Liquid supply device and liquid supply method

Abstract

The objective of this invention is to provide a liquid supply device that can reliably connect the liquid flow path on the plug side to the liquid flow path on the socket side, regardless of the direction of the plug fixed to the opening of the liquid storage container. The liquid supply device of the present invention includes: a plug having a plug-side liquid flow path; a socket having a socket-side liquid flow path; a handle for holding the socket and positioning it in a three-dimensional position within its range of motion in a predetermined posture; and a camera for identifying the direction of the plug axis of the plug. The handle holds the socket in a posture in which the direction of the plug axis identified by the camera is consistent with the direction of the socket axis. By inserting the socket held by the handle into the plug, the socket-side liquid flow path and the plug-side liquid flow path are connected.

Description

[Technical Field]

[0001] This invention relates to a liquid supply device and a liquid supply method. [Previous Technology]

[0002] Conventionally, a liquid supply device is known to supply liquid contained in a liquid storage container to a plurality of target supply devices (for example, see Patent Document 1). The liquid supply device disclosed in Patent Document 1 connects a liquid flow path formed in the plug to a liquid storage container opening by fixing a plug to the plug and installing a socket on the plug. When installing the socket on the plug, the operator must engage the external thread of the socket formed in the mounting nut with the internal thread formed in the plug. [Prior Art Documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-20793 [Summary of the Invention]

[0004] In the liquid supply device disclosed in Patent Document 1, when connecting the liquid flow path formed by the plug and the liquid flow path formed by the socket, the operator must hold the socket to perform the installation operation to the plug. Therefore, it increases the operator's workload, and there is a possibility that the operator will be put in danger when handling highly hazardous liquids.

[0005] Here, in order to prevent increasing the workload of the operator or putting the operator in danger, it has been considered to automate the operation of installing the socket into the plug by using a robotic arm capable of holding the socket. For example, as disclosed in Patent Document 1, the position of the plug can be memorized in advance, and the socket can be moved to the memorized position by using a robotic arm.

[0006] However, since the position or orientation of the opening of each individual liquid storage container may differ, the position or orientation of the plug provided at the opening will also vary depending on the individual liquid storage container. In addition, the state of the liquid contained in the liquid storage container or the ambient temperature may cause changes in the internal pressure of the liquid storage container, and consequently, the orientation of the opening of the fixing plug will also change.

[0007] In such cases, even if the socket is correctly moved to the predetermined position in three-dimensional space, there is a possibility that the socket cannot be installed due to the position or orientation of the plug. Furthermore, if the socket and plug are forcibly connected when their orientations are inconsistent, a load will be applied to the socket and plug, which may lead to load accumulation and malfunction.

[0008] The present invention is made in view of the above, and its object is to provide a liquid supply device and a liquid supply method that can reliably connect the liquid flow path on the plug side and the liquid flow path on the socket side, regardless of the direction of the plug fixed to the opening of the liquid storage container.

[0009] To solve the above-mentioned problems, the present invention employs the following means. One aspect of the liquid supply device of the present invention includes: a first plug, fixed to a first opening provided on the top surface of a liquid receiving container, and having a plug-side liquid flow path extending along the axis of the first plug; a first socket, detachably mounted to the first plug, and having a socket-side liquid flow path extending along the axis of the first socket; a gripping mechanism, gripping the first socket and positioning the first socket in a three-dimensional position within its range of motion in a predetermined posture; and an identification unit, identifying the direction of the first plug axis of the first plug; and the gripping mechanism grips the first socket in a posture in which the direction of the first plug axis identified by the identification unit is consistent with the direction of the first socket axis, thereby connecting the socket-side liquid flow path and the plug-side liquid flow path by inserting the first socket held by the gripping mechanism into the first plug.

[0010] According to one aspect of the liquid supply device of the present invention, the identification unit identifies the direction of the first plug axis of the first plug, and the holding mechanism holds the first socket in an orientation where the direction of the first plug axis is consistent with the direction of the first socket axis. By inserting the first socket held by the holding mechanism into the first plug, the liquid flow path on the socket side and the liquid flow path on the plug side are connected. Since the first socket is held by the holding mechanism in an orientation suitable for the first plug, the liquid flow path on the plug side and the liquid flow path on the socket side can be reliably connected regardless of the orientation of the first plug fixed to the first opening of the liquid collection container.

[0011] A preferred structure of the liquid supply device of the present invention is as follows: the front end of the aforementioned first plug forms a first groove extending in an annular shape around the axis of the aforementioned first plug and having a plug-side fixing portion; the front end of the aforementioned first socket forms a first protrusion extending in an annular shape around the axis of the aforementioned first socket and having a socket-side fixing portion; the aforementioned gripping mechanism inserts the aforementioned first protrusion into the aforementioned first groove at a position on the axis of the aforementioned first plug identified by the aforementioned identification portion and separated from the aforementioned plug-side fixing portion by only a first predetermined distance to configure the aforementioned socket-side fixing portion; the aforementioned first socket has an adjustment portion that adjusts the position of the aforementioned socket-side fixing portion on the aforementioned first socket axis relative to the gripping position held by the aforementioned gripping mechanism, so that the aforementioned socket-side fixing portion is fixed to the aforementioned plug-side fixing portion in a fixed state.

[0012] According to the liquid supply device configured as described above, the first protrusion of the first socket can be inserted into the first groove of the first plug by means of the gripping mechanism, and the socket-side fixing part can be fixed to the plug-side fixing part by means of the adjustment part of the socket.

[0013] In the liquid supply device configured as described above, it is preferable that the aforementioned adjusting part adjusts the position of the aforementioned socket-side fixing part on the aforementioned first socket axis relative to the aforementioned gripping position, thereby releasing the aforementioned fixing state. According to this liquid supply device, by adjusting the position of the socket-side fixing part relative to the plug-side fixing part, the fixing state of the socket-side fixing part being fixed to the plug-side fixing part is released.

[0014] In the liquid supply device described above, it is preferable that the aforementioned gripping mechanism grips the aforementioned first socket removed from the aforementioned first plug and moves the aforementioned first socket to a cleaning container storing the cleaning liquid of the aforementioned first socket. According to the liquid supply device described above, the first socket removed from the first plug can be moved to the cleaning container, and the first socket can be cleaned by the cleaning liquid.

[0015] In one embodiment of the liquid supply device of the present invention, a preferred structure includes: a first cover portion that seals the liquid flow path on the plug side and has a first insertion portion that is inserted into the first groove portion; and a rotating mechanism that has a support portion that supports the first cover portion and rotates the support portion about the first cover axis; the first insertion portion of the first cover portion has a first thread portion, the first groove portion of the first plug portion has a second thread portion that engages with the first thread portion, the gripping mechanism grips the rotating mechanism in an attitude in which the direction of the first plug axis identified by the identification portion is consistent with the direction of the first cover axis, and the rotating mechanism rotates the support portion in a predetermined direction while the support portion supports the first cover portion, thereby removing the first cover portion from the first plug portion.

