Mass flow control system

Abstract

This invention relates to a mass flow control system (300) for providing fluid mass flow under control, comprising a support plate (301) having a fluid interface on a first side (302) for connecting valve modules (304), each fluid interface having a plurality of channels (345), each channel (345) being connected to an inlet channel (306, 307) or to one of a plurality of outlet channels (309), and having a plurality of valve modules (304) each having at least one actuator (359), and having an outlet connector (347) for connecting to an outlet... One of the outlet channels (309) is connected and has a motherboard (363) carrying an electronic processing unit (368), a supply interface (369), and a control interface (370). In the outlet channel (309), a flow resistance (201) is provided. A sensor port (364) is provided in the flow resistance (201) area, and pressure sensors (361, 362) are configured to the sensor port (364). The electronic processing unit (368) is connected to the pressure sensors (361, 362), the supply interface (369), and the control interface (370).

Description

Technical Field

[0001] The present invention relates to a mass flow control system for providing a controlled mass flow of a fluid. Such a system is used, for example, in automation technology to accurately provide a defined mass flow of the fluid, particularly compressed air, to one or more consumers, such as pneumatic cylinders or other pneumatically actuated systems. Prior Art

[0002] The object of the present invention is therefore to provide a modular mass flow system for providing a fluid mass flow under control, wherein the module can be tailored to different consumers, in particular to a plurality of different consumers. Summary of the Invention

[0003] This object of the present invention is achieved by a mass flow controller for providing a fluid mass flow under control, comprising a carrier plate having a fluid interface on a first side for connecting a valve module, and each fluid interface is equipped with a plurality of channel ports, each channel port is connected to a first inlet channel constructed on the carrier plate or to one of a plurality of outlet channels constructed on the carrier plate, and a plurality of valve modules each having at least one valve combination, each valve module being designed to influence at least one fluid mass flow, and each valve module having an inlet connector which is sealedly connected to the inlet channel via a channel port, and an outlet connector which is sealed via a channel port. The main board is connected to one of the outlet channels in a sealed manner and has a main board. The main board carries an electronic processing unit, a power supply interface, and a power control interface for connecting to the valve module. A flow resistance is provided in each outlet channel, and each outlet channel is configured with a sensor port in the flow resistance area. The sensor port leads to the second side of the carrier plate away from the first side of the carrier plate, and the sensor port is allocated to a pressure sensor provided on the main board. The processing unit is electrically connected to the pressure sensor and the supply interface and the control interface. The processing unit is constructed to interpret the pressure signal of the pressure sensor and control the valve module connected to the control connector to perform mass flow control.

[0004] The design of the fluid mass flow control system of the present invention allows it to be used in various configurations. For example, two or more valve modules can be connected to the carrier plate, allowing two consumers to be supplied by a single fluid mass flow rate. Alternatively, the first of two valve modules can initially supply a consumer, and if the first module's supply fails, the second module can be switched. The number of valve modules in use can also be tailored to the specific usage. Thus, for example, five valve modules can be installed to supply five different consumers.

[0005] The number of valve modules can be flexibly adjusted because the necessary interpretation of sensor data and the control commands for the valve combinations in the valve module are passed through the electronic processing unit located on the main board. The electronic processing unit can be implemented as a processor or microcontroller. This eliminates the need for a dedicated controller in the valve module.

[0006] The carrier plate serves, on the one hand, to mechanically secure the valve module and, on the other hand, to provide a fluid connection between a fluid source, the valve module, and one or more users. For example, the carrier plate is made of plastic or metal, particularly aluminum, and preferably has a substantially square shape.

[0007] The valve modules are preferably arranged adjacent to each other along an arrangement direction with opposing side surfaces, in particular a large flat surface of each valve module. The housings of the valve modules each have two mutually parallel side surfaces connected to each other by narrow sides, and at least one of the two narrow sides is designed to be attached to a carrier plate. Preferably, the narrow side is flat, and the carrier plate is also flat, at least in the fluid interface region.

