Pressurization apparatus

Abstract

This invention provides a pressurizing device capable of controlling the pressure distribution on a pressed surface. The pressurizing device (1, 1A) of this invention includes: a first pressurizing member (4, 14); a second pressurizing member (6, 16) disposed below the first pressurizing member; intermediate members (5, 15, 5B-5E) disposed adjacent to the first and second pressurizing members between them; and a planar upper pressing surface (71a, 171a) made of metal. The intermediate member includes: an abutting region (R1, R11) abutting the second pressurizing member; and a non-abutting region (R2, R12) not abutting the second pressurizing member. The upper pressing surface includes pressing surface regions (R3, R13) that abut against the workpiece. When viewed from above, the contact area is arranged adjacent to the non-contact area and is positioned further inward than the first outer perimeter (Lo1) shown by the outer perimeter of the pressure surface area.

Description

[Technical Field]

[0001] This invention relates to a pressurization device. [Previous Technology]

[0002] The pressurizing device is used to pressurize a laminated body having multiple sheet-like substrates (e.g., green sheets of multilayer ceramic capacitors, printed circuit boards, etc.). The pressurizing device uses a pair of pressurizing units to clamp the laminated body (the object to be pressurized) from above and below, and pressurizes the laminated body with a predetermined pressurizing force. In the pressurizing unit, the pressing surfaces in the mold that contact the laminated body are formed as mutually parallel planes so that when the laminated body is pressurized, equal surface pressure is applied from the pressing surfaces to the entire upper and lower surfaces of the laminated body.

[0003] As is well known, in such pressurizing devices, there is a phenomenon where, when a workpiece is pressurized, the pressure applied to the pressed surface of the workpiece is significantly higher at the outer edge and decreases towards the center (the phenomenon of strong pressure on the outer edge of the pressed surface) (for example, see Patent Document 1). If this phenomenon occurs, the pressed surface of the workpiece is not uniformly pressurized, and deformation of the workpiece may occur (such as deformation where the center of the workpiece expands more than the outer edge). The main causes of this phenomenon can be listed as the deflection of the pressurizing unit (mold) during pressurization. This phenomenon is particularly prone to occur when the workpiece size is relatively small compared to the pressing surface size, as the edge portion of the workpiece functions as a "lever point". [Prior Art Documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2020-146703 [Summary of the Invention]

[0005] [Problem to be Solved by the Invention] Generally, to suppress this phenomenon, a design is adopted to increase the rigidity of the mold itself by increasing the thickness of the mold with the pressing surface. In this design, the mold becomes larger and its weight increases. Therefore, the workability of manufacturing and maintaining the pressurizing device deteriorates. Furthermore, the processing of the mold (especially the pressing surface) becomes difficult, and the materials available for use as molds are limited. Moreover, even in this design, the above-mentioned phenomenon still occurs. Therefore, a technique different from the technique of increasing the mold thickness is needed to improve the phenomenon of the outer edge of the pressed surface being strongly pressed. As mentioned above, it is difficult to control the pressure distribution on the pressed surface of a mold with a planar pressing surface.

[0006] The object of this invention is to provide a pressurizing device capable of controlling the pressure distribution on the pressed surface. [Means for solving the problem]

[0007] One embodiment of the present invention is a pressurizing device that clamps a workpiece in a vertical direction and applies pressure. The pressurizing device includes an upper pressurizing unit disposed above the workpiece. The upper pressurizing unit comprises: a first pressurizing member; a second pressurizing member disposed below the first pressurizing member; a plate-shaped intermediate member disposed adjacent to the first and second pressurizing members between them; and a metal-made... A planar upper pressing surface is constructed that abuts against the aforementioned workpiece when pressure is applied. The aforementioned intermediate member includes: an abutting region that abuts against the aforementioned second pressing member; and a non-abutting region that does not abut against the aforementioned second pressing member. The aforementioned upper pressing surface includes a pressing area that abuts against the aforementioned workpiece when pressure is applied. The abutting area is arranged adjacent to the aforementioned non-abutting area when viewed from above and below, and is positioned further inward than the first outer perimeter indicated by the outer perimeter of the pressing area. [Effects of the Invention]

[0008] According to the present invention, a pressurizing device is provided that can control the pressure distribution of the pressed surface.

Implementation Method

[0010] The following describes embodiments of the pressurizing device of the present invention (hereinafter referred to as "the device"). In the following description, reference is made appropriately to the various drawings. In the drawings, the same symbols are used to mark the same components and elements, and repeated descriptions are omitted. Furthermore, for ease of explanation, the dimensional ratios of the components may sometimes be exaggerated, and are not limited to the ratios shown in the drawings.

[0011] In the following descriptions and diagrams, unless otherwise specified, when the three mutually orthogonal axes in space are the X-axis, Y-axis, and Z-axis, the X-axis and Y-axis are parallel to the horizontal direction, and the Z-axis is parallel to the vertical direction. "X-axis direction" refers to the direction along the X-axis; "+X direction" is one direction along the X-axis; "-X direction" is the other direction along the X-axis. "Y-axis direction" refers to the direction along the Y-axis; "+Y direction" is one direction along the Y-axis; "-Y direction" is the other direction along the Y-axis. "Z-axis direction" refers to the direction along the Z-axis, which is the vertical direction. "+Z direction" is above; "-Z direction" is below. "XY direction" refers to the direction along both the X-axis and Y-axis; "XY plane" is a virtual plane parallel to the XY direction (horizontal direction). "XZ direction" refers to the direction along both the X-axis and Z-axis; "XZ plane" is a virtual plane parallel to the XZ direction (vertical direction).

[0012] In the following description, the lower surface is the surface facing downwards and parallel to the XY direction. The upper surface is the surface facing upwards and parallel to the XY direction. That is, the lower and upper surfaces are planar in shape. Furthermore, the thickness of each component is the length of each component in the vertical direction.

[0013] In the pressurizing device that applies pressure to a workpiece from above and below using a planar pressing surface, the present invention improves the phenomenon of excessive pressure on the outer edge of the pressed surface of the workpiece by adjusting the stress transmission from each component to the pressing surface. Furthermore, the present invention controls the pressure distribution on the pressed surface of the workpiece by controlling the stress transmitted to the pressing surface.

[0014] "The phenomenon of strong pressure on the outer edge of the workpiece's pressed surface" refers to the phenomenon that when a workpiece is pressed by a planar pressing surface, the pressure applied to the outer edge of the workpiece's pressed surface is significantly higher at the outer edge and gradually decreases from the outer edge to the center. Hereinafter, this phenomenon will only be described as "strong pressure phenomenon on the outer edge".

[0015] "Workpiece" refers to the object (the object being pressed) by this device, such as sheet-like substrates (ceramic green sheets, etc.), electronic components, substrates with circuits assembled, etc. The workpiece has a pressing surface. The pressing surface refers to the upper surface that is pressed from above by this device.

[0016] ●Pressure Apparatus● ●Composition of the Pressure Apparatus Figure 1 is a schematic cross-sectional view of the apparatus, showing an embodiment of the apparatus. This figure shows the cut surface of the apparatus 1 along the XZ plane, which is formed by cutting the central part of the apparatus 1 in the Y-axis direction (Figure 9 is the same). The pressure surface area R3, which will be described later, is represented by a thicker dashed line in this figure.

[0017] This device 1 clamps and pressurizes the workpiece W in the vertical direction. This device 1 includes a base member 2, a frame member 3, a first buffer member 4, an intermediate member 5, a second buffer member 6, an upper pressure plate 7, a mounting plate 8, a lower pressure plate 9, a lifting device 10, and a control device 11. The base member 2, frame member 3, first buffer member 4, intermediate member 5, second buffer member 6, and upper pressure plate 7 are positioned above the workpiece W, functioning as an upper pressure unit (UP) that pressurizes the workpiece W from above. The mounting plate 8 and lower pressure plate 9 are positioned below the workpiece W, functioning as a lower pressure unit (DP) that pressurizes the workpiece W from below.

[0018] The base member 2 supports the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper pressure plate 7 via the frame member 3. The base member 2 is made of a metal with high rigidity (e.g., carbon steel). The base member 2 is rectangular (square in this embodiment) along the XY direction when viewed from above, and its shape is cuboid. The base member 2 is supported on the lifting device 10 in a manner that allows it to move (lift) in the vertical direction. The base member 2 has a lower surface 2a.

[0019] The frame member 3 houses a portion of the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper pressure plate 7. The frame member 3 is made of metal (e.g., stainless steel). The frame member 3 is mounted to the lower surface 2a of the base member 2, for example, by means of multiple bolts (not shown in the figure, the same applies below). Therefore, the frame member 3 can be easily mounted and dismounted relative to the base member 2 by removing and attaching the bolts. The frame member 3 has a main body portion 31 and an inner flange portion 32.

[0020] The main body 31 is rectangular in shape along the XY direction when viewed from above (square in this embodiment), and its shape is cylindrical (rectangular cylindrical). The inner circumferential surface 31a of the main body 31 faces the XY direction. In the horizontal direction, the main body 31 is arranged to surround the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper pressure plate 7. The lower end of the inner circumferential surface 31a protrudes evenly inward throughout the entire circumference, forming an inner flange 32. That is, in the horizontal direction, the inner flange 32 protrudes from the main body 31 inward and is integrally formed with the main body 31.

[0021] The inner flange portion 32 supports the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper pressure plate 7, restricting the downward movement of the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper pressure plate 7. When viewed from above, the inner flange portion 32 has a frame-like shape (rectangular frame shape). The inner flange portion 32 has an upper surface 32a and an inner peripheral surface 32b. The inner peripheral surface 32b is a surface parallel to the vertical direction and faces the XY direction.

[0022] Furthermore, in this invention, the shape of the inner flange portion 32 is not limited to a rectangular frame. That is, for example, the inner flange portion 32 may also protrude from the main body portion 31 only in the X-axis direction or the Y-axis direction. Also, for example, multiple rod-shaped portions protruding from the main body portion 31 at equal distances in the X-axis direction and / or the Y-axis direction may each function as the inner flange portion 32.

[0023] When the workpiece W is pressurized, the first buffer member 4 diffuses and homogenizes the pressure applied to it. Furthermore, when the workpiece W is pressurized, the first buffer member 4 suppresses axial displacement (horizontal movement) of the intermediate member 5. The first buffer member 4 is made of an elastic material (e.g., a conventional pressing buffer material), which is compressed in the vertical direction when the workpiece W is pressurized and can return to its pre-pressurization state when the pressurization of the workpiece W ends. The shape of the first buffer member 4 is rectangular along the XY direction when viewed from above (square in this embodiment), and the shape of the first buffer member 4 is sheet-like. The first buffer member 4 is housed in the frame member 3. The first buffer member 4 is disposed adjacent to the base member 2 below it. The first buffer member 4 has a lower surface 4a and an upper surface 4b. The first buffer member 4 is an example of the first pressurizing member in this invention.

