Pipeline diagram generation method, semiconductor process equipment, and computer-readable storage medium

Abstract

A pipeline diagram generation method, semiconductor process equipment, and computer-readable storage medium are disclosed. The method includes: acquiring text information of a pipeline; the text information includes at least two node identifiers and a pipeline identifier located between the two node identifiers; the text information corresponds one-to-one with the pipeline; parsing the text information based on preset parsing rules to determine at least one sub-text information; the parsing rules include classifying two adjacent node identifiers and the pipeline identifier between them into the same sub-text information, and the sub-text information corresponds one-to-one with a minimum pipeline; generating a corresponding minimum pipeline diagram based on the sub-text information; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in image form; and generating an initial pipeline diagram based on all the minimum pipeline diagrams.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular, to a pipeline diagram generation method, a semiconductor processing apparatus, and a computer-readable storage medium. Prior Art

[0002] In the control system of a semiconductor processing apparatus, a pipeline diagram is usually constructed for the pipeline system of the semiconductor processing apparatus, and the attribute data of each pipeline is displayed or modified by using the pipeline diagram, so as to visually present the attribute data of each pipeline or control the attributes of each pipeline.

[0003] Currently, the pipeline diagram generation method in the related art is as follows: First, a mechanical principle diagram of the pipeline system is drawn by using a dedicated drawing software; then, image recognition is performed on the mechanical principle diagram to generate an initial pipeline diagram; then, the device images in the initial pipeline diagram are manually bound to the attribute data to generate a target pipeline diagram. Since the image recognition process requires a large amount of computing resources, the generation speed of the pipeline diagram is reduced. Summary of the Invention

[0004] The present application provides a pipeline diagram generation method, a semiconductor processing apparatus, and a computer-readable storage medium to solve the problem of slow pipeline diagram generation speed caused by a large amount of computing resources consumed by image recognition in the related art.

[0005] In a first aspect of the present application, a pipeline diagram generation method is provided, which is applied to a host computer of a semiconductor processing apparatus. The semiconductor processing apparatus includes a pipeline system, the pipeline system includes at least one pipeline, the pipeline includes at least one minimum pipeline, and the minimum pipeline is a pipeline between two adjacent nodes in the pipeline; the method includes: obtaining text information of the pipeline; the text information includes at least two node identifiers and a pipeline identifier between the two node identifiers; the text information corresponds to the pipeline one by one; parsing the text information based on a preset parsing rule to determine at least one sub-text information; the parsing rule includes dividing two adjacent node identifiers and the pipeline identifier therebetween into the same sub-text information, and the sub-text information corresponds to the minimum pipeline one by one; generating a corresponding minimum pipeline diagram based on the sub-text information; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in the form of an image; generating an initial pipeline diagram based on all the minimum pipeline diagrams.

[0006] In one embodiment, the text information further includes a device identifier located between two adjacent node identifiers. Parsing the text information based on a preset parsing rule to determine at least one sub-text information further includes: regarding two adjacent node identifiers, a pipeline identifier, and a device identifier located between the two adjacent node identifiers as a sub-text information.

[0007] In one embodiment, the method further includes: traversing the device identifiers of the sub-text information, and obtaining the attribute data corresponding to the device identifiers from a preset attribute database; automatically binding the attribute data with the minimum pipeline diagram to generate a target pipeline diagram.

[0008] In one embodiment, the attribute data is presented in a table form or an icon form.

[0009] In one embodiment, the attribute data and the text information are configured in the same text file.

[0010] In one embodiment, generating a corresponding minimum pipeline diagram based on the sub-text information includes: based on the pipeline identifier in the sub-text information, obtaining the pipeline segment image corresponding to the pipeline identifier from a preset image database and displaying it; marking the two node identifiers in the sub-text information at both ends of the pipeline segment image one by one to generate a minimum pipeline diagram.

[0011] In one embodiment, the sub-text information further includes a device identifier. Generating a corresponding minimum pipeline diagram based on the sub-text information further includes: based on the device identifier in the sub-text information, obtaining the device image corresponding to the device identifier from the image database; setting the device image on the pipeline segment image and displaying it.

[0012] In one embodiment, there are multiple minimum pipeline diagrams, and both ends of the minimum pipeline diagrams respectively have two different node identifiers. Generating an initial pipeline diagram based on all the minimum pipeline diagrams includes: splicing the ends corresponding to the same node identifiers of all the minimum pipeline diagrams to generate an initial pipeline diagram.

[0013] The second aspect of the present application provides a semiconductor manufacturing device, including a pipeline system and a host computer; the host computer includes a processor and a memory, and instructions are stored in the memory, and the instructions are loaded and executed by the processor to implement the method of any of the above embodiments to generate a pipeline diagram of the pipeline system.

[0014] The third aspect of the present application provides a computer-readable storage medium, which stores a computer program. When the computer program is executed by a processor, the method of any of the above embodiments is implemented.