[0008] For fluid connection, a plurality of fluid channels are provided on the carrier plate. These channels connect an inlet channel to at least one channel opening of the fluid interface. A fluid source can be connected to the inlet channel via an inlet coupling. Furthermore, a further channel opening is assigned to the fluid interface, which is connected to at least one of the plurality of outlet channels. A consumer can be connected to the at least one outlet channel via an outlet coupling. The fluid source and the consumer can preferably be connected to the inlet channel or the plurality of outlet channels via pipeline connections. For a convenient pipeline coupling, the inlet coupling and the outlet coupling can, for example, be pneumatic plugs.

[0009] The housing of each valve module can be, for example, square and have a plurality of parallel boxes on a front end perpendicular to the narrow side to be mounted on the carrier plate, preferably arranged at the same interval and at the same distance from one another. Each box extends from the front end into the valve module housing in the form of a recess along an axis of extension. The boxes preferably have a substantially constant cross-section, and their openings preferably lie on an opening plane parallel to the front end. Each box is designed to accommodate a valve assembly, which can be pushed into the box from the opening along a first axis of extension.

[0010] The valve assembly includes a supply connector and an outlet passage, each configured to serve as an inlet for either the supply passage or the outlet passage of the valve assembly. A valve seat and a valve element are disposed in the outlet passage. The valve element is movable between a closed position and an open position of the valve seat, thereby varying the cross-section of the outlet passage. The valve element is coupled to an actuator that controls the valve seat between the open and closed positions in response to an electrical control signal.

[0011] Preferably, the valve element releases a maximum cross-section of the outlet passage in an open position and completely closes the outlet passage in a closed position.

[0012] Flow resistors provided in each outlet channel of the carrier plate allow for fluid mass flow measurement in each outlet channel using a differential pressure method in conjunction with pressure sensors mounted on the main board. The flow resistors can be designed, for example, as throttles, shutters, or Laval nozzles. The pressure sensors assigned to each outlet channel protrude into a sensor port located in the flow resistor area and are fluidically connected to the outlet channel. Sealing elements are provided to ensure a fluid-tight connection between the pressure sensor and the carrier plate. The pressure sensors are mounted directly on the main board, and the electrical sensor signals provided by the sensors are routed to the electronic processing unit via signal lines integrated into the main board for processing.

[0013] The electronic processing unit is connected to a supply board of each valve module via the electrical control interface of the valve module. Thus, the electronic processing unit can send control signals to the valve combination in the valve module.

[0014] In the present invention, an electronic processing unit performs mass flow control on each outlet channel to provide a predetermined fluid mass flow rate to the outlet channel connector of each outlet channel. To this end, the electronic processing unit implements valve module control based on the measured fluid mass flow rate. It can be configured so that all valve assemblies assigned to an outlet channel are operated simultaneously and each has a substantially identical valve opening. In one such operation mode, when the actuators of each valve assembly are in the open position, releasing the maximum cross-section of each outlet channel, all valve assemblies assigned to the outlet channel can fully open their valve openings to provide the maximum fluid mass flow rate.

[0015] Another approach could be to pair two valves from a valve module to form a first group, and pair another two valves from the valve module to form a second group. Initially, only the first group is used to control the fluid mass flow rate, while the second group only begins operating if at least one valve combination in the first group fails, thus serving as a backup.

[0016] The power supply interface on the mainboard is used to supply current to the electrical and electronic components on the mainboard, especially to the valve module via each control interface.

[0017] Furthermore, the supply interface can provide communication between the fluid mass flow system and a higher-level controller, such as a networked automation system. To this end, the supply interface is designed to connect the fluid mass flow system to a communication system. Purely by way of example, the supply interface communicates based on communication standards such as OPC UA (Open Platform Communication Unified Architecture), bus communication systems, and IO Link. In this case, data can be exchanged via the supply interface, for example, with a higher-level controller, particularly a programmable logic controller (SPS), a command layer, or a cloud.

[0018] In the present invention, all components necessary for mass flow control system operation, such as the electronic processing unit, power supply interface, electrical control interface, and pressure sensor, are located on a mainboard. The mainboard allows for central supply and control of all components, particularly the valve module. All steps required for mass flow control can be initiated and monitored by components on the mainboard. This eliminates the need for costly separate boards, such as a sensor board and a control board.

[0019] Further advantageous embodiments of the invention are found in the dependent claims.

