Humidity sensing device

TWI934378BActive Publication Date: 2026-08-01NUVOTON
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Patents
Current Assignee / Owner
NUVOTON
Filing Date
2024-12-19
Publication Date
2026-08-01

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Abstract

A humidity sensing device is provided. The humidity sensing device includes a substrate, a first dielectric layer, a second dielectric layer, a sensing electrode, and a sensing material layer. The first dielectric layer is disposed on the substrate. The second dielectric layer is disposed on the first dielectric layer. The second dielectric layer includes a plurality of protrusions, each of the plurality of protrusions being separate from each other. The sensing electrode is disposed on the plurality of protrusions. The sensing material layer is disposed on the sensing electrode. The top width of each of the plurality of protrusions is smaller than its bottom width.
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Claims

1. A humidity sensing device, comprising: One substrate; A first dielectric layer is disposed on the substrate; A second dielectric layer is disposed on the first dielectric layer, wherein the second dielectric layer includes a plurality of protrusions, each of the plurality of protrusions being separated from each other, and adjacent protrusions having a top gap; a sensing electrode is disposed on the plurality of protrusions; a cover layer is disposed on the sensing electrode and the plurality of protrusions; a barrier layer is disposed between the first dielectric layer and the second dielectric layer, wherein the potential of the barrier layer is 0; and a sensing material layer is disposed on the sensing electrode, wherein the top width of each of the plurality of protrusions is smaller than the bottom width, and the top view area of ​​the sensing material layer is smaller than the top view area of ​​the barrier layer, wherein each of the plurality of protrusions has a sloping side surface, and the thickness of the cover layer is less than or equal to 0.2 times the top gap.

2. The humidity sensing device as claimed in claim 1, wherein the angle of the inclined side surface of each of the plurality of protrusions is greater than 0 degrees and less than or equal to 45 degrees.

3. The humidity sensing device as claimed in claim 1, wherein a flat portion is present between adjacent protrusions of the plurality of protrusions.

4. The humidity sensing device as claimed in claim 3, wherein the etching rate of the second dielectric layer by an etchant is greater than or equal to 10 times the etching rate of the barrier layer by the etchant.

5. The humidity sensing device as claimed in claim 1, wherein the covering layer is disposed between the sensing electrode and the sensing material layer.

6. The humidity sensing device as claimed in claim 5, wherein the covering layer comprises a nitride.

7. The humidity sensing device as claimed in claim 1, further comprising: A sidewall portion is disposed on one side surface of the sensing electrode; and a top portion is disposed on one top surface of the sensing electrode.

8. The humidity sensing device as claimed in claim 7, wherein the sidewall portion exposes a portion of the side surface of the sensing electrode.

9. The humidity sensing device as claimed in claim 7, wherein the sidewall portion and the top portion comprise oxides.