[0015] The advantages or beneficial effects in the above technical solutions at least include: Since there is a one-to-one correspondence between the pipelines in the pipeline system and the text information, the text information of the pipelines can be used to characterize the structure of the pipelines. By parsing the text information of the pipelines, the sub-text information corresponding one-to-one to the smallest pipelines in the pipelines can be determined, and then the smallest pipeline diagram is generated by using the sub-text information, and further the initial pipeline diagram is generated by using the smallest pipeline diagram. This method for generating a pipeline diagram only needs to process text information and does not require image recognition. Its computational amount is much smaller than that of image recognition, which can effectively reduce the use of computing resources, is beneficial to improving the computing speed, thereby quickly generating a pipeline diagram and improving the generation efficiency of the pipeline diagram. Brief Description of the Drawings

[0016] When read in conjunction with the accompanying drawings, the aspects of the present disclosure are best understood from the following detailed description. It should be noted that, according to the standard practice in the industry, various components are not drawn to scale. In fact, for the sake of clarity of discussion, the sizes of various components can be arbitrarily increased or decreased. FIG. 1A shows a mechanical principle diagram of a pipeline system in the related art. FIG. 1B shows an initial pipeline diagram of a pipeline system in the related art. FIG. 1C shows a target pipeline diagram of a pipeline system in the related art. FIG. 2 shows a flowchart of a method for generating a pipeline diagram according to an embodiment of the present application. FIG. 3A shows a structural schematic diagram of a pipeline system according to an embodiment of the present application. FIG. 3B shows a marking schematic diagram of the pipeline system in FIG. 3A. FIG. 3C shows a schematic diagram of an initial pipeline diagram according to an embodiment of the present application. FIG. 3D shows a schematic diagram of a target pipeline diagram according to an embodiment of the present application. FIG. 4 shows a partial flowchart of a method for generating a pipeline diagram according to another embodiment of the present application. FIG. 5 shows a structural block diagram of a host computer of a semiconductor manufacturing equipment according to an embodiment of the present application. Embodiments

[0017] The following disclosure provides many different embodiments or examples for implementing the different components of the present disclosure. Specific examples of components and configurations are described below to simplify the present disclosure. Of course, these are only examples and are not intended to be limiting. For example, in one embodiment described below, a first component formed above or on a second component may include an embodiment in which the first component and the second component are formed in direct contact, and may also include an embodiment in which additional components may be formed between the first component and the second component such that the first component and the second component do not directly contact. Additionally, the present disclosure may repeat reference numerals and / or letters in various examples. This repetition is for purposes of simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations being discussed.

[0018] In addition, for ease of description, spatial relative terms such as "below", "beneath", "lower", "above", "upper" and the like may be used herein to describe the relationship of one element or component to another (other) element or component, as illustrated in the figures. Spatial relative terms are intended to encompass different orientations of the device in use or operation other than the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and thus the spatial relative descriptors used herein may be interpreted likewise.

[0019] Although the numerical ranges and parameters setting forth the broad scope of the present disclosure are approximations, the numerical values set forth in the specific examples are reported as precisely as possible. However, any numerical value inherently contains certain errors necessarily resulting from the standard deviation found in their respective testing measurements. Moreover, as used herein, the term "about" generally means within 10%, 5%, 1%, or 0.5% of a given value or range. Alternatively, the term "about" means within an acceptable standard error of the mean as considered by one of ordinary skill in the art. Except in the operating / work examples, or unless otherwise expressly specified, all numerical ranges, amounts, values and percentages such as those for the amounts of materials, duration of time, temperatures, operating conditions, ratios of amounts and the like disclosed herein should be understood to be modified in all instances by the term "about". Accordingly, unless indicated to the contrary, the numerical parameters set forth in the present disclosure and the appended claims are approximations that may vary as desired. At the very least, each numerical parameter should be construed in light of the reported number of significant digits and by applying ordinary rounding techniques. Ranges may be expressed herein as from one endpoint to another endpoint or between two endpoints. All ranges disclosed herein include the endpoints, unless otherwise specified.

[0020] FIG. 1A shows a mechanical schematic diagram of a pipeline system in the related art. FIG. 1B shows an initial pipeline diagram of a pipeline system in the related art. FIG. 1C shows a target pipeline diagram of a pipeline system in the related art.

