Robotic arm

Abstract

A robotic arm includes a first arm, a second arm, a first carrier plate, and a second carrier plate connected to each other. The first arm includes a first rotary motor, a first belt gear set, a first speed-changing module, and a first arm portion connected in sequence. The second arm includes a second rotary motor, a second belt gear set, a second speed-changing module, and a second arm portion connected in sequence. The first carrier plate includes a third rotary motor, a third belt gear set, a third speed-changing module, and a first plate body connected in sequence. The second carrier plate includes a fourth rotary motor, a fourth belt gear set, a fourth speed-changing module, and a second plate body connected to each other. The second, third, and fourth rotary motors are each disposed within the first arm portion.

Description

Technical Field

[0001] This invention relates to a robotic arm. Prior Technology

[0002] Whether in semiconductor manufacturing or panel manufacturing, using robotic arms to transport substrates or wafers is a common automation technology.

[0003] However, in the existing robotic arm mechanism, the joints between its multiple arm segments still use belts as drive components. But joints are mostly areas where the robotic arm experiences concentrated force (or torque due to force), and belts are prone to transmission flexurality under heavy loads, thus reducing their service life and affecting the positioning stability after the movement stops.

[0004] Therefore, how to improve the load tolerance of robotic arms is a problem that relevant technical personnel need to consider and solve. Summary of the Invention

[0005] This invention provides a robotic arm that improves its overall load-bearing capacity through rigid components at the joints.

[0006] The robotic arm of the present invention includes a first arm, a second arm, a first carrier plate, and a second carrier plate connected to each other. The first arm includes a first rotary motor, a first belt gear set, a first speed-changing module, and a first arm portion connected in sequence. The first rotary motor provides power and drives the first arm portion to rotate via the first belt gear set and the first speed-changing module. The second arm includes a second rotary motor, a second belt gear set, a second speed-changing module, and a second arm portion connected in sequence. The second rotary motor provides power and drives the second arm portion to rotate via the second belt gear set and the second speed-changing module. The first carrier plate includes a third rotary motor, a third belt gear set, a third speed-changing module, and a first plate body connected in sequence. The third rotary motor provides power and drives the first plate body to rotate via the third belt gear set and the third speed-changing module. The second carrier plate includes a fourth rotary motor, a fourth belt gear set, a fourth speed-changing module, and a second plate body connected to each other. The fourth rotary motor provides power and drives the second plate body via the fourth belt gear set and the fourth speed-changing module. The second, third, and fourth rotary motors are respectively disposed within the first arm portion.

[0007] In one embodiment of the present invention, a base is also included, and a first rotary motor drives the first arm to rotate along the first axis through a first belt gear set and a first speed change module.

[0008] In one embodiment of the present invention, the second arm is pivotally connected to the first arm along the second axis, and the first carrier plate and the second carrier plate are respectively pivotally connected to the second arm along the third axis, with the second axis being parallel to the third axis.

[0009] In one embodiment of the present invention, the first belt gear set includes a first gear, a first belt and a second gear connected in sequence. The first gear is disposed on a first rotary motor, and the second gear, the first speed change module and the first arm are coaxially disposed.

[0010] In one embodiment of the present invention, the second belt gear set includes a third gear, a second belt and a fourth gear connected in sequence, the third gear is disposed on the second rotary motor and the fourth gear is coaxially disposed with the second speed change module.

[0011] In one embodiment of the present invention, the second speed change module is located at the pivot point between the first arm and the second arm, the second arm is fixed on the second speed change module, and the second rotary motor drives the second arm to rotate relative to the first arm through the second belt gear set and the second speed change module.

[0012] In one embodiment of the present invention, the aforementioned third belt gear set includes a fifth gear, a third belt, and a sixth gear arranged sequentially on the first arm, a first transmission shaft passing through the first arm and the second arm along a second axis, and a seventh gear, a fourth belt, and an eighth gear arranged sequentially on the second arm. The fifth gear is mounted on a third rotary motor, the sixth gear, the first transmission shaft, and the seventh gear are coaxially mounted, and the eighth gear is coaxially mounted with the third speed change module.

[0013] In one embodiment of the present invention, the first plate is fixed on the third speed change module, and the third rotary motor drives the first plate to rotate relative to the second arm through the third belt gear set and the third belt gear set and the third speed change module.