[0016] According to the liquid supply device configured as described above, the identification unit identifies the direction of the first plug axis of the first plug, and the gripping mechanism grips the rotating mechanism in an orientation where the direction of the first plug axis is aligned with the direction of the first cover axis. By rotating the support portion of the rotating mechanism held by the gripping mechanism in a predetermined direction, the first cover portion supported on the support portion is removed from the first plug. Since the rotating mechanism is gripped by the gripping mechanism in an orientation suitable for the direction of the first plug, the first cover portion can be reliably removed from the first plug regardless of the orientation of the plug fixed to the opening of the liquid storage container.

[0017] In the liquid supply device configured above, it is preferable that the aforementioned rotating mechanism rotates the aforementioned supporting part in the opposite direction to the aforementioned predetermined direction while the aforementioned supporting part supports the aforementioned first cover part, thereby installing the aforementioned first cover part onto the aforementioned first plug.

[0018] According to the liquid supply device of this state, the support part is rotated in the opposite direction of a predetermined direction by a rotating mechanism for removing the first cover from the first plug, thereby enabling the first cover to be installed on the first plug.

[0019] A preferred structure of the liquid supply device of the present invention includes: a second plug, fixed to a second opening provided on the top surface of the liquid storage container, and having a plug-side gas flow path extending along the axis of the second plug; and a second socket, detachably mounted to the second plug, and having a socket-side gas flow path extending along the axis of the second socket. The aforementioned identification unit identifies the direction of the aforementioned second plug axis, and the aforementioned holding mechanism holds the aforementioned second socket in an attitude in which the direction of the aforementioned second plug axis identified by the aforementioned identification unit is consistent with the direction of the aforementioned second socket axis. The aforementioned second socket held by the aforementioned holding mechanism is inserted into the aforementioned second plug, thereby connecting the aforementioned socket-side gas flow path and the aforementioned plug-side gas flow path.

[0020] According to the liquid supply device of this configuration, the identification unit identifies the direction of the second plug axis of the second plug, and the holding mechanism holds the second socket in a posture in which the direction of the second plug axis is consistent with the direction of the second socket axis. The second plug is inserted into the second socket held by the holding mechanism, thereby connecting the gas flow path on the socket side and the gas flow path on the plug side. Since the second socket is held in a posture that is suitable for the direction of the second plug by the holding mechanism, the gas flow path on the plug side and the gas flow path on the socket side can be reliably connected regardless of the direction of the second plug fixed to the second opening of the liquid receiving container.

[0021] One embodiment of the present invention is a liquid supply method that supplies liquid using a liquid supply device, the liquid supply device comprising: a first plug fixed to a first opening on the top surface of a liquid receiving container and having a plug-side liquid flow path extending along the axis of the first plug; a first socket detachably mounted to the first plug and having a socket-side liquid flow path extending along the axis of the first socket; and a gripping mechanism for gripping the first socket and positioning the first socket in a three-dimensional position within its range of motion in a predetermined posture; the liquid supply method comprising: an identification step for identifying the direction of the first plug axis of the first plug; a gripping step for gripping the first socket in a posture in which the direction of the first plug axis identified in the identification step is consistent with the direction of the first socket axis; and a connection step for connecting the socket-side liquid flow path and the plug-side liquid flow path by inserting the first socket held in the gripping step into the first plug.

[0022] According to one aspect of the liquid supply method of the present invention, in the identification step, the direction of the first plug axis of the first plug is identified, and in the holding step, the holding mechanism holds the first socket in a posture in which the direction of the first plug axis is consistent with the direction of the first socket axis. The first socket held in the holding step is inserted into the first plug, thereby connecting the liquid flow path on the socket side with the liquid flow path on the plug side. Since the holding mechanism holds the first socket in a posture suitable for the direction of the first plug, the liquid flow path on the plug side can be reliably connected to the liquid flow path on the socket side regardless of the direction of the first plug fixed to the first opening of the liquid collection container.

[0023] According to the present invention, a liquid supply device and a liquid supply method can be provided, which can reliably connect the liquid flow path on the plug side and the liquid flow path on the socket side regardless of the direction of the plug fixed to the opening of the liquid storage container.

Implementation Method

[0025] [First Embodiment] Hereinafter, the liquid supply device 100 of the first embodiment of the present invention will be described with reference to the drawings. Figures 1 and 2 are side views of the liquid supply device 100 of this embodiment. Figure 1 shows the state in which the robot 30 holds and moves the socket 20. Figure 2 shows the state in which the robot 30 positions the socket 20 near the plug 10. Figure 3 is a top view of the liquid supply device 100 shown in Figure 1, and shows the state in which the robot 30 holds and moves the socket 20.

[0026] The liquid supply device 100 of this embodiment shown in FIG1 is a device for supplying liquid contained in a liquid storage container 200 to a plurality of target supply devices (not shown). Here, the liquid in this embodiment is, for example, pure water or various pharmaceutical solutions used in the semiconductor manufacturing step of a semiconductor manufacturing apparatus.

[0027] As shown in Figures 1 to 3, the liquid supply device 100 includes: a plug (first plug) 10, a sealing plug 15, a socket (first socket) 20, a robot (gripping mechanism) 30, a camera unit (recognition unit) 40, a cover (first cover) 50, a cover fixture (rotation mechanism) 60, and a control unit 70. In this embodiment, even if the liquid supply device 100 deforms under pressure within the liquid storage container 200, causing a change in the orientation of the plug 10 fixed to the first opening 210, the socket 20 can still be appropriately fixed to the plug 10 regardless of the orientation of the plug 10.

[0028] As shown in Figure 1, the liquid receiving container 200 is formed as a cylindrical container around an axis Z1 extending in a vertical direction, and a first opening 210 and a second opening 220 are provided on the top surface (top plate). The inner circumferential surfaces of the first opening 210 and the second opening 220 are formed with internal threads.

[0029] The position or orientation of the first opening 210 of the liquid storage container 200 may vary for each individual container, and the position or orientation of the plug 10 located at the first opening 210 may also vary for each individual liquid storage container 200. Furthermore, when the internal pressure of the liquid storage container 200 changes due to the state of the liquid contained in the liquid storage container or the ambient temperature, the orientation of the first opening 210 that secures the plug 10 will also change. In this embodiment, the liquid supply device 100 can reliably connect the plug 10 to the socket 20 even if each individual liquid storage container 200 has a different shape or the orientation of the first opening 210 changes due to different ambient temperatures.