[0021] In the implementation process, the inventor found that: in the pipeline diagram generation method of the related art, as shown in FIG. 1A, it is usually necessary to first draw a mechanical schematic diagram of the pipeline system using specialized drawing software. Among them, the pipeline source 11, flow meter 21, first valve 31, second valve 32, third valve 33, fourth valve 34, fifth valve 35, process chamber 41, dry pump 51, molecular pump 52, each pipeline segment L, first node A, second node B, third node C, and fourth node D in the mechanical schematic diagram all need to be drawn; please refer to FIG. 1B together. Then, perform image recognition on the mechanical schematic diagram of the pipeline system, obtain the corresponding pipeline segment image LA and device image from the image database according to the recognition result, and manually splice the device image and the pipeline segment image LA to generate an initial pipeline diagram. Among them, the flow meter image 21A, first valve image 31A, second valve image 32A, third valve image 33A, fourth valve image 34A, fifth valve image 35A, process chamber image 41A, dry pump image 51A, and molecular pump image 52A in FIG. 1B are all device images and correspond to each device in FIG. 1A one by one; then, manually bind each device image in the initial pipeline diagram to the corresponding device attribute data to generate the target pipeline diagram shown in FIG. 1C. However, since performing image recognition on the mechanical schematic diagram requires a large amount of computing resources, it is easy to reduce the computing speed, resulting in a slower pipeline diagram generation speed.

[0022] In view of this, the present application provides a pipeline diagram generation method, a semiconductor manufacturing device, and a computer-readable storage medium, which can effectively solve the problem of slow pipeline diagram generation speed caused by consuming a large amount of computing resources for image recognition. The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0023] FIG. 2 shows a flowchart of the pipeline diagram generation method according to an embodiment of the present application.

[0024] An embodiment of the present application provides a pipeline diagram generation method, which is applicable to the host computer of semiconductor process equipment. The semiconductor process equipment includes a pipeline system, the pipeline system includes at least one pipeline, the pipeline includes at least one minimum pipeline, and the minimum pipeline is the pipeline between two adjacent nodes in the pipeline. Among them, the pipeline includes but is not limited to gas pipelines, water pipelines, etc. The semiconductor process equipment can be photovoltaic equipment or other semiconductor process equipment, and the types of semiconductor process equipment are not limited in the embodiments of the present application.

[0025] For example, as shown in Figure 3A, the pipeline system includes the first pipeline L1 between the pipeline source 11 and the process chamber 41, the second pipeline L2 between the first node A and the second node B, the third pipeline L3 between the dry pump 51 and the fourth node D, and the fourth pipeline L4 between the third node C and the fourth node D, a total of four pipelines. Taking the first pipeline L1 as an example, the minimum pipelines of the first pipeline L1 include the first minimum pipeline L11 between the adjacent pipeline source 11 and the first node A, the second minimum pipeline L12 between the adjacent first node A and the second node B, the third minimum pipeline L13 between the adjacent second node B and the fourth node D, and the fourth minimum pipeline L14 between the adjacent fourth node D and the process chamber 41.

[0026] As shown in Figure 2, the pipeline diagram generation method includes the following steps S210 to S240.

[0027] Step S210, obtain the text information of the pipeline; the text information includes at least two node identifiers and the pipeline identifier between the two node identifiers; the text information corresponds to the pipeline one by one. Among them, the text information is used to characterize the structure of the pipeline in the form of character identifiers.

[0028] Exemplarily, the text information of the pipeline can be pre-written according to a preset description rule. For example, a description rule of the pipeline is shown in Table 1 below. Table 1. Description rules of pipelines Character Meaning Character Meaning (gas-name) (): Indicates the starting node identifier of the pipeline gas-name: Indicates the pipeline source name pumpnum pump: Indicates the identifier of the pump num: Indicates the number of the pump vnum v: Indicates the valve identifier num: Indicates the valve number ---------- More than 4 consecutive "-" symbols indicate the pipeline identifier mfc:gas-name mfc: Indicates the flow meter identifier gas-name: The same as above ----->----- More than 4 consecutive "-" symbols indicate the pipeline identifier; ">" indicates that a check valve is installed in the pipeline pmnum pm: Indicates the process chamber identifier num: Indicates the number of the process chamber #key #: Indicates the node identifier of the pipeline key: Indicates the node name and is unique

[0029] According to the description rules in Table 1 above, the pipeline system in Figure 3A can be marked using the marking schematic diagram shown in Figure 3B. Among them, "(N2)" is the pipeline source identifier of pipeline source 11, where "N2" represents the pipeline source name and "()" represents the starting node identifier; "#A" is the first node identifier used to characterize the first node A, "#B" is the second node identifier used to characterize the second node B, "#C" is the third node identifier used to characterize the third node C, and "#D" is the fourth node identifier used to characterize the fourth node D; "mfc:N2" is the flow meter identifier used to characterize flow meter 21, and flow meter 21 is used to detect the flow rate of the fluid provided by pipeline source 11 flowing through the pipeline section where flow meter 21 is located; "v1" is the first valve identifier used to characterize the first valve 31, "v2" is the second valve identifier used to characterize the second valve 32, "v3" is the third valve identifier used to characterize the third valve 33, "v4" is the fourth valve identifier used to characterize the fourth valve 34, and "v5" is the fifth valve identifier used to characterize the fifth valve 35; "pm1" is the process chamber identifier used to characterize process chamber 41 and can be used as the termination node identifier; "pump1" is the dry pump identifier used to characterize dry pump 51, and "pump2" is the molecular pump identifier used to characterize molecular pump 52; "---->-----" is the pipeline identifier used to characterize the pipeline section with a check valve, and "--------- " is the pipeline identifier used to characterize the pipeline section that only contains the pipeline section. It should be noted that using the marking schematic diagram shown in Figure 3B to mark Figure 3A is an analysis process. When familiar with the description rules and the structure of the pipeline system, the text information of each pipeline in the pipeline system can be directly written according to the above description rules without using Figure 3B to mark the pipeline system.

