Adhesive sheet for fixing polishing pads with release sheet fa, adhesive sheet for fixing polishing pads with release sheets fa and fb, and method for producing the same, polishing pad with release sheet fa and adhesive layer a, and method for fixing polishing pad to polishing plate via adhesive sheet

Abstract

This invention provides a double-sided adhesive sheet with a release tab for fixing a polishing pad to a platform. It is an adhesive sheet for fixing a polishing pad with a release tab for high-precision CMP processing, and it is easy to reposition and adjust. It has excellent air expulsion and excellent adhesive properties. The problem of this invention can be solved by the following adhesive sheet (1) for fixing a polishing pad with a release tab FA. The adhesive sheet (1) has a laminated structure of release tab FA / adhesive layer A / sheet substrate F / adhesive layer B. The outer surface (11) of the release tab FA that is not in contact with the adhesive layer A has unevenness, and the outer surface of the release tab FA has the same shape as the inner surface of the release tab FA after reversal. In the Beck smoothness test, the smoothness of the outer surface of the release tab FA under specific condition 1 is 0.1 seconds to 30 seconds, and the smoothness of the outer surface of the release tab FA under specific condition 2 is 1 second to 500 seconds.

Description

Technical Field

[0001] This disclosure relates to an adhesive sheet for fixing an abrasive pad with a release tab FA, and an adhesive sheet for fixing an abrasive pad with release tabs FA and FB, and a method for manufacturing the same. Additionally, this disclosure relates to an abrasive pad with a release tab FA and an adhesive layer A, and a method for fixing the abrasive pad to a platform via the adhesive sheet. Prior Technology

[0002] In recent years, semiconductor development has demanded increasingly higher integration and quality, requiring wafers, the materials used, to achieve higher grinding precision. Methods have evolved beyond simple grinding with abrasive grains; they also utilize chemical mechanical polishing (CMP) and other methods that alter the surface through chemical reactions. Within CMP, methods have been developed to achieve a smoother, more refined surface than previously possible. When attaching the polishing pad to the platform, a double-sided adhesive sheet is used. Specifically, one side of the double-sided adhesive sheet is attached to one side of the polishing pad (the side opposite to the predetermined side of the object to be polished), and a polishing pad with a single-sided adhesive layer is prepared in advance and the adhesive layer of the polishing pad with the single-sided adhesive layer is attached to the platform.

[0003] Various adhesive sheets have been proposed as adhesive sheets for fixing abrasive pads (Patent Documents 1 to 3, etc.). [Existing Technical Documents] [Patent Literature]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2011-122069 [Patent Document 2] Japanese Patent Application Publication No. 2011-168714 [Patent Document 3] Japanese Patent Application Publication No. 2012-057135 Summary of the Invention

[0005] [The problem that the invention aims to solve] The requirements for grinding pads vary depending on the stage of grinding. In particular, the grinding pads used in the final finishing process are multi-layered with various hardnesses and thicknesses, resulting in increasingly complex structures. The more complex the structure of the grinding pad, the more difficult it becomes to attach it to the platform. When attaching highly multi-layered, thick abrasive pads with single-sided adhesive layers to a platform, repositioning often requires temporary application, repositioning confirmation, peeling, and re-application to achieve the desired location. Ideally, this repositioning process should be as short and frequent as possible to improve productivity. Using adhesive layers with low adhesion is effective in terms of ease of repositioning. However, the adhesive layer used to hold the abrasive pad to the platform must be able to withstand the strong adhesion or cohesion (holding force) of abrasive application.

[0006] Furthermore, even if a polishing pad with a single-sided adhesive layer can be quickly and temporarily fixed to the target position on the platform, there is still a problem of air being trapped between the platform and the adhesive layer when using rollers or presses to firmly fix the polishing pad to the platform. If some of the air trapped between the platform and the adhesive layer remains, the parallelism between the outermost surface of the polishing pad and the platform surface will be damaged, making it impossible to polish the object with high precision and smoothness, thus affecting the polishing accuracy. One approach is to suppress air entrainment by creating grooves on the surface of the adhesive layer on the side that contacts the platform to allow air to flow through. However, even with air flow paths created, the soft adhesive layer can still block these paths when the polishing pad is securely fixed to the platform. Sometimes, gaps cannot be completely removed, or time is wasted before the air can escape, which slows down semiconductor production.

[0007] For the adhesive layer constituting the double-sided adhesive sheet used to fix the polishing pad to the platform, strong adhesion, or cohesive strength (holding force) to withstand the shear forces applied during the polishing process, or chemical resistance to strong alkalinity and strong acidity in relation to the polishing fluid used during polishing is required. In particular, in CMP, since strong alkaline polishing fluids are mostly used, resistance to strong alkalis is strongly required.

[0008] This disclosure is made in view of the aforementioned background, and aims to provide a double-sided adhesive sheet for fixing a polishing pad to a platform. This adhesive sheet is for fixing polishing pads in high-precision CMP processing and is easy to reposition. It has excellent air expulsion properties and excellent adhesive properties (adhesion, cohesion (holding power), and chemical resistance in terms of resistance to strong alkalis and strong acids). [Methods for solving problems]

[0009] The inventors and others have made repeated efforts in their research and have found that the problem disclosed herein can be solved in the following states, thereby completing this disclosure. [1]: An adhesive sheet for fixing an abrasive pad with a release tab FA, comprising an adhesive layer A on one side of a sheet-like substrate and an adhesive layer B on the other side of the sheet-like substrate, wherein the surface of the adhesive layer A that is not in contact with the sheet-like substrate is in contact with the release tab FA. The adhesive sheet for fixing the abrasive pad with the release tab FA is characterized in that: The release liner FA is made of paperless plastic film. The outer surface of the release tab FA, which is not in contact with the adhesive layer A, has irregularities. In the Bekk smoothness test, The smoothness of the outer surface of the release tab FA, determined under the following condition 1, is 0.1 seconds to 30 seconds. The smoothness of the outer surface of the peeling sheet FA, determined under the following condition 2, is between 1 second and 500 seconds. Condition 1: The time it takes for the pressure to change from -50.7 kPa to -48.0 kPa. Condition 2: The time it takes for the pressure to change from -50.7 kPa to -29.3 kPa. [2]: An adhesive sheet for fixing an abrasive pad with a release tab FA as described in [1], wherein the outer side of the release tab FA has the same shape as the inner side of the release tab FA after being reversed. [3]: The adhesive sheet for fixing the abrasive pad with the release strip FA as described in [1] or [2] is characterized in that: the average height Rc of the unevenness of the outer surface of the release strip FA is 12 μm to 42 μm. [4]: An adhesive sheet for fixing an abrasive pad with a release tab FA as described in any one of [1] to [3], characterized in that: the cut-off level difference Rδc of the contour curve of the outer surface of the release tab FA is 5 μm to 25 μm. [5]: An adhesive sheet for fixing an abrasive pad with a release strip FA as described in any one of [1] to [4], characterized in that: the kurtosis Rku of the outer surface of the release strip FA is less than 3. [6]: An adhesive sheet for fixing an abrasive pad with a release tab FA as described in any one of [1] to [4], characterized in that: the shape of the protrusion on the outer surface of the release tab FA is irregular and amorphous when viewed from above. [7]: An adhesive sheet for fixing an abrasive pad with a release tab FA as described in any one of [1] to [6], characterized in that: the thickness of the release tab FA is 25 μm to 100 μm. [8]: An adhesive sheet for fixing an abrasive pad with a release tab FA as described in any one of [1] to [7], characterized in that: the average height Rc of the unevenness of the inner surface of the release tab FA is 12 μm to 42 μm. [9]: An adhesive sheet for fixing an abrasive pad with a release tab FA as described in any one of [1] to [8], characterized in that: the adhesive layer A is an acrylic adhesive layer.

[10] : The abrasive pad fixing adhesive sheet with release strip FA as described in any one of [1] to [9] is wound into a roll and the length of the roll in the width direction is 1000 mm or less.

[11] : An adhesive sheet for fixing an abrasive pad with a release tab FA and a release tab FB, characterized in that it comprises: an adhesive sheet for fixing an abrasive pad with a release tab FA as described in any one of [1] to

[10] , and a release tab FB. The surfaces of the release liner FB and the adhesive layer B that are not in contact with the sheet-like substrate are in contact. The release liner FB is made of paperless plastic film.

[12] : The abrasive pad fixing adhesive sheet with release strip FA and release strip FB as described in

[11] is wound into a roll and the length of the roll in the width direction is less than 1000 mm.

[13] : An adhesive sheet for fixing an abrasive pad with a release strip FA and a release strip FB as described in

[11] , wherein the length of the short side is less than 1000 mm.

[14] : An abrasive pad with a release tab FA and an adhesive layer A, comprising an abrasive pad and an adhesive layer for fixing the abrasive pad with a release tab FA as described in any one of [1] to

[10] , wherein, The abrasive pad is in contact with the adhesive layer B.

[15] : A method for fixing an abrasive pad to a platform via an adhesive sheet, characterized in that: the abrasive pad with a release sheet FA and an adhesive layer A as described in

[14] peels off the release sheet FA and attaches the adhesive layer A to the platform.

[16] : A method for manufacturing an adhesive sheet for fixing an abrasive pad with release tabs FA and FB, comprising a release tab FA, an adhesive layer A, a sheet-like substrate, an adhesive layer B, and a release tab FB, for fixing an abrasive pad with release tabs FA and FB. The manufacturing method comprises either step (Ia) or step (Ib), and step (II) the adhesive layer forming step, and The stacking steps in steps (III) and (IV) (Ia) Step of applying adhesive a to the inner surface of the peeled strip FA to form adhesive layer A. (Ib) Step of applying adhesive a to one side of the sheet substrate to form adhesive layer A. (II) The step of applying adhesive b to the peeled surface of the release sheet FB to form adhesive layer B. (III) The step of laminating the release sheet FA and the sheet-like substrate via the adhesive layer A. (IV) The step of laminating the release sheet FB and the sheet-like substrate via the adhesive layer B. The outer surface of the release tab FA, which is not in contact with the adhesive layer A, has irregularities. The outer surface of the release tab FA has the same shape as the inner surface of the release tab FA after being reversed. In the Beck smoothness test, The smoothness of the outer surface of the release tab FA, determined under the following condition 1, is 0.1 seconds to 30 seconds. The smoothness of the outer surface of the peeling sheet FA, determined under the following condition 2, is between 1 second and 500 seconds. Condition 1: The time it takes for the pressure to change from -50.7 kPa to -48.0 kPa. Condition 2: The time it takes for the pressure to change from -50.7 kPa to -29.3 kPa. [ ]

[17] : The method for manufacturing an adhesive sheet for fixing an abrasive pad with a release tab FA and a release tab FB according to

[16] , wherein the side of the release tab FA that is in contact with the adhesive layer A is subjected to a release treatment, and the average height Rc of the unevenness of the surface subjected to the release treatment is 12 μm to 42 μm.