[0030] The plug 10 is fixed to the first opening 210 and has a plug-side liquid flow path 11 extending along the plug axis (first plug axis) Zp1. The plug-side liquid flow path 11 extends to near the bottom 230 of the liquid collection container 200. An external thread is formed on the outer peripheral surface of the upper end of the plug 10. The plug 10 is fixed to the first opening 210 by engaging the external thread of the plug 10 with the internal thread of the first opening 210.

[0031] Figure 6 shows a partial cross-sectional view of the cover fixture 60 moved to the vicinity of the plug 10. As shown in Figure 6, the front end (upper end) of the plug 10 has a groove (first groove) 12 extending in an annular shape around the plug axis Zp1. The groove 12 has a fixing groove (plug-side fixing part) 12a for fixing the ball valve 22a of the socket 20. The fixing groove 12a is formed in an annular shape around the plug axis Zp1. The groove 12 of the plug 10 has an external thread (second thread part) 12b for engaging with the internal thread 51a of the cover 50.

[0032] The sealing plug 15 is fixed to the second opening 220 and is a component for sealing the second opening 220. An external thread is formed on the outer peripheral surface of the sealing plug 15. The sealing plug 15 is fixed to the second opening 220 by engaging the external thread of the sealing plug 15 with the internal thread of the second opening 220.

[0033] The socket 20 is detachably mounted to the plug 10 and has a socket-side liquid flow path 21 extending along the socket axis (first socket axis) Zs1. The socket 20 is connected to a liquid piping LL1 for supplying liquid to a target supply device and a gas piping GL1 for supplying gas to the liquid collection container 200. The socket 20 is held by the handle 31 of the robot 30.

[0034] Figure 9 shows a partial cross-sectional view of the socket 20 in a position where it is moved near the plug 10. As shown in Figure 9, a protrusion (first protrusion) 22 extending in an annular shape around the socket axis Zs1 is formed at the front end (lower end) of the socket 20. The protrusion 22 has a plurality of ball valves (socket-side fixing parts) 22a fixed to the fixing groove 12a of the plug 10. The ball valves 22a are arranged at multiple locations around the socket axis Zs1 at intervals.

[0035] The robot 30 is a mechanism that holds the socket 20 and the cover fixture 60, and positions the socket 20 and the cover fixture 60 in a predetermined posture within the three-dimensional position defined by the axes X, Y, and Z of its range of motion. The robot 30 may be, for example, a six-axis multi-joint robot. The robot 30 includes: a handle 31, a wrist 32, a first arm 33, a second arm 34, a base 35, and a rotary body 36.

[0036] The rotating body 36 is supported in a manner that allows it to rotate relative to the base portion 35 about a vertical axis Zr1. The first arm portion 33 is supported in a manner that allows it to rotate relative to the rotating body 36 about a horizontal axis Zr2. The second arm portion 34 is supported in a manner that allows it to rotate relative to the first arm portion 33 about a horizontal axis Zr3. One end of the wrist portion 32 is mounted to the second arm portion 34, and the other end is mounted to a handle portion 31.

[0037] By combining the rotation of the gyratory body 36 relative to the base 35, the rotation of the first arm 33 relative to the gyratory body 36, and the rotation of the second arm 34 relative to the first arm 33, the wrist 32 can be positioned in any three-dimensional position within the range of motion. Furthermore, the wrist 32 can rotate along three axes, and the handle 31 can be displaced along three axes to assume any posture.

[0038] The camera unit 40 is a device that captures an image of the top surface of the plug 10 and identifies the position of the plug 10 in three-dimensional space and the direction of the plug axis Zp1 of the plug 10. The camera unit 40 transmits the identification results of the position of the plug 10 in three-dimensional space and the direction of the plug axis Zp1 of the plug 10 to the control unit 70.

[0039] As shown in FIG6, the cover portion (first cover portion) 50 is a component that seals the liquid flow path 11 on the plug side. The cover portion 50 has an insertion portion 51 for inserting into the groove 12 of the plug 10. The insertion portion 51 is formed in a cylindrical shape extending around the cover axis Zc1. An internal thread (first thread portion) 51a is formed on the inner circumferential surface of the insertion portion 51.

[0040] As shown in FIG. 6, the cover fixture 60 has a support portion 61 for supporting the cover portion 50 and a rotation mechanism for rotating the support portion 61 about the cover axis (first cover axis) Zc1. The cover fixture 60 has a transmission portion 64, which transmits the rotational power of the rotating shaft 63 about the cover axis Zc1 to the support portion 61. The cover fixture 60 transmits the rotational power of the rotating shaft 63 to the support portion 61, causing the cover portion 50 to rotate about the cover axis Zc1. The support portion 61 is connected to the cover fixture body 65 via a shaft portion 66. The shaft portion 66 provides a thrust from the cover fixture body 65 toward the separation direction by means of a spring 62 embedded in the cover fixture body 65.

[0041] The control unit 70 controls the robot 30 based on the identification results of the three-dimensional position of the plug 10 and the direction of the plug axis Zp1 of the plug 10 transmitted from the camera unit 40, so that the socket 20 or cover fixture 60 held by the handle 31 is configured in the expected position in the expected posture.

[0042] Next, the control method of the liquid supply device 100 of this embodiment will be described with reference to FIG4. FIG4 is a flowchart showing the control method of the liquid supply device 100 of this embodiment, showing the process of installing the socket 20 to the plug 10. Each process shown in FIG4 is performed by the control unit 70 executing the control program.

[0043] In step S101, the control unit 70 moves the liquid storage container 200 containing the liquid from the storage location (illustration omitted) to a predetermined position within the operating range of the robot 30. The control unit 70, for example, moves the unmanned transport vehicle (illustration omitted) carrying the liquid storage container 200 to the predetermined position. Alternatively, an operator can use a transport vehicle (illustration omitted) to move the liquid storage container 200.

[0044] The first opening 210 of the liquid storage container 200 that is moved in during step S101 is fitted with a cover 50. In addition, a sealing plug 15 is fitted to the second opening 220.

[0045] In step S102 (identification step), the control unit 70 controls the camera unit 40 to identify the position of the plug 10 and the direction of the plug axis Zp1. Here, an example of the camera unit 40 identifying the position of the plug 10 and the direction of the plug axis Zp1 will be described.

[0046] Figure 5 shows an image obtained by the camera unit 40 capturing an image of the top surface of the plug 10. As shown in Figure 5, the top surface of the plug 10 has circular or slightly circular patterns C1, C2, C3, C4, C5, and C6. The patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6 represented by the dashed lines in Figure 5 are images obtained by the camera unit 40 capturing an image of the top surface of the plug 10 when the plug axis Zp1 is aligned with the vertically extending axis Z1.

