Common rail handling equipment

Abstract

A common-rail transport device includes a linear drive rail, a platform, a lifting drive assembly, a movable arm, and a rotary drive assembly. The linear drive rail includes a power supply control module, a rail, a first slide, a second slide, a third slide, and a fourth slide. The rail includes multiple linearly arranged electromagnetic coils, each electrically connected to the power supply control module. The first, second, third, and fourth slides each have fixed magnetism and are sequentially and movably coupled to the rail. The power supply control module supplies power to the electromagnetic coils to generate corresponding magnetic fields to control the sliding of the first, second, third, and fourth slides on the rail. The lifting drive assembly connects the second and fourth slides to the platform. The rotary drive assembly is disposed between the first and third slides and the platform to connect to the movable arm.

Claims

1. A common rail conveying device, comprising: A linear drive track includes: a power supply control module; a track including a plurality of linearly arranged electromagnetic coils electrically connected to the power supply control module; a first slider, a second slider, a third slider, and a fourth slider, sequentially and movably coupled to the track and each having a fixed magnetism, wherein the power supply control module supplies power to the electromagnetic coils to generate corresponding magnetic fields to drive and control the first slider, the second slider, the third slider, and the fourth slider to slide on the track respectively; a platform; and a lifting drive assembly connecting the second slider, the fourth slider, and the platform, wherein the power supply control module drives the second slider and the fourth slider to slide on the track, and the lifting drive assembly drives the platform to rise and fall relative to the track. A movable arm is movably mounted on the platform; and a rotary drive assembly is disposed on the first slide, the third slide, and the platform to connect the movable arm, wherein the power supply control module drives the first slide and the third slide to slide on the track, and the rotary drive assembly drives the movable arm to extend or rotate relative to the track.

2. The common rail conveying device as claimed in claim 1, wherein the rotary drive assembly comprises: The first rack is fixed to the first sliding member; And a first gear, rotatably mounted on the platform, and the first rack and the first gear are on each other's movement paths.

3. The common rail conveying device as claimed in claim 2, wherein the rotary drive assembly further includes: The second rack is fixed to the third sliding member; And a second gear, rotatably mounted on the platform, and the second rack and the second gear are movably meshed together.

4. The common rail conveying device as claimed in claim 3, wherein the first gear and the second gear are coaxial with each other and arranged in an upper and lower configuration.

5. The common rail conveying device as claimed in claim 3, wherein the rotary drive assembly further includes: The first shaft is assembled to the platform, and the second arm of the movable arm is connected to the first shaft. Second shaft component; And a first track assembly, connected between the first shaft and the second shaft, wherein the first shaft moves up and down relative to the second shaft via the first track assembly.

6. The common rail conveying device as claimed in claim 5, wherein the first gear surrounds the first shaft and the second shaft, the second gear and the second shaft being an integral structure, such that the second arm is driven to rotate via the second shaft, the first rail assembly and the first shaft when the second gear rotates.

7. The common rail conveying device as claimed in claim 3, wherein the first gear has an annular toothed portion and a drive protrusion extending from the top surface of the annulus, the movable arm includes a first arm pivotally mounted on the platform, the first arm having a first arm portion and a driven protrusion extending from the bottom surface of the first arm portion, and the driven protrusion extending through the platform to the rotation path of the drive protrusion, so as to drive the first arm to rotate through the drive protrusion and the driven protrusion when the first gear rotates.

8. The common rail conveying device as claimed in claim 7, wherein the rotary drive assembly further includes a second rail assembly disposed between the driven protrusion of the first arm and the drive protrusion of the first gear, so that the first arm and the first gear rotate synchronously about an axis and slide relative to each other along the axis.

9. The common rail conveying device as claimed in claim 7, wherein the movable arm is a scissor linkage mechanism, and the second arm of the movable arm is connected to and synchronized with the second gear via a shaft assembly, the first gear is coaxially sleeved outside the shaft assembly and can rotate relative to each other, the power supply control module drives the first slide and the third slide to move synchronously in opposite directions at the same speed to drive the movable arm to rotate along the axis, and the power supply control module drives the first slide and the third slide to move synchronously in the same direction at the same speed to drive the movable arm to extend or retract.

10. The common rail conveying device as claimed in claim 1, wherein the lifting drive assembly is a scissor linkage mechanism, one end of which is pivotally connected to the second slide member, and the other end of which is pivotally connected to the fourth slide member, wherein the power supply control module drives the second slide member and the fourth slide member to move closer to each other to raise the platform, and the power supply control module drives the second slide member and the fourth slide member to move away from each other to lower the platform.

11. The common rail conveying device as claimed in claim 1, wherein the first slide, the second slide, the third slide and the fourth slide are respectively permanent magnets or electromagnets.

12. The common-rail transport device as claimed in claim 1, wherein the first slide, the second slide, the third slide, and the fourth slide are coplanar.

13. The common rail transport device as claimed in claim 1, wherein the lifting drive assembly further includes a second rail assembly assembled between the two links of the lifting drive assembly and the platform, so that the platform can slide relative to the lifting drive assembly along the rail via the second rail assembly.

14. The common rail transport apparatus as claimed in claim 1, adapted to be configured in a vacuum chamber to form a vacuum processing system, wherein a plurality of processing stations are connected to the periphery of the vacuum chamber, and a substrate in one of the processing stations is adapted to be transported to another processing station by the common rail transport apparatus.

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