[18] : A method for manufacturing an adhesive sheet for fixing an abrasive pad with release tabs FA and FB, comprising a release tab FA, an adhesive layer A, a sheet-like substrate, an adhesive layer B, and a release tab FB, for fixing an abrasive pad with release tabs FA and FB. The manufacturing method comprises the following steps (1) to (4), (1) The step of applying adhesive a to the surface of the release sheet FA, whose average height Rc of the surface after peeling treatment is 12 μm to 42 μm, to form an adhesive layer A. (2) The step of overlapping the sheet substrate on the surface of the adhesive layer A that is not in contact with the release sheet FA. (3) Applying adhesive b to the peeled surface of the release sheet FB to form adhesive layer B. (4) The step of overlapping the surface of the adhesive layer B, which is not in contact with the adhesive layer A, with the surface of the adhesive layer B, which is not in contact with the release liner FB. The outer surface of the release tab FA, which is not in contact with the adhesive layer A, has irregularities. In the Beck smoothness test, The smoothness of the outer surface of the release tab FA, determined under the following condition 1, is 0.1 seconds to 30 seconds. The smoothness of the outer surface of the peeling sheet FA, determined under the following condition 2, is between 1 second and 500 seconds. Condition 1: The time it takes for the pressure to change from -50.7 kPa to -48.0 kPa. Condition 2: The time it takes for the pressure to change from -50.7 kPa to -29.3 kPa.

[19] : A method for manufacturing an adhesive sheet for fixing an abrasive pad with release tabs FA and FB, comprising a release tab FA, an adhesive layer A, a sheet-like substrate, an adhesive layer B, and a release tab FB, wherein the method comprises an adhesive sheet for fixing an abrasive pad with release tabs FA and FB. The manufacturing method comprises the following steps (5) to (8), (5) The step of applying adhesive a to one side of the sheet substrate to form adhesive layer A. (6) The step of overlapping the surface of the release sheet FA, whose average height Rc of the peeled surface is 12 μm to 42 μm, with the surface of the adhesive layer A that is not in contact with the sheet substrate. (7) Applying adhesive b to the peeled surface of the release sheet FB to form adhesive layer B. (8) The step of overlapping the surface of the adhesive layer B, which is not in contact with the adhesive layer A, with the surface of the adhesive layer B, which is not in contact with the release liner FB. The outer surface of the release tab FA, which is not in contact with the adhesive layer A, has irregularities. In the Beck smoothness test, The smoothness of the outer surface of the release tab FA, determined under the following condition 1, is 0.1 seconds to 30 seconds. The smoothness of the outer surface of the peeling sheet FA, determined under the following condition 2, is between 1 second and 500 seconds. Condition 1: The time it takes for the pressure to change from -50.7 kPa to -48.0 kPa. Condition 2: The time it takes for the pressure to change from -50.7 kPa to -29.3 kPa.

[20] : A method for manufacturing an adhesive sheet for fixing an abrasive pad with release tabs FA and FB, comprising a release tab FA, an adhesive layer A, a sheet substrate, an adhesive layer B, and a release tab FB, wherein the manufacturing method comprises the following steps (9) to (12). (9) The step of applying adhesive b to the peeled surface of the release sheet FB to form adhesive layer B. (10) The step of overlapping the sheet substrate on the surface of the adhesive layer B that is not in contact with the release sheet FB. (11) The step of applying adhesive a to the surface of the release sheet FA, whose average height Rc of the surface after peeling treatment is 12 μm to 42 μm, to form an adhesive layer A. (12) The step of overlapping the surface of the adhesive layer A that is not in contact with the release liner FA on the surface of the sheet substrate that is not in contact with the adhesive layer B. The outer surface of the release tab FA, which is not in contact with the adhesive layer A, has irregularities. In the Beck smoothness test, The smoothness of the outer surface of the release tab FA, determined under the following condition 1, is 0.1 seconds to 30 seconds. The smoothness of the outer surface of the peeling sheet FA, determined under the following condition 2, is between 1 second and 500 seconds. Condition 1: The time it takes for the pressure to change from -50.7 kPa to -48.0 kPa. Condition 2: The time it takes for the pressure to change from -50.7 kPa to -29.3 kPa. [The effects of the invention]

[0010] This disclosure provides a double-sided adhesive sheet for fixing a polishing pad to a platform. It offers easy repositioning, excellent air expulsion, and superior adhesive properties (adhesion strength, cohesion (holding power), and chemical resistance to strong alkalis and acids). The polishing pad fixing adhesive sheet with release tab FA disclosed herein improves workability during adhesion and significantly enhances polishing accuracy in high-precision CMP processes. Simple Explanation of the Diagram

[0011] Figures 1A to 1D are schematic cross-sectional views showing different examples of adhesive sheets for fixing abrasive pads with release tabs FA according to embodiments of the present disclosure. Figure 1E is a schematic illustration of a rolled adhesive sheet for fixing an abrasive pad with a release tab FA. Figure 2A is a schematic diagram illustrating the test piece used in the Beck smoothness test. Figure 2B is a schematic cross-sectional view illustrating the method for performing the Beck smoothness test on this test piece. Figures 3A to 3G are schematic enlarged cross-sectional views of the stripping sheet FA. Figure 4A is a schematic cross-sectional view illustrating the unevenness of the surface of the release sheet FA disclosed herein. Figure 4B is a schematic cross-section illustrating the unevenness of the surface of the peeling sheet in the comparative example. Figures 5(a) and 5(b) are images of the outer surface of the peeling sheet FA in the embodiment. Figures 6(1) to 6(4) are explanatory diagrams showing an example of an irregular and amorphous pattern. Figures 7A-7D are schematic cross-sectional views illustrating the method of fixing an abrasive pad to a platform using an adhesive strip with a release tab as disclosed herein. Figures 8(a) to 8(d) are schematic diagrams illustrating the method for evaluating the adhesion workability of this embodiment. Figures 9(a) and 9(b) are schematic diagrams illustrating the air exhaust performance evaluation method of this embodiment. Implementation

[0012] The following describes an example of an embodiment that utilizes the disclosed method. Furthermore, the numerical values ​​"A~B" specifically designated in this specification represent values ​​A and above and B and below.

[0013] <Adhesive pad for fixing abrasive pads with release tabs (FA)> As shown in Figure 1A, one embodiment of the abrasive pad fixing adhesive sheet 1 with release tab FA disclosed herein has an abrasive pad fixing adhesive sheet 5 (hereinafter also referred to as "adhesive sheet") having an adhesive layer A on one side of a sheet substrate F and an adhesive layer B on the other side. The surface of the adhesive layer A of the abrasive pad fixing adhesive sheet 5 is covered and protected by the release tab FA. The contact surface of the release tab FA with the adhesive layer A corresponds to the release surface. The material of the release tab FA is a paperless plastic film. It can also be provided in a roll form, as shown in Figure 1E, in which the abrasive pad fixing adhesive sheet 1 with release tab FA is wound to a cylindrical member 6 called a core (also called core material) and the surface of the adhesive layer B is covered by the outer surface of the release tab FA (the surface not in contact with the adhesive layer A). Furthermore, in Figures 1A, etc., the unevenness of the surfaces of the release tab FA and the adhesive layer A is omitted from the illustration.

[0014] As another example of the adhesive sheet 1 for fixing the abrasive pad with release tab FA, as shown in FIG1B, the forms of the adhesive sheet 2 for fixing the abrasive pad including release tab FB covering the surface of adhesive layer B and release tab FA and release tab FB can be listed.

[0015] As shown in Figure 1C, the abrasive pad 3 with release tab FA disclosed herein has an abrasive pad PP deposited on the adhesive layer B of the adhesive sheet 1 for fixing the abrasive pad with release tab FA.

[0016] The polishing pad PP is fixed to the platform SP via the adhesive sheet 5. Specifically, the polishing pad 3 (Fig. 1C) with its own release tab FA is peeled off, and the polishing pad 4 with the adhesive layer A exposed is attached to the platform SP (Fig. 1D). The adhesive layer A in the adhesive sheet 5 is in contact with the platform SP, and the adhesive layer B is in contact with the polishing pad PP.

[0017] When attaching the polishing pad PP to the platform SP via the adhesive sheet 5, the surface of the polishing pad PP is gently warped and flexed from the end, and then slowly pressed using a roller or scraper to expel air while attaching it. If the adhesive sheet is twisted or uneven force is applied to the adhesive sheet 5 when attaching the adhesive layer A to the platform SP, large air pockets will form locally between the platform SP and the adhesive layer A. Furthermore, recently, there has been an increasing trend in the production of polishing pads (PP) towards increased thickness, extreme hardening, or extreme softening. Due to the increased thickness or extreme hardening of polishing pads, which makes them too rigid, the following problems arise: they cannot flex as effectively as before, and the rollers or scrapers used for smoothing cannot fully apply pressure to the surface of the polishing pad. On the other hand, because extremely soft polishing pads are easily flexed and bent, it is difficult to maintain a flexible state when smoothing the surface of the polishing pad using rollers or scrapers. In either case, it is impossible to quickly expel air from the adhesive interface or achieve uniformity across the entire interface, easily resulting in large localized air pockets. In addition, when the surface of the PP abrasive pad is pressed using rollers or scrapers, pressure is applied locally to the surface of the PP abrasive pad. In order to ensure that the pressure is applied to the entire surface of the PP abrasive pad in sequence, the surface of the PP abrasive pad is also the predetermined surface that is in contact with the object being abraded (the object being abraded), and there is also a requirement that too much force should not be applied.

[0018] The outer surface of the release fin FA in the adhesive sheet 1 for fixing the abrasive pad with the release fin FA disclosed herein has an unevenness specifically specified by the Beck smoothness test described later. An unevenness of equal size forms the unevenness of the surface of the adhesive layer A, which is in contact with the release fin FA. The surface of the adhesive layer A is a predetermined surface in contact with the platform SP. The adhesive layer A is printed with the same unevenness as the outer surface of the release fin FA, and the recesses on the surface of the adhesive layer A can be used as air passages (flow paths) to expel air between the platform SP and the adhesive layer A from the periphery to the outside, or to make it uniform across the entire adhesive interface. As a result, the generation of large, localized air accumulations between the platform SP and the adhesive sheet 5, which are parallel to the surface of the abrasive pad PP (the surface in contact with the abrasive object), can be suppressed and prevented.

[0019] The Beck smoothness of the outer surface of the release sheet FA is described. Beck smoothness is specified by Japanese Industrial Standards (JIS) P8119. A general description of the sequence of the Beck smoothness test is provided. (1) The test piece described later is placed on the plane of a glass (an annular glass component with a circular hole in the center connected to a vacuum container) that has undergone optical plane finishing. (2) While applying a pressure of 0.1 MPa to the rubber pressing plate placed on the test piece via the pressure plate, the pressure inside the vacuum container is reduced to -50.7 kPa. (3) After reaching -50.7 kPa, the decompression was stopped, and atmospheric pressure air was drawn in between the glass plane and the contact surface of the test piece. Here, for the pressure inside the vacuum container, the time for the pressure to change from -50.7 kPa to -48.0 kPa was measured under condition 1, and the time for the pressure to change from -50.7 kPa to -29.3 kPa was measured under condition 2. The ventilability of the surface of adhesive layer A can be evaluated based on these values. That is, under either condition 1 or condition 2, the shorter the time to restore the pressure to the specified pressure, the easier it is to ventilate.