[0047] The center positions of the patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6 on the XY plane are Pr1, Pr2, Pr3, Pr4, Pr5, and Pr6, respectively. The camera unit 40 detects the coordinates of Pr1, Pr2, Pr3, Pr4, Pr5, and Pr6 from the images of the patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6, and then assigns corresponding coordinates Pr (PrX, PrY, PrZ) on a predetermined portion of the plug 10 to the pre-memory unit (illustration omitted).

[0048] The camera unit 40 detects the coordinates of the center positions of patterns C1, C2, C3, C4, C5, and C6 on the XY plane from the image captured in step S102, namely P1, P2, P3, P4, P5, and P6. Furthermore, by comparing Pr1 with P1, Pr2 with P2, Pr3 with P3, Pr4 with P4, Pr5 with P5, and Pr6 with P6, it identifies the coordinates P(PX, PY, PZ) of the coordinates Pr in three-dimensional space stored in the correction memory unit. Coordinate P represents the position of a predetermined portion of the plug 10 captured by the camera unit 40 in three-dimensional space. The camera unit 40 compares Pr1 with P1, Pr2 with P2, Pr3 with P3, Pr4 with P4, Pr5 with P5, and Pr6 with P6 to identify the direction of the plug axis Zp1.

[0049] In step S103, the control unit 70 controls the robot 30 to hold the cover fixture 60 set on the setting table TB1. The control unit 70 has pre-memorized the position of the cover fixture 60 set on the setting table TB1, so that the handle 31 moves to a position near the cover fixture 60 and holds the cover fixture 60.

[0050] In step S104, the control unit 70 controls the robot 30 to move the cover fixture 60 to the vicinity of the plug 10 while the handle 31 is holding the cover fixture 60. The control unit 70 controls the robot 30 to position the support 61 at a certain distance from the coordinate P of the plug 10 identified in step S102 along the plug axis Zp1.

[0051] When the robot 30 positions the cover fixture 60 near the plug 10, it holds the cover fixture 60 in a posture where the direction of the plug axis Zp1, as identified by the camera unit 40, is consistent with the direction of the cover axis Zc1. The alignment of the cover axis Zc1 with the plug axis Zp1 means that the direction of the plug axis Zp1 is not consistent with the direction of the axis Z1 extending in the vertical direction.

[0052] As shown in Figure 6, in the XZ plane, the direction of the plug axis Zp1 is tilted by an angle θ1 only relative to the direction of the axis Z1 extending in the vertical direction. By aligning the direction of the cover axis Zc1 with the direction of the plug axis Zp1, the support portion 61 of the cover fixture 60 can move along the plug axis Zp1 toward the cover portion 50.

[0053] Furthermore, the orientation of the plug axis Zp1 being aligned with the orientation of the cover axis Zc1 does not mean that the orientations of the plug axis Zp1 and the cover axis Zc1 are identical. For example, even if the difference between the orientations of the plug axis Zp1 and the cover axis Zc1 is smaller than the angle θ1 shown in Figure 6, it still conforms to the orientation of the plug axis Zp1 being aligned with the orientation of the cover axis Zc1. The following explanations are the same.

[0054] In step S105, the control unit 70 controls the robot 30 to hold the cover fixture 60 so that the cover fixture 60 supports the cover portion 50. The robot 30 moves the cover fixture 60 along the plug axis Zp1 toward the cover portion 50. As shown in FIG6, the cover fixture 60 has a support portion 61 that supports the cover portion 50.

[0055] As shown in FIG. 6, the support portion 61 is provided with a ball valve 61a, which is used to generate a thrust toward the cover axis Zc1. In addition, a receiving groove 52 is formed on the top surface of the cover portion 50 to accommodate the support portion 61. As shown in FIG. 5 and FIG. 6, the receiving groove 52 is formed with a plurality of fixing grooves 52a for fixing a plurality of ball valves 61a.

[0056] The cover fixture 60 houses the support 61 in the receiving groove 52 and moves toward the cover 50 with the ball valve 61a fixed to the fixing groove 52a. When the ball valve 61a is in contact with the central part 53 of the cover 50, the cover fixture 60 moves further downward, thereby causing the spring 62 to contract and gradually increase the thrust of the spring 62.

[0057] By increasing the thrust of the spring 62 and moving the ball valve 61a away from the plug axis Zp1, the ball valve 61a is moved toward the position of the fixing groove 52a, thereby fixing the ball valve 61a in the fixing groove 52a. In this way, the cover portion 50 is supported by the support portion 61 of the cover fixture 60.

[0058] Subsequently, when the robot 30 moves the cover fixture 60 upward along the plug axis Zp1 to allow the contracted spring 62 to return to its natural length, it reaches the state shown in FIG. 7. The central portion 53 of the cover portion 50 supported by the support portion 61, as shown in FIG. 5, has a slightly quadrangular shape when viewed along the plug axis Zp1. Furthermore, to accommodate the slightly quadrangular portion of the cover portion 50, the support portion 61 has a slightly quadrangular recess when viewed along the plug axis Zp1. By accommodating the central portion 53 in the recess, the support portion 61 maintains support for the cover portion 50 and prevents it from spinning freely.

[0059] In step S106, while the cover 50 is supported by the support 61, the control unit 70 rotates the support 61 counterclockwise (in a predetermined direction) to remove the cover 50 from the plug 10. Rotating the cover 50 counterclockwise disengages the external thread 12b of the plug 10 from the internal thread 51a of the cover 50, resulting in the state shown in FIG8, thereby removing the cover 50 from the plug 10. When disengaging the external thread 12b of the plug 10 from the internal thread 51a of the cover 50, the support 61 approaches the cover fixture body 65, causing the spring 62 to contract and housing the shaft 66 inside the cover fixture body 65.

[0060] In step S107, the control unit 70 controls the robot 30 to move the cover fixture 60 to the cover standby position (the position of symbol 50 in Figure 3) while the cover 50 is supported by the support part 61. The cover standby position is provided with a fixing part (figure omitted), which has an external thread that engages with the internal thread 51a of the cover 50.

[0061] The cover fixture 60 transmits the power of the rotating shaft 63 rotating clockwise around the cover axis Zc1 to the support part 61, causing the cover part 50 to engage with the internal thread of the fixing part, thereby fixing the cover part 50 to the fixing part. Afterwards, the control unit 70 controls the robot 30 to move the cover fixture 60, which is not supporting the cover part 50, to the cover fixture standby position (the position of symbol 60 in Figure 3). Through the above steps S102 to S107, the cover part 50 is removed from the plug 10.