[0020] In a preferred design, a first sensor port is located before the flow resistance, and a second sensor port is located after the flow resistance. A first pressure sensor assigned to the first sensor port and a second pressure sensor assigned to the second sensor port are each designed as absolute pressure sensors. The pressure loss induced by the flow resistance can be detected as a pressure differential between the sensor signals of the first and second pressure sensors, and the fluid mass flow rate is calculated based on this differential. The calculations required for this are performed within the electronic processing unit. The electronic processing unit is further configured to send an appropriate control signal to the valve module to control the fluid mass flow rate to the desired value when the actual calculated fluid mass flow rate differs from a predetermined desired fluid mass flow rate. In this embodiment, in addition to the first and second pressure sensors, an additional pressure sensor can be configured on the mainboard to measure ambient pressure, and its sensor signal is also processed by the electronic processing unit.

[0021] Alternatively, the first and second pressure sensors can be designed as relative pressure sensors, with an ambient pressure sensor provided on the mainboard to measure ambient pressure. This allows the use of simpler relative pressure sensors and the detection of ambient pressure to correct the measurement results before calculating the fluid mass flow rate.

[0022] Alternatively, the first sensor port is positioned before the flow resistor in the flow direction, and the second sensor port has a first inlet channel and a second inlet channel. The first inlet channel opens into the outlet channel before the flow resistor in the flow direction, and the second inlet channel opens into the outlet channel after the flow resistor in the flow direction. The first pressure sensor assigned to the first sensor port is designed as an absolute pressure sensor, and the second pressure sensor assigned to the second sensor port is designed as a differential pressure sensor. Alternatively, the first pressure sensor is designed as a relative pressure sensor, and the second pressure sensor is designed as a differential pressure sensor. An ambient pressure sensor is provided on the main board to measure ambient pressure. This advantageously allows a differential pressure sensor to be used for direct differential pressure measurement of the pressure loss induced by the flow resistor, and this can be used together with the absolute pressure measured before the flow resistor to calculate mass flow.

[0023] Advantageously, the valve module has multiple outlet connections and includes multiple valve assemblies, each of which is connected to an inlet connection and to an outlet connection or to multiple outlet connections. Thus, for example, in a valve module with four valve assemblies, two valve assemblies can be fluidically connected to a first outlet connection and two valve assemblies to a further outlet connection, with each outlet connection being sealed to an outlet channel via a channel opening. The mass flow rate of the fluid supplied by each outlet channel can also be determined. Thus, for example, two different consumers can each be supplied with a fluid mass flow rate simultaneously or alternately, and the fluid mass flow rate supplied by each can be controlled. Alternatively, a fluid separation can be provided between the first outlet connection and the second outlet connection, with each consumer being supplied with a different fluid.

[0024] In one advantageous design, the valve module includes a channel plate configured to connect multiple valve assemblies within the valve module. The channel plate is configured to be attachable to a front end of the valve housing. A first connecting channel and a second connecting channel are formed on the channel plate. The first connecting channel is fluidically connected to the supply connections of each valve assembly, while the second connecting channel is fluidically connected to the outlet connections of each valve assembly. The inlet connection of the first connecting channel is a channel port that is connected to the inlet channel, while the outlet connection of the second connecting channel is sealedly connected to one of the outlet channels via one or more channel ports. Depending on the number of valve assemblies provided in the valve module and / or the mass flow rate of the fluid being supplied, the first and second connecting channels can be interchanged to achieve different configurations by interchanging the channel plates.

[0025] For example, it is conceivable that only two valve assemblies are provided in a first box and a second box of the valve module. In this case, the first connecting channel and the second connecting channel each have only two connections to the valve assemblies.

[0026] The supply interface preferably has a data and power interface for connecting to a supply module. A swappable supply module is inserted into the supply interface and connected to the supply interface via the data and power interfaces. This allows the supply module to be interchanged to adapt the supply interface to different conditions. For example, a supply module for connecting to a 50 Hz power supply or a supply module for connecting to a 60 Hz power supply can be provided. It is also preferred that the supply module include an AC unit that can be integrated into various AC systems, allowing operation with different AC systems by swapping the module.