[0024] When the workpiece W is pressurized, the intermediate member 5 concentrates the pressure applied to it, thereby controlling the pressure distribution in the pressed surface Wa. The intermediate member 5 is made of a metal with high rigidity (e.g., carbon steel). The intermediate member 5 is rectangular (square in this embodiment) along the XY direction when viewed from above, and its shape is plate-like. The intermediate member 5 is housed in the frame member 3. The intermediate member 5 is disposed adjacent to the first buffer member 4 below it. The intermediate member 5 has a lower surface 5a, an upper surface 5b, a non-abutting surface 5c, and an abutting surface 5d.

[0025] The outer edge of the lower surface 5a is recessed upwards all around its circumference to form a non-abutting surface 5c. The central portion of the lower surface 5a, excluding the non-abutting surface 5c, forms an abutting surface 5d. In the vertical direction, the non-abutting surface 5c is positioned higher than the abutting surface 5d. The non-abutting surface 5c is rectangular (square in this embodiment) along the XY direction when viewed from the vertical direction, and its shape is also frame-like (rectangular frame). The abutting surface 5d is rectangular (square in this embodiment) along the XY direction when viewed from the vertical direction. Both the non-abutting surface 5c and the abutting surface 5d are downward-facing surfaces parallel to the XY direction.

[0026] When the workpiece W is pressurized, the second buffer member 6 diffuses and homogenizes the pressure applied to it. Furthermore, when the workpiece W is pressurized, the second buffer member 6 suppresses axial displacement of the intermediate member 5. The second buffer member 6 is, for example, a conventional pressing buffer material. In this embodiment, the shape of the second buffer member 6 is the same as that of the first buffer member 4. The second buffer member 6 has a lower surface 6a and an upper surface 6b. The second buffer member 6 is housed in the frame member 3. The second buffer member 6 is disposed adjacent to the intermediate member 5 below it. The second buffer member 6 is an example of a second pressurizing member in this invention.

[0027] The upper pressure plate 7 applies downward pressure to the workpiece W when it is being pressed. The upper pressure plate 7 is made of, for example, a metal with high rigidity (e.g., carbon steel). The upper pressure plate 7 has an inverted cap shape when viewed from the side. The upper pressure plate 7 includes an upper surface 7a, a main body 71, and an outer flange 72. The upper pressure plate 7 is an example of the third pressure-applying member in this invention.

[0028] The main body 71 is rectangular in shape along the XY direction when viewed from above (square in this embodiment), and its shape is plate-like. The main body 71 has a lower surface 71a and an outer peripheral surface 71b. The lower surface 71a is the surface that faces the workpiece W and abuts against the pressed surface Wa of the workpiece W when it is pressed. That is, when viewed from above, a portion of the lower surface 71a is the area that abuts against the pressed surface Wa (hereinafter referred to as "pressed surface area R3"). In other words, the lower surface 71a has a pressed surface area R3. The lower surface 71a is an example of an upper pressing surface in this invention.

[0029] The upper half of the outer peripheral surface 71b protrudes evenly outwards along its entire circumference, forming an outer flange portion 72. That is, in the horizontal direction, the outer flange portion 72 protrudes outwards from the main body portion 71 and is integrally formed with the main body portion 71. Therefore, the upper surface 7a of the upper pressure plate 7 is formed by the upper surfaces of the main body portion 71 and the outer flange portion 72. The outer flange portion 72 is frame-shaped (rectangular frame-shaped). The outer flange portion 72 has a lower surface 72a.

[0030] Furthermore, in this invention, the shape of the outer flange portion 72 is not limited to a rectangular frame shape. That is, for example, the outer flange portion 72 may also protrude from the outer peripheral surface 71c only in the X-axis direction or the Y-axis direction. That is, the outer flange portion 72 may also protrude only from the outer peripheral surface 71b parallel to the X-axis direction or the Y-axis direction. Also, for example, multiple rod-shaped portions protruding at equal distances from the main body portion 71 in the X-axis direction and / or the Y-axis direction may each function as the outer flange portion 72.

[0031] The upper pressure plate 7, except for the lower part of the main body 71, is housed in the frame member 3. That is, in the vertical direction, the lower part (lower surface 71a) of the main body 71 is located lower than the frame member 3. The upper pressure plate 7 is disposed adjacent to the second buffer member 6 below the second buffer member 6. The lower surface 72a of the outer flange 72 abuts against the upper surface 32a of the inner flange 32. As a result, the inner flange 32 restricts the downward movement of the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper pressure plate 7, and supports these members.

[0032] The upper surface 4b of the first buffer member 4 abuts against the lower surface 2a of the base member 2, and the lower surface 4a abuts against the upper surface 5b of the intermediate member 5. The abutting surface 5d of the intermediate member 5 abuts against a portion of the upper surface 6b of the second buffer member 6. The non-abutting surface 5c is positioned above the upper surface 6b and faces it. That is, the non-abutting surface 5c does not abut against the upper surface 6b. Therefore, when viewed from the top and bottom, the abutting surface 5d in the intermediate member 5 forms a region that abuts against the second buffer member 6 (hereinafter referred to as "abutting region R1"), and the non-abutting surface 5c forms a region that does not abut against the second buffer member 6 (hereinafter referred to as "non-abutting region R2"). That is, when viewed from the top and bottom, the abutting region R1 is the region where the abutting surface 5d is disposed, and the non-abutting region R2 is the region where the non-abutting surface 5c is disposed. The lower surface 6a of the second buffer member 6 abuts against the upper surface 7a of the upper pressure plate 7.

[0033] Figure 2 is a schematic bottom view of the upper pressure unit UP. For ease of explanation, the inner peripheral surface 31a, the first buffer member 4, the intermediate member 5, and the second buffer member 6 are represented by thicker two-point chain lines, and the workpiece W and the pressure surface area R3 are represented by thinner two-point chain lines. In the following description, Figure 1 is referred to appropriately along with Figure 2.

[0034] The relationship between the lengths of each component in the upper pressurization unit UP in the X-axis and Y-axis directions, i.e., the XY directions, will be explained. The length L2 of the base component 2 is longer than the length L3 of the frame component 3. The distance L31 between the inner peripheral surfaces 31a of the main body 31 is the same as (slightly larger than) the length L4 of the first buffer component 4, the length L5 of the intermediate component 5, the length L6 of the second buffer component 6, and the length L72 of the outer flange 72 of the upper pressure plate 7. The length L4 of the first buffer component 4 is the same as the length L5 of the intermediate component 5, the length L6 of the second buffer component 6, and the length L72 of the outer flange 72 of the upper pressure plate 7. The length L71 of the main body 71 (i.e., the lower surface 71a) is shorter than the distance L32 between the inner peripheral surfaces 32b of the inner flange 32.

[0035] The length Lw of the pressed surface Wa of workpiece W is shorter than the length L71 of the lower surface 71a. That is, the length LR3 of the pressing area R3 is shorter than the length L71 of the lower surface 71a. In other words, the workpiece size is smaller than the upper pressing surface size. The length L51 of the abutting surface 5d of the intermediate member 5 is shorter than the length L71 of the lower surface 71a and the length Lw of the pressed surface Wa. That is, the length LR1 of the abutting area R1 is shorter than the length LR3 of the pressing area R3.

[0036] Figure 3 is a schematic diagram showing the positional relationship of the various regions defined in this device 1 when viewed from the top and bottom. For ease of explanation, the intermediate member 5 is represented by a thicker solid line, the non-abutting region R2 (non-abutting surface 5c) is represented by a gray area, the lower surface 71a is represented by a thinner two-point chain line, and the pressing surface region R3 is represented by a thicker two-point chain line. In the following description, Figures 1 and 2 are referred to appropriately along with Figure 3.

[0037] When viewed from above, the contact area R1 is positioned further inward than the first outer perimeter line Lo1 shown by the outer perimeter line of the pressing surface area R3. When viewed from above, the contact area R1 is arranged adjacent to the non-contact area R2 such that it is completely surrounded by the non-contact area R2. That is, when viewed from above, the first outer perimeter line Lo1 does not coincide with the contact area R1, but coincides with the non-contact area R2.

[0038] In this embodiment, the intermediate member 5 has one abutment surface 5d. When viewed from above, the area for which the abutment surface 5d is disposed (hereinafter referred to as the "disposal area Rx") is limited to the area of ​​the pressure surface area R3 (that is, the area divided by the first outer perimeter line Lo1). That is, the second outer perimeter line Lo2, indicated by the outer perimeter line of the disposal area Rx, is disposed in a position further inward than the first outer perimeter line Lo1, and does not coincide with the first outer perimeter line Lo1. When viewed from above, the second outer perimeter line Lo2 has the same shape as the first outer perimeter line Lo1 (a square shape in this embodiment), and is a similar shape.

[0039] In the following description, the main reference diagram is returned to FIG1. ​​The mounting plate 8 is a component for mounting the workpiece W. The mounting plate 8 is made of, for example, a metal with high thermal conductivity (e.g., a copper alloy). The shape of the mounting plate 8 is square along the XY direction when viewed from above, and the shape of the mounting plate 8 is plate-shaped. The mounting plate 8 is mounted on the lower pressure plate 9. The mounting plate 8 has an upper surface, namely the mounting surface 8a.

[0040] When the workpiece W is pressurized, the lower pressure plate 9 presses the workpiece W upward according to the pressure from the upper pressure unit UP. The lower pressure plate 9 is made of a metal with high rigidity (e.g., carbon steel). The shape of the lower pressure plate 9 is square along the XY direction when viewed from above and below, and the shape of the lower pressure plate 9 is plate-shaped.

[0041] The lifting device 10 raises and lowers the base component 2. The lifting device 10 is, for example, a conventional hydraulic cylinder.

[0042] The control device 11 controls the overall operation of this device 1.

[0043] In the device 1 constructed in this manner, the frame member 3 can be installed and removed relative to the base member 2 by means of bolts. Therefore, by removing the frame member 3, the first buffer member 4, the intermediate member 5, and the second buffer member 6 can be easily replaced.

[0044] Furthermore, in this invention, the shapes of the base member 2, frame member 3, first buffer member 4, intermediate member 5, second buffer member 6, upper pressure plate 7, mounting plate 8, and lower pressure plate 9 when viewed from the top and bottom are not limited to square shapes.