[0014] In one embodiment of the present invention, the aforementioned fourth belt gear set includes a ninth gear, a fifth belt, and a tenth gear arranged sequentially on the first arm, a second drive shaft passing through the first arm and the second arm, and an eleventh gear, a sixth belt, and a twelfth gear arranged sequentially on the second arm. The ninth gear is mounted on a fourth rotary motor, the tenth gear, the second drive shaft, and the eleventh gear are coaxially arranged, and the twelfth gear is coaxially arranged with the fourth speed change module.

[0015] In one embodiment of the present invention, the fourth belt gear set further includes a third drive shaft, and the second plate is fixed on the fourth transmission module through the third drive shaft.

[0016] In one embodiment of the present invention, a base and a lifting mechanism are further included. The lifting mechanism is disposed on the base and includes a fifth rotary motor, a fifth belt gear set, a screw, a driven part, a lifting platform, a sliding block, and a track connected in sequence. The sliding block is movably coupled to the track. The lifting platform is assembled to the sliding block and the driven part. The fifth rotary motor drives the lifting platform to move up and down relative to the base through the fifth belt gear set, the screw, and the driven part. The first arm is assembled to the lifting platform through a first speed-changing module.

[0017] In one embodiment of the present invention, the third belt gear set includes a first drive shaft, and the fourth belt gear set includes a second drive shaft, with the first drive shaft and the second drive shaft being coaxially arranged.

[0018] In one embodiment of the present invention, the aforementioned second drive shaft passes through the second transmission module from the first arm and is connected to the second arm, and the first drive shaft passes through the second drive shaft from the first arm and is connected to the second arm.

[0019] In one embodiment of the present invention, the third transmission module, the first carrier plate, and the second carrier plate are disposed on the first side of the second arm, and the fourth transmission module is disposed on the second side of the second arm. The first side and the second side are opposite sides of the second arm.

[0020] In one embodiment of the present invention, the aforementioned fourth belt gear set includes a third drive shaft that extends from the fourth gearbox through the second arm and the first carrier plate and connects to the second carrier plate.

[0021] Based on the above, the robotic arm comprises four main structural components—a first arm, a second arm, a first carrier plate, and a second carrier plate—connected to each other. Each component has its own arm (or plate) and a rotary motor, belt and gear set, and variable assembly module housed within the arm (or plate). Thus, each component is an independently driveable unit, avoiding complex and difficult-to-control drive modes caused by interconnections, thereby simplifying the algorithm complexity of the controller required for the robotic arm. Furthermore, the rotary motors of the second arm, the first carrier plate, and the second carrier plate are all located within the first arm of the first arm, thereby centralizing the drive source of the robotic arm and facilitating assembly, replacement, and maintenance. Simple Explanation of the Diagram

[0022] Figure 1 is a schematic diagram of a robotic arm according to an embodiment of the present invention. Figure 2A is a schematic diagram of some components of the robotic arm in Figure 1. Figure 2B is an exploded view of the components in Figure 2A. Figure 3A shows a partial side view of the first and second arms. Figure 3B is a schematic diagram of multiple rotary motors inside the first arm. Figures 4A and 4B are partial sectional views of the robotic arm at different locations. Figure 5 shows the relevant structural components of the robotic arm and their corresponding relationships using a simple block diagram. Implementation

[0023] Figure 1 is a schematic diagram of a robotic arm according to an embodiment of the present invention. Referring to Figure 1, the robotic arm 100 includes a first arm 110, a second arm 120, a first carrier plate 130, and a second carrier plate 140 connected to each other. The first arm 110 is movably disposed on a base 150, the second arm 120 is pivotally connected to the first arm 110, and the first carrier plate 130 and the second carrier plate 140 are respectively pivotally connected to the second arm 120. Here, the first carrier plate 130 and the second carrier plate 140 are each used to carry and fix the wafer 200 for transport.

