooperation between the fixed electrical connection part and the first mounting hole, and finally can maintain the vacuum environment inside the chamber space. On this basis, by making the fixed electrical connection part and the rotating electrical connection part be electrically connected in a relatively rotatable manner, the fixed electrical connection part and the rotating electrical connection part can be kept in contact electrical connection while the rotating electrical connection part rotates with the electrical device, so as to realize the rotating power supply. The sealing structure of this rotating power supply technology does not need to adopt a magnetorheological fluid structure for sealing, so as to avoid the influence of the external magnetic field on the sealing effect, and thus can overcome the problem of poor sealing effect caused by external magnetic field interference when using the magnetorheological fluid structure for sealing. Brief Description of the Drawings

[0011] In the accompanying drawings: FIG. 1 is a cross-sectional view of the semiconductor processing equipment disclosed in the embodiment of the present application from a perspective; FIG. 2 is a schematic diagram of a partial structure of FIG. 1; FIG. 3 is a cross-sectional view of a partial structure of a semiconductor processing apparatus disclosed in an embodiment of the present application from another perspective; FIG. 4 is a cross-sectional view of a conductive slip ring disclosed in an embodiment of the present application from one perspective; FIG. 5 is a cross-sectional view of a conductive slip ring disclosed in an embodiment of the present application from another perspective; FIG. 6 and FIG. 7 are respectively cross-sectional views of a partial structure of a conductive slip ring disclosed in an embodiment of the present application; FIG. 8 is a schematic structural diagram of a housing of a conductive slip ring disclosed in an embodiment of the present application; FIG. 9 is a schematic structural diagram of an insulating rotating shaft of a conductive slip ring disclosed in an embodiment of the present application; FIG. 10 is a schematic structural diagram of a conductive ring of a conductive slip ring disclosed in an embodiment of the present application; FIG. 11 is an assembly schematic diagram of a partial structure of an insulating rotating shaft, a conductive ring, and an insulating spacer in a conductive slip ring disclosed in an embodiment of the present application; FIG. 12 is a schematic diagram of FIG. 11 from another perspective; FIG. 13 is a schematic structural diagram of a power connector of a conductive slip ring disclosed in an embodiment of the present application; FIG. 14 is a schematic structural diagram of a fixed insulating sleeve disclosed in an embodiment of the present application; FIG. 15 is a schematic structural diagram of a conductive slip ring disclosed in an embodiment of the present application after a brush and a mounting bracket are assembled; FIG. 16 is a schematic structural diagram of a conductive slip ring disclosed in an embodiment of the present application after a brush, a mounting bracket, and a fixed insulating sleeve are assembled. Embodiment

[0012] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0013] In related technologies, a rotating power supply technology is adopted in the process chamber of semiconductor process equipment to achieve the electrical connection between the electrical devices inside the process chamber and the power supply outside the process chamber. In order to ensure the vacuum environment inside the process chamber, the rotating power supply technology realizes sealing through a magneto-fluid structure to isolate the external environment outside the process chamber. The inventor of the present invention found during the implementation of the present invention that the magneto-fluid structure is extremely vulnerable to external magnetic field interference, and the process chamber is provided with a structure that easily generates an external magnetic field. For example, the radio frequency coil configured in the process chamber generates a magnetic field during operation (this part of the magnetic field can be considered as the external magnetic field affecting the magneto-fluid structure). The interference of the external magnetic field will affect the magneto-fluid of the magneto-fluid structure, thereby affecting the sealing effect, and ultimately resulting in a problem of poor sealing effect between the inside of the process chamber and the external environment outside the process chamber.

[0014] Based on this, the inventor of the present invention improved the technical solution in the case of discovering this technical problem, so as to solve the problem of poor sealing effect. The following will combine the accompanying drawings to detail the technical solutions disclosed in each embodiment of the present invention.

[0015] Please refer to FIGS. 1 to 16. An embodiment of the present application discloses a conductive slip ring 01. The disclosed conductive slip ring 01 is applied to the process chamber 10 of semiconductor process equipment. The disclosed conductive slip ring 01 includes a housing 30, a fixed electrical connection part 40, and a rotating electrical connection part 50.

[0016] The housing 30 is the outer peripheral housing of the conductive slip ring 01, and the housing 30 can provide an installation basis for other components of the conductive slip ring 01. Of course, the housing 30 can also provide peripheral protection for some components of the conductive slip ring 01. In addition, the housing 30 can be used as an installation component of the conductive slip ring 01 to realize the installation of the conductive slip ring 01 on the process chamber 10.

[0017] As shown in FIG. 8, the housing 30 has a housing cavity 31 and a first mounting hole 32. The first mounting hole 32 communicates with the housing cavity 31, and the first mounting hole 32 is used to mount the fixed electrical connection part 40. Substantially, the housing 30 also has a docking port 38, and the docking port 38 communicates with the housing cavity 31. The housing 30 is used for sealing connection with the process chamber 10 so that the housing cavity 31 is in sealed communication with the chamber space 11 of the process chamber 10. Specifically, the docking port 38 of the housing 30 is in sealed docking with the docking port of the process chamber 10, so that the housing cavity 31 communicates with the chamber space 11 of the process chamber 10. It should be noted that the process chamber 10 has a process space, and the process space can be a part of the chamber space 11 or the whole of the chamber space 11, which is not limited in the embodiments of the present application.

[0018] The fixed electrical connection part 40 is the fixed electrical connection part in the conductive slip ring 01. The fixed electrical connection part 40 is fixed to the first mounting hole 32, so as to realize the fixed connection with the housing 30. The fixed electrical connection part 40 is in sealing fit with the first mounting hole 32. The first end of the fixed electrical connection part 40 extends into the housing cavity 31 and is electrically connected to the rotating electrical connection part 50. The second end of the fixed electrical connection part 40 is located outside the housing 30. The second end of the fixed electrical connection part 40 is used for electrically connecting with the power supply 60. It should be noted that the power supply 60 is located outside the process chamber 10 and also outside the housing 30. The first end and the second end of the fixed electrical connection part 40 are the opposite ends of the fixed electrical connection part 40 respectively.

