Method for manufacturing probe

Abstract

The method for manufacturing the probe of the present invention includes the following steps: preparing a first metal plate, which is formed by arranging first inclined beams extending along a first intersecting direction; preparing a second metal plate, which is formed by arranging two rows of parallel beams at intervals of the first inclined beams; preparing a third metal plate, which is formed by arranging second inclined beams extending along a second intersecting direction symmetrical to the first intersecting direction; and sequentially stacking the first metal plate, the second metal plate, and the third metal plate. The ends of the first inclined beams are connected to the ends of the second inclined beams via parallel beams, thereby forming a spring portion including a wire-wound spring portion formed by sequentially connecting the first inclined beam, the parallel beam, and the second inclined beam.

Description

Technical Field

[0001] This invention relates to a method for manufacturing a probe used for inspecting the electrical characteristics of an object. Prior Technology

[0002] To inspect the electrical characteristics of semiconductor integrated circuits and other objects under inspection in wafer condition, an electrical connection device including probes is used. During probe inspection, one end of the probe contacts the electrodes of the object under inspection, while the other end contacts terminals (hereinafter also referred to as "pads") disposed on the substrate included in the electrical connection device. The pads are electrically connected to inspection equipment such as testing machines.

[0003] To accurately inspect the electrical characteristics of an object, it is essential to establish a stable electrical connection between the object and the pads using a probe. Therefore, when the probe itself lacks axial elasticity, a method is employed where the probe is held in a bent state at the probe tip of the electrical connection device. By pushing the bent probe against the object and further bending it through overdrive, the probe's elasticity ensures stable contact between the probe and both the object and the pads. [Previous Technical Documents] [Patent Literature]

[0004] Patent Document 1: Japanese Patent Publication No. 2018-4260 Summary of the Invention

[0005] [The problem that the invention aims to solve] However, when the probe needs to be replaced in an electrical connection device that holds the probe in a bent state, the probe held in the probe head must be straightened before it can be removed from the probe head. Therefore, probe replacement is time-consuming.

[0006] In contrast, if the probe is telescopic along the axial direction, the probe does not need to be held in a bent state within the electrical connection device. The present invention aims to provide a method for manufacturing a probe that is telescopic along the axial direction. [Methods used to solve problems]

[0007] The present invention discloses a method for manufacturing a probe by stacking a first metal plate, a second metal plate, and a third metal plate. The first metal plate is formed by arranging first inclined beams extending along a first intersecting direction. The second metal plate is formed by arranging two rows of parallel beams at intervals of the first inclined beams. The third metal plate is formed by arranging second inclined beams extending along a second intersecting direction symmetrical to the first intersecting direction. By sequentially stacking the first, second, and third metal plates, and connecting the ends of the first and second inclined beams via parallel beams, a spring portion comprising a wire-wound spring portion formed by sequentially connecting the first, parallel, and second inclined beams is constructed.

[0008] According to the present invention, a method for manufacturing a probe that can extend and retract along an axial direction can be provided. Simple Explanation of the Diagram

[0009] Figure 1 is a schematic side view showing the configuration of the probe in the first embodiment. Figure 2 is a schematic plan view showing the configuration of the probe in the first embodiment. Figure 3 is a schematic diagram showing the first metal plate that constitutes the probe shown in Figure 1. Figure 4 is a schematic diagram showing the second metal plate that constitutes the probe shown in Figure 1. Figure 5 is a schematic diagram showing the third metal plate that constitutes the probe shown in Figure 1. Figure 6 is a schematic diagram showing the configuration of the wire-wound spring portion of the probe in the first embodiment. Figure 7 is a schematic perspective view showing the wire-wound spring portion of the probe in the first embodiment. Figure 8 is a schematic diagram showing the fourth metal plate that constitutes the probe shown in Figure 1. Figure 9 is a schematic diagram showing the connection between the front end of the probe shown in Figure 1 and the columnar component. Figure 10 is a schematic diagram showing the connection state between the connecting part of the probe shown in Figure 1 and the columnar component. Figure 11 is a schematic diagram showing the shape of each wire in the wire-wound spring portion of the probe in the first embodiment. picture. Figure 12 is a schematic diagram showing the structure of a substrate used to manufacture a probe of the first embodiment. Figure 13 is a schematic diagram showing the configuration of the probe in the second embodiment. Figure 14 is a schematic diagram showing the first metal plate that constitutes the probe shown in Figure 13. Figure 15 is a schematic diagram showing the second metal plate that constitutes the probe shown in Figure 13. Figure 16 is a schematic diagram showing the third metal plate that constitutes the probe shown in Figure 13. Figure 17 is a schematic diagram showing the fourth metal plate that constitutes the probe shown in Figure 13. Figure 18 is a schematic diagram showing the connection method of the columnar component of the probe shown in Figure 13. Figure 19 is a schematic diagram showing the first metal plate of the probe constituting the modified example of the second embodiment. picture. Figure 20A is a schematic side view of the first metal plate shown in Figure 19. Figure 20B is a schematic perspective view of the first metal plate shown in Figure 19. Figure 21 is a schematic diagram showing the second metal plate of the probe constituting the modified example of the second embodiment. picture. Figure 22A is a schematic side view of the second metal plate shown in Figure 21. Figure 22B is a schematic perspective view of the second metal plate shown in Figure 21. Figure 23 is a schematic diagram showing the third metal plate of the probe constituting the modified example of the second embodiment. picture. Figure 24A is a schematic side view of the third metal plate shown in Figure 23. Figure 24B is a schematic perspective view of the third metal plate shown in Figure 23. Figure 25 is a schematic perspective view showing the fourth metal plate of the probe constituting the modified example of the second embodiment. Figure 26 is a schematic diagram showing the pattern of the metal plate formed on the substrate. Figure 27 is a schematic cross-sectional view showing an example of the opening shape of the connector of a probe in other embodiments. Figure 28 is a schematic cross-sectional view showing another example of the opening shape of the connector of a probe in other embodiments. Implementation