[0045] ● Operation of the pressurizing device Next, the operation of this device 1 will be described below. In the following description, please refer to Figures 1 to 3 as appropriate.

[0046] First, the workpiece W is placed on the mounting surface 8a of the mounting plate 8.

[0047] Next, the control device 11 controls the operation of the lifting device 10, causing the upper pressure unit UP to descend to a predetermined position. At this time, the lower surface 71a of the upper pressure plate 7 abuts against the workpiece W. That is, the pressure surface area R3 abuts against the pressed surface Wa.

[0048] Next, the control device 11 controls the operation of the lifting device 10, causing the upper pressure unit UP to descend further, applying pressure to the workpiece W between the upper pressure unit UP and the lower pressure unit DP. At this time, as described below, the pressure applied from the first buffer member 4 to the intermediate member 5 diffuses and homogenizes. The pressure applied from the intermediate member 5 to the second buffer member 6 is concentrated in the portion of the second buffer member 6 that abuts against the contact surface 5d. The pressure applied from the second buffer member 6 to the upper pressure plate 7 diffuses and homogenizes. The pressure applied from the upper pressure plate 7 to the workpiece W is concentrated in the portion of the workpiece W that abuts against the pressure surface region R3 (the pressed surface Wa). As described above, after applying pressure to each member, the edge portion of the workpiece W does not function as a "lever fulcrum," and no strong pressure phenomenon occurs at the outer edge. As a result, the pressure distribution in the pressed surface Wa is homogenized.

[0049] Furthermore, when the workpiece W is pressurized, a pressure of several MPa to tens of MPa is applied to the intermediate member 5. Generally speaking, when planar metal surfaces are in contact with each other and are pressurized, if the pressure axis of the pressurized side is offset relative to the normal direction of the metal surface of the pressurized side (if so-called axial offset occurs), the pressurized side cannot be pressurized flatly. Even if each component of this device 1 is manufactured with precision, axial offset may occur for various reasons. Therefore, assuming that the intermediate member 5 directly abuts against the base member 2 and the upper pressure plate 7, axial offset may occur between the intermediate member 5 and the base member 2 and the upper pressure plate 7. In this embodiment, the first buffer member 4 is disposed between the base member 2 and the intermediate member 5, and the second buffer member 6 is disposed between the intermediate member 5 and the upper pressure plate 7. As described above, the first buffer member 4 and the second buffer member 6 are made of elastic material, and their function is to make the axis between them aligned. Therefore, the axial offset of the intermediate member 5 relative to the base member 2 and the axial offset of the intermediate member 5 relative to the upper pressure plate 7 are both suppressed.

[0050] ●Example● Next, as an embodiment and reference example of the present invention, the test results of a pressure test performed by a conventional pressure device (test apparatus) assembled with a first buffer member 4, an intermediate member 5, and a second buffer member 6 will be described below. In the following description of the embodiments, a "Prescale" (registered trademark, hereinafter referred to as "scale") manufactured by Fujifilm Inc. was used for pressure measurement. The pressure was 5 MPa. For ease of testing, the first buffer member 4 was not used except in some reference examples. In each reference example and some comparative examples, only the scale was pressurized. In all test conditions, the upper pressure plate 7 was a cuboid shape of 160 mm × 164 mm × 15 mm.

[0051] In the following description of the embodiments, reference will be made to Figures 1 to 3 as appropriate. Furthermore, in the following description, for ease of explanation, the same names and symbols will be used for elements that have common functions with the previously described embodiments (hereinafter referred to as "first embodiments").

[0052] Figure 4 is a schematic diagram showing the test conditions and test results of an embodiment of the present invention. Figure 5 is a pressure distribution diagram showing the test results. Figure 6 is a schematic bottom view of the intermediate component 5 used in each embodiment. Figure 6(a) is a schematic bottom view of type 1, Figure 6(b) is a schematic bottom view of type 2, Figure 6(c) is a schematic bottom view of type 3, and Figure 6(d) is a schematic bottom view of type 4. In Figure 5, the color intensity of each scale represents the magnitude of the pressure; as the color becomes darker, the pressure increases. In Figure 6, the thicker two-point chain line represents the second outer perimeter line Lo2. The gray area represents the non-contact surfaces 5c, 5c1, and 5c2, which will be described later.

[0053] (Test Conditions) First, the test conditions shown in Figure 4 will be explained below. "Type" indicates the type of intermediate component 5. Details of each type are shown in Figure 6 and will be described below. In "First Buffer Component" and "Second Buffer Component", "-" indicates that it is not used, "A" indicates "Flexible Protective Fabric: EPT1.0" manufactured by Shibata Industrial Co., Ltd., and "B" indicates "Hot Pressing Buffer Component: MF-20S" manufactured by Sanfuku Industrial Co., Ltd. In "Other", "*1" indicates that heat insulation material manufactured by PGX is used between the second buffer component 6 and the upper pressure plate 7. "*2" indicates that workpieces with a workpiece size of 30mm are evenly arranged in a 3-row × 3-column configuration within the first outer perimeter Lo1 of a 110mm × 110mm square. The spacing between the workpieces is 5mm. "*3" indicates that an upper pressure plate 7 with a thickness T1 of 10mm is used. "Area Ratio" represents the ratio (Ax / A3) of the area "Ax" of the configuration region Rx to the area "A3" of the pressure surface region R3. The workpiece W is square in shape. In the "Results", "◎" indicates that no strong pressure phenomenon occurs at the outer edge, and the pressure distribution of the pressure surface Wa is controlled to become relatively uniform. "〇" indicates that the uniformity of pressure is lower than ◎, but no strong pressure phenomenon occurs at the outer edge, and the pressure distribution of the pressure surface Wa is controlled to be a pressure distribution corresponding to the shape of the intermediate member 5. "△" indicates that there is a tendency for strong pressure phenomenon to remain at the outer edge, but this phenomenon is suppressed in the pressure distribution of the pressure surface Wa. "×" indicates that strong pressure phenomenon occurs at the outer edge. In other words, "×" indicates that the pressure distribution of the pressure surface Wa can be controlled to decrease from the outer edge towards the center.

[0054] (Type 1) The intermediate member 5 of Type 1 has one non-abutting surface 5c and one abutting surface 5d. When viewed from above, the abutting surface 5d is a square of 115mm × 115mm. When viewed from above, the non-abutting surface 5c is a rectangular frame of 160mm × 164mm surrounding the entire circumference of the abutting surface 5d. The thickness of the abutting surface 5d is 5mm. Furthermore, when viewed from above, the abutting surface 5d is a square of 95mm × 95mm only in Embodiment 17.

[0055] (Type 2) The intermediate member 5 of Type 2 has two non-abutting surfaces 5c1 and 5c2 and one abutting surface 5d. When viewed from above, the non-abutting surface 5c1 is a square shape of 45mm × 45mm. When viewed from above, the abutting surface 5d is a rectangular frame of 95mm × 95mm surrounding the entire circumference of the non-abutting surface 5c1. The non-abutting surface 5c2 is a rectangular frame of 160mm × 164mm surrounding the entire circumference of the abutting surface 5d. The thickness of the abutting surface 5d is 5mm.

[0056] (Type 3) The intermediate member 5 of Type 3 has one non-abutting surface 5c and nine abutting surfaces 5d1 to 5d9. When viewed from above, the abutting surfaces 5d1 to 5d9 are squares of 25mm x 25mm. The abutting surfaces 5d1 to 5d9 are evenly arranged in a 3-row x 3-column configuration within the second outer perimeter Lo2 of the 95mm x 95mm square. The abutting surfaces 5d1 to 5d9 are spaced 10mm apart from each other. The non-abutting surface 5c has a 10mm wide grid-like portion disposed inside the second outer perimeter Lo2 and a rectangular frame-like portion disposed outside the second outer perimeter Lo2. In other words, when viewed from above, the non-abutting surface 5c has a grid-like shape. The abutting surfaces 5d1 to 5d9 are 5mm thick.

[0057] (Type 4) The intermediate member 5 of Type 4 has one non-abutting surface 5c and four abutting surfaces 5d1 to 5d4. When viewed from above, the abutting surfaces 5d1 to 5d4 are square in shape, each 45mm x 45mm. The abutting surfaces 5d1 to 5d4 are evenly arranged in a 2-row x 2-column configuration within the second outer perimeter Lo2 of the 115mm x 115mm square. The abutting surfaces 5d1 to 5d4 are spaced 25mm apart from each other. The non-abutting surface 5c has a 15mm wide grid-like portion disposed inside the second outer perimeter Lo2 and a rectangular frame-like portion disposed outside the second outer perimeter Lo2. In other words, when viewed from above, the non-abutting surface 5c has a grid-like shape. The abutting surfaces 5d1 to 5d4 are 5mm thick.

[0058] ● Examples 1-5 In Examples 1-5, the intermediate member 5 of type 1 was used, and the workpiece size was set to 150mm, 130mm, and 120mm. The area ratios were "0.59", "0.78", and "0.92". In Example 4, a heat-insulating material was used. In Examples 1-4, the second buffer member 6 used "A" with a thickness of 1mm, and in Example 5, the second buffer member 6 used "A" with a thickness of 2mm. Under all conditions, no strong pressure phenomenon occurred at the outer edge, especially in Examples 2, 3, and 5, the pressure distribution on the pressed surface Wa was controlled to become uniform. As the workpiece size increases, the pressure applied to the workpiece W tends to increase in the central part compared to the outer edge. This indicates that the pressure distribution on the pressed surface Wa can be controlled by adjusting the area ratio. In Example 4, a slight deviation occurred in the pressure distribution. It is speculated that this is due to the increased length of the interval between the contact surface 5d and the lower surface 71a caused by the heat-insulating material. Furthermore, it is speculated that the influence of the configuration of the various components and workpiece W during the test (the influence of axial offset) is also the cause of this slight deviation. As described in Example 5, this influence can be mitigated by increasing the thickness of the second buffer member 6.

[0059] ● Examples 6 and 7 In Examples 6 and 7, the intermediate member 5 of type 2 is used, and the workpiece size is set to 120 mm. The area ratio is "0.63". In Example 6, the second buffer member 6 uses "A", and in Example 7, the second buffer member 6 uses "B". Under all conditions, no strong pressure phenomenon occurs at the outer edge, and the pressure distribution on the pressed surface Wa is controlled to become uniform. In Example 6, the pressure applied to the workpiece W is greater at the outer edge compared to the central part. In Example 7, compared to Example 6, the pressure applied to the workpiece W is greater at the central part compared to the outer edge. This indicates that by changing the configuration of the second buffer member 6, the influence of the intermediate member 5 on the pressure distribution of the pressed surface Wa changes. That is, compared to "B", "A" has a tendency to spread stress evenly, and compared to "A", "B" has a tendency to concentrate stress towards the center. As described above, the configuration of the second buffer member 6 may become a factor affecting the control of the pressure distribution of the pressure-bearing surface Wa using the intermediate member 5.