[0020] The test piece is prepared as follows: First, a polyethylene terephthalate (PET) film with a thickness of 100 μm and an Rc of less than 0.5 μm on both sides is adhered to the adhesive layer B of the abrasive pad fixing adhesive sheet 1 with release tab FA. Then, it is cut in 50 mm squares, as shown in Figure 2A, to obtain a laminate formed by overlapping two of the films. A circular hole 7 with a radius of 5 mm (smaller than the circular hole in the center of the glass component) is made in the center of the obtained laminate to prepare the test sample 8. Then, as shown in Figure 2B, with the hole 7 of the test sample 8 directly above the central hole 9 of the glass component G, the outer surface of the lowermost release sheet FA in the figure is placed on the surface of the glass component G, and a rubber pressing plate E is placed on the upper surface of the uppermost PET film in the figure. Under the condition of applying a pressure of 0.1 MPa through the pressure plate H, suction and decompression are performed from the lower part of the central hole 9 of the glass component G to determine the smoothness of conditions 1 and 2. In the test sample 8, two abrasive pads with release tabs FA are overlapped using adhesive sheets 1. Therefore, half of the measured value is the result of the adhesive layer A of each abrasive pad with release tabs FA using adhesive sheets 1. That is, if the measured value is 2 seconds, the Beck smoothness of the outer surface of the release tab FA is 1 second.

[0021] Regarding the Beck smoothness of the outer surface of the release strip FA, in condition 1, the important value is 0.1 seconds to 30 seconds, more preferably 0.2 seconds to 15 seconds, even better 0.3 seconds to 5 seconds, and best 0.5 seconds to 4 seconds. The smoothness of condition 1 is related to the air movement and state in the very initial stage when the adhesive layer A and the platform SP come into contact, and is mainly related to position adjustment. That is, by having a smoothness of condition 1 of less than 30 seconds, large local air accumulation is less likely to occur when the adhesive layer A comes into contact with the platform SP, allowing for a tight seal by adsorbing the adhesive layer A onto the platform SP. If the position of the adhesive layer A in contact with the platform SP is appropriate and no position adjustment is required, and the smoothness of condition 1 is less than 0.1 seconds, the air permeability is too good, and the position of the adhesive layer A is more likely to shift. That is, by having a smoothness of condition 1 of 0.1 seconds or more, it is easier to maintain the position of the abrasive pad 4 with the abrasive pad fixing adhesive sheet adsorbed onto the platform SP.

[0022] In addition, regarding the smoothness of the outer surface of the release strip FA, in condition 2, it is important to be 1 second to 500 seconds, preferably 2 seconds to 300 seconds, more preferably 5 seconds to 200 seconds, even better 6 seconds to 100 seconds, and most preferably 9 seconds to 50 seconds. The smoothness of condition 2 is related to the air movement and state for several minutes to over ten minutes after the adhesive layer A is attached to the platform SP, and is mainly related to the air expulsion of the adhesion interface. With a smoothness of less than 500 seconds in condition 2, even if localized air accumulation occurs between the platform SP and the adhesive layer A, the air can easily become uniform across the entire adhesion interface through the concave areas, or be expelled from the periphery. With a smoothness of more than 1 second in condition 2, the adhesive layer A in contact with the platform SP adheres more firmly to the platform SP.

[0023] Furthermore, the surfaces of the release liner FB and the adhesive layer B (the predetermined surfaces that come into contact with the abrasive pad PP) do not need to have any special irregularities. When the polishing pad 3 is attached to the platform SP, since the attachment is done manually, large air pockets are easily formed between the adhesive layer A and the platform SP. On the other hand, when the polishing pad PP is attached to the adhesive layer B of the polishing pad fixing adhesive sheet 1 with the release tab FA, since the attachment is done mechanically rather than manually, large air pockets are less likely to form locally, unlike when the polishing pad 3 is attached to the platform SP.

[0024] The shape of the surface irregularities (cross-sections) of the release liner FA is illustrated using the schematic enlarged cross-sectional views in Figures 3A to 3G. For example, as shown in Figure 3A, the release liner FA has irregularities on its outer surface 11. Furthermore, the outer surface 11 has the same shape as its opposite inner surface 12 after being reversed. In the adhesive layer A, a pattern is transferred to reverse the irregularities of the inner surface 12 of the release liner FA. Therefore, the adhesive layer A forms the same shape as the outer surface 11 of the release liner FA. In Figure 3A, the inner surface 12 of the release liner FA is the surface in contact with the adhesive layer A, and the outer surface 11 represents the outer side of the release liner FA. For illustrative purposes, the surface of the release liner FA in contact with the adhesive layer A is sometimes referred to as the inner side of the release liner FA, and the surface not in contact is referred to as the outer side of the release liner FA. Regarding improving the alignment of the polishing pad 3 with the release tab FA and the platform SP, the top of the protrusion near the head of the outer surface 11 of the release tab FA, which forms the shape of the adhesive layer A in contact with the platform SP, is preferably as gently rounded as shown in Figure 3A, rather than being as flat as shown in Figure 3B. Furthermore, regarding improving the air venting performance of the adhesive layer, Figure 3A, with a wider recess on the outer side of the release tab FA (i.e., a wider recess in the adhesive layer A), is better than the case used in Figure 3B. Compared to Figure 3B, the recess on the outer side of the release tab FA in Figure 3C is wider, so in this respect, some improvement in the air venting performance of the adhesive layer A can be expected. However, because the recess on the outer side of the release tab FA is wider, there is a concern that the polishing accuracy of the polishing pad fixed to the platform using the adhesive layer formed therefrom may decrease.

[0025] Therefore, in order to improve alignment and air expulsion without reducing grinding accuracy, the average height Rc (hereinafter referred to as average height Rc) of the surface roughness curve element on the outer side of the release sheet FA is preferably 12 μm to 42 μm, more preferably 17 μm to 37 μm, and even more preferably 22 μm to 32 μm. Within this range, its uneven surface can be transferred to the adhesive layer A with high accuracy. Because the average height Rc of the outer side of the release sheet FA is 12 μm or more, the recesses are relatively deeper, thus even the surface of the adhesive layer A exhibits good air permeability under either condition 1 or condition 2 in the Beck smoothness test, improving alignment and air expulsion. In particular, it has a significant impact on air expulsion; after grinding, the grinding pad PP along with the adhesive sheet 5 can easily peel off from the platform SP. With the average height Rc of the outer surface of the release strip FA being less than 42 μm, the adhesive layer A with this average height Rc is transferred to the platform SP when the abrasive pad PP with the abrasive pad fixing adhesive strip is attached to the abrasive pad and abrasive pad is ground. The uneven shape does not easily affect the outermost surface of the abrasive pad PP that is in contact with the workpiece being ground, thus resulting in excellent grinding accuracy.

[0026] Regarding the shape of the uneven surface 11 on the outer side of the release sheet FA disclosed herein, the roundness or inclination of the protrusion, the interval between the uneven parts, and other uneven shapes can be more specifically grasped based on the two parameters: the cut level difference of the profile curve: Rδc and the kurtosis: Rku. The Rδc of the outer surface 11 of the release tab FA is preferably 5 μm to 25 μm, more preferably 10 μm to 20 μm, and even more preferably 12.5 μm to 19.0 μm. The Rδc of the outer surface 11 of the release tab FA is the difference in the horizontal direction in the height direction consistent with any two load length rates, with respect to the load curve (a curve obtained by plotting the ratio of the length of the solid part to the measured length in height order). In this disclosure, the two load length rates are defined as 0% and 50%. Because the Rδc of the outer surface 11 of the release tab FA is 5 μm or more, air accumulation is difficult to occur in the very early stages of adhesion, and the top of the protrusion of the adhesive layer A formed on the inner side of the release tab FA gently (lightly) contacts the platform SP. In other words, since the adhesive layer A is not so firmly bonded to the platform SP, the adhesive layer A can be peeled off with little resistance when it is temporarily in contact with the platform SP, making position adjustment easier. Furthermore, since adhesive layer A adheres, it is assumed that some deformation will occur when adhesive layer A is adhered to platform SP. That is, microscopically, it can be imagined that during adhesion, the small protrusions on the surface of adhesive layer A are flattened, and the concave areas will become relatively shallower. With the Rδc of the outer surface 11 of the release tab FA being less than 25 μm, when adhesive layer A is firmly attached to platform SP, adhesive layer A is not easily flattened, the depth of the concave areas is maintained, and air expulsion is improved.

[0027] Furthermore, the ku (rku) of the outer surface 11 of the release tab FA is preferably less than 3. An Rku of less than 3 on the outer surface 11 of the release tab FA indicates a rounded, convex shape. By contacting the rounded tip of the convex with the platform SP during attachment, alignment can be performed with an adhesive feel. In particular, by having an Rku of 1.5 or higher and less than 3 on the outer surface 11 of the release tab FA, workability during alignment is good, and it adheres firmly even under strong pressing and fixing, thus suppressing problems such as peeling during grinding, which is especially desirable.

[0028] Use diagrams to illustrate Rc, Rδc, and Rku. Figures 3A, 3D, and 3E show cases where Rc is at the same level. If Figure 3A represents the case where Rδc is 5 μm to 25 μm and Rku is less than 3, then in Figure 3D, where the inclination of the convex part is steeper than in Figure 3A, Rδc is larger than in Figure 3A, and Rku is less than 3. Similarly, in Figure 3E, where the inclination of the convex part is steeper than in Figure 3A, Rδc is larger than in Figure 3A, and the top of the convex part is sharp, therefore Rku is greater than 3. In addition, Figures 3F and 3G also depict the imaging with Rc at the same level as in Figure 3A. Since the concave-convex interval is wider than in the case of Figure 3A, Rδc is smaller than in the case of Figure 3A. In the case of Figure 3F, Rku is less than 3, and in the case of Figure 3G, Rku is greater than 3.

[0029] Rc, Rδc, and Rku are values ​​measured based on JIS B 0601 (2013). Specifically, they were measured using a laser microscope (Keyence VK-X100). Specifically, at 400x magnification, five images were continuously taken, each covering a field of view of approximately 460 μm in length and 640 μm in width (a total of 25 images). An area of ​​approximately 2300 μm in length and 3200 μm in width was defined as the entire field of view. The central area of ​​approximately 1840 μm in length and 2560 μm in width was defined as the measurement field of view. Rc, Rδc, and Rku were measured along the two diagonals of the measurement field of view, and their average values ​​were calculated. The same method was used to measure Rc and other parameters of the peeling sheet FA in the examples described later.

[0030] Figure 4A shows an image of the surface irregularity of the release liner FA disclosed herein, and Figure 4B shows an image of the surface irregularity of the outer surface 11 of the release liner FA-x in the comparative example, which is described as "dull". The irregularity in this disclosure differs from the irregularity of the so-called "dull" surface, which is intended for optical light removal. The irregularity of the outer surface of the release liner FA in this disclosure is large and rough. Since the irregularity of "dull" surface is small, it is difficult to directly transfer the irregularity shape of the outer surface of the release liner FA to the adhesive layer A. Even assuming that the irregularity of "dull" surface is transferred to the adhesive layer A, the height difference of the irregularity Rc, Rδc, and Rku in this disclosure is larger and the interval between the irregularities is wider than that of the so-called "dull" surface, which is good at optical light removal. Therefore, it shows an ideal shape for the initial position adjustment or air expulsion during the application process, and thus fixes the polishing pad PP parallel and smoothly on the platform SP.

[0031] The surface irregularities (top view) of the outer surface of the release strip FA are described below. The surface irregularities (top view) of the outer surface of the release strip FA in this disclosure can be regular patterns or designs such as grid patterns or water droplet patterns, but are preferably irregular and amorphous as shown below. An example of an image obtained by observing the outer surface of the FA strip using a laser microscope is shown in Figures 5(a) and 5(b). The black area in Figure 5(a) is a convex area, which is irregular and amorphous when viewed from above. As irregular and amorphous patterns and patterns in this disclosure, the patterns and patterns like Figures 6(1) ~ Figure 6(4) may be exemplified. Figure 6(1) is sometimes referred to as sand pattern, leather pattern, rock pattern, stone pattern, and pear skin pattern. Figure 6(2) shows a spot-like pattern, pattern known as floral spot in the field of ink or coating. Figure 6(3) is also known as flower spots, but for the patterns, patterns seen in decorative stickers, etc. of plastic models. In addition, Figure 6(4) is sometimes referred to as the dalmatian pattern. In the patterns and patterns shown in Figures 6(1) ~ Figure 6(4), the positions of the convex parts (black parts) and concave parts (white parts) are not regular, and no regularity was confirmed in terms of shape.