[0019] The rotating electrical connection part 50 is movably arranged. The rotating electrical connection part 50 is rotatably arranged inside the housing 30, that is, in the housing cavity 31, so that it can rotate relative to the fixed electrical connection part 40 and the housing 30. As described above, the first end of the fixed electrical connection part 40 is electrically connected to the rotating electrical connection part 50. However, since the rotating electrical connection part 50 can rotate relative to the fixed electrical connection part 40, the electrical connection between the first end of the fixed electrical connection part 40 and the rotating electrical connection part 50 is realized through contact and in a manner that can relatively slide.

[0020] In the embodiment of the present application, the rotating electrical connection part 50 is used for electrically connecting with the electrical device 21 inside the process chamber 10. The electrical device 21 is a device that needs to rotate and needs electricity inside the process chamber 10. For example, a carrier 20 is rotatably arranged in the chamber space 11 of the process chamber 10, and the electrical device 21 is buried in the carrier 20, and the electrical device 21 can rotate along with the carrier 20. The electrical device 21 can be a heating element, an electrostatic adsorption electrode, etc. The embodiment of the present application does not limit the specific type and structure of the electrical device 21.

[0021] After the conductive slip ring 01 disclosed in the embodiment of the present application is installed in the process chamber 10, the housing cavity 31 can be in sealed communication with the chamber space 11 of the process chamber 10. As shown in FIGS. 1 and 2, the fixed electrical connection part 40 is installed in the first mounting hole 32 and is in sealed cooperation with the first mounting hole 32. In this case, the overall space formed after the housing cavity 31 communicates with the chamber space 11 will be hermetically isolated from the external environment (i.e., the environment outside the process chamber 10 and the housing 30) due to the sealed cooperation between the fixed electrical connection part 40 and the first mounting hole 32. At the same time, the electrical energy provided by the power supply 60 will be transmitted from the second end of the fixed electrical connection part 40 to the first end of the fixed electrical connection part 40, and then conducted from the first end of the fixed electrical connection part 40 to the rotating electrical connection part 50, and finally transmitted by the rotating electrical connection part 50 to the electrical device 21 inside the process chamber 10. On this basis, by making the fixed electrical connection part 40 and the rotating electrical connection part 50 electrically connected so as to be relatively rotatable, the fixed electrical connection part 40 and the rotating electrical connection part 50 can maintain electrical contact while the rotating electrical connection part 50 rotates with the electrical device 21, thereby realizing rotational power supply.

[0022] From the above power supply process, it can be seen that the conductive slip ring 01 disclosed in the embodiment of the present application can, while realizing the rotational power supply technology, make the overall space formed after the housing cavity 31 communicates with the chamber space 11 hermetically isolated from the external environment where the power supply 60 is located through the sealed cooperation between the fixed electrical connection part 40 and the first mounting hole 32, and finally maintain the vacuum environment in the chamber space 11. The sealing structure of this rotational power supply technology does not need to adopt a magneto-fluid structure for sealing, thereby avoiding the influence of the external magnetic field on the sealing effect, and overcoming the problem of poor sealing effect caused by external magnetic field interference when using the magneto-fluid structure for sealing.

[0023] In the embodiment of the present application, the fixed electrical connection part 40 and the first mounting hole 32 are in sealed cooperation to isolate the external environment. There are various ways to achieve the seal between the fixed electrical connection part 40 and the first mounting hole 32. For example, a sealant is filled between the fixed electrical connection part 40 and the hole wall of the first mounting hole 32.

[0024] Of course, there are various structures of the fixed electrical connection part 40. The fixed electrical connection part 40 can include conventional metal wires. The metal wires pass through the first mounting hole 32, and a sealant is filled between the metal wires and the hole wall of the first mounting hole 32. The embodiment of the present application does not limit the specific structure of the fixed electrical connection part 40.

[0025] In some embodiments, the fixed electrical connection part 40 in the embodiments of the present application may include a brush 41. The brush 41 may be in sliding fit with the outer peripheral wall of the rotating electrical connection part 50 in the rotation direction of the rotating electrical connection part 50, so as to achieve the contact electrical connection between the fixed electrical connection part 40 and the rotating electrical connection part 50. Of course, the electrical connection structure of the sliding contact between the fixed electrical connection part 40 and the rotating electrical connection part 50 may be brush-shaped or non-brush-shaped, and the embodiments of the present application do not limit this.

[0026] The fixed electrical connection part 40 disclosed in the embodiments of the present application may further include a power supply connector 42. The first end of the power supply connector 42 extends into the housing cavity 31, is electrically connected to the brush 41, and realizes the sliding fit with the rotating electrical connection part 50 through the brush 41. Of course, after the first end of the power supply connector 42 extends into the housing cavity 31, it may also directly realize the sliding fit with the rotating electrical connection part 50 without passing through the brush 41, so as to achieve the contact electrical connection. In this case, the fixed electrical connection part 40 may not include the brush 41.

[0027] In the embodiments of the present application, the power supply connector 42 may be the ordinary metal wire described above, or may have other structures. Referring to FIG. 13, in some embodiments, the power supply connector 42 may include a core 421 and a sealing part 422. The core 421 passes through the first mounting hole 32. The end of the core 421 located inside the housing 30 is the first end of the power supply connector 42, that is, the end of the core 421 located inside the housing 30 can directly or indirectly realize the sliding electrical contact with the rotating electrical connection part 50 through the brush 41. The end of the core 421 located outside the housing 30 may be the second end of the power supply connector 42 for electrically connecting with the power supply 60. The sealing part 422 wraps a part of the core 421 and is at least hermetically arranged between the hole wall of the first mounting hole 32 and the core 421. The sealing part 422 may be a sealing sleeve sleeved on the core 421, or may be a sealing glue smeared on the core 421. The embodiments of the present application do not limit the specific structure of the sealing part 422. The sealing part 422 is hermetically fitted with both the surface of the core 421 and the hole wall of the first mounting hole 32, so as to realize the sealing fit between the power supply connector 42 and the first mounting hole 32. In this case, the sealing part 422 can not only play the sealing function, but also at least realize the function of filling between the core 421 and the hole wall of the first mounting hole 32, so as to realize the fixed connection between the power supply connector 42 and the first mounting hole 32. At the same time, in this structure, the core 421 is specifically used for transmitting electric energy, and the length of the core 421 can be flexibly adjusted to adaptively match the position of the rotating electrical connection part 50.