[0060] ● Examples 8-13 In Examples 8-13, the intermediate member 5 of type 3 was used, and the workpiece size was set to four types: 150mm, 130mm, 120mm, and 100mm. The area ratios were "0.40", "0.53", "0.63", and "0.90" respectively. In Examples 8-11, the second buffer member 6 used "A" with a thickness of 1mm; in Example 12, the second buffer member 6 used "A" with a thickness of 2mm; and in Example 13, the second buffer member 6 used "B" with a thickness of 2mm. In Examples 8-10, 12, and 13, no strong pressure phenomenon occurred at the outer edge. In particular, in Examples 9, 10, and 12, the pressure distribution on the pressed surface Wa was controlled to become uniform. In Example 11, although there was a slight tendency for this phenomenon to occur, the central part of the workpiece W was also pressurized, and this phenomenon was improved. Comparing Examples 10, 12, and 13, in Example 13, the pressure applied to the workpiece W is greater in the central portion compared to the outer edge. Example 8 is similar. This result indicates that by utilizing the material of the second buffer member 6 and the size of the abutment area R1, the pressure distribution in the pressed surface Wa can be controlled to a distribution dependent on the shape of the abutment area R1 (abutment surface 5d).

[0061] ●Examples 14 and 15 In Examples 14 and 15, the intermediate member 5 of type 4 is used, the workpiece size is set to 120mm, and the thickness T1 of the upper pressure plate 7 is set to 15mm and 10mm. In Example 14, no strong pressure phenomenon occurs at the outer edge, and the pressure distribution on the pressed surface Wa is controlled to become uniform. On the other hand, in Example 15, a pressure distribution is obtained in which the pressure is concentrated at 4 points centered on the abutment area R1 (abutment surfaces 5d1 to 5d4) (that is, a pressure distribution that depends on the shape of the intermediate member 5). This result indicates that the degree of stress diffusion inside the upper pressure plate 7 depends on the thickness T1. Therefore, in Example 15 with a smaller thickness T1, a pressure distribution that is significantly dependent on the shape of the intermediate member 5 is obtained compared to Example 14. That is, this result indicates that the pressure distribution can be controlled according to the thickness T1.

[0062] ●Examples 16 and 17 In Example 16, a type 1 (95mm × 95mm) intermediate member 5 is used. In Example 17, a type 3 intermediate member 5 is used. In Examples 16 and 17, nine workpieces W with a workpiece size of 30mm are simultaneously pressurized. In Example 16, when viewed from above, one abutting surface 5d (abutting area R1) corresponds to all workpieces W (one abutting surface 5d is arranged above all workpieces W). The area ratios are "0.75 (95mm × 95mm / 110mm × 110mm)" and "0.69 (30mm × 30mm)". In Example 16, the workpiece size of each workpiece W is smaller than the abutting surface 5d, and no strong pressure phenomenon occurs on the outer edge of each workpiece W. The results indicate that nine workpieces W can be pressurized as a single workpiece W (workpiece W with a workpiece size of 110 mm). The area in the lower surface 71a containing the region where each workpiece W abuts functions as a pressing surface region R3, and the invention can be implemented even when multiple workpieces W are pressurized simultaneously. However, in Embodiment 16, the workpieces W disposed on the outer edge side of the pressing surface region R3 (especially the portion on the outer edge side of the pressing surface region R3) are pressurized slightly more intensely. On the other hand, in Embodiment 17, even when multiple workpieces W are pressurized simultaneously, all workpieces W are still pressurized uniformly. The results indicate that the geometry of the intermediate member 5 also has a local effect. Each region in the lower surface 71a that contacts each workpiece W (workpiece size 30 mm) functions as a pressing surface region R3, and each region where each abutment surface 5d1 to 5d9 is disposed when viewed from above functions as a placement region Rx. Furthermore, by making each area ratio less than "1", the pressure distribution in the pressed surface Wa of each workpiece W can be controlled to become uniform.

[0063] ●Reference Examples 1-7 In Reference Examples 1-4, the intermediate member 5 of type 1 is used; in Reference Examples 5 and 6, the intermediate member 5 of type 2 is used; and in Reference Example 7, the intermediate member 5 of type 3 is used. As described above, in Reference Examples 1-7, only scale is pressurized. In Reference Example 1, the first buffer member 4 and the second buffer member 6 are not used. In Reference Example 2, the first buffer member 4 uses "A" with a thickness of 1 mm, and the second buffer member 6 is not used. In Reference Examples 3, 5, and 7, the first buffer member 4 is not used, and the second buffer member 6 uses "A" with a thickness of 1 mm. In Reference Example 4, the first buffer member 4 and the second buffer member 6 use "A" with a thickness of 1 mm. In Reference Example 6, the first buffer member 4 is not used, and the second buffer member 6 uses "B" with a thickness of 2 mm. Under all conditions, no strong pressure phenomenon occurs at the outer edge, and under each condition, a pressure distribution that depends on the shape of the intermediate member 5 is obtained. In Reference Example 1, when viewed from above, a higher pressure distribution is obtained near the corner of the contact area R1 (contact surface 5d). In Reference Example 2, a pressure distribution with slight diffusion, similar to that in Reference Example 1, is obtained. In Reference Examples 3-5 and 7, when viewed from above, a higher pressure distribution is obtained in the area where the contact area R1 is located. In Reference Example 4, a pressure distribution with slight diffusion, similar to that in Reference Example 3, is obtained. In Reference Example 5, a rectangular frame-like pressure distribution corresponding to the shape of the contact area R1 (contact surface 5d) is obtained. In Reference Example 6, a higher pressure distribution is obtained in the central part of the contact area R1. These results indicate that the intermediate member 5 helps to improve the strong pressure phenomenon at the outer edge. Furthermore, this result indicates that stress (pressure) is concentrated in the contact area R1 of the intermediate member 5. Moreover, this result indicates that the second buffer member 6 diffuses the pressure concentrated by the intermediate member 5. Furthermore, the result indicates that by utilizing the presence or absence and material of the first buffer member 4 and the second buffer member 6, the pressure distribution in the pressed surface Wa can be controlled to a distribution that depends on the shape of the abutment area R1 (abutment surface 5d).

[0064] ●Comparative Examples 1-9 In Comparative Examples 1-4, the intermediate member 5 was not used. In Comparative Examples 5-7, the intermediate member 5 of type 1 was used; in Comparative Example 8, the intermediate member 5 of type 2 was used; and in Comparative Example 9, the intermediate member 5 of type 3 was used. In Comparative Examples 1-2, only scale was pressurized. In Comparative Examples 5-9, the workpiece size was set to be smaller than the area "Ax" of the placement region Rx. In Comparative Examples 1, 3-9, a typical pressure distribution representing the strong pressure phenomenon at the outer edge was obtained. On the other hand, in Comparative Example 2, a pressure distribution similar to pressure diffusion in Comparative Example 1 was obtained using the second buffer member 6. According to this result, the second buffer member 6 suppressed the strong pressure phenomenon at the outer edge when the workpiece W was not placed. However, the intermediate member 5 and the second buffer member 6 did not suppress this phenomenon when the workpiece W, which is smaller than the area "Ax" of the placement region Rx, was pressurized.

[0065] ● Improvement of the phenomenon of strong pressure on the outer edge of the pressed surface of the workpiece As can be seen from the above embodiments and reference examples, the phenomenon of strong pressure on the outer edge of the pressed surface Wa of the workpiece W is improved by the intermediate member 5. Regarding this factor, the observation results of the inventors of the present invention will be described below.

[0066] Figure 7 shows the stress transmission state of the simulator. Figure 7(a) shows the stress transmission state when a workpiece W with an area "Ax" smaller than the configuration region Rx is pressurized. Figure 7(b) shows the stress transmission state when a workpiece W with an area "Ax" larger than the configuration region Rx is pressurized. Figure 8 is a schematic diagram illustrating the factors that improve the imbalance of pressure distribution.

[0067] In Figure 7, the first buffer member 4 and the second buffer member 6 are not used. In Figure 7(a), the size of the configuration area Rx is 115mm × 115mm, and the workpiece size is 80mm × 80mm. In Figure 7(b), the size of the configuration area Rx is 115mm × 115mm, and the workpiece size is 140mm × 140mm. For ease of explanation, Figure 8 uses black arrows to indicate the magnitude of stress and dashed lines to indicate the state of stress concentration or diffusion.

[0068] As shown in Figure 7(a), when a workpiece W smaller than the placement area Rx is pressurized, the stress generated inside the upper pressure plate 7 due to the pressure applied from the intermediate member 5 is transmitted to the entire lower surface 71a of the upper pressure plate 7 (outer than the pressure surface area R3). Furthermore, the pressure transmitted from the workpiece W to the mounting plate 8 becomes the greatest at the edge portion of the workpiece W. When pressure is applied to the workpiece W from the entire lower surface 71a, there is no object bearing the external force (pressure) from the portion outer than the pressure surface area R3. Therefore, this portion functions as a "lever point," and the edge portion of the workpiece W functions as a "lever fulcrum." At this time, the stress transmitted to the outside of the pressure surface area R3 is concentrated at the outer edge of the pressure surface area R3. As a result, excessive pressure from the lower surface 71a is applied to the edge portion of the workpiece W, resulting in a strong pressure phenomenon at the outer edge.

[0069] On the other hand, as shown in FIG7(b), when a workpiece W larger than the placement area Rx is pressurized, the stress generated inside the upper pressure plate 7 due to the pressure applied from the intermediate member 5 diffuses within the upper pressure plate 7 and is transmitted toward the pressure surface area R3. Furthermore, the pressure applied from the workpiece W to the mounting plate 8 does not become maximum at the edge of the workpiece W, but diffuses downward toward the workpiece W. This means that the edge of the workpiece W does not function as a "lever fulcrum," that is, the strong pressure phenomenon at the outer edge is suppressed.