[0010] Next, embodiments of the present invention will be described with reference to the drawings. In the following figures, the same or similar symbols are used for the same or similar parts. However, the drawings are merely illustrative, and it should be noted that there may be differences from the actual object, such as the thickness ratio of each part. Furthermore, the drawings will naturally include differences in dimensional relationships, ratios, etc., between each other. The embodiments shown below are examples of apparatuses and methods used to embody the technical concept of the present invention; the embodiments of the present invention are not intended to specifically specify the materials, shapes, structures, and arrangements of the constituent parts as described below.

[0011] (First Implementation Type) The probe 10 of the first embodiment shown in Figure 1 is used for inspecting the electrical characteristics of an object. One end of the probe 10 in the axial direction has a front end portion 11 that contacts the object being inspected, and the other end has a base end portion 13 that contacts a solder pad. Between the front end portion 11 and the base end portion 13, a plurality of elastic wire-wound spring portions 121 are connected along the axial direction via a non-elastic connecting portion 122. In the following description, the portion located between the front end portion 11 and the base end portion 13, including the wire-wound spring portion 121 and the connecting portion 122, will be referred to as the spring portion 12.

[0012] The probe 10 is cylindrical with a front end 11 and a base end 13 at its two ends. The left-right direction in Figure 1 is taken as the first direction (X direction), the up-down direction in Figure 1 is taken as the second direction (Z direction), and the direction perpendicular to the plane of the paper in Figure 1 is taken as the third direction (Y direction). The axial direction of the probe 10 is the Z direction. The Y direction is perpendicular to both the X and Z directions. The plane defined by the X direction and the Z direction perpendicular to the X direction is also called the "XZ plane". Furthermore, when viewed from the base end 13 along the Z direction, the direction where the front end 11 is located is considered the top, and when viewed from the front end 11 along the Z direction, the direction where the base end 13 is located is considered the bottom. Furthermore, for each part of the probe 10, the surface facing upwards is considered the upper surface, the surface facing downwards is considered the lower surface, and the surface connecting the upper and lower surfaces is considered the side surface.

[0013] The probe 10 shown in Figure 1 is connected to four wire-wound spring portions 121 from the front end portion 11 toward the base end portion 13 via the connecting portion 122. Figure 1 illustrates the case where the probe 10 contains four wire-wound spring portions 121, but the number of wire-wound spring portions 121 contained in the probe 10 can be set to any number.

[0014] As shown in Figure 2, when viewed from the axial direction, the probe 10 has four sides and is rectangular. The side viewed from the Y direction is designated as the first side 101, and the side facing the opposite direction of the first side 101 is designated as the second side 102. Furthermore, the side viewed from the X direction is designated as the third side 103, and the side facing the opposite direction of the third side 103 is designated as the fourth side 104. As will be described later, the probe 10 is constructed by stacking a first metal plate 111, a second metal plate 112, and a third metal plate 113. As shown in Figure 2, the first side 101 is the surface of the first metal plate 111, the second side 102 is the surface of the third metal plate 113, and the third side 103 and the fourth side 104 are the surfaces of the second metal plate 112.