[0062] In step S108, the control unit 70 controls the camera unit 40 to identify the position of the plug 10 and the direction of the plug axis Zp1. The processing in step S108 is the same as that in step S102. The reason for re-identifying the position of the plug 10 and the direction of the plug axis Zp1 in step S108 is that the position of the plug 10 and the direction of the plug axis Zp1 may change when the cover 50 is removed.

[0063] In step S109, the control unit 70 controls the robot 30 to hold the socket 20 set on the setting table TB2. The control unit 70 pre-memorizes the position of the socket 20 set on the setting table TB2, and then moves the handle 31 to a position near the socket 20 to hold the socket 20.

[0064] In step S110 (holding step), the control unit 70 controls the robot 30 to move the socket 20 to the vicinity of the plug 10 while the handle 31 is holding the socket 20. The control unit 70 controls the robot 30 to position the protrusion 22 at a certain distance from the plug axis Zp1 relative to the coordinate P of the plug 10 identified in step S108.

[0065] When the robot 30 places the socket 20 near the plug 10, it holds the socket 20 in a posture where the direction of the plug axis Zp1, as identified by the camera unit 40, is consistent with the direction of the socket axis Zs1. The fact that the direction of the socket axis Zs1 is consistent with the direction of the plug axis Zp1 means that the direction of the plug axis Zp1 is not consistent with the direction of the axis Z1 extending in the vertical direction.

[0066] As shown in Figure 9, in the XZ plane, the direction of the plug axis Zp1 is tilted by an angle θ2 only relative to the direction of the axis Z1 extending in the vertical direction. By aligning the direction of the socket axis Zs1 with the direction of the plug axis Zp1, the protrusion 22 of the socket 20 can move along the plug axis Zp1 toward the plug 10.

[0067] In step S111, the control unit 70 controls the robot 30 to insert the socket 20 into the plug 10. The robot 30 moves the handle 31 along the plug axis Zp1 so that the protrusion 22 is inserted into the groove 12 of the plug 10. As shown in FIG10, the robot 30 inserts the protrusion 22 into the groove 12 at a position where the ball valve 22a is positioned only at a predetermined distance (first predetermined distance) L1 away from the fixed groove 12a on the plug axis Zp1. When the protrusion 22 of the socket 20 is inserted into the groove 12 of the plug 10, it will be in the state shown in FIG10.

[0068] In step S112 (connection step), the control unit 70 controls the socket 20 to fix the socket 20 to the plug 10. The socket 20 has an adjustment unit 23, which moves the protrusion 22 toward the bottom of the groove 12 of the plug 10. The adjustment unit 23 adjusts the position of the ball valve 22a relative to the gripping position of the handle 31 of the robot 30 on the socket axis Zs1, thereby positioning the ball valve 22a in the fixed groove 12a.

[0069] When the ball valve 22a is disposed in the fixing groove 12a, the ball valve 22a will be fixed in the fixing groove 12a by the pushing force of the spring 24. Therefore, as long as no upward force greater than the pushing force of the spring 24 is applied, the socket 20 will remain fixed in the plug 10.

[0070] As shown in Figure 10, when the ball valve 22a is positioned in the fixed groove 12a, the valve 25 is in contact with the body 26, and the lower end of the socket-side liquid flow path 21 is sealed. On the other hand, when the ball valve 22a is positioned in the fixed groove 12a, the body 26 is in contact with the front end of the plug 10, and correspondingly, the valve 25 separates from the body 26. This releases the seal on the socket-side liquid flow path 21, connecting the socket-side liquid flow path 21 with the plug-side liquid flow path 11.

[0071] In step S113, the control unit 70 controls the robot 30 to release the state of the handle 31 holding the socket 20 and move the handle 31 to the predetermined standby position.

[0072] In step S114, the control unit 70 activates the pump (illustrated but not shown) connected to the liquid piping LL1 to begin supplying the liquid contained in the liquid storage container 200 to the target supply device. The control unit 70 controls the gas supply source (illustrated but not shown) connected to the gas piping GL1 to supply gas (e.g., air or nitrogen) equivalent to the volume of liquid taken from the liquid storage container 200 to the liquid storage container 200.

[0073] The gas supplied from the gas pipe GL1 to the socket 20 flows inside the socket 20 and is supplied to the upper space of the liquid collection container 200 via the plug-side gas flow path 13. The liquid reaching the upper end of the plug-side liquid flow path 11 is introduced into the liquid pipe LL1 via the socket-side liquid flow path 21. The liquid introduced into the liquid pipe LL1 is then supplied to the target supply device. In this way, the liquid supply device 100 begins to supply liquid to the target supply device.

[0074] Liquid is supplied to the target supply device using the liquid supply device 100. This process continues as long as there is liquid residue in the liquid storage container 200. When the liquid in the liquid storage container 200 is used up or the remaining amount is below a predetermined level, a new liquid storage container 200 must be replaced. Next, the process of removing the socket 20 from the plug 10 in order to replace the liquid storage container 200 will be described with reference to FIG12.

[0075] In step S201, the control unit 70 controls the operation of the pump connected to the liquid piping LL1 and stops the supply of gas from the gas supply source connected to the gas piping GL1 to the socket 20. When the pump is stopped, the supply of liquid from the liquid collection container 200 to the liquid piping LL1 is stopped.

[0076] In step S202, the control unit 70 controls the robot 30 to move the handle 31 from a predetermined standby position to a position where it can grip the socket 20, and uses the handle 31 to grip the socket 20. When the handle 31 grips the socket 20, it will be in the state shown in Figure 11.

[0077] In step S203, the control unit 70 controls the socket 20 to release the socket 20 from the fixed state of the plug 10. Relative to the gripping position of the handle 31 of the robot 30, the adjustment unit 23 adjusts the position of the ball valve 22a on the socket axis Zs1 so that the ball valve 22a is not configured in the fixed groove 12a.

[0078] The adjusting part 23 applies an upward force greater than the thrust of the spring 24, causing the spring 24 to contract. As the spring 24 contracts, it releases the ball valve 22a from the fixed groove 12a, and the ball valve 22a moves to a position separated from the fixed groove 12a, as shown in Figure 10. Then, the control part 70 controls the robot 30 to unplug the socket 20 from the plug 10. The robot 30 moves the handle part 31 along the plug axis Zp1, thereby pulling the protrusion 22 out of the groove 12 of the plug 10.

[0079] In step S204, the control unit 70 controls the robot 30 to move the handle 31, which is holding the socket 20, to the cleaning container WC located on the setting table TB2. The cleaning container WC stores cleaning liquid (e.g., pure water) to clean the liquid adhering to the socket 20.

[0080] By immersing the socket 20 in the cleaning solution, if the liquid system adhering to the socket 20 comes into contact with the atmosphere such as slurry and solidifies, it can prevent the liquid from drying and solidifying while adhering to the socket 20. Furthermore, it is best to maintain the socket 20 in a state where the cleaning container WC continuously supplies fresh cleaning solution, thus keeping it uncontaminated.