[0024] Figure 2A is a schematic diagram of some components of the robotic arm in Figure 1. Figure 2B is an exploded view of the components in Figure 2A. Referring to Figures 1, 2A, and 2B simultaneously, in this embodiment, the robotic arm 100 also includes a base 150, and the first arm 110 includes a first rotary motor 111, a first belt gear set 112, a first speed change module 113, and a first arm portion 114 connected in sequence. The first rotary motor 111 provides power and drives the first arm portion 114 to rotate along the first axis AX1 through the first belt gear set 112 and the first speed change module 113. Here, the first speed change module 113 is, for example, a reduction bearing, a harmonic reducer module, or a module composed of a harmonic reducer core component plus a bearing and a self-made structure. The first belt gear set 112 includes a first gear 112a, a first belt 112b and a second gear 112c connected in sequence. The first gear 112a is disposed on the first rotary motor 111. The second gear 112c, the first speed change module 113 and the first arm 114 are coaxial (along the first axis AX1). The first belt 112b is connected between the first gear 112a and the second gear 112c for transmission.

[0025] Furthermore, the robotic arm 100 also includes a lifting mechanism 160, which includes a fifth rotary motor 161, a transmission assembly 162, a lifting platform 163, a track 164, and a sliding block 165. The transmission assembly 162 includes a fifth belt gear set 162a, a screw 162b, and a driven part 162c. The fifth rotary motor 161 is disposed within the column of the base 150 and is connected to the fifth belt gear set 162a, which is located at the top of the base 150. The fifth belt gear set 162a includes two gears and a belt connecting and driving them. One gear is coaxially disposed with the fifth rotary motor 161 to transmit power to the other gear when the fifth rotary motor 161 is actuated. The screw 162b stands on one side of the base 150, and one end of the screw 162b is coaxially connected to the other gear. The driven part 162c is coupled to the screw 162b. Therefore, when the screw 162b is driven to rotate by the fifth rotary motor 161 and the fifth belt gear set 162a, the driven part 162c can be driven to move up and down relative to the base 150.

[0026] Furthermore, track 164 is located on the other side of the column of base 150, sliding block 165 is movably coupled to track 164, lifting platform 163 is assembled to sliding block 165 and driven part 162c, and fifth rotary motor 161 drives lifting platform 163 to rise and fall relative to base 150 through fifth belt gear set 162a, screw 162b, and driven part 162c. First arm 114 of first arm 110 is assembled to lifting platform 163 through first speed change module 113, and at the same time, first rotary motor 111 rests on base 150 (when lifting platform 163 is in the lowest position).

[0027] Figure 3A shows a partial side view of the components of the first and second arms. Figure 3B is a schematic diagram of multiple rotary motors within the first arm, allowing the arrangement of the rotary motors to be identified from a three-dimensional perspective. Referring to both Figures 3A and 3B, in this embodiment, the second arm 120 includes a second rotary motor 121, a second belt gear set 122, a second speed change module 123, and a second arm 124 connected in sequence. The second rotary motor 121 provides power and drives the second arm 124 to rotate relative to the first arm 114 along the second axis AX2 via the second belt gear set 122 and the second speed change module 123.

[0028] Furthermore, the second arm 120 is essentially pivotally connected to the first arm 110 along the second axis AX2, where the first axis AX1 is parallel to the second axis AX2. The second belt gear set 122 includes a third gear 122a, a second belt 122b, and a fourth gear 122c connected in sequence. The third gear 122a is disposed on the second rotary motor 121, and the fourth gear 122c is coaxially disposed with the second transmission module 123 (along the second axis AX2). The second transmission module 123 is located at the pivot point between the first arm 110 and the second arm 120. The second arm 124 is fixed to the second transmission module 123. The second rotary motor 121 drives the second arm 124 to rotate relative to the first arm 114 along the second axis AX2 through the second belt gear set 122 and the second transmission module 123. Here, the component composition of the second transmission module 123 is the same as that of the first transmission module 113 described above, only the form and specifications are adjusted according to the compatible components.