[0015] The following describes a method for manufacturing a probe 10 using the first metal plate 111 shown in FIG. 3, the second metal plate 112 shown in FIG. 4, and the third metal plate 113 shown in FIG. 5. In the following description, the first metal plate 111, the second metal plate 112, and the third metal plate 113 are referred to simply as metal plates without distinction between them.

[0016] As shown in Figure 3, the first metal plate 111 includes a first telescopic portion 1201 formed by a plurality of first inclined beams 1211 arranged along the Z direction. The plurality of first inclined beams 1211 extend in the XZ plane along a first intersecting direction that is inclined to both the X and Z directions. The first metal plate 111 may include a plurality of first telescopic portions 1201.

[0017] The first metal plate 111 has a plate-shaped first front end portion 1101 disposed at one end in the Z direction and a plate-shaped first base end portion 1301 disposed at the other end in the Z direction. Furthermore, the first metal plate 111 includes a plate-shaped first connecting portion 1221 disposed between the first telescopic portions 1201. The first metal plate 111 shown in FIG3 includes four first telescopic portions 1201 that clamp the first connecting portions 1221 between each other.

[0018] As shown in Figure 4, the second metal plate 112 includes a second telescopic section 1202 formed by a plurality of parallel beams 1212 extending along the Y direction and arranged along the Z direction. The parallel beams 1212 are arranged in two rows with intervals equal to the length of the first inclined beam 1211 along the X direction. The second metal plate 112 may include a plurality of second telescopic sections 1202.

[0019] The second metal plate 112 has a plate-shaped second front end portion 1102 disposed at one end in the Z direction, and a plate-shaped second base end portion 1302 disposed at the other end in the Z direction. Furthermore, the second metal plate 112 includes a plate-shaped second connecting portion 1222 disposed between the second telescopic portions 1202. The second metal plate 112 shown in FIG4 includes four second telescopic portions 1202 that clamp the second connecting portions 1222 between each other.

[0020] As shown in Figure 5, the third metal plate 113 includes a third telescopic section 1203 formed by a plurality of second inclined beams 1213 arranged along the Z direction. The plurality of second inclined beams 1213 extend in the XZ plane along a second intersecting direction symmetrical to the first intersecting direction with the Z direction as the axis of symmetry. The length of the second inclined beams 1213 along the X direction is the same as the length of the first inclined beams 1211 along the X direction. In other words, the third metal plate 113 is a mirror image of the first metal plate 111. The third metal plate 113 may include a plurality of third telescopic sections 1203.

[0021] The third metal plate 113 has a plate-shaped third front end portion 1103 disposed at one end in the Z direction, and a plate-shaped third base end portion 1303 disposed at the other end in the Z direction. Furthermore, the third metal plate 113 includes a plate-shaped third connecting portion 1223 disposed between the third telescopic portions 1203. The third metal plate 113 shown in FIG. 5 includes four third telescopic portions 1203 that clamp the third connecting portions 1223 between each other.

[0022] When manufacturing probe 10, a first metal plate 111, a second metal plate 112, and a third metal plate 113 are prepared. Then, the third metal plate 113, the second metal plate 112, and the first metal plate 111 are sequentially stacked along the Y direction (third direction). At this time, the ends of the first inclined beam 1211 and the second inclined beam 1213 are connected via a parallel beam 1212, thus forming a spring section 12 comprising a wire-wound spring section 121 formed by the sequential connection of the first inclined beam 1211, the parallel beam 1212, and the second inclined beam 1213. In other words, the wire-wound spring section 121 is constructed by connecting a first telescopic section 1201, a second telescopic section 1202, and a third telescopic section 1203. In the following description, the first telescopic section 1201, the second telescopic section 1202, and the third telescopic section 1203 will not be distinguished and will only be referred to as telescopic sections.

[0023] Furthermore, the third metal plate 113, the second metal plate 112, and the first metal plate 111 are sequentially stacked along the Y direction, thereby forming the front end 11 of the probe 10 by stacking the third front end 1103, the second front end 1102, and the first front end 1101. At the same time, the base end 13 of the probe 10 is formed by stacking the third base end 1303, the second base end 1302, and the first base end 1301.

[0024] Furthermore, the third metal plate 113, the second metal plate 112, and the first metal plate 111 are sequentially stacked along the Y direction, thereby forming the connecting portion 122 of the probe 10 by stacking the third connecting portion 1223, the second connecting portion 1222, and the first connecting portion 1221. In this way, a plurality of elastic wire-wound spring portions 121 are connected along the axial direction via the non-elastic connecting portion 122 to form the spring portion 12.