[0028] As described above, the embodiments of the present application do not limit the specific structure of the sealing portion 422. Please continue to refer to FIG. 13. The embodiments of the present application disclose a sealing portion 422 with a specific structure. The disclosed sealing portion 422 includes an insulating portion 401, a pressing portion 402, and a first sealing ring 403. The pressing portion 402 includes an external thread connecting sleeve 412 and a pressing body 413 that are fixedly connected to each other. The insulating portion 401 is hermetically sleeved on the battery cell 421, thereby achieving the seal between the insulating portion 401 and the battery cell 421. The insulating portion 401 can be insulating glue.

[0029] The pressing portion 402 is hermetically sleeved on the insulating portion 401. That is to say, both the external thread connecting sleeve 412 and the pressing body 413 are hermetically sleeved on the insulating portion 401, thereby achieving the seal between the pressing portion 402 and the insulating portion 401. The external thread connecting sleeve 412 is fixedly connected to the first mounting hole 32 by threads, thereby achieving detachable connection. The pressing body 413 presses the first sealing ring 403 around the outer port of the first mounting hole 32 against the outer wall surface of the housing 30. In this case, the first sealing ring 403 can achieve the seal between the pressing body 413 and the outer wall surface of the housing 30, thereby indirectly achieving the seal of the thread gap between the external thread connecting sleeve 412 and the first mounting hole 32.

[0030] In this structure, the external thread connecting sleeve 412 and the first mounting hole 32 are fixedly connected by threads, which is more conducive to achieving the detachable connection between the power connection member 42 and the first mounting hole 32, and thus facilitating the quick disassembly and assembly of the power connection member 42. In the embodiments of the present application, the pressing of the first sealing ring 403 by the pressing body 413 can be derived from the thread fit between the external thread connecting sleeve 412 and the first mounting hole 32. That is to say, after the external thread connecting sleeve 412 and the first mounting hole 32 are threadedly connected, since the external thread connecting sleeve 412 is connected to the pressing body 413, the external thread connecting sleeve 412 can pull the pressing body 413, making it tend to press against the outer wall surface of the housing 30. In this case, the pressing body 413 can press the first sealing ring 403 against the outer wall surface of the housing 30, thereby achieving the seal of the first sealing ring 403 between the pressing body 413 and the outer wall surface of the housing 30.

[0031] In order to better press the first sealing ring 403, the pressing body 413 can be a sheet-like structure, which is more likely to achieve the all-round pressing of the first sealing ring 403.

[0032] To improve the stability of the connection. In a further technical solution, the pressing body 413 can be detachably connected to the outer shell 30 through a threaded connector (such as a screw or a bolt), thereby avoiding the problem that the pressing effect on the first sealing ring 403 becomes poor due to the loosening of the external thread connecting sleeve 412.

[0033] In the embodiment of the present application, the outer wall surface of the outer shell 30 may have a first plane 33, and the first sealing ring 403 can be pressed between the first plane 33 and the pressing body 413. In this case, the first plane 33 can provide a relatively flat pressing surface, which is beneficial to ensure that each area of the first sealing ring 403 can be pressed more evenly, and is beneficial to ensuring the sealing effect.

[0034] In other embodiments or further embodiments, at least one of the outer wall surface of the outer shell 30 and the surface of the pressing body 413 facing the outer shell 30 may be provided with a mounting groove 36, and the first sealing ring 403 can be positioned and installed in the mounting groove 36. In this case, the first sealing ring 403 will be restricted by the positioning of the mounting groove 36, thereby improving the installation stability of the first sealing ring 403. In addition, the cooperation between the first sealing ring 403 and the mounting groove 36 is more likely to form a labyrinth sealing structure, which can further improve the sealing effect.

[0035] Please refer to FIGS. 3 to 7 again. In the embodiment of the present application, the conductive slip ring 01 may further include a fixed insulating sleeve 70. The fixed insulating sleeve 70 is disposed inside the outer shell 30, that is, in the shell cavity 31, and is sleeved outside the rotating electrical connection portion 50. At least a part of the rotating electrical connection portion 50 is rotatably disposed inside the fixed insulating sleeve 70, and is insulated from the outer shell 30 at least through the fixed insulating sleeve 70, thereby preventing the rotating electrical connection portion 50 from being in electrical contact with the outer shell 30. The fixed electrical connection portion 40 passes through the fixed insulating sleeve 70 and is electrically connected to the rotating electrical connection portion 50 in a relatively rotatable manner. Of course, in order to avoid static electricity on the outer shell 30, the outer shell 30 is grounded; or, the outer shell 30 is connected to a grounded peripheral member of the process chamber 10, and the outer shell 30 will also be grounded. In this case, the insulating isolation function of the fixed insulating sleeve 70 can prevent the rotating electrical connection portion 50 from being grounded.

[0036] As described above, the fixed electrical connection part 40 may include a power connection member 42. The first end of the power connection member 42 can achieve sliding electrical contact with the rotating electrical connection part 50 through the brush 41. The brush 41 can achieve electrical connection with the power supply 60 through the power connection member 42 that is hermetically fitted with the first mounting hole 32 as described above. Of course, it is not limited to electrically connecting with the power supply 60 through the power connection member 42. In the embodiments of the present application, it does not exclude the possibility that the brush 41 directly extends outside the housing 30 after being hermetically fitted with the first mounting hole 32 and is directly electrically connected to the power supply 60.