[0070] As shown in Figure 8, when pressure is applied from the base member 2, the stress generated inside the first buffer member 4 diffuses and homogenizes within the first buffer member 4. Therefore, the pressure applied from the first buffer member 4 to the intermediate member 5 diffuses and homogenizes. That is, the pressure distribution on the upper surface 5b of the intermediate member 5 is homogenized. Next, when pressure is applied from the first buffer member 4, the stress generated inside the intermediate member 5 is concentrated and transmitted towards the contact surface 5d (contact area R1) within the intermediate member 5. Therefore, the pressure applied from the intermediate member 5 to the second buffer member 6 is concentrated in the portion of the second buffer member 6 that abuts against the contact surface 5d. At this time, the stress transmitted to the non-contact surface 5c (non-contact area R2) is concentrated on the outer edge of the contact surface 5d (contact area R1). Therefore, the pressure applied from the contact surface 5d to the second buffer member 6 is higher at the outer edge compared to the central portion. Next, when pressure is applied from the intermediate member 5, the stress generated in the second buffer member 6 diffuses and homogenizes within the second buffer member 6. Therefore, the pressure applied to the upper pressure plate 7 from the second buffer member 6 diffuses and homogenizes. That is, the pressure distribution on the upper surface 7a of the upper pressure plate 7 is homogenized. Then, when pressure is applied from the second buffer member 6, the stress generated inside the upper pressure plate 7 is slightly diffused within the upper pressure plate 7 and transmitted primarily to the pressure surface region R3 in the lower surface 71a. That is, the stress transmitted inside the upper pressure plate 7 is concentrated within the pressure surface region R3 compared to the outer side of the pressure surface region R3. Therefore, the pressure applied to the workpiece W from the upper pressure plate 7 is concentrated in the portion of the workpiece W that abuts against the pressure surface region R3 (the pressed surface Wa). As a result, the edge portion of the workpiece W does not function as a "lever fulcrum," and strong pressure is not generated at the outer edge.

[0071] Here, as shown by Saint-Venant's principle, the degree of stress diffusion within the upper pressure plate 7 increases with the thickness T1 of the upper pressure plate 7. That is, the area of ​​stress concentration transmission in the lower surface 71a (hereinafter referred to as the "concentration area") increases with the thickness T1 of the upper pressure plate 7 and decreases with the thickness T1 decreasing. Therefore, the size of the concentration area can be controlled by the thickness T1 of the upper pressure plate 7 and the area of ​​the abutment surface 5d (abutment area R1) (that is, the area "Ax" of the arrangement area Rx). In other words, in order to keep the size of the concentration area within a predetermined range (the range of the pressure surface area R3), the area "Ax" of the arrangement area Rx is designed to decrease with the increase of the interval between the abutment surface 5d of the intermediate member 5 and the lower surface 71a, and increase with the decrease of the interval.

[0072] As described above, when viewed from above and below, the ratio (area ratio: Ax / A3) of the area "Ax" of the configuration region Rx to the area "A3" of the pressure surface region R3 depends on various parameters such as the thickness T1 of the upper pressure plate 7, its material, and the pressure applied to the upper pressure plate 7, and is designed to be at least less than "1". Under the conditions shown in the above embodiment, for example, the area ratio is preferably designed to be "0.32" or more, more preferably "0.40" or more and "0.92" or less, and even more preferably "0.53" or more and "0.92" or less. The area "A3" is one example of the first area in this invention, and the area "Ax" is one example of the second area in this invention.

[0073] ●Summary According to the embodiment described above, the upper pressure unit UP includes a first buffer member 4, an intermediate member 5, a second buffer member 6, and a lower surface 71a. The second buffer member 6 is positioned lower than the first buffer member 4. The intermediate member 5 is disposed adjacent to the first buffer member 4 and the second buffer member 6 between the first buffer member 4 and the second buffer member 6. The lower surface 71a is made of metal and abuts against the workpiece W when it is pressurized. The lower surface 71a is a planar shape parallel to the XY direction. The intermediate member 5 includes a non-abutting surface 5c (non-abutting area R2) and an abutting surface 5d (abutting area R1). The lower surface 71a includes a pressure surface area R3 that abuts against the workpiece W when it is pressurized. When viewed from above, the abutting area R1 is positioned further inward than the first outer perimeter line Lo1 shown by the outer perimeter line of the pressure surface area R3. According to this configuration, within the intermediate member 5, stress is concentrated in the abutment region R1 (abutment surface 5d). Then, within the upper pressure plate 7, stress diffuses and propagates towards the pressure surface region R3 as it is transmitted to the lower surface 71a. That is, stress is concentrated in the pressure surface region R3. As a result, excessive pressure is not applied to the edge portion of the workpiece W, and the phenomenon of excessive pressure at the outer edge is improved. In other words, this device 1 can control the pressure distribution on the pressure surface Wa to avoid the occurrence of excessive pressure at the outer edge.

[0074] As described above, the present invention does not employ the conventional design of increasing the thickness T1 of the upper pressure plate 7 to improve its rigidity. Therefore, in the present invention, the thickness T1 of the upper pressure plate 7 can be thinner than in the conventional design. Therefore, the burden on the operator responsible for replacing the first buffer member 4, the intermediate member 5, and the second buffer member 6 is reduced. Furthermore, the device 1 can control the amount of stress diffusion inside the upper pressure plate 7 by utilizing the thickness T1 of the upper pressure plate 7, thereby controlling the pressure distribution on the pressed surface Wa.

[0075] Furthermore, according to the embodiment described above, the upper pressure unit UP includes an upper pressure plate 7, which has a lower surface 71a. The upper pressure plate 7 is disposed adjacent to the second buffer member 6 at a position lower than the second buffer member 6. The second buffer member 6 is made of an elastic material that is compressed in the vertical direction when the workpiece W is pressurized and can return to its state before pressurization when the pressurization of the workpiece W ends. According to this configuration, even if the stress inside the intermediate member 5 is concentrated in the contact area R1 (contact surface 5d), the stress generated inside the second buffer member 6 will diffuse and be homogenized inside the second buffer member 6. As a result, the pressure applied to the upper pressure plate 7 from the second buffer member 6 is homogenized. Therefore, the stress generated inside the upper pressure plate 7 is homogenized. Therefore, compared with the distribution assuming there is no second buffer member 6, the distribution of stress transmitted to the pressure surface area R3 is more homogenized. As a result, the device 1 can control the pressure distribution of the pressure surface Wa to become uniform. Furthermore, by placing the second buffer member 6, made of elastic material, between the intermediate member 5 and the upper pressure plate 7, the axial offset of the intermediate member 5 relative to the upper pressure plate 7 is suppressed.

[0076] Furthermore, according to the embodiment described above, the first buffer member 4 is made of an elastic material that is compressed in the vertical direction when the workpiece W is pressurized and can return to its state before pressurization when the pressurization of the workpiece W ends. According to this configuration, the pressure applied to the intermediate member 5 from the first buffer member 4 is uniformized. Also, by distributing the first buffer member 4, made of elastic material, between the base member 2 and the intermediate member 5, axial displacement of the intermediate member 5 relative to the base member 2 is suppressed.

[0077] Furthermore, according to the embodiment described above, the intermediate member 5 has a non-abutting surface 5c and an abutting surface 5d. The abutting surface 5d abuts against the second buffer member 6. The non-abutting surface 5c is positioned higher than the abutting surface 5d in the vertical direction and does not abut against the second buffer member 6. When viewed from the vertical direction, the abutting area R1 is the area where the abutting surface 5d is located, and the non-abutting area R2 is the area where the non-abutting surface 5c is located. With this configuration, the intermediate member 5 can be easily formed by forming a recess only on the lower surface of the plate-shaped member. Moreover, the position and shape of the abutting surface 5d can be arbitrarily designed according to the position and shape of the recess. Therefore, the pressure distribution of the pressed surface Wa can be controlled to be a distribution that depends on the shape of the intermediate member 5 or a uniform distribution.

[0078] Furthermore, according to the embodiment described above, when viewed from above, the shape of the first outer perimeter line Lo1, indicated by the outer perimeter line of the pressing surface region R3, is square. When viewed from above, the shape of the arrangement region Rx for arranging the contact surface 5d is square. When viewed from above, the arrangement region Rx is arranged inside the first outer perimeter line Lo1. That is, the shape of the second outer perimeter line Lo2 is similar to the shape of the first outer perimeter line Lo1. When viewed from above, the ratio of the area "Ax" of the arrangement region Rx to the area "A3" of the pressing surface region R3 is "0.40" or more and "0.92" or less. According to this configuration, the device 1 can reliably improve the strong pressure phenomenon at the outer edge and control the pressure distribution of the pressed surface Wa.

[0079] Furthermore, according to the embodiment described above, the configuration area Rx is designed to decrease as the distance between the abutment surface 5d that abuts against the second buffer member 6 in the intermediate member 5 and the lower surface 71a increases, and to increase as the distance decreases. According to this configuration, the intermediate member 5 having an abutment surface 5d (with configuration area Rx) corresponding to the workpiece W can be easily designed based on the length of the pressed surface Wa of the workpiece W (workpiece size) and the thickness T1 of the upper pressure plate 7.

[0080] ●Other Embodiments● Furthermore, in this invention, the device 1 may also omit the first buffer member 4. That is, the intermediate member 5 may also be disposed adjacent to the base member 2 below it. In this case, the base member 2 functions as the first pressurizing member in this invention. In this configuration, as shown in embodiments 1 to 12 above, the device 1 can improve the strong pressure phenomenon at the outer edge and control the pressure distribution on the pressed surface Wa to become uniform.

[0081] Furthermore, in this invention, the device 1 may also omit the second buffer member 6. That is, the upper pressure plate 7 is disposed adjacent to the intermediate member 5 below it. In this case, the upper pressure plate 7 functions as the second pressure member in this invention. In this configuration, compared to the first embodiment, the distribution of stress transmitted inside the upper pressure plate 7 is less uniform, but as shown in Reference Example 2 above, the strong pressure phenomenon at the outer edge is improved.

[0082] Furthermore, in this invention, the device 1 may also omit the first buffer member 4 and the second buffer member 6. That is, the intermediate member 5 may also be disposed adjacent to the base member 2 below it. Additionally, the upper pressure plate 7 is disposed adjacent to the intermediate member 5 below it. In this case, the base member 2 functions as the first pressure-applying member in this invention, and the upper pressure plate 7 functions as the second pressure-applying member in this invention. In this configuration, compared to the first embodiment, the distribution of stress transmitted inside the upper pressure plate 7 is less uniform, but as shown in Reference Example 1 above, the strong pressure phenomenon at the outer edge is improved.

[0083] Furthermore, in this invention, the material of the intermediate member 5 is any material whose shape (area) of the contact area R1 does not change much when pressurized, and is not limited to a metal with high rigidity. That is, for example, the device 1 may also include a first buffer member 4 or a second buffer member 6 having the same shape as the intermediate member 5, instead of the intermediate member 5 as the intermediate member in this invention. Also, for example, the intermediate member 5 may also be made of a rigid heat-insulating member.