[0029] Figures 4A and 4B are partial cross-sectional views of the robotic arm at different locations. Figure 5 uses a simple block diagram to illustrate the relevant structural components of the robotic arm and their corresponding relationships. Figure 5 provides a simple overview of the arm and its corresponding structural components in this embodiment. Referring to Figures 4A, 4B, and 5 simultaneously, in this embodiment, the first carrier plate 130 includes a third rotary motor 131, a third belt gear set 132, a third speed change module 133, and a first plate body 134 connected in sequence. The third rotary motor 131 provides power and drives the first plate body 134 to rotate along the third axis AX3 through the third belt gear set 132 and the third speed change module 133. The first axis AX1, the second axis AX2, and the third axis AX3 are parallel to each other. Furthermore, the second carrier plate 140 includes a fourth rotary motor 141, a fourth belt gear set 142, a fourth speed change module 143 and a second plate body 144 connected to each other. The fourth rotary motor 141 provides power and drives the second plate body 144 to rotate through the fourth belt gear set 142 and the fourth speed change module 143.

[0030] Furthermore, regarding the first carrier plate 130, the third rotary motor 131 is disposed within the first arm 114, and the third belt gear set 132 includes a fifth gear 132a, a third belt 132b, and a sixth gear 132c disposed in the first arm 114 and connected in sequence, a first drive shaft 132d passing through the first arm 114 and the second arm 124 along the second axis AX2, and a seventh gear 132e, a fourth belt 132f, and an eighth gear 132g disposed in the second arm 124 and connected in sequence. The fifth gear 132a is disposed on the third rotary motor 131, the sixth gear 132c, the first drive shaft 132d, and the seventh gear 132e are coaxial (along the second axis AX2), and the eighth gear 132g is coaxial with the third transmission module 133 (along the third axis AX3). The first plate 134 is fixed on the third speed change module 133. The third rotary motor 131 drives the first plate 134 to rotate relative to the second arm 124 through the third belt gear set 132 and the third speed change module 133.

[0031] The fourth belt gear set 142 includes a ninth gear 142a, a fifth belt 142b, and a tenth gear 142c, which are sequentially connected and disposed on the first arm 114; a second drive shaft 142d passing through the first arm 114 and the second arm 124; and an eleventh gear 142e, a sixth belt 142f, and a twelfth gear 142g, which are sequentially connected and disposed on the second arm 124. The ninth gear 142a is disposed on the fourth rotary motor 141; the tenth gear 142c, the second drive shaft 142d, and the eleventh gear 142e are coaxial (along the second axis AX2); and the twelfth gear 142g is coaxial (along the third axis AX3) with the fourth speed change module 143. The fourth belt gear set 142 also includes a third drive shaft 142h. The second plate 144 is fixed to the fourth transmission module 143 via the third drive shaft 142h, so that the fourth rotary motor 141 drives the second plate 144 to rotate relative to the second arm 124 along the third axis AX3 via the fourth belt gear set 142 and the fourth transmission module 143. Here, the components of the third transmission module 133 and the fourth transmission module 143 are the same as those of the first transmission module 113 or the second transmission module 123 described above, only the form and specifications are adjusted according to the compatible components.

[0032] As shown in Figure 5, the third belt gear set 132 of this embodiment includes a first drive shaft 132d, and the fourth belt gear set 142 includes a second drive shaft 142d. The first drive shaft 132d and the second drive shaft 142d are coaxial (along the second axis AX2). The second drive shaft 142d passes through the second transmission module 123 from the first arm 114 and connects to the second arm 124. The first drive shaft 132d passes through the second drive shaft 142d from the first arm 114 and connects to the second arm 124. The third transmission module 133, the first carrier plate 130, and the second carrier plate 140 are disposed on the first side of the second arm 124, and the fourth transmission module 143 is disposed on the second side of the second arm 124. The first side and the second side are opposite sides of the second arm 124. The fourth belt gear set 142 includes a third drive shaft 142h, which passes through the second arm 124 and the first plate 134 from the fourth transmission module 143 and connects to the second plate 144.

[0033] As can be clearly seen from Figure 5, in this embodiment, the robotic arm 100 has the second rotary motor 121, the third rotary motor 131, and the fourth rotary motor 141 respectively housed within the first arm portion 114. Therefore, each structural component of the robotic arm 100 (i.e., the first arm portion 114, the second arm portion 124, the first plate 134, and the second plate 144) is in a state where it can be independently driven and independently assembled and disassembled. This avoids design and structural complexity caused by structural connections, and also facilitates the assembly, maintenance, and replacement of structural components.