[0037] In the case where the fixed electrical connection part 40 includes the brush 41, in a further technical solution, please refer to FIG. 14. The fixed insulating sleeve 70 may be provided with a second mounting hole 71. The brush 41 is installed in the second mounting hole 71 and at least partially located within the fixed insulating sleeve 70. In this case, the fixed insulating sleeve 70 can not only play the role of insulating isolation, but also provide an insulating mounting basis for the brush 41, thereby realizing the installation of the brush 41 within the housing 30.

[0038] The brush 41 has good elasticity or flexibility, and the strength of the brush 41 is not high, which is beneficial to generate a certain elastic force with the rotating electrical connection part 50 to achieve the purpose of stable electrical contact. To facilitate the fixed installation of the brush 41, the fixed electrical connection part 40 may further include a mounting frame 43. The mounting frame 43 is installed in the second mounting hole 71, and the brush 41 is connected to the mounting frame 43. The first end of the power connection member 42 located within the housing cavity 31 is electrically connected to the mounting frame 43, and the mounting frame 43 electrically connects the brush 41 and the power connection member 42. The power connection member 42 is hermetically fitted with the first mounting hole 32, and the second end of the power connection member 42 located outside the housing 30 is used for electrical connection with the power supply 60. In this case, the mounting frame 43 can realize the relatively stable installation of the brush 41 on the fixed insulating sleeve 70.

[0039] In the embodiments of the present application, the structure of the mounting bracket 43 can be various, as long as it can achieve the installation of the brush 41 and realize the electrical connection between the brush 41 and the power connection member 42. The specific structure of the mounting bracket 43 is not limited in the embodiments of the present application. Please refer to FIGS. 15 and 16. In some embodiments, the mounting bracket 43 can include a trough-shaped main body 431, two connecting fins 432, and an electrical connection protrusion 433. The two connecting fins 432 are respectively connected to the tops of the two side walls of the trough-shaped main body 431 (i.e., the ends of the side walls where the trough opening is located), and extend from the trough opening of the trough-shaped main body 431 towards the opposite sides respectively. The electrical connection protrusion 433 is at least partially located inside the trough-shaped main body 431 and is electrically connected to the first end of the power connection member 42. The two connecting fins 432 are fixedly connected to the fixed insulating sleeve 70. Each mounting bracket 43 can be connected to at least one brush 41. For example, the two brushes 41 shown in FIG. 15, one end of the two brushes 41 is fixed in the third mounting hole penetrating the bottom of the trough-shaped main body 431 and is located on both sides of the electrical connection protrusion 433. The other ends of the two brushes 41 extend in the direction away from the trough opening of the trough-shaped main body 431. Of course, each mounting bracket 43 can also be connected to one or more than three brushes 41. The number of brushes 41 connected to each mounting bracket 43 is not limited in the embodiments of the present application.

[0040] In this structure, the two connecting fins 432 can extend on the opposite sides of the trough opening of the trough-shaped main body 431 to achieve a relatively stable connection with the fixed insulating sleeve 70. Moreover, the mounting bracket 43 takes the trough-shaped main body 431 as the main structure, and the trough-shaped main body 431 and the two connecting fins 432 can form a structure similar to a bow, so that the mounting bracket 43 can have a good elastic function, which is beneficial to the elastic contact between the brush 41 and the rotating electrical connection part 50, can better avoid rigid contact, and can avoid the adverse effects on the brush 41 caused by the rotation of the rotating electrical connection part 50. At the same time, the electrical connection protrusion 433 is a member provided inside the trough-shaped main body 431 and is specifically used for connecting with the power connection member 42, which can facilitate the electrical connection with the power connection member 42.

[0041] Please refer to FIG. 15 again. In some embodiments, the electrical connection protrusion 433 can be provided with an electrical connection hole 4331, and the end of the core 421 located inside the outer shell 30 can be directly connected to the electrical connection hole 4331. Specifically, the end of the core 421 located inside the outer shell 30 can be a threaded end, the electrical connection hole 4331 can be a threaded hole, and the threaded end can be fixedly electrically connected by directly screwing into the threaded hole. Of course, the electrical connection between the electrical connection protrusion 433 and the end of the core 421 located inside the outer shell 30 can also be achieved by welding, conductive adhesive bonding, etc. The embodiments of the present application do not make limitations.

[0042] In the embodiments of the present application, the outer wall surface of the fixed insulating sleeve 70 may include a second plane 73, and both of the two connecting fins 432 are fixedly connected to the second plane 73. In this case, the two connecting fins 432 can be attached to the second plane 73, which is beneficial to improving the stability of the connection between the two connecting fins 432 and the fixed insulating sleeve 70. In some embodiments, the connecting fin 432 and the second plane 73 can be fixedly connected by a first threaded connector 78.

[0043] The shape of the fixed insulating sleeve 70 can be various. For example, the fixed insulating sleeve 70 is a square kit, a circular kit, etc., and the embodiments of the present application do not limit this. Please refer to FIG. 16 again. In some embodiments, the outer wall surface of the fixed insulating sleeve 70 may further include a first curved surface 74. Each part of the first curved surface 74 is located within a first cylindrical surface. The first curved surface 74 is connected end to end with the second plane 73. The inner wall surface of the outer shell 30 is a second cylindrical surface concentric with the first cylindrical surface. An insulating sealing filling part 75 can be provided in the gap between the second plane 73 and the area opposite to the second cylindrical surface, as shown in FIG. 5. In this case, the fixed insulating sleeve 70 can be as similar as possible to the shape of the outer shell 30, avoiding occupying too much space and also being able to minimize the generation of large gaps. At the same time, the design of the gap is beneficial to accommodating part of the structure of the mounting frame 43. At the same time, the insulating sealing filling part 75 can fill the large gap between the second plane 73 and the area opposite to the second cylindrical surface, which is beneficial to ensuring that the components installed in the outer shell 30 are more stable.