[0084] Furthermore, in this invention, the intermediate member 5 only needs to have an abutting region R1 and a non-abutting region R2, and the shape of the intermediate member 5 is not limited to the shape of the first embodiment. That is, for example, the intermediate member 5 can also be formed in the shape of intermediate members 5B to 5E in the second to fifth modifications described later.

[0085] Furthermore, in this invention, the thickness T1 of the upper pressure plate 7 can also be designed to allow for elastic deformation of the portion below the contact area R1 when the workpiece W is pressurized (i.e., it is designed to be thinner). In this case, the contact area R1 is positioned above the area in the workpiece W that requires localized pressurization, for example, depending on the shape or composition of the pressed surface Wa of the workpiece W. In this configuration, the upper pressure plate 7 undergoes localized elastic deformation. Therefore, the device 1 can only locally pressurize, for example, the portion in the pressed surface Wa that protrudes after pressurization due to differences in composition. Also, for example, the device 1 can pressurize multiple workpieces W simultaneously, and can locally pressurize workpieces W with complex shapes. Furthermore, for example, when the thickness T1 is thinner, the device 1 can control the pressure distribution of the pressed surface Wa to be uniform by making the area ratio close to "1", and can control the pressure distribution of the pressed surface Wa to be a distribution that depends on the shape of the intermediate member 5 by reducing the area ratio. This thickness T1 design is a design that could not be used in previous designs to improve the rigidity of the upper pressure plate 7.

[0086] Furthermore, in this invention, the lower pressurization unit DP may also have a thermal energy unit for heating the workpiece W.

[0087] Furthermore, in this invention, the intermediate member 5 may also have multiple abutment surfaces 5d. In this case, the shape of each abutment surface 5d may be like that of the abutment surfaces 5d1 to 5d9 in the third modified example described later, or they may be different from each other.

[0088] Furthermore, in this invention, when viewed from above, the shape of the contact surface 5d is not limited to a rectangle. That is, for example, when viewed from above, the shape of the contact surface 5d can be arbitrarily designed according to the distribution shape of the stress transmitted to the lower surface 71a. The method is to use conventional analysis methods such as the finite element method to solve the inverse problem and find the optimal shape that meets the purpose.

[0089] Furthermore, in this invention, in the XY direction, the length L5 of the intermediate member 5 may also be shorter than the length L72 of the outer flange 72 of the upper pressure plate 7. That is, for example, the length L5 may also be shorter than the length LR3 of the pressure surface region R3. In other words, when viewed from the vertical direction, the intermediate member 5 may also be positioned only at a position further inward than the first outer perimeter line Lo1.

[0090] Furthermore, in this invention, the device 1 may also have three or more upper pressurization units UP and lower pressurization units DP. That is, the device 1 may also be a pressurization device with three or more stages.

[0091] Furthermore, in this invention, the device 1 may also include a heat-insulating member made of heat-insulating material, which is disposed between the intermediate member 5 and the second buffer member 6. In this case, when viewed from above and below, the shape of the heat-insulating member may also be the same as the shape of the second buffer member 6. When the device 1 does not include the second buffer member 6, the heat-insulating member can function as the second pressurizing member in this invention. In this configuration, even if the lower pressurizing unit DP has a heat energy unit for heating the workpiece W, the heat energy from the heat energy unit will be blocked by the heat-insulating member and will not be transferred to the second buffer member 6, the first buffer member 4, and the base member 2.

[0092] Furthermore, in this invention, as shown in Embodiment 17 above, when multiple workpieces W are pressed together, and when viewed from above and below, one contact surface 5d corresponds to all workpieces W, the pressing surface region R3 can also be the region in the lower surface 71a that includes the region abutted by each workpiece W. That is, the pressing surface region R3 can also include multiple regions abutted by each workpiece W. In this case, the first outer perimeter line Lo1 is represented by the outer perimeter line of this region.

[0093] Furthermore, in this invention, as shown in Embodiment 14 above, when multiple workpieces W are pressed together, and when viewed from above and below, each contact surface 5d1 to 5d9 corresponds to each workpiece W, the pressing surface region R3 can also be the respective region in the lower surface 71a that each workpiece W contacts. That is, the lower surface 71a can also have multiple pressing surface regions R3. In this case, the first outer perimeter line Lo1 is represented by the outer perimeter line of each region.

[0094] Furthermore, in this invention, a protective sheet can also be placed on the workpiece W to protect the lower surface 71a and prevent the workpiece W from adhering. The protective sheet is so thin that it hardly causes stress homogenization within it. Therefore, the effectiveness of this invention will not differ due to the presence or absence of a protective sheet.

[0095] ●Modifications● Next, focusing on the differences from the previously described embodiment (hereinafter referred to as "first embodiment"), modifications of this device 1 will be described below. For ease of explanation, in the following modifications, components that are the same as those in the first embodiment and components that have common functions are marked with the same symbols as those in the first embodiment, and their detailed descriptions are omitted. In the following modifications, please refer to Figures 1 and 2 as appropriate.

[0096] ●First Modification Example Figure 9 is a schematic cross-sectional view of the device showing the first modification example of the device.

[0097] This device 1A clamps and pressurizes two workpieces W1 and W2 in the vertical direction. This device 1A includes a base member 2, a frame member 3, a first buffer member 4, an intermediate member 5, a second buffer member 6, an upper pressure plate 7, a mounting plate 8, a lower pressure plate 9, a lifting device 10, a control device 11, a second base member 12, a second frame member 13, a third buffer member 14, a second intermediate member 15, a fourth buffer member 16, a second upper pressure plate 17, and a second mounting plate 18. The base member 2, frame member 3, first buffer member 4, intermediate member 5, second buffer member 6, and upper pressure plate 7 are positioned higher than workpiece W1 in the vertical direction, functioning as an upper pressure unit (UP) that pressurizes workpiece W1 from above. The mounting plate 8 and second base member 12 are positioned lower than workpiece W1 in the vertical direction, functioning as a lower pressure unit (DP) that pressurizes workpiece W1 from below. Similarly, the second base member 12, the second frame member 13, the third buffer member 14, the second intermediate member 15, the fourth buffer member 16, and the second upper pressure plate 17 are arranged vertically above the workpiece W2, functioning as a second upper pressure unit UP2 that applies pressure to the workpiece W2 from above. The second mounting plate 18 and the second lower pressure plate 19 are arranged vertically below the workpiece W2, functioning as a second lower pressure unit DP2 that applies pressure to the workpiece W2 from below. That is, this device 1A is a two-stage pressure device with the upper pressure unit UP, the lower pressure unit DP, the second upper pressure unit UP2, and the second lower pressure unit UD2 arranged sequentially from above.

[0098] The second base member 12 supports the third buffer member 14, the second intermediate member 15, the fourth buffer member 16, and the second upper pressure plate 17 via the second frame member 13. The configuration of the second base member 12 is the same as that of the base member 2. The second base member 12 has a lower surface 12a. The second base member 12 is supported on the lifting device 10 in a manner that allows it to move (lift) in the vertical direction. A mounting plate 8 is placed on the second base member 12. The second base member 12 also functions as the lower pressure plate of the lower pressurization unit DP. In the vertical direction, the size (thickness) of the second base member 12 is set to the extent that the stress generated inside the second base member 12 due to the pressure transmitted to the second base member 12 via the mounting plate 8 can be sufficiently diffused inside the second base member 12.

[0099] The second frame member 13 accommodates a portion of the third buffer member 14, the second intermediate member 15, the fourth buffer member 16, and the second upper pressure plate 17. The structure of the second frame member 13 is the same as that of the frame member 3. The second frame member 13 has a main body portion 131 and an inner flange portion 132. The main body portion 131 has an inner peripheral surface 131a. The inner flange portion 132 has an upper surface 132a and an inner peripheral surface 132b.

[0100] When the workpiece W2 is pressurized, the third buffer member 14 diffuses and homogenizes the pressure applied to it. Furthermore, when the workpiece W2 is pressurized, the third buffer member 14 suppresses axial displacement of the second intermediate member 15. The configuration of the third buffer member 14 is the same as that of the first buffer member 4. The third buffer member 14 has a lower surface 14a and an upper surface 14b. The third buffer member 14 is an example of the first pressurizing member in this invention.

[0101] When the workpiece W2 is pressurized, the pressure applied to the second intermediate member 15 is concentrated. The configuration of the second intermediate member 15 is the same as that of the intermediate member 5. The second intermediate member 15 has a lower surface 15a, an upper surface 15b, a non-abutting surface 15c, and an abutting surface 15d. The second intermediate member 15 is an example of an intermediate member in this invention. When viewed from above, the area of ​​the second intermediate member 15 with the abutting surface 15d is the abutting area R11, and the area with the non-abutting surface 15c is the non-abutting area R12.

[0102] When the workpiece W2 is pressurized, the fourth buffer member 16 diffuses and homogenizes the pressure applied to it. Furthermore, when the workpiece W2 is pressurized, the fourth buffer member 16 suppresses axial displacement of the second intermediate member 15. The configuration of the fourth buffer member 16 is the same as that of the second buffer member 6. The fourth buffer member 16 has a lower surface 16a and an upper surface 16b. The fourth buffer member 16 is an example of the second pressurizing member in this invention.

[0103] When the workpiece W2 is pressed, the second upper pressure plate 17 presses the workpiece W2 downward. The structure of the second upper pressure plate 17 is the same as that of the upper pressure plate 7. The second upper pressure plate 17 has an upper surface 17a, a main body portion 171, and an outer flange portion 172. The main body portion 171 has a lower surface 171a and an outer peripheral surface 171b. The lower surface 171a has a pressing surface area R13. The second upper pressure plate 17 is an example of the third pressing member in this invention. The lower surface 171a is an example of the upper pressing surface in this invention. The outer flange portion 172 has a lower surface 172a.

[0104] The second mounting plate 18 is a component for mounting the workpiece W2. The structure of the second mounting plate 18 is the same as that of the mounting plate 8. The second mounting plate 18 is mounted on the second lower pressure plate 19. The second mounting plate 18 has an upper surface, namely the mounting surface 18a.

[0105] When the workpiece W2 is pressurized, the second lower pressure plate 19 presses the workpiece W2 upward according to the pressure from the second upper pressure unit UP2. The configuration of the second lower pressure plate 19 is the same as that of the lower pressure plate 9.

[0106] The positional and size relationships of the second base member 12, the second frame member 13, the third buffer member 14, the second intermediate member 15, the fourth buffer member 16, and the second upper pressure plate 17 are in common with the positional and size relationships of the base member 2, the frame member 3, the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper pressure plate 7.