[0032] If the Beck smoothness of the surface on the outside of the stripping pad FA in adhesive pad fixation with stripping pad FA was in the range described in Condition 1, and Condition 2, there was no difference in position adjustment or air expulsivity when adhesive to the platform, regardless of whether the shape of the concave and convex overhead view was irregular and amorphous or regular and shaped. However, by means of irregular and amorphous patterns, patterns when viewed from above, thereby easily easing the bias of the force at the time of attaching, it is easy to adhere evenly. In addition, even if scratches are produced on the surface of the outer side of the stripping sheet FA to a degree that does not affect the performance, or spots are produced on the surface of the adhesive layer A, if the pattern, pattern is irregular and amorphous when viewed from above, it is not easy to attract attention, which is better in this regard.

[0033] As a method of obtaining adhesive sheet 1 fixation of grinding pad with stripping sheet FA with Beck smoothness in the specified range, enumerated methods of stripping sheet FA utilizing a surface with a bump with an average height Rc of 12 μm~42 μm. That is, a stripper FA' with a stripping layer (not shown) was prepared, and next, for which, as shown in Figure 7A , the strip FA' was passed between the metal roller R1 and the rubber roller R2 processed into the desired surface shape at high temperature, thereby inverting the surface shape of the metal roller R1 to prepare the stripped FA with an average height Rc of 12 μm~42 μm. Furthermore, in the case of inverting the surface shape of the transfer stripping FA by the rotation of the metal roller R1, its surface shape has a certain periodicity, but its periodicity has different implications from the said regularity when viewed from above. Furthermore, when measuring the Beck smoothness of an adhesive sheet 1 for fixing an abrasive pad with a release tab FA, formed using such an uneven release tab FA, the unevenness of the outer surface of the release tab FA is deformed (flattened) by pressure applied during the measurement. The deformation of the unevenness of the outer surface of the release tab FA is affected by the thickness or hardness of the adhesive layer A that is in contact with the inner surface of the release tab FA. For example, if the adhesive layer A is of the same type, a thicker layer is easier to mitigate stress, and therefore the unevenness of the outer surface of the release tab FA is flattened in a smoother manner. Therefore, the Beck smoothness value of the adhesive sheet 1 for fixing an abrasive pad with a release tab increases. The Beck smoothness of the adhesive sheet 1 for fixing an abrasive pad with a release tab FA is based on the deformation of the unevenness of the outer surface of the release tab FA caused by pressure and the deformation of the unevenness of the adhesive layer A that is in contact with the inner surface of the release tab FA. Therefore, the Beck smoothness value of the adhesive sheet 1 for fixing the abrasive pad with the release tab is related to the adhesion workability or air expulsion when the adhesive layer A is attached to the platform SP, the adhesion or holding force to the platform, the abrasive precision, etc.

[0034] The method disclosed herein for manufacturing an adhesive sheet for fixing an abrasive pad with release tabs FA and FB can be manufactured, for example, by the following method: having either step (Ia) or step (Ib), an adhesive layer forming step (II), and lamination steps (III) and (IV). (Ia) The step of applying adhesive a to the peeled surface (inner surface) of the release sheet FA to form an adhesive layer A. (Ib) The step of applying adhesive a to one side of the sheet substrate to form adhesive layer A. (II) The step of applying adhesive b to the peeled surface of the release sheet FB to form an adhesive layer B. (III) The step of laminating the release sheet FA and the sheet substrate via the adhesive layer A. (IV) The step of laminating the release sheet FB and the sheet substrate via the adhesive layer B. By means of the manufacturing method of the abrasive pad fixing adhesive sheet with release tab FA and release tab FB disclosed herein, an abrasive pad fixing adhesive sheet with release tab FA and release tab FB can be obtained, wherein the outer surface of the release tab FA has an uneven surface, and the outer surface of the release tab FA has the same shape as the inner surface of the release tab FA after being reversed. In the Beck smoothness test, the smoothness of the outer surface of the release tab FA under condition 1 is 0.1 seconds to 30 seconds, and the smoothness of the outer surface of the release tab FA under condition 2 is 1 second to 500 seconds.

[0035] More specifically, it can be manufactured using the following methods. (1) Apply adhesive a to the release layer of the release sheet FA and dry it as needed to form the adhesive layer A. (2) On the surface of the adhesive layer A that is not in contact with the release sheet FA, overlap the sheet substrate. (3) Apply adhesive b to the peeled surface of the release sheet FB and dry it as needed to form an adhesive layer B. (4) On the surface of the sheet substrate that is not in contact with the adhesive layer A, overlap the surface of the adhesive layer B that is not in contact with the release sheet FB. As a result, an adhesive sheet 2 for fixing an abrasive pad with a release sheet can be manufactured with a laminated structure as shown in Figure 7B, consisting of [release sheet FA / adhesive layer A / sheet substrate F / adhesive layer B / release sheet FB].

[0036] or, (5) Apply adhesive a to one side of the sheet substrate F and dry it as needed to form an adhesive layer A. (6) On the surface of the adhesive layer A that is not in contact with the sheet substrate F, the surface of the release sheet FA with an average height Rc of 12 μm to 42 μm of the surface that has been peeled is overlapped with the surface of the release sheet. (7) Apply adhesive b to the peeled surface of the release sheet FB and dry it as needed to form an adhesive layer B. (8) On the surface of the sheet substrate F that is not in contact with the adhesive layer A, overlap the surface of the adhesive layer B that is not in contact with the release sheet FB. Using this method, an adhesive sheet for fixing an abrasive pad with a release sheet can also be made with a laminated structure as shown in Figure 7B, consisting of [release sheet FA / adhesive layer A / sheet substrate F / adhesive layer B / release sheet FB].

[0037] or, (9) Apply adhesive b to the peeled surface of the release sheet FB and dry it as needed to form an adhesive layer B. (10) Overlap sheet substrate on the surface of the adhesive layer B that is not in contact with the release sheet FB. (11) On the surface of the release sheet FA with an average height Rc of 12 μm to 42 μm after the surface has been peeled, an adhesive a is applied and dried as needed to form an adhesive layer A. (12) On the surface of the sheet substrate that is not in contact with the adhesive layer B, overlap the surface of the adhesive layer A that is not in contact with the release sheet FA. Using this method, an adhesive sheet for fixing an abrasive pad with a release sheet can also be made with a laminated structure as shown in Figure 7B, consisting of [release sheet FA / adhesive layer A / sheet substrate F / adhesive layer B / release sheet FB]. Furthermore, in any case, the surface of the adhesive layer B (the predetermined surface in contact with the abrasive pad PP) is preferably without unevenness, so the release surface of the release sheet FB to which the adhesive b is applied is preferably smooth.

[0038] The adhesive can be applied using known methods such as roller coating, corner roller coating, die lip coating, die coating, reverse coating, screen printing, and gravure coating. After application, it can be dried using a hot air oven or infrared heater.

[0039] A polishing pad 4 with release tabs and adhesive layers is obtained by using various methods to fix the polishing pad with a laminated structure of [release tab FA / adhesive layer A / sheet substrate F / adhesive layer B / release tab FB]. The release tab FB is peeled off, as shown in Figure 7C, and the polishing pad PP is attached to the exposed adhesive layer B. Next, from the obtained polishing pad 4 with release sheet and adhesive layer, the release sheet FA covering the adhesive layer A is peeled off, thereby obtaining the polishing pad 3 including the adhesive layer A with the release sheet FA reverse-transfer printed on it. Then, as shown in FIG7D, the exposed adhesive layer A is adhered to the platform SP, thereby fixing the polishing pad PP to the platform SP via the adhesive sheet 5.

[0040] <Adhesive layer> In the adhesive sheet 5 for fixing the abrasive pad disclosed herein, adhesive layer A and adhesive layer B are located on the outermost surfaces of the adhesive sheet 5, respectively. The sheet substrate F can be a single layer or can be formed by laminating multiple components, and the number of layers is not particularly limited. The thickness of the adhesive layer A of the adhesive sheet 5 for fixing the abrasive pad is preferably 15 μm to 100 μm, and more preferably 30 μm to 70 μm. By setting the thickness of the adhesive layer A to 15 μm or more, adhesion is easily demonstrated. In addition, the thicker the thickness, the easier it is for the unevenness of the adhesive layer A formed by the release sheet FA to be flattened, and the worse the air permeability when attached to the platform SP. Therefore, by setting it to 100 μm or less, the unevenness shape required by this disclosure is easily maintained even under the pressure applied during the abrasive stroke. By being in a better range, the adhesion is excellent, and the undesirable situation of the adhesive layer shifting in the shear direction is suppressed when the adhesive sheet becomes hot during abrasion. Furthermore, the thickness is the average value obtained by measuring five arbitrary points using a Litematic VL-50B thickness gauge manufactured by Mitutoyo, with a Φ7.5 mm measuring head and a pressing pressure of 0.01 N. Regarding the thickness of the adhesive layer B, there are no particular restrictions as long as it can fix various abrasive pads. It is set to be less than 200 μm by combining the thickness of the adhesive layer A after removing the substrate layer, thereby reducing the proportion of the adhesive layer, which is a low-elasticity material, in the entire adhesive sheet and improving the abrasive accuracy.

[0041] In the adhesive layer A and adhesive layer B of the adhesive sheet disclosed herein, acrylic adhesives, elastic adhesives, carbamate adhesives, silicone adhesives, etc., can be used, or two or more can be used in combination. From the viewpoints of less gel formation, less likelihood of localized differences in elastic modulus, and easier control of adhesive force, acrylic adhesive layer using acrylic adhesive is preferred. Elastic adhesives or carbamate adhesives mostly use metal catalysts during synthesis, and silicone adhesives mostly use metal catalysts during curing. In contrast, acrylic adhesives have a lower content of metal catalysts, so they are less likely to affect CMP processing and have higher chemical resistance, which is also better from this point of view. In addition, to accommodate the wide variety of abrasive pad materials, adhesive layer B is preferably made of acrylic adhesive with a wide range of monomers.

[0042] <Acrylic adhesives> Acrylic adhesives contain acrylic copolymers and hardeners. They may also contain adhesive-improving resins. The acrylic copolymers are preferably carboxyl or hydroxyl groups, and more preferably (meth)acrylate resins with hydroxyl groups.

[0043] The (meth)acrylate resin is obtained by copolymerizing a monomer having hydroxyl groups with other monomers that do not have hydroxyl groups. That is, the (meth)acrylate resin is a copolymer containing units derived from monomers having hydroxyl groups and units derived from other monomers.

[0044] Examples of monomers containing hydroxyl groups include hydroxyalkyl methacrylates, or compounds formed by adding ε-caprolactone to said hydroxyalkyl methacrylates, with hydroxyalkyl methacrylates being preferred.