[0044] In the embodiments of the present application, the fixed insulating sleeve 70 is fixed inside the outer shell 30. Specifically, there are various ways to fix the fixed insulating sleeve 70 inside the outer shell 30, and the embodiments of the present application do not limit this. In some embodiments, a plurality of first positioning grooves 76 can be provided at the end of the fixed insulating sleeve 70 adjacent to the process chamber 10, as shown in FIG. 14. The openings of the plurality of first positioning grooves 76 face the inner wall of the outer shell 30 and penetrate to the end face of the fixed insulating sleeve 70. A plurality of second positioning grooves 34 (as shown in FIG. 8) can be provided on the inner wall of the outer shell 30. The openings of the plurality of second positioning grooves 34 are docked with the openings of the plurality of first positioning grooves 76 one by one to form a positioning space. The fixed insulating sleeve 70 can be connected to the outer shell 30 through a positioning member 77 installed in the positioning space. Specifically, the positioning member 77 can be a connecting key. This connection method has a simple structure and can realize the disassembly between the fixed insulating sleeve 70 and the outer shell 30 by disassembling the positioning member 77 and realize the connection between the fixed insulating sleeve 70 and the outer shell 30 by installing the positioning member 77, so as to realize disassembly and assembly, as shown in FIG. 7.

[0045] The structure of the rotating electrical connection part 50 can be of various types, which is not limited in the embodiments of the present application. Please refer to FIGS. 9, 10, 11, and 12. In some embodiments, the rotating electrical connection part 50 may include an insulating rotating shaft 51 and a conductive ring 52 sleeved on the insulating rotating shaft 51. Both the insulating rotating shaft 51 and the conductive ring 52 are disposed within the fixed insulating sleeve 70, and the conductive ring 52 can rotate with the insulating rotating shaft 51. The conductive ring 52 is electrically connected to the first end portion of the fixed electrical connection part 40 located within the housing cavity 31. The insulating rotating shaft 51 is rotatably mounted within the outer housing 30. The conductive ring 52 is used for electrically connecting to the electrical device 21. In this structure, the conductive ring 52 is electrically connected to the fixed electrical connection part 40, thereby forming a corresponding electrical connection relationship, which is beneficial to realizing multiple sets of conductive rings 52 and fixed electrical connection parts 40 for corresponding electrical connections, and thus can plan more electrical connection paths within a smaller space. In addition, the rotating electrical connection part 50 of this structure is rotatably mounted based on the insulating rotating shaft 51, and the electrical connection is realized through the conductive ring 52 mounted on the insulating rotating shaft 51, which can isolate the insulating rotating shaft 51 between the conductive ring 52 and other components that do not need to be electrically connected to the conductive ring 52, avoiding short circuits.

[0046] Please refer to FIG. 10 again. In a further technical solution, the conductive ring 52 may include an annular body 521 and a power connection terminal 522 disposed within the annular body 521. The first end portion of the power connection terminal 522 is electrically connected to the inner ring surface of the annular body 521. Please refer to FIG. 9 again. The insulating rotating shaft 51 is provided with a power connection avoidance groove 511 extending along its axial direction. The second end portion of the power connection terminal 522 extends into the power connection avoidance groove 511 (as shown in FIG. 12) and is used for electrically connecting to the electrical device 21. The outer ring surface of the annular body 521 is in sliding electrical contact connection with the fixed electrical connection part 40. During the rotation of the rotating electrical connection part 50, the outer ring surface of the annular body 521 slides in contact with the fixed electrical connection part 40, thereby realizing rotational power supply. This structure can enable the power connection terminal 522 to perform the electrical connection function with the electrical device 21 while being able to be disposed within the insulating rotating shaft 51. The insulating rotating shaft 51 sacrifices a part of its own structure to form the power connection avoidance groove 511, and then accommodates the power connection terminal 522, which is beneficial to the miniaturized design of the rotating electrical connection part 50.

[0047] Of course, the conductive ring 52 can also realize the electrical connection with the electrical device 21 through a conductive layer (such as a conductive plating layer, a conductive coating layer, etc.) provided on the outer wall of the insulating rotating shaft 51 and extending along the axial direction of the insulating rotating shaft 51.

[0048] As described above, the power connection terminal 522 extends into the power connection avoidance groove 511. Specifically, the power connection terminal 522 may only extend into the power connection avoidance groove 511 without contacting the inner wall of the power connection avoidance groove 511 or forming a rigid fit. Of course, the power connection terminal 522 may also extend into the power connection avoidance groove 511 while contacting the inner wall of the power connection avoidance groove 511, thereby forming a more stable mating relationship. Based on this, in some embodiments, the first end of the power connection terminal 522 is fixedly connected to the annular body 521. The annular body 521 is in plug-in fit with the power connection avoidance groove 511 through the second end of the power connection terminal 522, so as to be in limit fit with the insulating rotating shaft 51 in the rotation direction of the rotating electrical connection portion 50. In this case, the power connection terminal 522 not only plays the role of electrical connection, but also the power connection terminal 522 can be in plug-in fit with the power connection avoidance groove 511, so that the annular body 521 and the insulating rotating shaft 51 are in limit fit in the rotation direction of the insulating rotating shaft 51 (that is, the rotation direction of the rotating electrical connection portion 50), thereby preventing the annular body 521 from rotating relative to the insulating rotating shaft 51, which undoubtedly can improve the stability of the connection between the annular body 521 and the insulating rotating shaft 51.

[0049] Under normal circumstances, the electrical devices 21 in the process chamber 10 may be one or multiple (i.e., at least two). When there are multiple electrical devices 21, there are multiple conductive rings 52, which are axially spaced apart on the insulating rotating shaft 51. The insulating rotating shaft 51 is provided with multiple power connection avoidance grooves 511 that are spaced apart, and the second ends of the power connection terminals 522 of each conductive ring 52 extend into the corresponding power connection avoidance grooves 511. In this case, each conductive ring 52 can supply power to a corresponding one of the electrical devices 21. At the same time, in this case, there may also be multiple fixed electrical connection portions 40, and the multiple fixed electrical connection portions 40 are in electrical contact connection with the conductive rings 52 one by one, so as to achieve the purpose of supplying power to the multiple electrical devices 21 correspondingly. This independent power supply mode is easier to adjust针对性 according to the power consumption requirements of the multiple electrical devices 21, and thus it is easier to meet the diversified power consumption requirements of the multiple electrical devices 21.