[0025] The bonding of the first metal plate 111, the second metal plate 112, and the third metal plate 113 can be achieved using diffusion bonding or by using a bonding material. When using diffusion bonding, since there are more technical challenges in bonding dissimilar metals, a metal that is easily diffused, such as gold (Au), can be vapor-deposited on the front and back surfaces of each metal plate. Because Au is relatively easy to diffuse bond with each other, even if the metal plates are dissimilar metals, they can be bonded together.

[0026] Figure 6 shows the configuration of the wire-wound spring portion 121. Viewed from the normal direction of the first side surface 101, the first metal plate 111 on the first side surface 101 includes a first inclined beam 1211 extending from the upper left to the lower right in the figure. Viewed from the normal direction of the first side surface 101, the third metal plate 113 on the second side surface 102 includes a second inclined beam 1213 extending from the upper right to the lower left in the figure. In other words, the first inclined beam 1211 of the first metal plate 111 and the second inclined beam 1213 of the third metal plate 113 are symmetrically arranged with respect to the central axis of the probe 10. As shown in Figure 6, the wire-wound spring portion 121 has a double-helix structure. Figure 7 shows a perspective view of the wire-wound spring portion 121.

[0027] Furthermore, the probe 10 shown in FIG1 includes a plurality of columnar members 114A disposed inside the wire-wound spring portion 121. The columnar members 114A bridge the connection between the front end portion 11 and the connecting portion 122, between the two connecting portions 122, and between the base end portion 13 and the connecting portion 122. The columnar members 114A are conductive, and the front end portion 11 and the base end portion 13 are electrically connected via the columnar members 114A and the connecting portion 122.

[0028] For example, regarding the wire-wound spring portion 121, which is connected at one end to the front end portion 11 and at the other end to the connecting portion 122, the columnar member 114A bridges the connecting portion 122 with the front end portion 11. In this way, the connecting portion 122, which is closest to the front end portion, is electrically connected to the front end portion 11.

[0029] Furthermore, regarding the wire-wound spring portion 121, which is connected at one end to the base end portion 13 and at the other end to the connecting portion 122, the columnar member 114A bridges the connecting portion 122 and the base end portion 13. In this way, the connecting portion 122, which is closest to the base end portion 13, is electrically connected to the base end portion 13.

[0030] Furthermore, the columnar member 114A bridges the two connecting portions 122, which are respectively connected to both ends of the spring section. In this way, the two connecting portions 122 are electrically connected.

[0031] When manufacturing the probe 10 including the columnar member 114A, the columnar member 114A is disposed inside the spring portion 12 before the first metal plate 111 is deposited onto the second metal plate 112. Specifically, before the first metal plate 111 is deposited onto the second metal plate 112, the fourth metal plate 114 shown in FIG8 is disposed onto the second metal plate 112. The fourth metal plate 114 is configured such that a plurality of columnar members 114A extending along the Z direction are arranged along the Z direction. In this way, a probe 10 with the columnar member 114A disposed inside the spring portion 12 can be manufactured.

[0032] For example, one end of each of the columnar members 114A is fixed to any one of the second front end portion 1102, the second connecting portion 1222, and the second base end portion 1302. Furthermore, a recess is formed in any one of the second front end portion 1102, the second connecting portion 1222, and the second base end portion 1302, so that when the spring portion 12 contracts along the axial direction, the other end of each of the columnar members 114A can be inserted into this recess.

[0033] For example, as shown in FIG9, the columnar member 114A disposed inside the wire-wound spring portion 121 has its first end facing the first opening 110 formed on the lower surface of the front end portion 11, and its second end connected to the upper surface of the connecting portion 122. When the wire-wound spring portion 121 extends or retracts, the first end of the columnar member 114A slides in contact with the interior of the first opening 110.

[0034] Furthermore, as shown in FIG10, the columnar member 114A disposed inside the wire-wound spring portion 121 has its first end facing the second opening 120 formed on the lower surface of a connecting portion 122, and its second end connected to the upper surface of another connecting portion 122. When the wire-wound spring portion 121 extends or retracts, the first end of the columnar member 114A slides in contact with the interior of the second opening 120.

[0035] As described above, when the wire-wound spring portion 121 extends or retracts, the end of the columnar member 114A slides in contact with the interior of the first opening portion 110 and the second opening portion 120. Therefore, even if the probe 10 extends or retracts along the axial direction, the columnar member 114A will not bend and protrude outside the wire-wound spring portion 121.