[0045] Specific examples of hydroxyalkyl methacrylates include 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, 3-hydroxypropyl methacrylate, 2-hydroxybutyl methacrylate, and 4-hydroxybutyl methacrylate, where the alkyl group has 1 to 4 carbon atoms. Specific examples of compounds formed by the addition of ε-caprolactone to hydroxyalkyl methacrylates include ε-caprolactone 1-molar adducts of 2-hydroxyethyl methacrylate, ε-caprolactone 2-molar adducts of 2-hydroxyethyl methacrylate, and ε-caprolactone 3-molar adducts of hydroxyalkyl methacrylates, where the alkyl group has 1 to 4 carbon atoms. However, this disclosure is not limited to these examples. These hydroxyl-containing monomers can be used individually or in combination. From the perspective that crosslinking with isocyanate curing agents results in closer molecular distances and improved chemical resistance, 2-hydroxyethyl (meth)acrylate is the preferred choice.

[0046] Other monomers that do not have hydroxyl groups can be listed as various monomers as shown below. Examples of alkyl methacrylates include: methyl methacrylate, ethyl methacrylate, n-propyl methacrylate, n-butyl methacrylate, isobutyl methacrylate, dibutyl methacrylate, tributyl methacrylate, isoamyl methacrylate, 2-ethylhexyl methacrylate, isononyl methacrylate, isodecanyl methacrylate, lauryl methacrylate, stearyl methacrylate, tributylhexyl methacrylate, etc., as well as alkyl methacrylates such as 2-acetylacetoxyethyl methacrylate and phenoxyethyl methacrylate.

[0047] The weight average molecular weight (Mw) of the acrylic copolymer is preferably 200,000 to 1,800,000, more preferably 500,000 to 1,500,000. With a weight average molecular weight (Mw) of 200,000 or higher, the adhesive easily acquires cohesive strength capable of withstanding strong shear forces; with a value below 1,800,000, excellent heat resistance is achieved, and adhesion to abrasive materials is less likely to decrease; and with an even better range, performance is improved.

[0048] Methods for polymerizing monomers include, for example, solution polymerization, bulk polymerization, suspension polymerization, and emulsion polymerization, but this disclosure is not limited to these polymerization methods. Among these polymerization methods, solution polymerization is preferred in terms of the direct usability of the resulting reaction mixture.

[0049] <Elastic adhesive system> The elastic adhesive system comprises an elastomer and an adhesive-improving resin. The elastomer is preferably a styrene-isoprene block copolymer.

[0050] Styrene-isoprene block copolymers exist in both linear and radial structures. The linear structure exhibits high flexibility, resulting in excellent adhesion to various substrates and superior performance in terms of both adhesion and heat resistance. Therefore, linear structures comprising triblock copolymers (styrene-isoprene-styrene, SIS) or diblock copolymers (styrene-isoprene, SI) are preferred. A linear styrene-isoprene block copolymer refers to a linear copolymer formed by the bonding of styrene and isoprene blocks.

[0051] The styrene-isoprene block copolymer preferably contains 20% to 40% styrene per 100% by weight. The diblock content is preferably 15% to 70% by weight. By having the styrene content and diblock content within the aforementioned ranges, it can exhibit excellent cohesive adhesive properties, improved holding power, and enhanced resistance to pharmaceutical solutions in high-humidity environments.

[0052] Examples of styrene-isoprene block copolymers include, but are not limited to, Kraton D1119 (manufactured by Kraton, 22% wt% styrene, 66% wt% diblock), Kraton D1126 (manufactured by Kraton, 21% wt% styrene, 30% wt% diblock), and Kraton D1117 (manufactured by Kraton, 17% wt% styrene, 33% wt% diblock). Two or more copolymers may be used in combination as needed.

[0053] Additionally, natural rubber may be included if the required performance range is not compromised. There are no particular limitations on the type of natural rubber, but it is preferable to use kneading rollers to achieve a Mooney viscosity of, for example, 10 to 100. Other elastomers or natural rubbers are not limited to these; one or more may be used alone or in combination.

[0054] Silicone-based adhesives Silicone-based adhesives can utilize materials known as silicone resins. Specifically, examples include organopolysiloxanes with silanol groups at both ends of their molecular chains, obtained by partially dehydrating and condensing organopolysiloxanes containing tri-organosiloxane units (represented by R3SiO0.5, where R indicates a substituted or unsubstituted monovalent hydrocarbon group) with SiO2 units. These can be obtained as silicone-based adhesives KR-101-10, KR-120, KR-130, and X-40-3068 (all manufactured by Shin-Etsu Chemical Industry Co., Ltd.). The curing methods for silicone-based adhesives generally include curing using peroxides such as benzoyl peroxide, and curing using a platinum catalyst reacting with organopolysiloxanes containing Si-H bonds; either method can be used, or they can be combined.

[0055] <Adhesion-improving resin> Examples of adhesive-imparting resins include: rosin esters, polymerized rosin, hydrogenated rosin, disproportionated rosin, maleic acid-modified rosin, fumaric acid-modified rosin, rosin phenol resins, and other rosin-based resins; terpene-based resins such as α-pinene resin, β-pinene resin, dipentene resin, aromatic modified terpene resin, hydrogenated terpene resin, terpene phenol resin, acid-modified terpene resin, and styrene-modified terpene resin; alkylphenol resins, coumarone-based resins, styrene-based resins, petroleum-based resins, or copolymers thereof. Terpene phenol resins are preferred. The adhesive-imparting resin may be used alone or in combination of two or more.

[0056] Hardening agent Hardeners can be added to adhesives as needed. The peel force during self-scraping on a grinding mill platform varies from high to low adhesion, therefore, hardeners can be added to control adhesion. As hardeners, isocyanate-based, aziridine-based, metal chelate-based, and epoxy-based hardeners can be used as needed, without compromising the desired performance. In particular, from the viewpoint of cohesion and heat resistance, isocyanate-based hardeners are preferred for addition to acrylic adhesives. These hardeners can be used alone or in combination of two or more.

[0057] <Other Additives> Among the various adhesives used to form the adhesive layer in the adhesive sheet disclosed herein, known additives such as antioxidants and anti-aging agents, fillers, pigments, dyes, diluents, plasticizers, polymerization inhibitors, ultraviolet absorbers, ultraviolet stabilizers, and coupling agents may be included as needed, and two or more additives may be used in combination. Furthermore, the amount of additives added only needs to be set to obtain the desired physical properties.

[0058] <Removal Tablet FA>, <Removal Tablet FB> Release sheets FA use paperless plastic film. Release sheets FB, for example, have a release layer formed by coating a release agent onto a sheet substrate such as paper, plastic film, or synthetic paper. In CMP processing, it is preferable to use a release sheet with a highly cleanable plastic film as the sheet substrate. The plastic film used for the release sheet FA is preferably a polyethylene terephthalate film, which is easy to process with a metal roller and is inexpensive. Furthermore, compared to cutting or laser processing, processing with a metal roller is less likely to introduce foreign matter, resulting in a cleaner product. In the example processing with a metal roller, a release sheet with a thickness of 25 μm to 100 μm is preferred, more preferably 45 μm to 80 μm. Within this range, it is easy to transfer a shape identical to the desired shape formed on the metal surface to the release sheet (transferability), and the outer and inner sides of the release sheet FA have the same shape after reversal (reversibility). Moreover, through a series of processes such as coating the inner surface of the release sheet FA and making the pattern on the surface of the resulting adhesive layer A match the shape of the inner surface of the release sheet FA, the raised pattern of the metal roller can be reproduced well on the surface of the adhesive layer A. Regarding the transfer of the uneven surface of the release sheet FA to the surface of the adhesive layer A, the average height Rc of the release sheet FA is preferably 12 μm to 42 μm, more preferably 17 μm to 37 μm, and even more preferably 22 μm to 32 μm. By being within the preferred range, its uneven surface can be transferred to the adhesive layer A with high precision.

[0059] The plastic film used for the release sheet FB is preferably an inexpensive and highly smooth polyethylene terephthalate film. Furthermore, there is no particular limitation on the thickness of the release sheet FB, but it is preferably 10 μm to 200 μm to give the film toughness and easy peeling. Release agents used in release sheets FA and FB include, for example, silicone resins, alkyd resins, melamine resins, fluorinated resins, and acrylic resins. Among these, silicone resins are preferred.

[0060] <Sheet substrate> The sheet substrate F disclosed herein is preferably a non-woven fabric or a plastic film. Examples of plastic films include polyolefins such as polyethylene and polypropylene, polyesters such as polyethylene terephthalate, polyphenylene sulfide (PPS), nylon, triacetyl cellulose, cyclic olefins, polyimide, and polyamide. Polyethylene terephthalate films, which are inexpensive to manufacture and exhibit excellent chemical resistance and smoothness, are particularly preferred.

[0061] There are no particular limitations on the thickness of the sheet substrate, but it is preferably 5 μm to 200 μm, more preferably 25 μm to 75 μm, and even more preferably 50 μm to 75 μm. Within the preferred range, the unevenness of adhesive layer A will not affect adhesive layer B or the abrasive pad, providing appropriate toughness and improving workability during application. Within the even preferred range, workability is further improved.

[0062] The sheet-like substrate disclosed herein can also undergo an easy-bonding treatment to improve the adhesion between adhesive layer A and adhesive layer B. The easy-bonding treatment can be performed using known methods such as a dry method involving corona discharge or a wet method involving the application of an anchoring agent. When using acrylic adhesives in the formation of the adhesive layer, it is preferable to use a substrate that has undergone an easy-bond treatment to improve adhesion. On the other hand, when using elastic adhesives, if an easy-bond treatment using corona discharge is performed, the adhesive layer is more likely to peel off from the sheet substrate. Therefore, it is preferable to apply the elastic adhesive to the surface where the easy-bond treatment has not been performed.

[0063] The thickness of the adhesive sheet 5 for fixing the abrasive pad, comprising adhesive layer A, sheet substrate, and adhesive layer B, is preferably 80 μm to 300 μm, and more preferably 100 μm to 200 μm. With a thickness of 80 μm or more, processing can be performed uniformly without force bias during lamination when integrated with the abrasive pad PP. With a thickness of 300 μm or less, a roll shape can be used when manufacturing the adhesive sheet 5, increasing productivity. Within this optimal range, the force of the platform is appropriately transmitted to the abrasive pad during grinding, improving grinding accuracy.

[0064] <Utilization Form> An example of the utilization form of the adhesive sheet for fixing the abrasive pad disclosed herein will be described. As shown in Figures 1B and 7B, the abrasive pad fixing adhesive sheet 2 with release tab FA can also be provided, in which release tabs FA and FB cover each side of the abrasive pad fixing adhesive sheet. As shown in Figure 1A, it can also be provided in a state where the release tab FA only covers the adhesive layer A side of the abrasive pad fixing adhesive sheet. In the configuration of Figure 1A, as shown in Figure 1E, the abrasive pad fixing adhesive sheet 1 with release tab FA can be wound around a cylindrical member 6 called a core (also called core material), and the other sides of the release tab FA (the sides that are not in contact with the adhesive layer A) cover the surface of the adhesive layer B, thereby providing a rolled abrasive pad fixing adhesive sheet with release tab FA.

[0065] As shown in Figures 1C and 7C, an abrasive pad PP with release tab FA and adhesive layer A is formed by surface-accumulating an adhesive layer B on an abrasive pad with release tab FA and adhesive layer A. Subsequently, as shown in Figures 1D and 7D, the release liner FA is peeled off to expose the adhesive layer A, and the polishing pad 3 with adhesive layer A is attached to the platform SP. The adhesive layer A in the polishing pad fixing adhesive sheet 5 is in contact with the platform SP, and the adhesive layer B is in contact with the polishing pad PP.