[0034] Furthermore, the two pivotally connected structural components are connected by a transmission module (second transmission module 123, third transmission module 133, and fourth transmission module 143). This effectively overcomes the negative impact of the prior art where belts cross the joints. In other words, using transmission modules (second transmission module 123, third transmission module 133, and fourth transmission module 143) as the joint structure of the robotic arm 100 increases its rigidity and improves its support capacity at the joints. In addition, compared to the prior art using belts for joint transmission, the use of transmission modules (second transmission module 123, third transmission module 133, and fourth transmission module 143) in this invention effectively resists low-frequency vibrations generated during operation due to their rigidity. Therefore, overall, the robotic arm 100 of this invention, due to the aforementioned component configuration, effectively improves its overall load capacity, stability, and durability.

[0035] In summary, in the above embodiments of the present invention, the robotic arm includes four main structural components—a first arm, a second arm, a first carrier plate, and a second carrier plate—connected to each other. Each structural component has its own arm portion (or plate) and a rotary motor, a belt and gear set, and a variable assembly module disposed within the arm portion (or plate). Accordingly, each structural component is an independently driveable unit, avoiding complex and difficult-to-control drive modes caused by interconnected relationships, thereby simplifying the algorithm complexity of the controller required for the robotic arm. Furthermore, the rotary motors of the second arm, the first carrier plate, and the second carrier plate are all disposed within the first arm portion of the first arm, thereby centralizing the drive source of the robotic arm, which facilitates assembly, replacement, and maintenance.

[0036] Meanwhile, the belt and gear sets belonging to each structural component are all located inside the arm (plate) rather than at or across the joints, thus avoiding the situation in the prior art where drive components such as belts span at least two structural components. At the same time, replacing the belts at the joints in the prior art with speed-changing modules can also effectively resist low-frequency vibrations during operation due to the rigidity of the speed-changing modules, thereby helping to improve the overall load capacity, stability and durability of the robotic arm.

[0037] 100: Robotic Arm 110: First Arm 111: First Rotary Motor 112: First belt gear set 112a: First gear 112b: First belt 112c: Second gear 113: First transmission module 114: First arm 120: Second arm 121: Second Rotary Motor 122: Second belt gear set 122a: Third gear 122b: Second belt 122c: Fourth Gear 123: Second transmission module 124: Second Arm 130: First carrier board 131: Third Rotary Motor 132: Third belt gear set 132a: Fifth Gear 132b: Third belt 132c: Sixth Gear 132d: First drive shaft 132e: The Seventh Gear 132f: Fourth belt 132g: Eighth Gear 133: Third transmission module 134: First Plate 140: Second carrier plate 141: Fourth Rotary Motor 142: Fourth belt gear set 142a: Ninth Gear 142b: Fifth belt 142c: Tenth Gear 142d: Second drive shaft 142e: Eleventh Gear 142f: Sixth belt 142g: Twelfth Gear 142h: Third drive shaft 143: Fourth transmission module 144: Second Plate 150: Base 160: Lifting mechanism 161: The Fifth Rotary Motor 162: Transmission Components 162a: Fifth belt gear set 162b: Screw 162c: Follower 163: Lifting Platform 164: Track 165: Sliding block 200: Wafer AX1: First axis AX2: Second axis AX3: Third axis

Claims

1. A robotic arm comprising a first arm, a second arm, a first carrier plate, and a second carrier plate connected to each other, wherein the first arm comprises a first rotary motor, a first belt gear set, a first speed-changing module, and a first arm portion connected in sequence, the first rotary motor providing power and driving the first arm portion to rotate via the first belt gear set and the first speed-changing module; the second arm comprises a second rotary motor, a second belt gear set, a second speed-changing module, and a second arm portion connected in sequence, the second rotary motor providing power and driving the second arm portion to rotate via the second belt gear set and the second speed-changing module; the first carrier plate comprises a third rotary motor, a third belt gear set, a third speed-changing module, and a first plate body connected in sequence, the third rotary motor providing power and driving the first plate body to rotate via the third belt gear set and the third speed-changing module; and the second carrier plate comprises a fourth rotary motor, a fourth belt gear set, a fourth speed-changing module, and a second plate body connected to each other, the fourth rotary motor providing power and driving the second plate body to rotate via the fourth belt gear set and the fourth speed-changing module. The second, third, and fourth rotary motors are respectively located within the first arm.