[0081] In step S205, the control unit 70 controls the robot 30 to release the handle 31 from the socket 20, causing the handle 31 to leave the socket 20. Then, the control unit 70 controls the robot 30 to move the handle 31 to a predetermined standby position. Through the above, the action of removing the socket 20 from the plug 10 is completed.

[0082] In step S206, the control unit 70 controls the camera unit 40 to identify the position of the plug 10 and the direction of the plug axis Zp1. The processing of step S206 is the same as that of step S102.

[0083] In step S207, the control unit 70 controls the robot 30 to grasp the cover fixture 60 set on the setting table TB1. The control unit 70 pre-memorizes the standby position of the cover fixture 60 set on the setting table TB1 (the position of symbol 60 in Figure 3), and then controls the robot 30 to move the handle 31 to the standby position of the cover fixture, thereby grasping the cover fixture 60. Afterwards, the control unit 70 controls the robot 30 to move the cover fixture 60 to the cover standby position (the position of symbol 50 in Figure 3), so that the cover 50 is supported on the support 61.

[0084] In step S208, the control unit 70 controls the robot 30 to move the cover fixture 60 to the vicinity of the plug 10 while the handle 31 is holding the cover fixture 60. The control unit 70 controls the robot 30 to position the support 61 at a position that is a certain distance away from the coordinate P of the plug 10 identified in step S206 along the plug axis Zp1, as shown in Figure 13.

[0085] When the robot 30 places the cover fixture 60 near the plug 10, it holds the cover fixture 60 in a posture where the direction of the plug axis Zp1, as identified by the camera unit 40, is consistent with the direction of the cover axis Zc1. The alignment of the cover axis Zc1 with the plug axis Zp1 means that the direction of the plug axis Zp1 is not consistent with the direction of the axis Z1 extending in the vertical direction.

[0086] As shown in Figure 13, in the XZ plane, the direction of the plug axis Zp1 is tilted by an angle θ3 only relative to the direction of the axis Z1 extending in the vertical direction. By aligning the direction of the cover axis Zc1 with the direction of the plug axis Zp1, the cover portion 50 of the cover fixture 60, supported by the support portion 61, can move along the plug axis Zp1 toward the plug 10. The control unit 70 controls the robot 30 to move the cover portion 50 along the plug axis Zp1 toward the plug 10 after it reaches the state shown in Figure 13, thus reaching the state shown in Figure 8.

[0087] In step S209, the control unit 70 controls the robot 30 to hold the cover fixture 60 and install the cover 50 onto the plug 10. The robot 30 moves the cover fixture 60 along the plug axis Zp1 toward the cover 50, as shown in FIG8. With the cover 50 supported by the support part 61, the control unit 70 uses the transmission part 64 to rotate the support part 61 clockwise (opposite to the predetermined direction). This engages the external thread 12b of the plug 10 with the internal thread 51a of the cover 50, thereby installing the cover 50 onto the plug 10.

[0088] The cover fixture 60 transmits the rotational power of the rotating shaft 63 in the clockwise direction to the support part 61 through the transmission part 64, causing the cover part 50 to rotate clockwise. When the cover part 50 rotates clockwise, the external thread 12b of the plug 10 will engage with the internal thread 51a of the cover part 50 to the state shown in FIG7, thereby installing the cover part 50 on the plug 10.

[0089] In step S210, the control unit 70 controls the cover fixture 60 to move the support part 61 upward along the cover axis Zc1, so that the cover part 50 is removed from the support part 61 as shown in FIG6. Afterwards, the control unit 70 controls the robot 30 to move the cover fixture 60 to the cover fixture standby position while the handle part 31 is holding the cover fixture 60.

[0090] In step S211, the control unit 70 moves the used liquid storage container 200 to a disposal site (figure omitted). The control unit 70 can, for example, move an unmanned transport vehicle (figure omitted) carrying the used liquid storage container 200 to the disposal site. Alternatively, an operator can use a transport vehicle (figure omitted) to move the liquid storage container 200.

[0091] The functions and effects of the liquid supply device 100 of this embodiment described above will be explained. According to the liquid supply device 100 of this embodiment, the camera unit 40 identifies the direction of the plug axis Zp1 of the plug 10, and the robot 30 holds the socket 20 in an orientation where the direction of the plug axis Zp1 is aligned with the direction of the socket axis Zs1. The socket 20, held by the robot 30, is inserted into the plug 10, thereby connecting the socket-side liquid flow path 21 with the plug-side liquid flow path 11. Since the socket 20 is held in an appropriate orientation relative to the plug 10 by the handle 31 of the robot 30, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected regardless of the orientation of the plug 10 fixed to the first opening 210 of the liquid collection container 200.

[0092] Furthermore, according to the liquid supply device 100 of this embodiment, when the protrusion 22 of the socket 20 is inserted into the groove 12 of the plug 10 by the robot 30, the ball valve 22a can be fixed in the fixed groove 12a by using the adjustment part 23 provided by the socket 20. In addition, by adjusting the position of the ball valve 22a by using the adjustment part 23, the fixed state of the ball valve 22a in the fixed groove 12a can be released.

[0093] Furthermore, according to the liquid supply device 100 of this embodiment, the camera unit 40 identifies the direction of the plug axis Zp1 of the plug 10, and the robot 30 holds the cover fixture 60 in a posture in which the direction of the plug axis Zp1 is consistent with the direction of the cover axis Zc1. By rotating the support portion 61 of the cover fixture 60 held by the handle 31 counterclockwise, the cover portion 50 supported by the support portion 61 can be removed from the plug 10.

[0094] Since the handle 31 can be held in a proper position relative to the plug 10, the cap 50 can be reliably removed from the plug 10 regardless of the direction of the plug 10 fixed to the first opening 210 of the liquid storage container 200. Furthermore, by rotating the support 61 clockwise using the cap fixture 60, the cap 50 can be installed onto the plug 10.

[0095] [Second Embodiment] Next, the liquid supply device 100A according to the second embodiment of the present invention will be described. This embodiment is a variation of the first embodiment, and except as specifically described below, it is the same as the first embodiment and is omitted in the following description.

[0096] The liquid supply device 100 of the first embodiment installs a socket 20 on a plug 10 fixed to the first opening 210 of a liquid storage container 200, and supplies gas to the liquid storage container 200 via the socket 20, thereby supplying liquid to the target supply device. In contrast, the liquid supply device 100A of this embodiment, as shown in FIG14, installs a socket 20 on a plug 10 fixed to both the first opening 210 and the second opening 220.