[0036] The thickness of the parallel beam 1212 in the Y direction, in other words, the thickness of the second metal plate 112 in the Y direction, is set to be greater than the thickness of the columnar member 114A in the Y direction. Increasing the thickness of the second metal plate 112 allows for a thicker columnar member 114A. By thickening the columnar member 114A, the allowable current flowing through the probe 10 can be increased. Here, the thickness of the third metal plate 113 can be appropriately set according to the arrangement spacing of the probes 10. Furthermore, it is preferable that the thicknesses of the first metal plate 111 and the third metal plate 113 in the Y direction are equal. This helps to suppress bending of the spring portion 12 during extension and contraction.

[0037] The first metal plate 111, the second metal plate 112, the third metal plate 113, and the fourth metal plate 114 are formed from sheets of conductive materials such as metal. The probe 10 is manufactured by stacking these components in the order of the third metal plate 113, the second metal plate 112, the fourth metal plate 114, and the first metal plate 111. The inclined beams of the first metal plate 111 and the third metal plate 113 function as springs, and the parallel beam 1212 of the second metal plate 112 connects the first metal plate 111 and the third metal plate 113. In other words, the wires wound around the spring portion 121 are formed by the beams connecting the first metal plate 111, the second metal plate 112, and the third metal plate 113.

[0038] The probe 10 is able to extend and retract freely along the axial direction via a wire-wound spring portion 121 composed of a first metal plate 111, a second metal plate 112, and a third metal plate 113. Thus, since the probe 10 itself has axial elasticity, the probe 10 does not need to be held in a bent state, for example, at the probe tip.

[0039] Furthermore, in the probe 10, the columnar member 114A disposed inside the wire-wound spring portion 121 functions as a current path between the front end portion 11 and the base end portion 13. Therefore, even if the current path flowing through the wire-wound spring portion 121 is long, resulting in higher resistance, the current path of the probe 10 can be shortened. In other words, the resistance of the current path of the probe 10 can be reduced by means of the columnar member 114A. Thus, the columnar member 114A functions as a component that shortens the current path. Here, if the resistance of the wire-wound spring portion 121 is such that it does not affect the degree of inspection of the object being inspected, the probe 10 may not include the columnar member 114A.

[0040] As shown in Figure 8, the columnar member 114A can be arranged in a bent state inside the wound spring portion 121. In this case, the bending directions of the plurality of columnar members 114A arranged along the axial direction can be different from each other. For example, the bending directions of the columnar members 114A can be different from each other along the axial direction.

[0041] The probe 10 can be made of materials such as nickel (Ni), nickel alloys, gold (Au), silver (Ag), copper (Cu), palladium (Pd), palladium alloys, rhodium (Rh), rhodium alloys, or other precious metals. The fourth metal plate 114 can be made of a material with lower mechanical strength but higher electrical conductivity compared to the first metal plate 111, the second metal plate 112, and the third metal plate 113. For example, the first metal plate 111 and the third metal plate 113 can be made of Ni alloys, and the fourth metal plate 114 can be made of gold or copper.

[0042] Viewed from the first side 101 and the second side 102, each wire of the wound spring portion 121 also includes curved portions rather than straight lines. For example, as shown in FIG11, the direction of travel of each wire can also change midway along the side. The wire system of the wound spring portion 121 shown in FIG11 includes a structure in which a first portion 121A and a second portion 121B are connected. The first portion 121A extends at a first angle relative to the axial direction. The second portion 121B extends at a second angle relative to the axial direction, which is different from the first angle. In the example shown in FIG11, the second portion 121B is disposed between the first portion 121A and the first portion 121A. Since each wire of the wound spring portion 121 includes curved portions rather than simply straight lines, the load applied to the probe 10 can be easily transmitted along the axial direction, and when the axial pressing force is applied to the probe 10, the probe 10 can be prevented from bending and buckling from the central axis.

[0043] The elastic force of the plurality of telescopic parts included in probe 10 can also be different. For example, the number of turns of the wire-wound spring in the telescopic part can also be different from each other. Alternatively, the number of turns of the wire-wound spring in all telescopic parts can be different. The number of turns of the wire-wound spring in the telescopic parts included in probe 10 can be arbitrarily selected according to each telescopic part.

[0044] When manufacturing probe 10, a plurality of probes 10 can be manufactured simultaneously using the large substrate shown in FIG. 12. A plurality of patterns of the first metal plate 111 shown in FIG. 3 are disposed in the first substrate 111M shown in FIG. 12. A plurality of patterns of the second metal plate 112 shown in FIG. 4 are disposed in the second substrate 112M. A plurality of patterns of the third metal plate 113 shown in FIG. 5 are disposed in the third substrate 113M. A plurality of patterns of the fourth metal plate 114 shown in FIG. 8 are disposed in the fourth substrate 114M. After stacking the third substrate 113M, the second substrate 112M, the fourth substrate 114M, and the first substrate 111M, an individualization step is performed, thereby enabling the simultaneous manufacture of a plurality of probes 10.