[0107] Furthermore, in the first modification, due to dimensional tolerances of each component, the pressure distribution on the upper surface 5b of the intermediate member 5 may differ from the pressure distribution on the upper surface 15b of the second intermediate member 15. Also, when the thickness of the second base member 12 is thinner, the workpiece W1 itself functions as an intermediate member in this invention, and the pressure transmitted from the second base member 12 to the second intermediate member 15 may be affected by this. In this case, the length LR1 of the contact area R1 of the intermediate member 5 is set according to the pressure applied to the workpiece W1, and the length LR11 of the contact area R11 of the second intermediate member 15 is set according to the pressure applied to the workpiece W2. That is, the length LR11 may also be different from the length LR1.

[0108] Furthermore, in the first modification, the device 1A may also omit the third buffer member 14. That is, the second intermediate member 15 may also be disposed adjacent to the second base member 12 below the second base member 12. In this case, the second base member 12 functions as the first pressure member in the present invention.

[0109] Furthermore, in the first modification, the device 1A may also omit the fourth buffer member 16. That is, the second upper pressure plate 17 is disposed adjacent to the second intermediate member 15 below the second intermediate member 15. In this case, the second upper pressure plate 17 functions as the second pressure member in the present invention.

[0110] Furthermore, in the first modification, the device 1A may also omit the third buffer member 14 and the fourth buffer member 16. That is, the second intermediate member 15 may also be disposed adjacent to the second base member 12 below it. Also, the second upper pressure plate 17 is disposed adjacent to the second intermediate member 15 below it. In this case, the second base member 12 functions as the first pressure member in the present invention, and the second upper pressure plate 17 functions as the second pressure member in the present invention.

[0111] ●Second to Fifth Modifications In the second to fifth modifications of this device, the structure of the intermediate member differs from that in the first embodiment. Therefore, in the following description, only the intermediate member will be described.

[0112] Figure 10 is a schematic bottom view of the intermediate component in the second to fifth modifications of this device. Figure 10(a) shows the intermediate component in the second modification, Figure 10(b) shows the intermediate component in the third modification, Figure 10(c) shows the intermediate component in the fourth modification, and Figure 10(d) shows the intermediate component in the fifth modification. In this figure, the second outer perimeter line Lo2 of the arrangement area Rx is represented by a thicker dashed line, and the pressing surface area R3 (the pressed surface Wa) is represented by a two-point chain line.

[0113] In the second variation, the intermediate member 5B has two non-abutting surfaces 5c1 and 5c2 and one abutting surface 5d. When viewed from above, the non-abutting surface 5c1 is rectangular, the abutting surface 5d is a rectangular frame surrounding the entire circumference of the non-abutting surface 5c1, and the non-abutting surface 5c2 is a rectangular frame surrounding the entire circumference of the abutting surface 5d. The second outer perimeter Lo2 is the same as the outer perimeter of the abutting surface 5d. When viewed from above, the abutting region R1 is the region where the abutting surface 5d is located, and the non-abutting region R2 is the region where the non-abutting surfaces 5c1 and 5c2 are located. In this configuration, as shown in Examples 6-7 and Reference Examples 5-6, this device 1 can improve the strong pressure phenomenon at the outer edge. Furthermore, this device 1 can control the pressure distribution on the pressed surface Wa to be a distribution that depends on the shape of the intermediate member 5.

[0114] In the third variation, the intermediate member 5C has one non-abutting surface 5c and nine abutting surfaces 5d1 to 5d9. When viewed from above, the abutting surfaces 5d1 to 5d9 are all rectangular in shape. The abutting surfaces 5d1 to 5d9 are evenly arranged in a 3-row × 3-column configuration. When viewed from above, the configuration area Rx is the area that accommodates all the abutting surfaces 5d1 to 5d9 and has the smallest possible area (rectangular in the third variation). The non-abutting surface 5c1 has a grid-like portion disposed inside the configuration area Rx and a rectangular frame-like portion disposed outside the configuration area Rx. When viewed from above, the abutting area R1 is the area where the abutting surfaces 5d1 to 5d9 are disposed, and the non-abutting area R2 is the area where the non-abutting surface 5c is disposed. In this configuration, as shown in Examples 8 to 12 and Reference Example 7, this device 1 can improve the strong pressure phenomenon at the outer edge. Furthermore, the pressure distribution of the pressed surface Wa can be controlled to be a distribution that depends on the shape of the intermediate member 5.

[0115] In the fourth variation, the intermediate member 5D has 12 non-abutting surfaces 5c1 to 5c12, 9 abutting surfaces 5d1 to 5d9, and 4 through portions 5e1 to 5e4. When viewed from above, the abutting surfaces 5d1 to 5d9 are all rectangular in shape. The abutting surfaces 5d1 to 5d9 are evenly arranged in a 3-row × 3-column configuration. When viewed from above, adjacent abutting surfaces 5d1 to 5d9 are connected by a bridge-like portion. The non-abutting surfaces 5c1 to 5c12 are disposed in this bridge-like portion. The through portions 5e1 to 5e4 are through holes that penetrate the intermediate member 5D in the vertical direction. When viewed from above, the through portions 5e1 to 5e4 are cross-shaped. The through portions 5e1 to 5e4 are disposed between the abutting surfaces 5d1 to 5d9 in a manner that divides them. Viewed from above, the configuration area Rx is the area with the smallest possible area for all the contact surfaces 5d1 to 5d9. Viewed from above, the contact area R1 is the area with contact surfaces 5d1 to 5d9, and the non-contact area R2 is the area with non-contact surfaces 5c1 to 5c12 and through portions 5e1 to 5e4. In the fourth variation, the length L5 of the intermediate member 5D is shorter than the length L4 of the first buffer member 4 and the length L6 of the second buffer member 6. Therefore, a rectangular frame-like space is formed around the intermediate member 5D. The outer edge of the first buffer member 4 faces the outer edge of the second buffer member 6 across this space. In this configuration, the intermediate member 5D can be easily formed by forming through holes that function as non-contact areas R2 only in the plate-shaped member and forming non-contact surfaces 5c1 to 5c12 in the bridge-shaped portion. Furthermore, the position and shape of the contact surfaces 5d are arbitrarily designed based on the position and shape of the through holes.

[0116] Furthermore, in the fourth variation, the non-abutting surfaces 5c1 to 5c12 may not be formed in the bridge-shaped portion. In this case, the bridge-shaped portion functions as an abutting surface. In this configuration, it is not necessary to form non-abutting surfaces 5c1 to 5c12; the intermediate member 5D can be easily formed simply by forming a through hole in the plate-shaped member that functions as the non-abutting area R2.

[0117] Furthermore, in the fourth variation, the shape of the through portions 5e1 to 5e4 is not limited to a cross shape, and the number of through portions 5e1 to 5e4 is not limited to four.

[0118] In the fifth variation, the intermediate member 5E has one non-abutting surface 5c and one abutting surface 5d. When viewed from above, the abutting surface 5d is rectangular. When viewed from above, the abutting surface 5d is located inside the pressure surface region R3 and is biased towards one corner of the intermediate member 5E. When viewed from above, the non-abutting surface 5c is a rectangular frame surrounding the entire circumference of the abutting surface 5d. When viewed from above, the abutting region R1 is the region where the abutting surface 5d is located, and the non-abutting region R2 is the region where the non-abutting surface 5c is located. By forming the intermediate member 5E in this way, the predetermined region in the pressure surface region R3 that includes the abutting region R1 and is centered on the abutting region R1 when viewed from above (the shaded area in FIG. 10(d)) is a biased pressure region R3a that applies pressure to the workpiece W with a greater pressure than other regions R3b. Viewed from above, the contact area R1 is positioned within the area of ​​the biased pressure area R3a and corresponds to the biased pressure area R3a. In other words, the contact area R1 includes the area corresponding to the biased pressure area R3a (hereinafter referred to as "specific area R1a"). In this configuration, the device 1 can control the pressure of a predetermined area in the pressed surface Wa (the area that contacts the biased pressure area R3a) to be higher than the pressure of other areas. The position and length of the biased pressure area R3a are arbitrarily designed based on the position and length of the specific area R1a (contact surface 5d) relative to the pressure surface area R3. That is, by using the intermediate member 5E instead of the intermediate member 5, the device 1 can perform biased pressure on any area in the pressed surface Wa, which cannot be achieved by conventional pressure devices (hereinafter referred to as "conventional devices") that directly (or indirectly) apply pressure to the workpiece through a planar pressure surface. Furthermore, by forming multiple specific regions R1a (abutment surface 5d) in a manner that forms multiple biased pressure regions R3a, this device 1 can also perform the simultaneous pressure application on multiple workpieces W, which is not possible with conventional devices.

[0119] Furthermore, in the fifth variation, the intermediate member 5E may also have multiple abutting surfaces 5d corresponding to multiple abutting regions R1 containing specific regions R1a.

[0120] ● Embodiments of the Invention● Next, referring to the terms and symbols described in each embodiment, the embodiments of the present invention as understood from the above-described embodiments will be described below.

[0121] A first embodiment of the present invention is a pressurizing device (e.g., pressurizing device 1, 1A) that clamps a workpiece (e.g., workpiece W, W1, W2) in a vertical direction and applies pressure. The pressurizing device includes an upper pressurizing unit (e.g., upper pressurizing unit UP, second upper pressurizing unit UP2) disposed above the workpiece. The upper pressurizing unit comprises: a first pressurizing member (e.g., base member 2, first buffer member 4, third buffer member 14); a second pressurizing member (e.g., second buffer member 6, upper pressure plate 7, fourth buffer member 16, second upper pressure plate 17) disposed at a position lower than the first pressurizing member; and an intermediate member (e.g., intermediate members 5-5E) disposed between the first and second pressurizing members and the first... The device comprises a pressure member and the aforementioned second pressure member arranged adjacent to each other; and a planar upper pressure surface (e.g., lower surfaces 71a, 171a) made of metal, which abuts against the workpiece when the workpiece is pressurized. The intermediate member includes: abutting regions (e.g., abutting regions R1, R11) that abut against the aforementioned second pressure member; and non-abutting regions (e.g., non-abutting regions R2, R12) that do not abut against the aforementioned second pressure member. The upper pressure surface includes a pressure surface region (e.g., pressure surface region R3, R13) that abuts against the workpiece when the workpiece is pressurized. The abutting region is arranged adjacent to the aforementioned non-abutting region when viewed from above and below, and is positioned further inward than a first outer perimeter line (e.g., first outer perimeter line Lo1) indicated by the outer perimeter line of the aforementioned pressure surface region. With this configuration, the device can control the pressure distribution on the pressed surface to avoid strong pressure at the outer edge.

