Laser drilling calibration method and calibration plate
Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Patents
- Current Assignee / Owner
- PROSEMI CO LTD
- Filing Date
- 2025-05-15
- Publication Date
- 2026-08-01
Smart Images
Figure TWG2TB001903950_001 
Figure TWG2TB001903950_002 
Figure TWG2TB001903950_003
Abstract
Claims
1. A laser drilling calibration method, comprising: providing a calibration pattern, wherein the calibration pattern includes predetermined positions of a plurality of calibration holes, the predetermined positions of the plurality of calibration holes being spaced at multiples of a first predetermined circumference along a first direction and at multiples of a second predetermined circumference along a second direction; controlling a laser beam to form the plurality of calibration holes on a calibration plate according to the calibration pattern; selecting a first standard circumference and a second standard circumference on the calibration plate; and calculating an offset of at least one of the plurality of calibration holes based on the first standard circumference and the second standard circumference. The calibration plate defines an adjacent component area and a non-component area. The plurality of calibration holes are formed in the component area. The calibration plate includes two first standard patterns and two second standard patterns disposed in the non-component area. The two first standard patterns are arranged along the first direction, and the two second standard patterns are arranged along the second direction. The first standard circumference is defined by the two first standard patterns, and the second standard circumference is defined by the two second standard patterns.
2. The laser drilling correction method as described in claim 1 further includes: correcting a design pattern based on the offset to obtain a corrected design pattern.
3. The laser drilling correction method as claimed in claim 1, wherein the offset includes a first offset in the first direction and a second offset in the second direction.
4. The laser drilling correction method as claimed in claim 1, wherein the two first standard patterns and the two second standard patterns are pre-formed on the correction sheet using a patterning process.
5. The laser drilling correction method as claimed in claim 1, wherein the correction sheet further comprises a first sublayer and a second sublayer, the second sublayer being disposed on the first sublayer, the two first standard patterns and the two second standard patterns being disposed in the first sublayer, and the plurality of correction holes being disposed in the second sublayer.
6. The laser drilling correction method as claimed in claim 1, wherein the correction sheet further comprises two marking elements disposed in the non-element area, the two marking elements being spaced apart along a third direction, and the third direction being not parallel to the first direction and the second direction.
7. The laser drilling correction method as claimed in claim 6, wherein the correction sheet further comprises a first sublayer and a second sublayer, the second sublayer being disposed on the first sublayer, the two marking elements being disposed in the first sublayer, and the plurality of correction holes being disposed in the second sublayer.
8. The laser drilling correction method as claimed in claim 1, wherein the predetermined positions of the plurality of correction holes include a first predetermined position and a second predetermined position arranged adjacent to each other along the first direction, and a third predetermined position and a fourth predetermined position arranged adjacent to each other along the first direction, and the distance between the first predetermined position and the second predetermined position is different from the distance between the third predetermined position and the fourth predetermined position.
9. A calibration plate for laser drilling, defining an element area and a non-element area adjacent to each other, the calibration plate comprising: two first standard patterns disposed in the non-element area, wherein the two first standard patterns are arranged along a first direction and define a first standard circumference; and two second standard patterns disposed in the non-element area, wherein the two second standard patterns are arranged along a second direction and define a second standard circumference.
10. The calibration sheet as claimed in claim 9, wherein the first standard pattern and the second standard pattern are pre-formed on the calibration sheet using a patterning process.
11. The calibration sheet as claimed in claim 10, wherein the patterning process includes optical lithography, electron beam lithography, or laser lithography.
12. The calibration sheet as claimed in claim 9, wherein the calibration sheet further comprises a first sublayer and a second sublayer, the second sublayer being disposed on the first sublayer, the two first standard patterns and the two second standard patterns being disposed in the first sublayer, and the second sublayer being used to provide a plurality of calibration holes.
13. The calibration sheet as claimed in claim 9 further comprises: two marking elements disposed in the non-element area, wherein the two marking elements are spaced apart along a third direction, and the third direction is not parallel to the first direction and the second direction.
14. The calibration sheet as claimed in claim 13, wherein the calibration sheet further comprises a first sublayer and a second sublayer, the second sublayer being disposed on the first sublayer, the two marking elements being disposed in the first sublayer, and the second sublayer being configured to provide a plurality of calibration holes.