2. The robotic arm as claimed in claim 1 further includes a base, wherein the first rotary motor drives the first arm to rotate along a first axis via the first belt gear set and the first speed change module.

3. The robotic arm as claimed in claim 1, wherein the second arm is pivotally connected to the first arm along a second axis, and the first carrier plate and the second carrier plate are respectively pivotally connected to the second arm along a third axis, the second axis being parallel to the third axis.

4. The robotic arm as claimed in claim 1, wherein the first belt gear set includes a first gear, a first belt and a second gear connected in sequence, the first gear is disposed on the first rotary motor, and the second gear, the first speed change module and the first arm are coaxially disposed.

5. The robotic arm as claimed in claim 1, wherein the second belt gear set includes a third gear, a second belt and a fourth gear disposed within the first arm portion and connected in sequence, the third gear being disposed on the second rotary motor, and the fourth gear being coaxially disposed with the second speed change module.

6. The robotic arm as claimed in claim 1, wherein the second speed-changing module is disposed at the pivot point between the first arm and the second arm, the second arm is fixed to the second speed-changing module, and the second rotary motor drives the second arm to rotate relative to the first arm through the second belt gear set and the second speed-changing module.

7. The robotic arm as claimed in claim 1, wherein the third belt gear set includes a fifth gear, a third belt and a sixth gear disposed within the first arm and connected in sequence, a first drive shaft passing through the first arm and the second arm along a second axis, and a seventh gear, a fourth belt and an eighth gear disposed in the second arm and connected in sequence, the fifth gear being disposed on the third rotary motor, the sixth gear, the first drive shaft and the seventh gear being coaxially disposed, and the eighth gear being coaxially disposed with the third speed change module.

8. The robotic arm as claimed in claim 1, wherein the third speed-changing module is disposed at the pivot point between the second arm and the first plate, the first plate is fixed to the third speed-changing module, and the third rotary motor drives the first plate to rotate relative to the second arm through the third belt gear set and the third speed-changing module.

9. The robotic arm as claimed in claim 1, wherein the fourth belt gear set includes a ninth gear, a fifth belt and a tenth gear disposed within the first arm and connected in sequence, a second drive shaft passing through the first arm and the second arm, an eleventh gear, a sixth belt and a twelfth gear disposed in the second arm and connected in sequence, the ninth gear being disposed on the fourth rotary motor, the tenth gear, the second drive shaft and the eleventh gear being coaxially disposed, and the twelfth gear being coaxially disposed with the fourth speed change module.

10. The robotic arm as claimed in claim 9, wherein the fourth belt gear set further includes a third drive shaft, and the second plate is fixed to the fourth transmission module via the third drive shaft.

11. The robotic arm as claimed in claim 1 further includes a base and a lifting mechanism disposed on the base. The lifting mechanism includes a fifth rotary motor, a fifth belt gear set, a screw, a driven part, a lifting platform, a sliding block, and a track connected in sequence. The sliding block is movably coupled to the track. The lifting platform is assembled to the sliding block and the driven part. The fifth rotary motor drives the lifting platform to move up and down relative to the base through the fifth belt gear set, the screw, and the driven part. The first arm is assembled to the lifting platform through the first speed-changing module.

12. The robotic arm as claimed in claim 1, wherein the third belt gear set includes a first drive shaft, the fourth belt gear set includes a second drive shaft, and the first drive shaft and the second drive shaft are coaxially arranged.

13. The robotic arm as claimed in claim 12, wherein the second drive shaft extends from the first arm through the second transmission module and is connected to the second arm, and the first drive shaft extends from the first arm through the second drive shaft and is connected to the second arm.

14. The robotic arm as claimed in claim 1, wherein the third speed-changing module, the first carrier plate, and the second carrier plate are disposed on a first side of the second arm portion, and the fourth speed-changing module is disposed on a second side of the second arm portion, wherein the first side and the second side are opposite sides of the second arm portion.

15. The robotic arm as claimed in claim 14, wherein the fourth belt gear set includes a third drive shaft extending from the fourth gearbox through the second arm portion and the first plate to the second plate.

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