[0066] Abrasive pads, also known as abrasive cloths, abrasive mats, or abrasive PADs, are components that come into contact with the surface of the object being abraded and abrade it. Abrasive pads can be single-layered (containing a single component) or multi-layered (comprising multiple components). Examples of raw materials for the outermost layer of an abrasive pad include urethane-based, non-woven fabrics, and suede-like fabrics. In multi-layered pads, urethane-based foams, polyethylene foams, and polypropylene foams are used as cushioning materials in the inner layers.

[0067] Examples of suitable adhesive sheets for fixing abrasive pads include: adhesive sheets for fixing abrasive pads with a laminated structure of release tab FA / adhesive layer A / sheet substrate / adhesive layer B, which are wound into a roll and have a length of 1000 mm or less in the width direction; or adhesive sheets for fixing abrasive pads with a laminated structure of release tab FA / adhesive layer A / sheet substrate / adhesive layer B / release tab FB. Additionally, another suitable example is an adhesive sheet for fixing abrasive pads with a laminated structure of release tab FA / adhesive layer A / sheet substrate / adhesive layer B / release tab FB, where the length of the short side is 1000 mm or less.

[0068] The adhesive sheet for fixing a polishing pad disclosed herein exhibits strong adhesion and cohesion (holding force) capable of withstanding the shear forces applied during the polishing process. Furthermore, it demonstrates excellent chemical resistance to the polishing fluids used during polishing, particularly against strong alkalinity and acidity. In particular, since strongly alkaline polishing fluids are mostly used in CMP, the adhesive sheet for fixing a polishing pad with a release tab disclosed herein is especially suitable as a sheet for high-precision CMP machining. [Example]

[0069] The present disclosure will be described in more detail below with reference to embodiments, but the present disclosure is not limited to the following embodiments. Furthermore, in the examples, "parts" refers to "parts by weight" and "%" refers to "% by weight".

[0070] [Molecular weight] In the following examples, molecular weight refers to the weight-average molecular weight of polystyrene determined by gel permeation chromatography (GPC). The determination was performed using GPC-8020 (manufactured by Tosoh Corporation), with tetrahydrofuran as the dissolution buffer. Three TSK gel SuperHM-M (manufactured by Tosoh Corporation) columns were used as the column temperature at 40°C, a flow rate of 0.6 mL / min, a sample concentration of 0.3%, and an injection volume of 10 μL.

[0071] [Non-volatile components] The non-volatile component is the value obtained by dividing the mass of the sample after heating (1 g) at 170°C for 10 minutes by the mass of the sample before heating. For commercially available products, the value calculated based on the manufacturer's specified method may also be used.

[0072] (Adhesive) <Preparation of a solution for acrylic adhesive (P-1)> In a four-necked flask equipped with a stirrer, reflux condenser, nitrogen inlet tube, and thermometer, 500 g of ethyl acetate was heated in a water bath while nitrogen gas was introduced. Then, a mixture consisting of 360 g of BA (n-butyl acrylic acid), 120 g of 2-EHA (2-ethylhexyl acrylic acid), 10 g of AA (acrylic acid), 5 g of HEA (hydroxyethyl acrylate), and 0.5 g of AIBN (azobisisobutyronitrile) as an initiator was added dropwise to the ethyl acetate mixture, and the reaction was carried out under reflux for 8 hours. After the reaction, 110 g of ethyl acetate was added to obtain a solution of (meth)acrylate resin p-1 with a weight average molecular weight (Mw) of 510,000 (45% non-volatile components). Then, 100 parts of a solution of (meth)acrylate resin p-1 and 3 parts of isocyanate-based curing agent (Mitsubishi Chemical Corporation (Mytec GP105A): an adduct of toluene diisocyanate and trimethylolpropane) were stirred and mixed, and methyl ethyl ketone was added as a solvent to prepare a solution of acrylic adhesive (P-1) (45% non-volatile component).

[0073] <Preparation of a solution for acrylic adhesive (P-2)> In a four-necked flask equipped with a stirrer, reflux condenser, nitrogen inlet tube, and thermometer, 500 g of ethyl acetate was heated in a water bath while nitrogen gas was introduced. Then, a mixture consisting of 120 g of BA (n-butyl acrylate), 360 g of 2-EHA (2-ethylhexyl acrylate), 20 g of AA (acrylic acid), and 0.3 g of AIBN (azobisisobutyronitrile) as an initiator was added dropwise to the ethyl acetate mixture, and the reaction was carried out under reflux for 8 hours. After the reaction, 110 g of ethyl acetate was added to obtain a solution of (meth)acrylate resin p-2 with a weight average molecular weight (Mw) of 800,000 (45% non-volatile components). Then, 100 parts of a solution of (meth)acrylate resin p-2 and 3 parts of isocyanate-based curing agent (Mitsubishi Chemical Corporation (Mytec GP105A): an adduct of toluene diisocyanate and trimethylolpropane) were stirred and mixed, and methyl ethyl ketone was added as a solvent to prepare a solution of acrylic adhesive (P-2) (45% non-volatile component).

[0074] <Preparation of a solution for acrylic adhesive (P-3)> A solution of 100 parts (45% non-volatile component) of (meth)acrylate resin p-2, 10 parts of O-130P (manufactured by Adeka, epoxidized soybean oil), and 3 parts of isocyanate-based hardener (manufactured by Mitsubishi Chemical Corporation (Mytec GP105A): adduct of toluene diisocyanate and trimethylolpropane) was stirred and mixed, and methyl ethyl ketone was added as a solvent to prepare a solution of acrylic adhesive (P-3) (45% non-volatile component).

[0075] <Preparation of a solution for an elastic adhesive system (P-4)> In a four-necked flask equipped with a stirrer, thermometer, reflux cooler, dropping device, and nitrogen inlet tube, 100 parts of Quintac 3270 (manufactured by ZEON Corporation, Japan, with a styrene content of 24% by weight and a diblock content of 67% by weight), an elastomer, and appropriate amounts of methyl ethyl ketone and toluene were added under a nitrogen atmosphere. The flask was then slowly heated to an internal temperature of approximately 50°C for 3 hours. After heating, the flask was cooled to a temperature below approximately 40°C. Under these conditions, 39 parts of YS Polyster T130 (manufactured by Yasuhara Chemical Co., Ltd., softening point 130±5℃, hydroxyl value 60 mgKOH / g) as the adhesive-imparting resin, 10 parts of O-130P (manufactured by Adeka Co., Ltd., epoxidized soybean oil), and 2 parts of Irganox 1010 (manufactured by BASF Japan Co., Ltd., anti-aging agent) as the anti-aging agent were added and diluted with methyl ethyl ketone and toluene. Stirring continued until the adhesive-imparting resin dissolved, and then 1 part of isocyanate-based hardener (manufactured by Mitsubishi Chemical Co., Ltd. (Mytec GP105A): an adduct of toluene diisocyanate and trimethylolpropane) was added to obtain a solution of elastic adhesive (P-4) (40% non-volatile components).

[0076] Peeling tablets <fa-1>Manufacturing A PET release sheet "RF2PETCS001-50" (thickness: 50 μm, single-sided silicone release treatment, Rc: 0.2 μm) manufactured by IMX Corporation (approximately 30 cm × 30 cm) was passed between a metal roller and a rubber roller with a PG7 pattern (sand texture) owned by Contract Resin Industries Co., Ltd., under the conditions of temperature: 220°C, pressure: 5 MPa, and speed: 3 m / min, thereby obtaining a release sheet FA-1 with the sand texture pattern transferred on it. The average height Rc of the unevenness on the outer surface of the peel FA-1, measured using a laser microscope (Keyence VK-X100) and the method described above, was 6.1 μm. Furthermore, the thickness of the PET release sheet is the average value obtained by measuring five arbitrary points using a Litematic VL-50B thickness gauge (manufactured by Mitutoyo) with a Φ7.5 mm measuring head and a pressing pressure of 0.01 N.

[0077] Peeling tablets <fa-2> ~ <fa-6>Manufacturing Instead of the metal roller with PG7 pattern owned by Contract Resin Industries, metal rollers with PG16, PG12, PG14, PG18, and PG68 patterns owned by Contract Resin Industries are used. Otherwise, under the same processing conditions as for release sheet FA-1, release sheets FA-2 to FA-7 with sand-textured patterns are obtained.

[0078] Peeling tablets <fa-7> ~ <fa-10>Manufacturing After obtaining release plates FA-3, FA-4, FA-5, and FA-6, each release plate is passed between a smooth metal roller and a rubber roller under the conditions of temperature: 110℃, pressure: 3.0 MPa, and speed: 0.5 m / min, thereby obtaining release plates FA-7, FA-8, FA-9, and FA-10.

[0079] Peeling tablets <fa-11>Manufacturing Instead of the metal roller with PG7 pattern owned by Contract Resin Industries, a metal roller with a grid pattern (200 μm line width, 26 μm line height, 1400 μm × 1400 μm grid pattern) owned by Contract Resin Industries was used. Under the same processing conditions as in the case of release sheet FA-1, that is, "RF2PETCS001-50" was passed between the metal roller and the rubber roller at a temperature of 220°C, a pressure of 5 MPa, and a speed of 3 minutes / m, to obtain a release sheet FA-11 with a grid pattern.

[0080] Peeling tablets <fa-12>Manufacturing Instead of the metal roller with PG7 pattern owned by Contract Resin Industries, a metal roller with PG27 pattern owned by Contract Resin Industries is used. Otherwise, under the same processing conditions as for release sheet FA-1, a release sheet with a sand-textured pattern is obtained.

[0081] Peeling tablets <fa-13>Manufacturing The "RF2PETCS001-50" is passed between a metal roller with a grid pattern (200 μm line width, 26 μm line height, 1400 μm × 1400 μm grid pattern) owned by Contract Resin Industries Co., Ltd., which replaces the metal roller with the PG7 pattern owned by Contract Resin Industries Co., Ltd., and a rubber roller, thereby obtaining a release sheet FA-13 with the aforementioned sand texture pattern.