[0097] As shown in FIG14, the liquid supply device 100A of this embodiment includes: a plug 10 fixed to both the first opening 210 and the second opening 220, and a socket 20 installed on the plug 10. The structure and function of the plug 10 and the socket 20 are the same as those of the first embodiment.

[0098] The socket 20 of the plug 10 fixed to the first opening 210 is connected to the liquid piping LL1, which supplies liquid to the target supply device. The socket 20 of the plug 10 fixed to the second opening 220 is connected to the liquid piping LL2, which is used to return the liquid circulating in the target supply device to the liquid collection container 200. In this embodiment, liquid is supplied to the target supply device via the liquid piping LL1 and then returned to the liquid collection container 200 via the liquid piping LL2, thus circulating the liquid.

[0099] Both the plug 10 fixed to the first opening 210 and the plug 10 fixed to the second opening 220 are pre-installed with cover portions 50. In this embodiment, the liquid storage container 200, with cover portions 50 installed on both the first opening 210 and the second opening 220, is first moved into a predetermined position within the operating range of the robot 30.

[0100] Subsequently, the control unit 70 performs steps S102 to S113 of FIG4 with respect to the first opening 210. This action brings the socket 20 to a state where the plug 10 is installed in the first opening 210. Then, the control unit 70 performs steps S102 to S113 of FIG4 with respect to the second opening 220. This action brings the socket 20 to a state where the plug 10 is installed in the second opening 220.

[0101] After the plug 10 is installed in both the first opening 210 and the second opening 220 of the socket 20, the control unit 70 activates the pump (not shown in the figure) connected to the liquid piping LL1. Upon activation of the pump, liquid is supplied from the liquid storage container 200 to the target supply device via the liquid piping LL1, and then from the target supply device back to the liquid storage container 200 via the liquid piping LL2. Gas used to displace the volume of liquid supplied from the liquid storage container 200 to the outside is supplied to the liquid storage container 200 via both gas piping GL1 and gas piping GL2. Alternatively, as shown in FIG14, only one of the gas piping GL1 and gas piping GL2 may be connected to the socket 20, and gas may be supplied to the liquid storage container 200 via a single gas piping.

[0102] According to the liquid supply device 100A of this embodiment, regardless of the direction of the plug 10 fixed to the first opening 210 of the liquid storage container 200, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected. Furthermore, regardless of the direction of the plug 10 fixed to the second opening 220 of the liquid storage container 200, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected.

[0103] [Third Embodiment] Next, the liquid supply device 100B according to the third embodiment of the present invention will be described. This embodiment is a variation of the first embodiment, and except for the following special description, it is the same as the first embodiment and is omitted in the following description.

[0104] The liquid supply device 100 of the first embodiment has a socket 20 installed on a plug 10 fixed to the first opening 210 of the liquid storage container 200, and supplies gas to the liquid storage container 200 and liquid to the target supply device through the socket 20. In contrast, the liquid supply device 100B of this embodiment, as shown in FIG15, has a plug 80 fixed to the second opening 220 and a socket 90 installed.

[0105] The plug (second plug) 80 is fixed to the second opening 220 and has a plug-side gas flow path 81 extending along the plug axis (second plug axis) Zp2. The plug-side gas flow path 81 communicates with the space above the liquid collection container 200. An external thread is formed on the outer peripheral surface of the upper end of the plug 80. The plug 80 is fixed to the second opening 220 by engaging the external thread of the plug 80 with the internal thread of the second opening 220.

[0106] The socket 90 is detachably mounted to the plug 80 and has a socket-side gas flow path 91 extending along the socket axis (second socket axis) Zs2. The socket 90 is connected to a gas piping GL3 for supplying gas to the liquid storage container 200. The socket 90 is held by the handle 31 of the robot 30.

[0107] Both the plug 10 fixed to the first opening 210 and the plug 80 fixed to the second opening 220 are pre-installed with cover portions 50. In this embodiment, the liquid storage container 200, with cover portions 50 installed on both the first opening 210 and the second opening 220, is first moved into a predetermined position within the operating range of the robot 30.

[0108] Subsequently, the control unit 70 performs steps S102 to S113 of FIG4 with respect to the first opening 210. This operation brings the socket 20 to a state where the plug 10 is installed in the first opening 210. Then, the control unit 70 performs steps S102 to S113 of FIG4 with respect to the second opening 220. This operation brings the socket 90 to a state where the plug 80 is installed in the second opening 220, connecting the plug-side gas flow path 81 and the socket-side gas flow path 91.

[0109] After the plug 10 is installed in the socket 20 at the first opening 210 and the plug 80 is installed in the socket 90 at the second opening 220, the control unit 70 activates the pump (not shown in the figure) connected to the liquid piping LL1. Upon activation of the pump, liquid is supplied from the liquid collection container 200 to the target supply device via the liquid piping LL1. Gas used to displace the volume of liquid supplied from the liquid collection container 200 to the outside is supplied to the liquid collection container 200 via the gas piping GL3 and the socket 90.

[0110] According to the liquid supply device 100B of this embodiment, regardless of the direction of the plug 10 fixed to the first opening 210 of the liquid storage container 200, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected. In addition, regardless of the direction of the plug 80 fixed to the second opening 220 of the liquid storage container 200, the plug-side gas flow path 81 and the socket-side gas flow path 91 can be reliably connected.

[0111] In this embodiment, the shape of the portion of plug 10 that inserts into socket 20 is different from the shape of the portion of plug 80 that inserts into socket 90. Furthermore, the shape of the portion of socket 20 that inserts into plug 10 is different from the shape of the portion of socket 90 that inserts into plug 80. Therefore, even if one tries to connect plug 10 to socket 90, it cannot be connected; similarly, one tries to connect plug 80 to socket 20, but this also prevents accidental connection between plug 10 and socket 90, and between plug 80 and socket 20.