[0050] In a specific embodiment, there may be multiple conductive rings 52, which are axially spaced along the insulating rotating shaft 51, and there may be multiple fixed electrical connection portions 40, which are axially spaced along the insulating rotating shaft 51. Each conductive ring 52 is electrically connected to the corresponding fixed electrical connection portion 40 and the corresponding electrical device 21.

[0051] In the case where the fixed electrical connection part 40 includes the brush 41 and the power connection part 42, there can be multiple sets of brushes 41, which are arranged at intervals along the axial direction of the insulating rotating shaft 51. There are multiple power connection parts 42, which are arranged at intervals along the axial direction of the insulating rotating shaft 51. Each set of brushes 41 is electrically connected to the corresponding conductive ring 52 and the corresponding power connection part 42.

[0052] Each fixed electrical connection part 40 can include a set of brushes 41. In the embodiments of the present application, a set of brushes 41 cooperating with each conductive ring 52 can be one brush 41 or multiple brushes 41. The embodiments of the present application do not limit the number of brushes 41 included in a set of brushes 41. In some embodiments, each set of brushes 41 can include two brushes 41. The distance between the ends of the two brushes 41 in the same set that are away from the conductive ring 52 is less than the distance between the other ends that are close to the conductive ring 52. The two brushes 41 in the same set are respectively tangent to and in contact with different parts of the conductive ring 52. In this case, each power connection part 42 realizes sliding electrical contact with the conductive ring 52 through the two brushes 41, which can improve the stability of electrical contact.

[0053] In order to better match the positions of the multiple conductive rings 52, the first ends of the multiple power connection avoidance grooves 511 are located on the end face of the insulating rotating shaft 51 adjacent to the electrical device 21. The second ends of the multiple power connection avoidance grooves 511 extend to the positions corresponding to the corresponding power connection terminals 522, that is, the second ends of the multiple power connection avoidance grooves 511 extend to the positions where the corresponding conductive rings 52 are located. At least some of the multiple power connection avoidance grooves 511 are not all through grooves. In this case, the second ends of the multiple power connection avoidance grooves 511 extend to the positions of the corresponding conductive rings 52 for the power connection terminals 522 of the corresponding conductive rings 52 to extend in and achieve assembly. At the same time, it is not necessary for all the multiple power connection avoidance grooves 511 to penetrate through both ends of the entire insulating rotating shaft 51, so that the strength of the insulating rotating shaft 51 will not be greatly affected.

[0054] As described above, the power consumption requirements of the multiple electrical devices 21 are different, and thus the sizes of the conductive rings 52 are required to be different. Based on this, in some embodiments, the lengths of the annular bodies 521 of the multiple conductive rings 52 in the axial direction of the insulating rotating shaft 51 are not all equal, that is, at least two of the lengths of the annular bodies 521 of the multiple conductive rings 52 in the axial direction of the insulating rotating shaft 51 are not equal. For example, among the multiple conductive rings 52, the conductive ring 52 with a larger length can be used to transmit radio frequency current, the conductive ring 52 with the next larger length can be used to conduct alternating current to supply the electrical device 21 as a heating device. The conductive ring 52 with a shorter length can be used to conduct direct current to supply a thermocouple or an electrostatic adsorption electrode.

[0055] When the number of the conductive rings 52 can be multiple, the multiple conductive rings 52 can be arranged at intervals along the axial direction of the insulating rotating shaft 51. The conductive ring 52 can be fixed on the insulating rotating shaft 51 through the interference fit between the annular body 521 and the insulating rotating shaft 51. Of course, the conductive ring 52 can be fixedly connected to the insulating rotating shaft 51 through the cooperation between the electrical connection terminal 522 and the electrical connection avoidance groove 511. In this case, the electrical connection terminal 522 and the electrical connection avoidance groove 511 are in interference fit. The multiple conductive rings 52 are fixed on the insulating rotating shaft 51 and are arranged at intervals to avoid contacting each other, so as to avoid short circuit between adjacent conductive rings 52.

[0056] Of course, in other embodiments, the rotating electrical connection part 50 may further include an insulating isolation part 53, and an insulating isolation part 53 is arranged between adjacent two conductive rings 52. In this case, the isolation function of the insulating isolation part 53 can avoid the adjacent two conductive rings 52 from moving and contacting each other, and can also preferably avoid the short circuit problem.

[0057] In the embodiment of the present application, the insulating rotating shaft 51 is rotatably arranged in the outer shell 30. The insulating rotating shaft 51 can be rotatably installed through simple shaft-hole fit. Of course, considering relieving wear and improving the stability of rotation, as shown in FIG. 3, the insulating rotating shaft 51 can be rotatably arranged in the fixed insulating sleeve 70 through the first bearing 91. An annular isolation protrusion 72 can be arranged in the fixed insulating sleeve 70, and the annular isolation protrusion 72 can be fixed relative to the fixed insulating sleeve 70. The first bearing 91 is located on the first side of the annular isolation protrusion 72. The conductive ring 52 can be located on the second side of the annular isolation protrusion 72, and the first side and the second side are opposite to each other. In this case, the annular isolation protrusion 72 can isolate the first bearing 91 and the conductive ring 52, so as to relieve the particles generated after the first bearing 91 works for a long time from entering the space where the conductive ring 52 is located, and thus can avoid having an adverse effect on the sliding electrical contact of the conductive ring 52.

[0058] In some embodiments, the first end of the insulating rotating shaft 51 is rotatably arranged in the outer shell 30 through the first bearing 91, and the second end of the insulating rotating shaft 51 can be rotatably arranged in the outer shell 30 through the second bearing 92. Specifically, the annular isolation protrusion 72 can be only arranged between the first bearing 91 and the conductive ring 52, as shown in FIG. 7.