[0082] The Rc of the outer surface of the release strip FA of each release strip FA-1 to FA-12 is described in detail below. FA-1: Transferred with PG7 (sand texture). Rc: 6.1 μm FA-2: Printed with PG16 (sand-textured pattern). Rc: 8.3 μm FA-3: Printed with PG12 (sand-textured pattern). Rc: 11.5 μm FA-4: Transferred with PG14 (sand texture). Rc: 21.2 μm FA-5: Printed with PG18 (sand-textured pattern). Rc: 33.1 μm FA-6: Printed with PG68 (sand-textured pattern). Rc: 38.7 μm • FA-7: Processing of the release FA-3 stripper. Rc: 9.7 μm • FA-8: Processing of the release FA-4 stripper. Rc: 16.3 μm FA-9: Processing of the release FA-5 stripper. Rc: 28.7 μm FA-10: Processed from FA-6 stripper sheets. Rc: 35.8 μm FA-11: Printed with a checkered pattern. Rc: 25.4 μm FA-12: Transferred with PG27 (sand texture). Rc: 48.0 μm FA-13: Transferred with a checkered pattern. Rc: 4.2 μm

[0083] <Flap FB> •FB-1:RF2PETCS001-50, manufactured by IMX, PET release sheet (thickness: 50 μm, single-sided silicone release treatment, Rc: 0.2 μm)

[0084] <Other peeling tablets> • FH-21: A film formed by coating the glossy side (opposite to the matte side) of a matte polyester film (Unitika, Emblet "PTH-38") with BYK's silicone treatment agent "BYK 300" at a rate of 0.1 g / m² using a coil bar, and then creating a release surface. Rc: 1.5 μm • FH-22: A film formed by applying BYK's silicone treatment agent "BYK 300" at a rate of 0.1 g / m² to the matte surface of a matte polyester film (Unitika, Emblet "PTH-38"), opposite to the glossy surface, using a wire rod, and then creating a release surface. Rc: 1.5 μm

[0085] <Sheet substrate F> • Sheet substrate F-1: PET25, PET film manufactured by Unitika (thickness: 25 μm) • Sheet substrate F-2: PET75, PET film manufactured by Unitika (thickness: 75 μm) • Sheet substrate F-3: PET5, PET film manufactured by Unitika (thickness: 5 μm)

[0086] <Example 1> Manufacturing of an adhesive sheet for fixing abrasive pads and an adhesive sheet for fixing abrasive pads with a release tab. On the release surface (inner surface) of the release sheet FA-1, a solution of adhesive P-1 is applied using a doctor blade to a thickness of 50 μm after drying. The solution is then dried in an oven at 80°C to form an adhesive layer A-1. On the surface of the adhesive layer A-1, a sheet substrate F-1 is bonded together using a hand roller. Separately, on the release surface of the release sheet FB-1, a solution of adhesive P-2 was applied using a doctor blade to form a 50 μm thick layer after drying, and then dried in an oven at 80°C to form an adhesive layer B-1. Next, the sheet-like substrate F-1, on the side opposite to the adhesive layer A-1, is pressed together with a hand roller to the side opposite to the release tab FB-1 of the adhesive layer B-1, thereby obtaining an adhesive sheet for fixing an abrasive pad with a laminated structure of [adhesive layer A-1 / sheet-like substrate F-1 / adhesive layer B-1], wherein the release tab FA-1 is attached to the adhesive layer A-1 and the release tab FB-1 is attached to the adhesive layer B-1. The properties of the obtained adhesive sheet (Beck smoothness, average roughness Rc, cut level difference Rδc, and kurtosis Rku of the outer surface of the release sheet FA) are determined according to the method described later. In addition, the properties of the obtained adhesive sheet (adhesion workability, air expulsion, adhesion, alkali resistance, holding power, and grinding accuracy) are evaluated according to the method described later.

[0087] <Examples 2~Examples 11> Instead of release sheet FA-1, as shown in Table 1, release sheets for coating adhesive P-1 solution are set as FA-2 to FA-11. Otherwise, in the same manner as in Example 1, adhesive sheets for fixing abrasive pads with release sheets are obtained.

[0088] <Examples 12~16> Instead of release sheet FA-1, release sheet FA-5 or release sheet FA-3 is used. Furthermore, as shown in Table 1, instead of adhesive P-1 solution, adhesive P-4 solution is used. The thickness of adhesive layer A is changed, or the sheet substrate is changed, or the type or thickness of adhesive layer B is changed. Otherwise, in the same manner as in Example 1, an adhesive sheet for fixing abrasive pads with release sheets is obtained.

[0089] <Comparative Examples 1 to 4> Instead of release sheet FA-1, as shown in Table 1, release sheets for coating adhesive P-1 solution are set as FH-21, FH-22, FA-12, and FA-13. Otherwise, in the same manner as in Example 1, adhesive sheets for fixing abrasive pads with release sheets are obtained.

[0090] [Properties of adhesive sheets] <Beck smoothness> The release sheet FB covering the adhesive layer B is peeled off using the abrasive pad fixing adhesive sheet with release sheet prepared in the example and comparative example. The exposed adhesive layer B is then bonded to a 100 μm PET film (Rc: 0.2 μm) and cut to a size of 50 mm square. Next, two samples are overlapped, and a hole is formed in the center using a Thomson mold with a radius of 5 mm to create a test sample. The test sample was placed on a glass plate with the outer surface of the peeling sheet FA of the test sample in contact with the glass plate of the Beck smoothness meter (manufactured by Kumagai Riki Kogyo Co., Ltd.), and the hole of the test sample was located directly above the central circular hole on the glass plate. A rubber pressing plate was placed on the upper surface of the PET film at the top of the test sample. Under a pressure of 0.1 MPa applied by the pressing plate, suction was performed from the lower part of the central circular hole of the glass component to reduce the pressure to -50.7 kPa. After reaching -50.7 kPa, the decompression was stopped. The time for the change from -50.7 kPa to -48.0 kPa was measured five times under condition 1 and condition 2, and the time for the change from -50.7 kPa to -29.3 kPa was measured. The average value was calculated and then divided by the number of overlapping sheets, i.e., 2. In addition, if any of the five measurements exceeded 1000 seconds, the measurement was stopped, which is recorded in the table as ">1000". In addition, if there is one instance of poor smoothness and measurement time of less than 0.1 seconds in 5 measurements, or if the air inflow is too large and the vacuum degree cannot be raised to -50.7 kPa, it will be recorded as "0" in the table.

[0091] <Rc、Rδc、Rku> For the surface of the sample being measured, a vapor-deposited film with a thickness of approximately 20 nm was formed using a vacuum device (MSP15) with a vacuum device (Keyence VK-X100) at the outermost surface of the sample, by means of laser reflection from the laser. The target was Pt-Pd, and the working time was 1 minute. Measurements were performed using a laser microscope based on JIS B 0601 (2013).

[0092] [Evaluation of adhesive sheet] <Attachment Operations (Position Adjustment)> The order is explained according to Figures 8(a) to 8(d). As shown in Figure 8(a), the adhesive sheet for fixing the abrasive pad with release tab prepared in the examples and comparative examples was cut to a size of 210 mm square. The release tab FB was peeled off to expose the adhesive layer B. It was then bonded to a smooth glass plate G1 (approximately 300 g) with a thickness of 3 mm and a square of 200 mm at an environment of 23°C and 50%RH. The adhesive sheet 5 extending from the four sides of the glass plate was removed using a cutter to obtain a sample (hereinafter referred to as sample) 21 for evaluating the adhesion workability of the [glass / adhesive sheet 5 / release tab FA] structure with a square of 200 mm. Furthermore, in Figures 8(a) to 8(d), the illustrations of the stacking state of the adhesive sheet and the stacking state of the adhesive sheet and the release tab FA are omitted. As shown in Figure 8(b), two types of frames, 200 mm square and 150 mm square, are written on approximately the center of one side of a 300 mm square glass plate, i.e., the substrate G2, using an oil-based multi-purpose pen with a thickness of 1 mm, to create an evaluation substrate (hereinafter referred to as the substrate). As shown in Figure 8(c), the release tab FA of sample 21 is peeled off to expose the adhesive layer A. The sample, which is 200 mm square, is then placed such that each side extends at least 10 mm beyond the two sides of the 200 mm square outer frame written on the substrate G2. Furthermore, the surface on which the sample is placed is the opposite side to the surface with the two frames written on it. Immediately after placement, the sample was peeled off from the substrate G2, as shown in Figure 8(d). Its position was adjusted to align with the 200 mm square frame of the substrate G2, and the time until re-attachment was measured (placement ~ peeling ~ re-attachment). Furthermore, five randomly selected individuals performed the work, and each was scored as follows. The overall workability was then evaluated based on the combined scores of the five individuals. The score for the application of the adhesive is calculated as follows. 3 points: Can be easily aligned with the frame line within 10 seconds. 2 points: Can be aligned within 10 seconds to less than 15 seconds. 1 minute: Can be aligned within 15 seconds to less than 30 seconds. 0 points: It will take more than 30 seconds. The evaluation criteria for adhesion workability are as follows. S: 13-15 points A:10 points-12 points B: 7-9 points C: 4-6 points D: 0-3 points

[0093] <Evaluation of air emission performance> As shown in Figure 9(a), immediately after the evaluation of the adhesion performance, a 500 g weight (41 mm in diameter × 63 mm in height) for a pan balance was placed at the center of each of the five evaluation samples 21, and the samples were left to stand for 180 seconds. Then, as shown in Figure 9(b), the weight was removed, and the number of air pockets with a diameter of 5 mm or more existing inside the 150 mm square frame line on the side of the adhered material G2 (i.e., the back of the 300 mm square glass plate), and the presence or absence of air pockets with a diameter of 10 mm or more, were scored as follows. Furthermore, the air expulsion performance was evaluated based on the total score of the five samples. The air emission performance score is scored as follows. 3 points: There are 0 air accumulation sections with a diameter of 5 mm or more inside the frame. 2 points: There are 1 to 2 air accumulation sections with a diameter of 5 mm or more inside the frame, and there are no air accumulation sections with a diameter of 10 mm or more. 1 point: There are 3 to 5 air pockets with a diameter of 5 mm or more inside the frame, and there are no air pockets with a diameter of 10 mm or more. 0 points: There are more than 5 air pockets with a diameter of 5 mm or more inside the frame, and some of them have an air pocket with a diameter of 10 mm or more. The evaluation criteria for air emission performance are as follows. S: 13-15 points A:10 points-12 points B: 7-9 points C: 4-6 points D: 0-3 points

[0094] [Preparation of adhesive samples for determining adhesive properties] Evaluation of the initial adhesion of adhesive layer A At 23°C and 50%RH, an adhesive pad with a self-release tab was used to fix the abrasive pad. The release tab FB was peeled off, and the exposed adhesive layer B was bonded to a 25 μm PET film. The film was then cut into pieces 25 mm wide and 100 mm long to prepare a sample for adhesion evaluation. Subsequently, the release tab FA was peeled off, and the exposed adhesive layer A was overlapped onto a stainless steel plate. A 2 kg roller was used to press adhesive layer A onto the stainless steel plate once, and the plate was left to stand for 24 hours. Then, according to the JIS Z1528 test method, the adhesion of adhesive layer A (to stainless steel, SUS) was measured using a tensile testing machine at 23°C and 50%RH under conditions of a peel angle of 180 degrees and a peel speed of 0.3 m / min. The obtained test values ​​are shown in Table 1.

[0095] <Evaluation of Chemical Resistance> For the self-adhesion evaluation sample, the release liner FA was peeled off, and the exposed adhesive layer A was overlapped onto a stainless steel plate. A 2 kg roller was then applied back and forth once to press adhesive layer A onto the stainless steel plate. Subsequently, while remaining adhered to the stainless steel plate for no more than 30 minutes, the sample was immersed in a sodium hydroxide aqueous solution with a pH of 11.5 and placed at 40°C for 24 hours. Afterward, the sample was removed from the sodium hydroxide aqueous solution, washed with water, and placed at 23°C and 50% RH for 1 hour. The adhesive force is measured using the same method as described in the "Determination of Initial Adhesion Force," denoted as "Adhesion Force After Impregnation." The difference between the initial adhesive force and the adhesion force after impregnation is calculated. The smaller the difference, the better the chemical resistance. The evaluation criteria for chemical resistance are as follows. A: The difference in adhesion is less than 1.5 N / 25 mm. Extremely good. B: The difference in adhesion is greater than 1.5 N / 25 mm and less than 2.0 N / 25 mm. Good. C: The difference in adhesion is greater than 2.0 N / 25 mm and less than 3.0 N / 25 mm. Practical application is possible. D: The difference in adhesion is greater than 3.0 N / 25 mm. Target not met. In CMP processes where various chemicals are used depending on the object being ground, chemical resistance is strongly required. S is the best, A is suitable, B is generally usable, C has limited applications, and D is unusable.