[0045] As explained above, the method for manufacturing the probe 10 in this embodiment involves sequentially stacking multiple metal plates to produce the probe 10. Therefore, compared to methods that repeatedly perform chemical film-forming processes such as plating to manufacture the probe 10, the occurrence of internal defects in the metal material can be suppressed. Furthermore, by stacking multiple metal plates, a probe 10 formed into a dense metal material can be obtained, resulting in stable resistance and strength of the probe 10.

[0046] Furthermore, in the manufacturing method that sequentially stacks multiple metal plates, individual metal plates can be processed in parallel, thus shortening the process time. In contrast, in manufacturing methods that repeatedly perform chemical film deposition processes, if a defect occurs midway through the process, it may be impossible to correct and the entire process must be restarted. In contrast, in this manufacturing method, each metal plate is manufactured individually before the final step of stacking all the metal plates, making process rework less likely. Moreover, compared to the plating step which limits the choice of metal materials, this manufacturing method only requires the availability of the desired metal plates, thus allowing for easy selection of metal materials. For example, suitable materials can be selected to meet the required functions of the first metal plate 111 and the third metal plate 113 for achieving spring action, the second metal plate 112 for connecting the first inclined beam 1211 and the second inclined beam 1213, and the fourth metal plate 114 as a current path.

[0047] (Second Implementation Type) As shown in Figure 13, the probe 10 of the second embodiment has a single columnar member 114B disposed inside the wire-wound spring portion 121, reaching both the front end portion 11 and the base end portion 13. Unlike the probe shown in Figure 1, which electrically connects the front end portion 11 and the base end portion 13 via a plurality of columnar members 114A, the probe 10 shown in Figure 13 uses a single columnar member 114B to electrically connect the front end portion 11 and the base end portion 13. In other aspects, the probe 10 of the second embodiment is the same as the probe of the first embodiment shown in Figure 1.

[0048] Figure 14 shows the structure of the first metal plate 111 of the probe 10 shown in Figure 13. Figure 15 shows the structure of the second metal plate 112 of the probe 10 shown in Figure 13. Figure 16 shows the structure of the third metal plate 113 of the probe 10 shown in Figure 13. Figure 17 shows the fourth metal plate 114 of the probe 10 shown in Figure 13.

[0049] The probe 10 shown in Figure 13 is manufactured by laminating the first metal plate 111, the second metal plate 112, the third metal plate 113, and the fourth metal plate 114 shown in Figures 14 to 17, respectively. For example, a through hole is formed in the connecting portion 122, extending along the axial direction. Furthermore, the columnar member 114B passes through the through hole in the connecting portion 122 to reach the front end portion 11 and the base end portion 13. A recess is formed in advance in at least one of the front end portion 11 and the base end portion 13 so that when the spring portion 12 contracts along the axial direction, the end of the columnar member 114B can be inserted into this recess.

[0050] As shown in Figure 15, in the probe 10 shown in Figure 13, a second through hole 152 extending along the axial direction is formed in the second connecting portion 1222. A columnar member 114B is disposed inside the second through hole 152 of the wire-wound spring portion 121 and the connecting portion 122, bridging the front end portion 11 and the base end portion 13. For example, the first end of the columnar member 114B is inserted into the first through hole 151 formed in the second front end portion 1102 as shown in Figure 15, and its second end is inserted into the third through hole 153 formed in the second base end portion 1302. When the wire-wound spring portion 121 extends or retracts, the end of the columnar member 114B slides in contact with the interior of the first through hole 151 and the third through hole 153.

[0051] For example, as shown in FIG18, the columnar member 114B can be connected to the connection portion 122 between the first metal plate 111 and the third metal plate 113 by means of the connecting member 115. A support plate 116 is disposed inside the second through hole 152, and the connecting member 115 is disposed between the support plate 116 and the columnar member 114B, thereby joining the support plate 116 and the columnar member 114B. On the other hand, the columnar member 114B is not fixed to the second metal plate 112.

[0052] Compared to the probe 10 shown in FIG1, which uses a plurality of columnar members 114A, the probe 10 shown in FIG13 can reduce the resistance of the current path. This increases the allowable current flowing through the probe 10. Apart from this, the second embodiment is substantially the same as the first embodiment, so repeated descriptions are omitted.