[0030] According to the description rules in Table 1 above, please refer to Figure 3A and Figure 3B together. The text information of four pipelines in the pipeline system can be pre-written as follows:

[0031] (N2)----->-----#A-----mfc:N2-----v1-----#B-----#D ------pm1

[0032] #A------v2------#B

[0033] pump1------#C----v3-----#D

[0034] #C------v4-----pump2-----v5-----#D

[0035] Among the above four text messages, the first text message corresponds to the first pipeline L1, the second text message corresponds to the second pipeline L2, the third text message corresponds to the third pipeline L3, and the fourth text message corresponds to the fourth pipeline L4. In this way, the four pipelines in the pipeline system can be in one-to-one correspondence with the four text messages.

[0036] Exemplarily, the above four text messages can be written line by line in the same description text. The description text can be in the TXT text format or other text formats in the computer field. The embodiments of the present application do not limit the format of the description text. Step S210 may be: obtaining each line of text message from the description text.

[0037] Step S220: Parse the text message based on a preset parsing rule to determine at least one sub-text message; the parsing rule includes dividing two adjacent node identifiers and the pipeline identifier therebetween into the same sub-text message, and the sub-text message corresponds to the smallest pipeline one by one. Among them, the sub-text message is used to characterize the structure of the smallest pipeline in the form of character identifiers.

[0038] Exemplarily, taking the first text message "(N2) ---->-----#A-----mfc:N2-----v1-----#B------#D ------pm1" as an example for illustration.

[0039] Please also refer to FIG. 3B. In the first text information, “(N2), #A, #B, #D, pm1” all represent the node identifiers of the first pipeline L1. Based on the preset parsing rules, parsing the first text information, it can be determined that at least one sub - text information can be: dividing the adjacent pipeline source identifier “(N2)” and the first node identifier “#A” and the pipeline identifier “---->-----” between them into a sub - text information, and determining the first sub - text information as “(N2)---->-----#A”; dividing the adjacent first node identifier “#A” and the second node identifier “#B” and the pipeline identifier “--------------” between them into a sub - text information, and determining the second sub - text information as “#A---------------#B”; dividing the adjacent second node identifier “#B” and the fourth node identifier “#D” and the pipeline identifier “------” between them into a sub - text information, and determining the third sub - text information as “#B------#D”; dividing the adjacent fourth node identifier “#D” and the termination node identifier “pm1” and the pipeline identifier “------” between them into a sub - text information, and determining the fourth sub - text information as “#D------pm1”. Among them, the first sub - text information corresponds to the first minimum pipeline L11, the second sub - text information corresponds to the second minimum pipeline L12, the third sub - text information corresponds to the third minimum pipeline L13, and the fourth sub - text information corresponds to the fourth minimum pipeline L14.

[0040] Similarly, based on the preset parsing rules, parsing the above - mentioned second text information, third text information, and fourth text information can determine the corresponding sub - text information.

[0041] Step S230: Generate a corresponding minimum pipeline diagram based on the sub - text information; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in the form of an image.

[0042] Exemplarily, please also refer to FIG. 3B and FIG. 3C. Continuing with the above - mentioned first sub - text information, second sub - text information, third sub - text information, and fourth sub - text information as examples, based on the first sub - text information, the first minimum pipeline diagram L11A in FIG. 3C can be generated, based on the second sub - text information, the second minimum pipeline diagram L12A can be generated, and based on the third sub - text information, the third minimum pipeline diagram L13A can be generated, and based on the fourth sub - text information, the fourth minimum pipeline diagram L14A can be generated.

[0043] Step S240: Generate an initial pipeline diagram based on all the minimum pipeline diagrams.

[0044] In one example, if the pipeline system consists of only one minimum pipeline, the minimum pipeline diagram can be used as the initial pipeline diagram. In another example, if the pipeline system consists of multiple minimum pipelines, all the minimum pipeline diagrams can be spliced to generate the initial pipeline diagram. For example, obtain the initial pipeline diagram as shown in Figure 3C.

