Heat recovery external gas micro-pollution adsorption and filtration system

Abstract

This invention relates to a heat recovery system for adsorbing and filtering micro-pollutants from outside air. It primarily utilizes a combination of an outside air unit, a zeolite rotor adsorption device, an outside air conditioning unit (MAU), a cleanroom, a heat exchanger, volatile organic compound (VOC) treatment equipment, and a chimney. The exhaust gas from the incinerator of the VOC treatment equipment is heat-exchanged by the heat exchanger and then heated by the heater before being sent to the desorption zone of the zeolite rotor adsorption device. The zeolite rotor filters out micro-pollutants from the outside air, and the gas is then sent to the cleanroom via the MAU. This system achieves heat recovery of the exhaust gas and significantly reduces the amount of micro-pollutants entering the cleanroom.

Claims

1. A heat recovery external gas micro-pollutant adsorption and filtration system, comprising: An outside air source, comprising at least one or more gases or combinations thereof; a zeolite rotor adsorption device, comprising a zeolite rotor, a heater, an inlet pipe, a purified gas delivery pipe, a cooling gas inlet pipe, a cooling gas delivery pipe, a hot gas delivery pipe, and a desorbed gas outlet pipe, wherein the zeolite rotor comprises an adsorption zone, a cooling zone, and a desorption zone, and one end of the inlet pipe supplies the outside air source. Air is introduced into the zeolite rotor, with one end of the intake pipe connected to one side of the adsorption zone. One end of the purified gas delivery pipe is connected to the other side of the adsorption zone. One end of the cooling gas intake pipe is connected to one side of the cooling zone of the zeolite rotor, and one end of the cooling gas delivery pipe is connected to the other side of the cooling zone. One end of the hot gas delivery pipe is connected to the other side of the desorption zone of the zeolite rotor, and the other end of the hot gas delivery pipe is connected to the other end of the heater. One end of the desorbed gas output pipe is connected to one side of the desorption zone of the zeolite rotor. An external air conditioning unit (MAU) is provided, having one inlet and one outlet. The inlet of the external air conditioning unit (MAU) is connected to the other end of the clean air delivery pipeline of the zeolite rotor adsorption device; a cleanroom is connected to the outlet of the external air conditioning unit (MAU); a heat exchanger having a cold side channel and a hot side channel, the heat exchanger being provided with a cold side delivery pipeline, a hot side delivery pipeline and a hot side discharge pipeline, one end of the cold side channel being connected to the other end of the cooling gas delivery pipeline of the zeolite rotor adsorption device, the other end of the cold side channel being connected to the cold side delivery pipeline, one end of the hot side channel being connected to one end of the hot side delivery pipeline, and the other end of the hot side channel being connected to one end of the hot side discharge pipeline; a volatile organic compound (VOC) waste gas treatment device (The The VOC treatment equipment includes an incinerator with an outlet connected to the other end of the heat-side delivery pipeline of the heat exchanger; and a chimney connected to the other end of the heat-side discharge pipeline of the heat exchanger.

2. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 1, wherein the incinerator is further any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative thermal oxidizer (RTO).

3. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 1, wherein the volatile organic waste gas treatment equipment further includes either a single-rotor treatment system or a dual-rotor treatment system.

4. The heat recovery external air micro-pollution adsorption and filtration system as described in claim 1, wherein the heat-side delivery pipeline of the heat exchanger is further provided with a fan, and the heat-side discharge pipeline of the heat exchanger is further provided with a fan.

5. The heat recovery external air micro-pollution adsorption and filtration system as described in claim 1, wherein the external air conditioning unit (MAU) is further provided with a housing, wherein the housing is provided with a first filter device, a first temperature device, a water washing device, a second temperature device and a second filter device.

6. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 5, wherein the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, or a preheater.

7. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 5, wherein the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, or a reheater.

8. The heat recovery external air micro-pollution adsorption and filtration system as described in claim 5, wherein a fan is further provided inside the housing.

9. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 1, wherein the heater is further any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger.

10. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 1, wherein the air inlet pipe of the zeolite rotor is further provided with a fan.

11. The heat recovery external air micro-pollution adsorption and filtration system as described in claim 1, wherein the air inlet pipe is further provided with an air inlet connecting pipe, the air inlet connecting pipe is connected to the cooling air inlet pipe, and the air inlet connecting pipe is further provided with an air inlet connecting control valve to control the air volume of the air inlet connecting pipe.

12. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 1, wherein the other end of the desorbed gas output pipeline is further connected to the external gas.

13. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 1, wherein the desorbed gas output pipeline is further provided with a fan.

14. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 1, wherein the zeolite rotor system is further configured to operate continuously or at timed intervals.

15. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 14, wherein the rotational speed of the zeolite rotor is further set to any one of 0.1 RPH to 2 RPH per hour.

16. The heat recovery external gas micro-pollution adsorption and filtration system as described in claim 1, wherein the desorption zone of the zeolite rotor is further configured as either continuous desorption or timed desorption.

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