[0053] Furthermore, the probe 10 shown in FIG13 includes two wire-wound spring portions 121. However, in the second embodiment, the number of wire-wound spring portions 121 of the probe 10 can be arbitrary. The following are examples of probe 10 including four wire-wound spring portions 121.

[0054] Figure 19 illustrates a first metal plate 111 of a probe 10 comprising four wire-wound spring portions 121. Figures 20A and 20B show a side view and a perspective view of the first metal plate 111 shown in Figure 19, respectively.

[0055] Figure 21 illustrates a second metal plate 112 of a probe 10 comprising four wire-wound spring portions 121. Figures 22A and 22B show a side view and a perspective view of the second metal plate 112 shown in Figure 21, respectively.

[0056] Figure 23 illustrates a third metal plate 113 comprising a probe 10 with four wire-wound spring portions 121. Figures 24A and 24B show a side view and a perspective view of the third metal plate 113 shown in Figure 23, respectively.

[0057] Figure 25 shows a perspective view of the fourth metal plate 114. The outer shape of the fourth metal plate 114 is set to be smaller than the inner diameter of the second through hole 152 formed in the second connecting portion 1222 of the second metal plate 112.

[0058] When manufacturing the probe 10 of the second embodiment, a plurality of probes 10 can also be manufactured simultaneously using the large substrate shown in FIG12. After stacking the third substrate 113M, the second substrate 112M, the fourth substrate 114M and the first substrate 111M, an individualization step is performed, thereby enabling the simultaneous manufacture of a plurality of probes 10.

[0059] In each of the first substrate 111M to the fourth substrate 114M, the components of the metal plates are connected to the connecting members and the surrounding material and held therein until the probe 10 is individualized. As shown in FIG26, the columnar members 114B placed on the third metal plate 113 are connected to each other by the connecting members 150 and connected to the surrounding material. Here, adjacent columnar members 114B are omitted in FIG26. The manufacturing steps of the probe 10 are performed in this state. Furthermore, after all the metal plates are laminated, the surrounding material and connecting members 150 of the pattern are removed, for example, by cutting from the surrounding material by laser cutting to obtain the probe 10.

[0060] (Other implementation methods) As described above, the present invention has been illustrated by way of embodiments; however, it should be understood that the discussion and drawings disclosed herein are not intended to limit the invention. Those skilled in the art will be able to conceive of various alternative embodiments, examples, and applications from the disclosure.

[0061] For example, the above description illustrates that the first opening 110, the second opening 120, the first through hole 151, the second through hole 152, and the third through hole 153 are shaped to be openings perpendicularly to the upper or lower surface of the front end portion 11, the base end portion 13, or the connecting portion 122. However, the opening shape of these openings and through holes can also be a conical shape in which the area of ​​the opening gradually narrows from the outside to the center.

[0062] Figures 27 and 28 illustrate that the opening shape of the second opening 120 in the axial direction is conical. Because the opening shape is conical, the end of the columnar member 114A can be easily inserted into the first opening 110 and the second opening 120, and the end of the columnar member 114B can be easily inserted into the first through hole 151 and the third through hole 153.

[0063] Therefore, the present invention naturally also includes various embodiments not described in the above description. wait.

[0064] 10: Probe 11: Front end 12: Spring section 13: Base end 101: First Side View 102: Second side view 103: Third side 104: Fourth Side View 110: First opening 111: First Metal Plate 111M: First substrate 112: Second metal plate 112M: Second substrate 113: Third Metal Plate 113M: Third substrate 114: Fourth Metal Plate 114A, 114B: Columnar members 114M: Fourth substrate 115: Connecting components 116: Support board 120: Second opening 121: Wire-wound spring section 121A: Part One 121B: Part Two 122: Connecting Part 150: Connecting structural components 151: First through hole 152: Second through hole 153: Third through hole 1101: First front end 1102: Second anterior end 1103: Third anterior end 1201: First telescopic section 1202: Second telescopic section 1203: Third telescopic section 1211: First inclined beam 1212: Parallel Beam 1213: Second inclined beam 1221: First Linkage Section 1222: Second Link 1223: Third Link 1301: First base end 1302: Second base end 1303: Third base end X, Y, Z: Direction