[0045] In the above solution, since there is a one-to-one correspondence between the pipelines in the pipeline system and the text information, the text information of the pipelines can be used to characterize the structure of the pipelines. By parsing the text information of the pipelines, the sub-text information corresponding one-to-one to the minimum pipelines in the pipelines can be determined, and then the minimum pipeline diagrams can be generated using the sub-text information, and further the initial pipeline diagram can be generated using the minimum pipeline diagrams. This method for generating pipeline diagrams only needs to process the text information and does not require image recognition. Its computational complexity is much smaller than that of image recognition, which can effectively reduce the use of computing resources, is beneficial to improving the computing speed, thereby quickly generating pipeline diagrams and improving the generation efficiency of pipeline diagrams.

[0046] In addition, in practical applications, since the pipeline diagram generation method of the related technology depends on the mechanical principle diagram of the pipeline system, the drawing of the mechanical principle diagram is essential, which will consume a large amount of drawing time and is inconvenient to modify. Compared with the related technology, the present application uses the text information of the pipelines in the pipeline system to generate pipeline diagrams, which can save the cumbersome drawing process, and the editing and modification of the text information are more simple, convenient and flexible, which helps to improve the generation speed of pipeline diagrams. In this way, when the structure of the pipeline system changes, such as different models, batches, etc. of the pipeline system, or in the case where the user needs to modify the pipeline system, the pipeline diagram can be quickly updated by modifying the text information.

[0047] In one implementation manner, the text information further includes device identifiers located between two adjacent node identifiers, and step S220 further includes: taking two adjacent node identifiers, the pipeline identifier and the device identifier located between the two adjacent node identifiers as a sub-text information.

[0048] Exemplarily, continue to take the first text information "(N2)---->-----#A-----mfc:N2-----v1-----#B------#D ------pm1" as an example for illustration.

[0049] Please also refer to FIG. 3B. In the first text information, both the flow meter identifier "mfc:N2" and the first valve identifier "v1" belong to device identifiers. Based on the preset parsing rules, parsing the first text information, it can be determined that at least one sub-text information can be: dividing the adjacent pipeline source identifier "(N2)", the first node identifier "#A", and the pipeline identifier "---->-----" between them into a sub-text information, and determining the first sub-text information "(N2)---->-----#A"; dividing the adjacent first node identifier "#A", the second node identifier "#B", and the pipeline identifier "--------------", the flow meter identifier "mfc:N2", and the first valve identifier "v1" between them into a sub-text information, and determining the second sub-text information "#A-----mfc:N2-----v1-----#B"; dividing the adjacent second node identifier "#B" and the fourth node identifier "#D" and the pipeline identifier "------" between them into a sub-text information, and determining the third sub-text information "#B------#D"; dividing the adjacent fourth node identifier "#D" and the termination node identifier "pm1" and the pipeline identifier "------" between them into a sub-text information, and determining the fourth sub-text information "#D------pm1".

[0050] Based on this, in the case where there is a device identifier between two adjacent node identifiers in the text information, the parsing of the text information can also be realized.

[0051] In one implementation, as shown in FIG. 4, after step S240, the pipeline diagram generation method may further include the following steps S250 to step S260.

[0052] Step S250, traverse the device identifiers in the sub-text information, and obtain the attribute data corresponding to the device identifiers from the attribute database.

[0053] Step S260, automatically bind the attribute data to the smallest pipeline diagram corresponding to the sub-text information to generate a target pipeline diagram.

[0054] Exemplarily, please refer to FIGS. 3B to 3D together. Taking the second smallest pipeline L12 in the first pipeline L1 as an example. By traversing the flow meter identifier "mfc:N2" and the first valve identifier "v1" in the second sub-text information corresponding to the second smallest pipeline L12, the operating data "0" and the set data "2" corresponding to the flow meter identifier "mfc:N2" can be obtained from the attribute database, and the icon F corresponding to the first valve identifier "v1" can be obtained. Automatically binding the operating data "0", the set data "2" and the first valve identifier "v1" to the first smallest pipeline diagram L12A can generate the target pipeline diagram. For example, automatically binding the operating data "0" and the set data "2" to the flow meter image 21A corresponding to the flow meter identifier "mfc:N2", and automatically binding the icon F corresponding to the first valve identifier "v1" to its corresponding first valve image 31A.

[0055] Among them, obtaining the operating data "0" and the set data "2" corresponding to the flow meter identifier "mfc:N2" from the attribute database can be automatically queried from the attribute database based on the flow meter identifier "mfc:N2". For example, automatically querying all the data in the attribute database where the pipeline name of the flow meter is "N2", the corresponding operating data "0" and set data "2" can be obtained.

[0056] Correspondingly, obtaining the icon corresponding to the first valve identifier "v1" from the attribute database can also be obtained by automatically querying the icon with the valve number "1" in the attribute database.

[0057] Based on this, automatic binding of attribute data can be realized without manual intervention, which can reduce the occurrence of binding errors, can conveniently and quickly generate the target pipeline diagram, and helps to further improve the generation efficiency of the pipeline diagram.

[0058] In one implementation, the attribute data is presented in tabular form or icon form.