[0112] In this embodiment, to replace the volume of liquid supplied to the outside from the liquid storage container 200, gas is supplied to the liquid storage container 200 from the gas pipe GL3 via the socket 90. However, other configurations are also possible. For example, to pressurize the space above the liquid storage container 200, gas can also be supplied to the liquid storage container 200 from the gas pipe GL3 via the socket 90. In this case, the liquid stored in the liquid storage container 200 will be supplied from the liquid storage container 200 to the target supply device via the liquid pipe LL1 using the pressure of the gas supplied from the gas pipe GL3. [Simplified Explanation of the Diagram]

[0024] [Fig. 1] shows a side view of the liquid supply device according to the first embodiment of the present invention, and shows the state in which the robot holds and moves the socket. [Fig. 2] shows a side view of the liquid supply device according to the first embodiment of the present invention, and shows the state in which the robot positions the socket near the plug. [Fig. 3] shows a top view of the liquid supply device shown in Fig. 1 from above, and shows the state in which the robot holds and moves the socket. [Fig. 4] shows a flowchart of the control method of the liquid supply device of this embodiment, and shows the process of installing the socket on the plug. [Fig. 5] shows an image obtained by capturing the top surface of the plug using a camera unit. [Fig. 6] shows a partial cross-sectional view of the state in which the cover fixture is moved to the vicinity of the plug. [Fig. 7] shows a partial cross-sectional view of the state in which the cover is supported using the cover fixture. [Fig. 8] shows a partial cross-sectional view of the state in which the cover is removed from the plug using the cover fixture. [Fig. 9] shows a partial cross-sectional view of the state in which the socket is moved to the vicinity of the plug. [Fig. 10] shows a partial cross-sectional view of the state in which the socket is inserted into the plug. [Figure 11] is a partial cross-sectional view showing the state in which the socket is fixed to the plug. [Figure 12] is a flowchart showing the control method of the liquid supply device of this embodiment, and shows the process of removing the socket from the plug. [Figure 13] is a partial cross-sectional view showing the state in which the cover is installed on the plug using a cover fixture. [Figure 14] is a side view showing the liquid supply device of the second embodiment of the present invention, and shows the state in which the robot positions the socket near the plug. [Figure 15] is a side view showing the liquid supply device of the third embodiment of the present invention, and shows the state in which the robot positions the socket near the plug.

Claims

1. A liquid supply device, comprising: The first plug is fixed to the first opening on the top surface of the liquid collection container and has a plug-side liquid flow path extending along the axis of the first plug. The first socket is detachably mounted to the aforementioned first plug and has a socket-side liquid flow path extending along the axis of the first socket. The device includes a gripping mechanism that grips the first socket and positions it in a three-dimensional position within its range of motion in a predetermined posture; and a recognition unit that recognizes the direction of the first plug axis. The gripping mechanism grips the first socket in a posture where the direction of the first plug axis, as recognized by the recognition unit, aligns with the direction of the first socket axis. By inserting the first socket, held by the gripping mechanism, into the first plug, a liquid flow path on the socket side and a liquid flow path on the plug side are connected. The front end of the first plug forms a first groove extending annularly around its axis and having a plug-side fixing portion. The front end of the first socket forms a first protrusion extending annularly around its axis and having a socket-side fixing portion. The gripping mechanism inserts the first protrusion into the first groove at a position recognized by the recognition unit on the first plug axis, separated from the plug-side fixing portion by only a first predetermined distance, to position the socket-side fixing portion. The aforementioned first socket has an adjustment part, which adjusts the position of the aforementioned socket-side fixing part on the aforementioned first socket axis relative to the gripping position of the aforementioned gripping mechanism, so that the aforementioned socket-side fixing part is fixed to the aforementioned plug-side fixing part in a fixed state.

2. The liquid supply device as described in claim 1, wherein, The aforementioned adjustment part adjusts the position of the aforementioned socket-side fixing part on the aforementioned first socket axis relative to the aforementioned gripping position, thereby releasing the aforementioned fixing state.

3. The liquid supply device as described in claim 2, wherein, The aforementioned holding mechanism holds the aforementioned first socket removed from the aforementioned first plug and moves the aforementioned first socket to a cleaning container storing cleaning solution for cleaning the aforementioned first socket.

4. The liquid supply device as described in any one of claims 1 to 3, comprising: The first cover seals the liquid flow path on the plug side and has a first insertion portion that is inserted into the first groove. The rotating mechanism has a support portion that supports the aforementioned first cover portion, and the support portion rotates about the axis of the first cover portion; the aforementioned first cover portion has a first threaded portion formed on the aforementioned first insertion portion; the aforementioned first plug has a second threaded portion formed on the aforementioned first groove portion that engages with the aforementioned first threaded portion; the aforementioned gripping mechanism grips the aforementioned rotating mechanism in an attitude in which the direction of the axis of the aforementioned first plug identified by the aforementioned identification portion is consistent with the direction of the axis of the aforementioned first cover portion; the aforementioned rotating mechanism, in the state where the aforementioned first cover portion is supported by the aforementioned support portion, removes the aforementioned first cover portion from the aforementioned first plug portion by rotating the aforementioned support portion in a predetermined direction.

5. The liquid supply device as described in claim 4, wherein, When the aforementioned rotating mechanism supports the aforementioned first cover with the aforementioned support portion, it installs the aforementioned first cover onto the aforementioned first plug by rotating the aforementioned support portion in the opposite direction of the aforementioned predetermined direction.

6. The liquid supply device as described in any one of claims 1 to 3, comprising: The second plug is fixed to the second opening provided on the top surface of the aforementioned liquid storage container, and has a plug-side gas flow path extending along the axis of the second plug. The second socket is detachably mounted on the second plug and has a socket-side gas flow path extending along the axis of the second socket; the identification unit identifies the direction of the axis of the second plug; the gripping mechanism grips the second socket in an orientation where the direction of the axis of the second plug identified by the identification unit is consistent with the direction of the axis of the second socket; by inserting the second socket held by the gripping mechanism into the second plug, the socket-side gas flow path and the plug-side gas flow path are connected.

7. A liquid supply method, which utilizes a liquid supply device to supply liquid, wherein the liquid supply device comprises: The first plug is fixed to the first opening on the top surface of the liquid collection container and has a plug-side liquid flow path extending along the axis of the first plug. The first socket is detachably mounted to the aforementioned first plug and has a socket-side liquid flow path extending along the axis of the first socket. The method includes: a gripping mechanism for gripping the first socket and positioning it in a three-dimensional position within its range of motion in a predetermined posture; a first groove extending annularly around the axis of the first plug and having a plug-side fixing portion at the front end; a first protrusion extending annularly around the axis of the first socket and having a socket-side fixing portion at the front end; and a liquid supply method comprising: an identification step for identifying the direction of the axis of the first plug; a gripping step for gripping the first socket in a posture in which the direction of the axis of the first plug identified in the identification step is consistent with the direction of the axis of the first socket; and a connecting step for connecting the socket-side liquid flow path and the plug-side liquid flow path by inserting the first socket held in the gripping step into the first plug. In the aforementioned connection step, the position on the first plug axis that is identified in the aforementioned identification step and separated from the aforementioned plug-side fixing part by only a first predetermined distance is inserted into the aforementioned first groove to configure the aforementioned socket-side fixing part, and the position of the aforementioned socket-side fixing part on the aforementioned first socket axis is adjusted relative to the gripping position of the aforementioned gripping mechanism, so that the aforementioned socket-side fixing part is fixed to the aforementioned plug-side fixing part in a fixed state.

Images