Claims

1. A method for manufacturing a probe used for inspecting the electrical characteristics of an object, the method comprising: preparing a first metal plate including a first telescopic portion, the first telescopic portion being formed by a plurality of first inclined beams arranged along the second direction in a plane defined by a first direction and a second direction perpendicular to the first direction, the plurality of first inclined beams extending along a first intersecting direction that is obliquely intersecting both the first direction and the second direction; preparing a second metal plate including a second telescopic portion, the second telescopic portion being formed by a plurality of parallel beams arranged along the second direction, the plurality of parallel beams extending along a third direction perpendicular to both the first direction and the second direction, the parallel beams being arranged in two rows at intervals equal to the length of the first inclined beams along the first direction; A third metal plate containing a third telescopic portion is prepared. The third telescopic portion is formed by arranging a plurality of second inclined beams along the aforementioned second direction. The plurality of the aforementioned second inclined beams extend in the aforementioned plane along a second intersecting direction that is symmetrical to the aforementioned first intersecting direction with the aforementioned second direction as the axis of symmetry. The length of the plurality of the aforementioned second inclined beams along the aforementioned first direction is the same as the length of the aforementioned first inclined beam along the aforementioned first direction. The aforementioned third metal plate, the aforementioned second metal plate, and the aforementioned first metal plate are sequentially stacked along the aforementioned third direction so that the ends of the aforementioned first inclined beams are connected to the ends of the aforementioned second inclined beams via the aforementioned parallel beams, thereby forming a spring portion containing a wire-wound spring portion formed by sequentially connecting the aforementioned first inclined beams, the aforementioned parallel beams, and the aforementioned second inclined beams.

2. A method for manufacturing a probe as described in claim 1, wherein, The first metal plate has: a plate-shaped first front end portion disposed at one end of the second direction, and a plate-shaped first base end portion disposed at the other end of the second direction; the second metal plate has: a plate-shaped second front end portion disposed at one end of the second direction, and a plate-shaped second base end portion disposed at the other end of the second direction; the third metal plate has: a plate-shaped third front end portion disposed at one end of the second direction, and a plate-shaped third base end portion disposed at the other end of the second direction; and the manufacturing method includes: sequentially stacking the third metal plate, the second metal plate, and the first metal plate along the third direction to form a front end portion formed by stacking the third front end portion, the second front end portion, and the first front end portion, and a base end portion formed by stacking the third base end portion, the second base end portion, and the first base end portion.

3. A method for manufacturing a probe as described in claim 2, wherein, The aforementioned first metal plate includes: a plurality of first telescopic portions and a plate-shaped first connecting portion disposed between the aforementioned first telescopic portions; the aforementioned second metal plate includes: a plurality of second telescopic portions and a plate-shaped second connecting portion disposed between the aforementioned second telescopic portions; the aforementioned third metal plate includes: a plurality of third telescopic portions and a plate-shaped third connecting portion disposed between the aforementioned third telescopic portions; and the aforementioned manufacturing method includes: sequentially stacking the aforementioned third metal plate, the aforementioned second metal plate, and the aforementioned first metal plate along the aforementioned third direction to form the aforementioned spring portion formed by connecting the aforementioned elastic plurality of the aforementioned wire-wound spring portions along the aforementioned second direction via a non-elastic connecting portion formed by stacking the aforementioned third connecting portion, the aforementioned second connecting portion, and the aforementioned first connecting portion.

4. A method for manufacturing a probe as described in claim 3, wherein, Before the aforementioned first metal plate and the aforementioned second metal plate are laminated, a columnar member that is electrically connected to the aforementioned front end and the aforementioned base end is disposed inside the aforementioned spring portion.

5. A method for manufacturing a probe as described in claim 4, wherein, The probe includes a plurality of columnar members bridging the aforementioned front end and the aforementioned connecting portion, the two aforementioned connecting portions, and the aforementioned connecting portion and the aforementioned base end; and the manufacturing method includes: fixing one end of each of the aforementioned columnar members to any one of the aforementioned front end, the aforementioned connecting portion, and the aforementioned base end; and forming a recess in any one of the aforementioned front end, the aforementioned connecting portion, and the aforementioned base end, the recess being for insertion of the other end of each of the aforementioned columnar members when the aforementioned spring portion contracts along the aforementioned second direction.

6. A method of manufacturing a probe as claimed in claim 4, comprising: forming a through hole in the aforementioned connecting portion extending along the aforementioned second direction; allowing a single aforementioned columnar member to pass through the aforementioned through hole to reach the aforementioned front end portion and the aforementioned base end portion; and forming a recess in at least one of the aforementioned front end portion and the aforementioned base end portion, the recess being for insertion of the end portion of the aforementioned columnar member when the aforementioned spring portion contracts along the aforementioned second direction.

7. A method for manufacturing a probe as described in claim 6, wherein, The aforementioned columnar member is joined to the aforementioned first metal plate and the aforementioned third metal plate by means of a connecting component.

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