[0059] For example, please refer to FIG. 3D. On the flow meter image 21A, the operating data "0" and the set data "2" of the flow meter are displayed in the preset tabular form T. On the process chamber image 41A, the power data, internal even data, external even data and set data of each section of the furnace tail, furnace interior and furnace mouth of the process chamber are displayed in the preset tabular form T. On the first valve image 31A and the dry pump image 51A, the corresponding icons are displayed in the preset icon form F.

[0060] In one implementation, the attribute data and the text information are configured in the same text file. In this way, when the host computer executes the method of the present application, the number of files loaded by the host computer can be reduced, which is beneficial to saving computing resources and improving the generation efficiency.

[0061] It should be noted that in the related art, since image recognition is required for the generation of the initial pipeline diagram and attribute data binding is required for the generation of the target pipeline diagram, at least one image library and one attribute database need to be maintained, and the versions of the two need to be ensured to be consistent. Compared with the related art, the present application configures the attribute data and the text information in the same text file, which can reduce the file maintenance cost.

[0062] In one implementation, step S230 includes the following steps S231 to S232.

[0063] Step S231: Based on the pipeline identifier in the sub-text information, obtain the pipeline segment image corresponding to the pipeline identifier from the preset image database and display it. Among them, the preset image database stores multiple pipeline identifiers and multiple pipeline segment images corresponding to the multiple pipeline identifiers one by one.

[0064] Step S232: Mark the two node identifiers in the sub-text information at both ends of the pipeline segment image one by one to generate the minimum pipeline diagram.

[0065] Exemplarily, please refer to FIG. 3B and FIG. 3C together. Taking the first sub-text information "(N2)---->-----#A" as an example, based on the pipeline identifier "---->-----" in the first sub-text information, obtain the pipeline segment image corresponding to the pipeline identifier from the preset image database. Mark the pipeline source identifier "(N2)" and the first node identifier "#A" at both ends of the pipeline segment image one by one to generate the first minimum pipeline diagram L11A corresponding to the first sub-text information. Among them, by marking the two ends of the pipeline segment image with the pipeline source identifier "(N2)" and the first node identifier "#A" one by one, the two ends of the first minimum pipeline diagram L11A can be distinguished.

[0066] Similarly, for the second sub-text information "#A---------------#B" parsed from the first text information, after performing the above steps S231 and S232, a second minimum pipeline diagram L12A corresponding to the second sub-text information can be generated. For the third sub-text information "#B------#D" parsed from the first text information, after performing the above steps S231 and S232, a third minimum pipeline diagram L13A corresponding to the third sub-text information can be generated. For the fourth sub-text information "#D------pm1" parsed from the first text information, a fourth minimum pipeline diagram L14A corresponding to the fourth sub-text information can be generated.

[0067] In the above solution, the method for generating the minimum pipeline diagram is to first directly obtain the pipeline segment image corresponding to the pipeline identifier from the preset image database based on the correspondence between the pipeline identifier and the pipeline segment image, and then mark both ends of the pipeline segment image respectively. The computational complexity of this generation method is much smaller than that of image recognition, which can effectively reduce the use of computational resources and is beneficial to quickly generating the minimum pipeline diagram. Moreover, by using the two node identifiers in the sub-text information to mark both ends of the pipeline segment image one by one, the marking of both ends of the minimum pipeline diagram can be realized, which is beneficial to directly generating the initial pipeline diagram using the minimum pipeline diagram subsequently.

[0068] In one implementation, the sub-text information further includes a device identifier, and step S230 may further include the following steps S233 and S234.

[0069] Step S233: Based on the device identifier in the sub-text information, obtain the device image corresponding to the device identifier from the image database.

[0070] Step S234: Set the device image on the pipeline segment image and display it.

[0071] Exemplarily, taking the second sub-text information including the flow meter identifier "mfc:N2" and the first valve identifier "v1" as an example, please refer to FIGS. 3B and 3C together. First, based on the flow meter identifier "mfc:N2" and the first valve identifier "v1", obtain the flow meter image 21A corresponding to the flow meter identifier "mfc:N2" and the first valve image 31A corresponding to the first valve identifier "v1" from the image database, and then set the flow meter image 21A and the first valve image 31A on the corresponding pipeline segment image LA' and display them to generate the second minimum pipeline diagram L12A.

[0072] Similarly, based on the above method, the second valve image 32A corresponding to the second valve identifier "v2", the third valve image 33A corresponding to the third valve identifier "v3", the fourth valve image 34A corresponding to the fourth valve identifier "v4", the fifth valve image 35A corresponding to the fifth valve identifier "v5", the process chamber image 41A corresponding to the process chamber identifier "pm1", the dry pump image 51A corresponding to the dry pump identifier "pump1", and the turbomolecular pump image 52A corresponding to the turbomolecular pump identifier "pump2" can be respectively obtained from the image database, and then these device images are set on their respective corresponding pipeline segment images and displayed.