[0122] The second embodiment of the present invention is a pressurizing device as described in the first embodiment, wherein the aforementioned upper pressurizing unit includes a third pressurizing member (e.g., upper pressure plate 7, second upper pressure plate 17), the third pressurizing member having the aforementioned upper pressing surface, the third pressurizing member being disposed adjacent to the aforementioned second pressurizing member at a position lower than the aforementioned second pressurizing member (e.g., second buffer member 6, fourth buffer member 16), the aforementioned second pressurizing member being made of an elastic material, the elastic material being compressed in the vertical direction when the aforementioned workpiece is pressurized, and being able to return to the state before pressurization when the pressurization of the aforementioned workpiece ends. According to this configuration, the pressed surface of the workpiece is uniformly pressurized. Furthermore, the axial displacement of the intermediate member relative to the upper pressure plate is suppressed.

[0123] The third embodiment of the present invention is a pressurizing device as described in the first embodiment, wherein the aforementioned second pressurizing member (e.g., upper pressure plate 7, second upper pressure plate 17) has the aforementioned upper pressure surface. According to this configuration, the device can control the pressure distribution of the pressed surface to avoid strong pressure phenomena at the outer edge of each segment.

[0124] The fourth embodiment of the present invention is a pressurizing device as in the second or third embodiment, wherein the aforementioned first pressurizing member (e.g., the first buffer member 4, the third buffer member 14) is made of an elastic material, which is compressed in the vertical direction when the workpiece is pressurized, and can return to its state before pressurization when the pressurization of the workpiece ends. According to this configuration, the pressure applied from the first buffer member to the intermediate member is homogenized. Furthermore, the axial displacement of the intermediate member relative to the base member is suppressed.

[0125] The fifth embodiment of the present invention is a pressurizing device as described in any of the first to third embodiments, wherein the aforementioned intermediate member comprises: an abutting surface (e.g., abutting surfaces 5d, 5d1 to 5d9) that abuts against the aforementioned second pressurizing member; and a non-abutting surface (e.g., non-abutting surfaces 5c, 5c1 to 5c12) that is disposed above the aforementioned abutting surface in the vertical direction and does not abut against the aforementioned second pressurizing member. When viewed from the vertical direction, the aforementioned abutting area is the area for which the aforementioned abutting surface is disposed, and when viewed from the vertical direction, the aforementioned non-abutting area is the area for which the aforementioned non-abutting surface is disposed. According to this configuration, the intermediate member can be easily formed by forming a recess only on the lower surface of the plate-shaped member.

[0126] The sixth embodiment of the present invention is a pressurizing device in any of the first to third embodiments, wherein the aforementioned intermediate member (e.g., intermediate member 5D) includes: an abutting surface (e.g., abutting surfaces 5d1 to 5d9) that abuts against the aforementioned second pressurizing member; and a through hole (e.g., through portions 5e1 to 5e4) that penetrates the aforementioned intermediate member in the vertical direction. When viewed from the vertical direction, the abutting area is the area for arranging the aforementioned abutting surface, and when viewed from the vertical direction, the aforementioned non-abutting area is the area for arranging the aforementioned through hole. According to this configuration, the intermediate member can be easily formed simply by forming a through hole that functions as a non-abutting area in the plate-shaped member.

[0127] The seventh embodiment of the present invention is a pressurizing device as described in the first embodiment, wherein, when viewed from above, the shape of the second outer perimeter line (e.g., the second outer perimeter line Lo2) shown by the outer perimeter line of the arrangement area (e.g., arrangement area Rx) for which the aforementioned abutment area is arranged is similar to the shape of the first outer perimeter line. When viewed from above, the ratio of the second area (e.g., area "Ax") of the arrangement area divided by the second outer perimeter line to the first area (e.g., area "A3") of the pressing surface area divided by the first outer perimeter line is 0.40 or more and 0.92 or less. According to this configuration, the device can reliably improve the strong pressure phenomenon at the outer edge and can control the pressure distribution on the pressed surface.

[0128] The eighth embodiment of the present invention is a pressurizing device as in the first embodiment, wherein, when viewed from the top and bottom, the configuration area for arranging the aforementioned abutment area is designed to decrease as the distance (e.g., thickness "T1") between the abutment surface of the aforementioned intermediate member abutting against the aforementioned second pressurizing member and the aforementioned upper pressing surface increases, and to increase as the aforementioned distance decreases. According to this configuration, an intermediate member having an abutment surface (having a configuration area) corresponding to the workpiece can be easily designed.

[0129] The ninth embodiment of the present invention is a pressurizing device as described in the first embodiment, wherein the aforementioned pressing surface region includes a biased pressurizing region (e.g., biased pressurizing region R3a), in which, when the aforementioned workpiece is pressurized in a vertical view, a predetermined area of ​​the aforementioned workpiece is pressurized with a greater pressurizing force than other areas of the aforementioned workpiece, and the aforementioned abutting region includes a specific region (e.g., specific region R1a) corresponding to the aforementioned biased pressurizing region, which is disposed within the range of the aforementioned biased pressurizing region when viewed in a vertical view. According to this configuration, the device can control the pressure distribution of the pressed surface so that any area of ​​the pressed surface is pressurized more intensely. [Simplified Explanation of the Diagram]

[0009] Figure 1 is a schematic cross-sectional view of the pressurizing device according to an embodiment of the present invention. Figure 2 is a schematic bottom view of the upper pressurizing unit of the pressurizing device of Figure 1. Figure 3 is a schematic diagram showing the positional relationship of the various regions defined in the pressurizing device of Figure 1 when viewed from above. Figure 4 is a schematic diagram showing the test conditions and test results of an embodiment of the present invention. Figure 5 is a pressure distribution diagram showing the test results of the above embodiment. Figure 6 is a schematic bottom view of the intermediate component of the pressurizing device of Figure 1 used in the above embodiment. Figure 6(a) is a schematic bottom view of type 1, Figure 6(b) is a schematic bottom view of type 2, Figure 6(c) is a schematic bottom view of type 3, and Figure 6(d) is a schematic bottom view of type 4. Figure 7 shows the stress transmission state of the simulator. Figure 7(a) shows the transmission state when a workpiece with an area smaller than the configuration area is pressurized, and Figure 7(b) shows the transmission state when a workpiece with an area larger than the configuration area is pressurized. Figure 8 is a schematic diagram illustrating factors for improving pressure distribution imbalance. Figure 9 is a schematic cross-sectional view of the pressurizing device of the first modification of the pressurizing device of the present invention. Figure 10 is a schematic bottom view of the intermediate component in the second to fifth modifications of the pressurizing device of the present invention. Figure 10(a) shows the intermediate component in the second modification, Figure 10(b) shows the intermediate component in the third modification, Figure 10(c) shows the intermediate component in the fourth modification, and Figure 10(d) shows the intermediate component in the fifth modification.

Claims

1. A pressurizing device that clamps a workpiece in a vertical direction and applies pressure, wherein, The aforementioned pressurizing device has an upper pressurizing unit disposed above the aforementioned workpiece. The upper pressurizing unit includes: a first pressurizing member; a second pressurizing member disposed below the first pressurizing member; a plate-shaped intermediate member disposed adjacent to the first and second pressurizing members between the first and second pressurizing members; and a planar upper pressing surface made of metal that abuts against the workpiece when the workpiece is pressurized. The intermediate member includes: an abutting area that abuts against the second pressurizing member; and a non-abutting area that does not abut against the second pressurizing member. The upper pressing surface includes a pressing surface area that abuts against the workpiece when the workpiece is pressurized. The abutting area is disposed adjacent to the non-abutting area when viewed from above and below, and is disposed further inward than the first outer perimeter indicated by the outer perimeter of the pressing surface area.

2. The pressurizing device as described in claim 1, wherein, The aforementioned upper pressurizing unit includes a third pressurizing member, which has the aforementioned upper pressing surface. The third pressurizing member is disposed adjacent to the aforementioned second pressurizing member at a position lower than the aforementioned second pressurizing member. The aforementioned second pressurizing member is made of an elastic material. The elastic material is compressed in the vertical direction when the aforementioned workpiece is pressurized, and can return to the state before pressurization when the pressurization of the aforementioned workpiece ends.

3. The pressurization device as described in claim 1, wherein, The aforementioned second pressure member has the aforementioned upper pressure surface.

4. The pressurization device as requested in item 2 or 3, wherein, The aforementioned first pressure-applying component is made of an elastic material. When the aforementioned workpiece is pressurized, the aforementioned elastic material is compressed in the vertical direction and can return to its state before pressurization when the pressurization of the aforementioned workpiece ends.

5. The pressurizing device as described in any of claims 1 to 3, wherein, The aforementioned intermediate member includes: an abutting surface that abuts against the aforementioned second pressure member; and a non-abutting surface that is positioned higher than the aforementioned abutting surface in the vertical direction and does not abut against the aforementioned second pressure member. When viewed from the vertical direction, the aforementioned abutting area is the area for which the aforementioned abutting surface is disposed, and when viewed from the vertical direction, the aforementioned non-abutting area is the area for which the aforementioned non-abutting surface is disposed.

6. The pressurizing device as described in any of claims 1 to 3, wherein, The aforementioned intermediate member includes: an abutting surface that abuts against the aforementioned second pressurizing member; and a through hole that penetrates the aforementioned intermediate member in the vertical direction. When viewed from the vertical direction, the aforementioned abutting area is the area for arranging the aforementioned abutting surface, and when viewed from the vertical direction, the aforementioned non-abutting area is the area for arranging the aforementioned through hole.

7. The pressurization device as described in claim 1, wherein, When viewed from above, the shape of the second outer perimeter line, which is the outer perimeter line of the configuration area for which the aforementioned contact area is configured, is similar to the shape of the first outer perimeter line. When viewed from above, the ratio of the second area of ​​the configuration area defined by the second outer perimeter line to the first area of ​​the pressing surface area defined by the first outer perimeter line is 0.40 or more and 0.92 or less.

8. The pressurization device as described in claim 1, wherein, When viewed from above, the configuration area for the aforementioned abutment area is designed to decrease as the distance between the abutment surface of the aforementioned intermediate member abutting against the aforementioned second pressurizing member and the aforementioned upper pressurizing surface increases, and to increase as the aforementioned distance decreases.

9. The pressurization device as claimed in claim 1, wherein, The aforementioned pressure surface area includes a biased pressure area, in which, when viewed from above and below, when the aforementioned workpiece is pressurized, a predetermined area of ​​the aforementioned workpiece is pressurized with a greater pressure than other areas of the aforementioned workpiece. The aforementioned contact area includes a specific area corresponding to the aforementioned biased pressure area, and when viewed from above and below, the aforementioned specific area is disposed within the range of the aforementioned biased pressure area.

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