[0096] <Evaluation of retention ability> For the self-adhesion evaluation test specimen, the release tab FA was peeled off, and only a 25 mm wide × 25 mm long area of ​​the exposed adhesive layer A was overlapped onto the stainless steel plate. A 2 kg roller was then applied back and forth once to press the adhesive layer A onto the stainless steel plate. Afterward, the specimen was placed at 23°C and 50% RH for 20 minutes. Subsequently, at 80°C, a 1 kg weight was added to the end of the specimen not attached to the stainless steel plate, and the specimen was placed in a 180-degree direction. After 24 hours, the displacement of the adhesion position (in mm) was measured. Additionally, in the case where the specimen completely shifted from the adhered object and fell, the time until it fell to the ground was measured. The evaluation criteria for retention force are as follows. S: Offset less than 0.1 mm. A: 0.1 mm or more and less than 1.0 mm. B: Offset is greater than 1.0 mm and less than 5.0 mm. C: It falls after 180 minutes. D: It falls within 180 minutes. The smaller the offset, the less likely it is to shift or peel off during grinding, thus firmly fixing the grinding pad and making it suitable for various grinding steps. S is the best case, A is suitable, B is generally usable, C has limited applications, and D is unusable.

[0097] <Grinding accuracy> The adhesive sheet for fixing the abrasive pad with a self-release tab is peeled off. The release tab FB is peeled off, and the non-abrasive surface of the abrasive pad (CMP cloth manufactured by Musashino-Denshi, Φ200 mm, ordinary type) is overlapped on the exposed adhesive layer B. The abrasive pad with the adhesive sheet is made by bonding under the conditions of roller temperature: 80℃, pressure: 0.1 MPa, and speed: 1.0 m / min. Using the MA-200 manufactured by Musashino-Denshi as a polishing device, the release liner FA was peeled off from the prepared polishing pad with adhesive pads, and the exposed adhesive layer A was attached to an aluminum platform. Semi-polishing was performed under the following conditions. (condition) Table speed: 100 rpm Head speed: 105 rpm Polishing object: A test piece made by cutting a 200 mm wafer (75 μm thick) with a polycrystalline silicon layer (500 nm) on its surface into 3 cm square pieces. Grinding pressure: 10.0 kPa Grinding time: 15 min Polishing slurry: Colloidal silicon dioxide polishing slurry #80 manufactured by Musashino-Denshi Co., Ltd. The polished test piece was washed with water, and the water droplets were removed by air. Then, the thickness of the polycrystalline silicon was measured at three points: one point at the center and two arbitrary points outside the center, using a film thickness measuring instrument FE-300 manufactured by Otsuka Electronics. The polishing accuracy was evaluated according to the following criteria based on the difference between the maximum and minimum film thickness. S: less than 10 nm. A: 10 nm or more and less than 20 nm. B: 20 ​​nm or more and less than 30 nm. C: 30 nm or more and less than 50 nm. D: 50 nm or higher. In CMP grinding requiring precision, case S is the best, case A is suitable, case B is generally usable, case C has limited applications, and case D is unusable.

[0098] [Table 1] Table 1 Example Comparative example 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 1 2 3 4 FB peeling tablets FB-1 FB-1 FB-1 Adhesive layer B P-2 P-2 P-2 P-2 P-3 P-3 P-2 Thickness (μm) 50 50 100 20 50 50 50 Sheet substrate F-1 F-1 F-1 F-1 F-2 F-3 F-1 Thickness (μm) 25 25 25 25 75 5 25 Adhesive layer A P-1 P-4 P-1 P-1 P-1 P-1 P-1 Thickness (μm) 50 50 100 20 50 50 50 Rc (μm) 5.9 8.1 11.2 20.8 32.9 38.1<​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​ Beckpin Slippage (seconds) Condition 1 28.3 15.4 4.2 1.3 0.3 0.1 11.1 3.4 0.9 0.2 2.2 0.3 5.2 3.2 0.3 0.3 390.8 >1000 0 61.2 Condition 2 461 206 56 16 5 1 170 49 10 2 307 4 106 44 6 4 >1000 >1000 0 732 Rc(μm) 6.1 8.3 11.5 21.2 33.1 38.7 9.7 16.3 28.7 35.8 25.4 33.1 11.4 11.4 33.1 33.1 3.1 0.1 48.0 4.2 Rδc(μm) 4.0 2.6 8.7 13.3 18.9 21.4 6.4 10.4 15.6 19.8 4.9 18.9 8.7 8.7 18.9 18.9 4.3 0.1 33.5 1.3 Rku Less than 3 Less than 3 Less than 3 Less than 3 Less than 3 Less than 3 Less than 3 Less than 3 Less than 3 Less than 3 3 or more Less than 3 Less than 3 Less than 3 Less than 3 Less than 3 3 or more Less than 3 Less than 3 3 or more Adhesion workability C B A S S S B A S S B S B A A A D D S D Air exhaust C C A S A B B A S B C A B B A A D D S D Adhesion 13 13 12 12 11 10 12 12 12 12 13 14 18 6 12 14 12 12 7 12 Chemical resistance (alkali) S S S S S C S S S B A S S S S S S S D S Holding force S S S S A C S S S B S A A A A A S S D S Grinding accuracy C C A S A C B S S B B B B B S B D D D D

[0099] 1: Adhesive sheet for fixing grinding pads with peeling disc FA 2: Adhesive sheet for fixing grinding pads with peelers FA and FB 3: Grinding pad with release fin FA / Grinding pad with release fin FA and adhesive layer A / Grinding pad with adhesive layer A / Grinding pad 4: Abrasive pads with adhesive pads for fixing abrasive pads / Abrasive pads with adhesive layer A / Abrasive pads with release tabs and adhesive layers 5: Adhesive sheet for fixing abrasive pads / adhesive sheet 6: Cylindrical components 7: Hole 8: Samples for determination 9: Round hole 11: The outer surface 12: Inner surface 21: Sample A: Adhesive layer B: Adhesive layer E: Rubber pressing plate F: Sheet substrate FA: Release sheet / peeling sheet covering the surface of adhesive layer A FA': Precursor tablet / release tablet of FA (a type of FA release tablet) FA-x: Peeling tablet FB: Release sheet / peel plate covering the surface of adhesive layer B G: Glass components G1: Glass plate G2: Adhesive H: Pressure plate PP: Abrasive Pad R1: Metal Roller R2: Rubber roller SP: Platform < / fa-7> < / fa-2>

Claims

1. An adhesive sheet for fixing an abrasive pad with a release tab FA, comprising an adhesive layer A on one side of a sheet-like substrate and an adhesive layer B on the other side of the sheet-like substrate, wherein the surface of the adhesive layer A not in contact with the sheet-like substrate is in contact with the release tab FA, characterized in that: the release tab FA is made of a paperless plastic film; the outer surface of the release tab FA not in contact with the adhesive layer A has irregularities, and the outer surface of the release tab FA has the same shape as the inner surface of the release tab FA after reversal; the adhesive layer A and the adhesive layer B are respectively selected from at least one of the group consisting of acrylic adhesives, elastic adhesives, carbamate adhesives, and silicone adhesives; in the Beck smoothness test, the smoothness of the outer surface of the release tab FA, determined under the following condition 1, is 0.1 seconds to 30 seconds, and the smoothness of the outer surface of the release tab FA, determined under the following condition 2, is 1 second to 500 seconds. Condition 1: The time it takes for the pressure to change from -50.7 kPa to -48.0 kPa; Condition 2: The time it takes for the pressure to change from -50.7 kPa to -29.3 kPa.

2. The adhesive sheet for fixing the abrasive pad with a release tab FA as described in claim 1, wherein, The average height Rc of the unevenness on the outer surface of the release strip FA is 12 μm to 42 μm.

3. The adhesive sheet for fixing the abrasive pad with a release tab FA as described in claim 2, wherein, The cut-off level difference Rδc of the uneven contour curve of the outer surface of the stripper FA is 5 μm to 25 μm.

4. The adhesive sheet for fixing the abrasive pad with a release tab FA as described in claim 2, wherein, The ku of the unevenness of the outer surface of the peeling strip FA is less than 3.

5. The adhesive sheet for fixing the abrasive pad with a release tab FA as described in claim 4, wherein, The protrusions on the outer surface of the peeling strip FA have an irregular and amorphous shape when viewed from above.

6. The adhesive sheet for fixing the abrasive pad with a release tab FA as described in claim 1, wherein, The thickness of the release strip FA is 25 μm to 100 μm.

7. The adhesive sheet for fixing the abrasive pad with a release tab FA as described in claim 1, wherein, The average height Rc of the unevenness on the inner surface of the release strip FA is 12 μm to 42 μm.

8. The adhesive sheet for fixing the abrasive pad with release tab FA as described in claim 1, which is wound into a roll and the length of the roll in the width direction is 1000 mm or less.

9. An adhesive sheet for fixing an abrasive pad with a release tab FA and a release tab FB, characterized in that it comprises: an adhesive sheet for fixing an abrasive pad with a release tab FA as described in any one of claims 1 to 8, and a release tab FB, wherein the release tab FB and the adhesive layer B are in contact with the non-contact surfaces of the sheet-like substrate, and the release tab FB is made of a paperless plastic film.

10. The adhesive sheet for fixing the abrasive pad with release tabs FA and FB as described in claim 9, which is wound into a roll and the length of the roll in the width direction is 1000 mm or less.

11. The adhesive sheet for fixing the abrasive pad with release tabs FA and FB as described in claim 9, wherein, The length of the shorter side is less than 1000 mm.

12. An abrasive pad with a release tab FA and an adhesive layer A, comprising an abrasive pad and an adhesive layer for fixing the abrasive pad with a release tab FA as described in any one of claims 1 to 8, wherein, The abrasive pad is in contact with the adhesive layer B.

13. A method for fixing an abrasive pad to a platform via an adhesive sheet, characterized in that: the abrasive pad with a release detacher FA and an adhesive layer A as described in claim 12 is used to peel off the release detacher FA and attach the adhesive layer A to the platform.

14. A method for manufacturing an adhesive sheet for fixing an abrasive pad with release tabs FA and FB, comprising a release tab FA, an adhesive layer A, a sheet substrate, an adhesive layer B, and a release tab FB, wherein the manufacturing method includes any one of the following steps (Ia) and (Ib), an adhesive layer forming step (II), and lamination steps (III) and (IV): (Ia) applying adhesive a to the inner surface of the release tab FA after release treatment to form adhesive layer A; (Ib) applying adhesive a to one side of the sheet substrate to form adhesive layer A; (II) applying adhesive b to the surface of the release tab FB after release treatment to form adhesive layer B; (III) laminating the release tab FA and the sheet substrate via adhesive layer A; and (IV) laminating the release tab FB and the sheet substrate via adhesive layer B. The adhesive layer A and the adhesive layer B are each selected from at least one of the groups consisting of acrylic adhesives, elastic adhesives, carbamate adhesives, and silicone adhesives. The outer surface of the release sheet FA that is not in contact with the adhesive layer A has irregularities. The outer surface of the release sheet FA has the same shape as the inner surface of the release sheet FA after reversal. In the Beck smoothness test, the smoothness of the outer surface of the release sheet FA is 0.1 seconds to 30 seconds under the following condition 1, and the smoothness of the outer surface of the release sheet FA is 1 second to 500 seconds under the following condition 2: Condition 1: Time from -50.7 kPa to -48.0 kPa; Condition 2: Time from -50.7 kPa to -29.3 kPa.

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