[0073] Based on this, in the case where the sub-text information includes device identifiers, the device images can be automatically combined with their corresponding pipeline segment images, which helps to quickly generate the minimum pipeline diagram.

[0074] In one implementation, there are multiple minimum pipeline diagrams. Both ends of the minimum pipeline diagrams respectively have two different node identifiers. Step S240 includes: splicing the ends corresponding to the same node identifiers of all the minimum pipeline diagrams to generate an initial pipeline diagram.

[0075] Exemplarily, please refer to FIGS. 3B and 3C together. Taking the splicing method of the first minimum pipeline diagram L11A corresponding to the first minimum pipeline L11 in the first pipeline L1, the second minimum pipeline diagram L12A corresponding to the second minimum pipeline L12, and the fifth minimum pipeline diagram L2A corresponding to the minimum pipeline in the second pipeline L2 as an example, the above solution will be described.

[0076] The node identifier at the left end of the first minimum pipeline diagram L11A is "(N2)", and the node identifier at the right end is "#A". The node identifier at the left end of the second minimum pipeline diagram L12A is "#A", and the node identifier at the right end is "#B". The node identifier at the left end of the fifth minimum pipeline diagram L2A is "#A", and the node identifier at the right end is "#B". Splice the right end of the first minimum pipeline diagram L11A, the left ends of the second minimum pipeline diagram L12A and the fifth minimum pipeline diagram L2A into the same intersection point, and splice the right end of the second minimum pipeline diagram L12A and the right end of the fifth minimum pipeline diagram L2A into the same intersection point, then the splicing between the first minimum pipeline diagram L11A, the second minimum pipeline diagram L12A and the fifth minimum pipeline diagram L2A can be completed.

[0077] And so on. After splicing the ends corresponding to the same node identifiers of all the minimum pipeline diagrams, the initial pipeline diagram shown in FIG. 3C can be obtained.

[0078] Based on this, by automatically splicing the corresponding ends of the same node identifiers of all the minimum pipeline diagrams, an initial pipeline diagram can be automatically generated, eliminating the manual splicing operation in the related art and facilitating the rapid generation of the initial pipeline diagram.

[0079] FIG. 5 shows a structural block diagram of a host computer of a semiconductor processing apparatus according to an embodiment of the present application.

[0080] The semiconductor processing apparatus includes a pipeline system and a host computer. As shown in FIG. 5, the host computer 600 includes: a memory 610 and a processor 620. The memory 610 stores a computer program that can run on the processor 620. When the processor 620 executes the computer program, the pipeline diagram generation method in the above embodiment is implemented. The number of the memory 610 and the processor 620 can be one or more.

[0081] The host computer 600 further includes a communication interface 630. The communication interface 630 is used to communicate with external devices and perform data interaction and transmission. If the memory 610, the processor 620, and the communication interface 630 are independently implemented, the memory 610, the processor 620, and the communication interface 630 can be connected to each other through a bus and complete communication with each other. The bus can be an Industry Standard Architecture (ISA) bus, a Peripheral Component Interconnect (PCI) bus, an Extended Industry Standard Architecture (EISA) bus, or the like. The bus can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, only a thick line is shown in FIG. 5, but it does not mean that there is only one bus or one type of bus.

[0082] Optionally, in a specific implementation, if the memory 610, the processor 620, and the communication interface 630 are integrated on a chip, the memory 610, the processor 620, and the communication interface 630 can complete communication with each other through an internal interface.

[0083] An embodiment of the present application provides a computer-readable storage medium that stores a computer program. When the program is executed by a processor, the method provided in the embodiment of the present application is implemented.

[0084] It should be understood that the above-mentioned processor can be a Central Processing Unit (CPU), or other general-purpose processors, Digital Signal Processors (DSPs), Application Specific Integrated Circuits (ASICs), Field Programmable Gate Arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or any conventional processor, etc. It is worth noting that the processor can be a processor that supports the Advanced RISC Machines (ARM) architecture.

[0085] Further, optionally, the above-mentioned memory can include a read-only memory and a random access memory, and can also include a non-volatile random access memory. The memory can be a volatile memory or a non-volatile memory, or can include both volatile and non-volatile memories. Among them, the non-volatile memory can include a Read-Only Memory (ROM), a Programmable ROM (PROM), an Erasable PROM (EPROM), an Electrically EPROM (EEPROM), or a flash memory. The volatile memory can include a Random Access Memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available. For example, Static Random Access Memory (SRAM), Dynamic Random Access Memory (DRAM), Synchronous DRAM (SDRAM), Double Data Rate SDRAM (DDR SDRAM), Enhanced SDRAM (ESDRAM), Synch Link DRAM (SLDRAM), and Direct Rambus RAM (DR RAM).

[0086] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware, or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the processes or functions according to the present application are generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium.

[0087] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present application, the meaning of "a plurality" is two or more, unless otherwise specifically defined.