[0059] In the embodiments of the present application, the insulating shaft 51 can be of an integral structure or a split structure. As shown in FIG. 9, in some embodiments, the insulating shaft 51 is of a split structure. The insulating shaft 51 can include a first shaft segment 501 and a second shaft segment 502, and the first shaft segment 501 and the second shaft segment 502 are detachably connected. The above-mentioned power connection avoidance groove 511 can be formed on the first shaft segment 501, and the second shaft segment 502 can be provided with an avoidance hole opposite to the corresponding power connection avoidance groove 511 so as not to affect the electrical connection between the electrical device 21 and the corresponding power connection terminal 522.

[0060] Based on the conductive slip ring 01 disclosed in the embodiments of the present application, the embodiments of the present application disclose a semiconductor processing apparatus. The disclosed semiconductor processing apparatus includes a processing chamber 10, a carrier 20, and the above-mentioned conductive slip ring 01.

[0061] The carrier 20 is used to carry a wafer and drive the wafer to rotate during the process to improve the uniformity of film formation on the wafer. The carrier 20 has an electrical device 21. The electrical device 21 can be an electrostatic chuck electrode, a heating coil, etc. built in the carrier 20.

[0062] The carrier 20 is disposed inside the processing chamber 10. The carrier 20 is rotatably disposed inside the processing chamber 10. The carrier 20 is provided with an electrical device 21 inside. The outer shell 30 is hermetically connected to the processing chamber 10. The shell cavity 31 communicates with the chamber space 11 of the processing chamber 10. The rotary electrical connection part 50 is connected to the carrier 20 and is electrically connected to the electrical device 21 inside the carrier 20. The rotary electrical connection part 50 and the carrier 20 can rotate synchronously, thereby realizing rotary power supply.

[0063] In the embodiments of the present application, the outer shell 30 of the conductive slip ring 01 has a connecting flange 35. The connecting flange 35 is disposed around the mating port 38 of the outer shell 30. The connecting flange 35 and the processing chamber 10 can be detachably connected by a second threaded connector 37.

[0064] The semiconductor processing equipment disclosed in the embodiments of the present application may further include a driving mechanism, which may include a driving motor 81, a rotating shaft 82, a driving wheel 83, a transmission belt 84, and a driven wheel 85. The driving motor 81 is fixed outside the process chamber 10. One end of the rotating shaft 82 is connected to the driving motor 81, and the other end of the rotating shaft 82 extends into the process chamber 10. The driving wheel 83 is fixed on the part of the rotating shaft 82 located inside the process chamber 10. The transmission belt 84 connects the driving wheel 83 and the driven wheel 85. The driven wheel 85 is connected to the support shaft 22 of the support carrier 20, so that the support shaft 22 can be driven to rotate during the rotation of the driven wheel 85, and finally the rotation of the entire carrier 20 is realized. Of course, the electrical components 21 in the carrier 20 will also rotate synchronously. Specifically, the support shaft 22 can be rotatably installed at the docking port of the process chamber 10 through a third bearing 86.

[0065] It should be noted that the structure of the driving mechanism can be various and is not limited to the structure described above. The embodiments of the present application do not make any restrictions.

[0066] In the above embodiments of the present invention, the differences between the various embodiments are mainly described. As long as the different optimization features of the various embodiments do not conflict, they can be combined to form a more optimal embodiment. Considering the simplicity of the text, it will not be elaborated here.

[0067] The embodiments of the present invention have been described above in conjunction with the accompanying drawings. However, the present invention is not limited to the above specific implementation manners. The above specific implementation manners are only illustrative and not restrictive. Under the inspiration of the present invention, those of ordinary skill in the art can also make many forms without departing from the purpose of the present invention and the scope protected by the claims, and all of them belong to the protection scope of the present invention.

[0068] 01: Conductive slip ring 10: Process chamber 11: Chamber space 20: Carrier 21: Electrical components 22: Support shaft 30: Outer shell 31: Shell cavity 32: First mounting hole 33: First plane 34: Second positioning groove 35: Connecting flange 36: Mounting groove 37: Second threaded connector 38: Docking port 40: Fixed electrical connection part 41: Brush 42: Power connection part 43: Mounting bracket 50: Rotating electrical connection part 51: Insulating shaft 52: Conductive ring 53: Insulating spacer 60: Power supply 70: Fixed insulating sleeve 71: Second mounting hole 72: Annular isolation protrusion 73: Second plane 74: First curved surface 75: Insulating sealing filling part 76: First positioning groove 77: Positioning part 78: First threaded connection part 81: Driving motor 82: Rotating shaft 83: Driving wheel 84: Transmission belt 85: Driven wheel 86: Third bearing 91: First bearing 92: Second bearing 401: Insulating part 402: Compressing part 403: First sealing ring 412: External threaded connection sleeve 413: Compressing body 421: Battery core 422: Sealing part 431: Grooved main body 432: Connecting fin 433: Electrical connection protrusion 501: First shaft segment 502: Second shaft segment 511: Electricity connection avoidance groove 521: Annular body 522: Electrical connection terminal

Claims

1. A conductive slip ring, wherein, A conductive slip ring is used in a process chamber of a semiconductor manufacturing apparatus. The slip ring includes a housing, a fixed electrical connection, and a rotating electrical connection, wherein: the housing has a cavity and a first mounting hole communicating with the cavity; the housing is used for a sealed connection with the process chamber to seal the cavity with a chamber space within the process chamber; the fixed electrical connection is sealed to the first mounting hole, and a first end of the fixed electrical connection extends into the cavity and is rotatably connected to the rotating electrical connection; a second end of the fixed electrical connection is located outside the housing and is used for electrical connection to a power source; the rotating electrical connection is rotatably disposed within the housing and is used for electrical connection to an electrical component within the process chamber.

2. The conductive slip ring as claimed in claim 1, wherein, The fixed electrical connection includes a power connector, which includes a battery cell and a sealing portion. The battery cell passes through the first mounting hole. The end of the battery cell located inside the housing makes slidable electrical contact with the rotating electrical connection. The end of the battery cell located outside the housing is used for electrical connection with the power source. The sealing portion covers a portion of the battery cell and is at least sealed between the hole wall of the first mounting hole and the battery cell.