[0088] It should be understood that each part of the present application can be implemented by hardware, software, firmware, or a combination thereof. In the above embodiments, multiple steps or methods can be implemented by software or firmware stored in a memory and executed by a suitable instruction execution system. All or part of the steps of the method in the above embodiments can be completed by a program instructing relevant hardware. The program can be stored in a computer-readable storage medium. When the program is executed, it includes one or a combination of the steps of the method embodiment.

[0089] In addition, each functional unit in various embodiments of the present application can be integrated into a processing module, or each unit can exist physically alone, or two or more units can be integrated into one module. The above integrated module can be implemented in the form of hardware or in the form of a software functional module. When the above integrated module is implemented in the form of a software functional module and sold or used as an independent product, it can also be stored in a computer-readable storage medium. The storage medium can be a read-only memory, a magnetic disk, an optical disk, etc.

[0090] The foregoing has outlined features of several embodiments so that those skilled in the art may better understand aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and / or achieving the same advantages as the embodiments introduced herein. Those skilled in the art should also understand that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that various changes, substitutions, and alterations may be made therein without departing from the spirit and scope of the present disclosure.

[0091] 11: Pipeline source 21: Flow meter 21A: Flow meter image 31: First valve 31A: First valve image 32A: Second valve image 32: Second valve 33: Third valve 33A: Third valve image 34: Fourth valve 34A: Fourth valve image 35: Fifth valve 35A: Fifth valve image 41: Process chamber 41A: Process chamber image 51: Dry pump 51A: Dry pump image 52: Molecular pump 52A: Molecular pump image 600: Host computer 610: Memory 620: Processor 630: Communication interface L: Each pipeline segment L1: First pipeline L2: Second pipeline L11: First minimum pipeline L12: Second minimum pipeline L13: Third minimum pipeline L14: Fourth minimum pipeline La: Pipeline segment image S210 - S240, S250 - S260: Steps v1: First valve identifier v2: Second valve identifier v3: Third valve identifier v4: Fourth valve identifier v5: Fifth valve identifier

Claims

1. A pipeline diagram generation method, applied to a host computer of a semiconductor process equipment, the semiconductor process equipment including a pipeline system, the pipeline system including at least one pipeline, the pipeline including at least one minimum pipeline, the minimum pipeline being the pipeline located between two adjacent nodes; the method includes: Obtain text information about the pipeline; the text information includes at least two node identifiers and a pipeline identifier located between the two node identifiers; The text information corresponds one-to-one with the pipeline; the text information is parsed based on a preset parsing rule to determine at least one sub-text information; the parsing rule includes classifying two adjacent node identifiers and the pipeline identifier between them into the same sub-text information, and the sub-text information corresponds one-to-one with the minimum pipeline; based on the sub-text information, a corresponding minimum pipeline diagram is generated, including: based on the pipeline identifier in the sub-text information, obtaining and displaying the pipeline segment image corresponding to the pipeline identifier from a preset image database; marking the two node identifiers in the sub-text information one-to-one at both ends of the pipeline segment image to generate the minimum pipeline diagram; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in image form; based on all the minimum pipeline diagrams, an initial pipeline diagram is generated.

2. The method as described in request item 1, wherein, The text information also includes a device identifier located between two adjacent node identifiers. The text information is parsed based on a preset parsing rule to determine at least one sub-text information, and further includes: taking two adjacent node identifiers, a pipeline identifier located between two adjacent node identifiers, and a device identifier as a sub-text information.

3. The method as described in claim 2, further comprising: Iterate through the device identifier in the sub-text information, retrieve the attribute data corresponding to the device identifier from the preset attribute database, and automatically bind the attribute data to the minimum piping diagram corresponding to the sub-text information to generate the target piping diagram.

4. The method as described in request item 3, wherein, This attribute data is presented in tabular or graphical form.

5. The method as described in request item 3, wherein, This attribute data and this text information are configured in the same text file.

6. The method as described in request item 1, wherein, The sub-text information also includes a device identifier. The process of generating a corresponding minimum piping diagram based on the sub-text information further includes: obtaining a device image corresponding to the device identifier from the image database based on the device identifier in the sub-text information; setting the device image on the piping segment image and displaying it.

7. The method as described in request item 1, wherein, The minimum piping diagram includes multiple minimum piping diagrams, each with two different node identifiers at both ends. The initial piping diagram is generated based on all of these minimum piping diagrams by splicing together the ends corresponding to the same node identifiers of all the minimum piping diagrams to generate the initial piping diagram.

8. A semiconductor manufacturing apparatus, comprising a piping system and a host computer; the host computer comprising a processor and a memory storing an instruction loaded and executed by the processor to implement the method as described in any one of claims 1 to 7, generating a piping diagram of the piping system.

9. A computer-readable storage medium storing a computer program that, when executed by a processor, implements the method as described in any one of claims 1 to 7.

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