3. The conductive slip ring as described in claim 2, wherein, The sealing part includes an insulating part, a pressing part, and a first sealing ring. The pressing part includes an externally threaded connecting sleeve and a pressing body that are fixedly connected to each other. The insulating part is sealed on the battery cell. The externally threaded connecting sleeve and the pressing body are both sealed on the insulating part. The externally threaded connecting sleeve is threadedly fixedly connected to the first mounting hole. The pressing body presses the first sealing ring, which surrounds the outer port of the first mounting hole, against the outer wall surface of the housing.

4. The conductive slip ring as described in claim 3, wherein, The outer wall surface of the housing has a first plane, and the first sealing ring is pressed between the first plane and the pressing body; or, at least one of the outer wall surface of the housing and the surface of the pressing body facing the housing is provided with a mounting groove, and the first sealing ring is positioned and installed in the mounting groove.

5. The conductive slip ring as claimed in claim 1, wherein, The conductive slip ring also includes a fixed insulating sleeve, which is disposed inside the housing and sleeved outside the rotating electrical connection portion. The rotating electrical connection portion is at least partially rotatably disposed inside the fixed insulating sleeve and is insulated from the housing at least through the fixed insulating sleeve. The fixed electrical connection portion passes through the fixed insulating sleeve and is electrically connected to the rotating electrical connection portion in a rotatable manner.

6. The conductive slip ring as claimed in claim 5, wherein, The fixed electrical connection includes a brush that slides in the rotation direction of the rotating electrical connection with the outer peripheral wall of the rotating electrical connection. The fixed insulating sleeve has a second mounting hole in which the brush is mounted and is at least partially located within the fixed insulating sleeve.

7. The conductive slip ring as claimed in claim 6, wherein, The fixed electrical connection part also includes a mounting bracket and a power connector. The mounting bracket is mounted in the second mounting hole. The brush is connected to the mounting bracket. The first end of the power connector located inside the housing cavity is electrically connected to the mounting bracket. The mounting bracket electrically connects the brush and the power connector. The power connector is sealed to the first mounting hole. The second end of the power connector located outside the housing is used for electrical connection with the power source.

8. The conductive slip ring as claimed in claim 7, wherein, The mounting bracket includes a groove-shaped body, two connecting fins, and an electrical connection protrusion. The two connecting fins are respectively connected to the top of the two side walls of the groove-shaped body and extend from the groove opening of the groove-shaped body to opposite sides. The electrical connection protrusion is at least partially located inside the groove-shaped body and is electrically connected to the first end of the power connector. Both connecting fins are fixedly connected to the fixed insulating sleeve. Each mounting bracket is connected to at least one brush. One end of at least one brush is fixed in a third mounting hole penetrating the bottom of the groove-shaped body, and the other end of at least one brush extends in a direction away from the groove opening of the groove-shaped body.

9. The conductive slip ring as claimed in claim 8, wherein, The outer surface of the fixed insulating sleeve includes a second plane, and both connecting fins are fixedly connected to the second plane.

10. The conductive slip ring as claimed in claim 5, wherein, The fixed insulating sleeve has a plurality of first positioning grooves at its end adjacent to the process chamber. The openings of the plurality of first positioning grooves face the inner wall of the outer shell and extend to the end face of the fixed insulating sleeve. The inner wall of the outer shell has a plurality of second positioning grooves. The openings of the plurality of second positioning grooves are aligned with the openings of the plurality of first positioning grooves to form a positioning space. The fixed insulating sleeve is connected to the outer shell through a positioning member installed in the positioning space.

11. The conductive slip ring as claimed in claim 5, wherein, The rotating electrical connection includes an insulating shaft disposed within the fixed insulating sleeve and a conductive ring sleeved on the insulating shaft and rotating with the insulating shaft. The conductive ring is electrically connected to the first end of the fixed electrical connection. The insulating shaft is rotatably mounted inside the housing, and the conductive ring is used for electrical connection with the electrical device.

12. The conductive slip ring as claimed in claim 11, wherein, The conductive ring includes an annular body and an electrical terminal disposed within the annular body. The first end of the electrical terminal is electrically connected to the inner annular surface of the annular body. The insulating shaft is provided with an electrical clearance groove extending along its axial direction. The second end of the electrical terminal extends into the electrical clearance groove and is used for electrical connection with the electrical device. The outer annular surface of the annular body is electrically contacted with the fixed electrical connection portion.

13. The conductive slip ring as claimed in claim 12, wherein, The first end of the electrical terminal is fixedly connected to the annular body, and the annular body is engaged with the electrical clearance groove through the second end of the electrical terminal, thereby limiting the rotation direction of the insulating shaft in the rotating electrical connection part.

14. The conductive slip ring as claimed in claim 12, wherein, There are multiple conductive rings, and the lengths of the annular bodies of the multiple conductive rings along the axial direction of the insulating shaft are not all equal.

15. The conductive slip ring as claimed in claim 12, wherein, There are multiple conductive rings, which are spaced apart along the axial direction of the insulating shaft. The insulating shaft has multiple spaced electrical clearance grooves. The second end of the electrical terminal of each conductive ring extends into the corresponding electrical clearance groove. There are multiple fixed electrical connection parts, which are spaced apart along the axial direction. Each conductive ring is electrically connected to the corresponding fixed electrical connection part and the corresponding electrical device.

16. The conductive slip ring as claimed in claim 11, wherein, The end of the insulating shaft is rotatably disposed within the fixed insulating sleeve via a first bearing. The fixed insulating sleeve has an annular isolation protrusion that can be fixed relative to the fixed insulating sleeve. The first bearing is located on the first side of the annular isolation protrusion, and the conductive ring is located on the second side of the annular isolation protrusion. The first side and the second side are opposite to each other.

17. A semiconductor manufacturing apparatus, wherein, The invention includes a process chamber, a carrier, and a conductive slip ring as described in any one of claims 1 to 16. The carrier is rotatably disposed within the process chamber and has an electrical component disposed therein. The housing is sealed to the process chamber and the housing cavity communicates with the chamber space of the process chamber. The rotating electrical connection is connected to the carrier and is electrically connected to the electrical component within the carrier.

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