[0027] In another design of a mass flow control system, a carrier plate has multiple recesses, each of which accommodates a plug segment of a valve module, providing a plug-in connection between the valve module and the main plate in an engaged state. This provides a primary fixation of the valve module on the carrier plate, and ensures proper alignment of the connectors. After proper alignment, the valve module can be secured to the carrier plate, for example, using other fixing elements.

[0028] Advantageously, the actuator of the valve assembly is a piezoelectric bender. This piezoelectric bender is typically strip-shaped and can be a unimorph, bimorph, or trimorph, with or without a conductive intermediate layer. This piezoelectric bender can function as a proportional valve. By varying the bending radius of the piezoelectric bender, the position of the valve element connected to it changes, thereby influencing the cross-section of the outflow channel. The mass flow of the fluid released by the valve assembly can be adjusted by control signals from a suitable processing unit.

[0029] The preferred valve module includes a supply board with a high-voltage circuit that supplies electrical energy to the actuators, which are designed as piezoelectric bender elements. High voltage, in this context, refers to a DC voltage in the 300 V range. The supply board is compatible with the valve assembly inserted into the valve module. However, it remains controlled by the processing unit, so that the high-voltage circuit contained within the valve module converts the control signals from the processing unit into high-voltage signals suitable for the actuators. This significantly reduces the complexity of the supply board, and the high-voltage circuit can be adapted to the valve assembly within the valve module. Advantageously, when the valve module is replaced, the high-voltage circuit required to supply the valve assembly is also replaced.

[0030] In an advantageous embodiment of the present invention, the processing unit is designed to individually control each actuator. Thus, for each valve combination, the cross-section of each valve can be adjusted independently of the cross-sections of the other valves. In particular, each actuator can be electronically controlled by the processing unit using a separate set of parameters.

[0031] Advantageously, the flow resistance is designed as a turbulence throttle. Using a turbulence throttle can produce a significant pressure drop, allowing a precise pressure difference measurement, while keeping the construction space requirement small. This is particularly true when comparing the construction space requirement of the turbulence throttle with the construction space requirement of a laminar flow throttle. The function of the turbulence throttle is based on the fact that when passing through the turbulence throttle, the fluid flow is diverted multiple times and thus undergoes multiple reversals, through which the desired pressure drop can be achieved across the turbulence throttle. To this end, at least two, preferably three, flow-guiding elements are provided in the turbulence throttle, each of which is penetrated by one or more grooves. The grooves of adjacent flow-guiding elements are arranged so that, on a projection plane transverse to the main flow direction of the fluid mass flow, the projections of the grooves of adjacent flow-guiding elements do not overlap. Simple diagram description

[0032] The present invention will be further described below based on the accompanying drawings, which show: Figure 1: Schematic diagram and perspective view of a mass flow control system. Figure 2 Exploded view of the mass flow control system in Figure 1. Figure 3: Schematic diagram and exploded view of a valve module. FIG4 is a schematic diagram of a first fluid connection in a mass flow control system. Figure 5 is a schematic diagram of a second fluid connection in a mass flow control system. Figure 6 is a cross-sectional view of the mass flow control system in Figure 1, viewed from the side along section II. Figure 7 - Detailed view of the outlet passage of Detail A in Figure 6, Figure 8 is a cross-sectional view of a side view of a flow resistance designed to be a throttling flow. Figure 9 is a top view of one of the inflow plates of the throttling flow shown in Figure 8. FIG10 is a top view of a throttle plate of the spoiler throttle shown in FIG8. Implementation Method

[0033] The mass flow control system 300 shown in FIG1 is used for supplying a plurality of consumers (not shown) with fluid. Purely by way of example, the mass flow control system 300 comprises a square aluminum carrier plate 301, with a plurality of valve modules 304 attached to its upper side 302, also referred to as the first side. FIG2 shows an exploded perspective view of the mass flow control system 300. A first inlet channel 306 and a second inlet channel 307 are provided on a first front side 305 of the carrier plate 301, perpendicular to the upper side 302. Each of these channels is connected to a fluid source 308 (FIGS. 4 and 5). Through these channels, the mass flow control system 300 can be supplied with one or two pressurized fluids, particularly compressed air or process gas.

[0034] Furthermore, the front end side 305 is provided with, purely by way of example, eight outlet connections 311 to which fluid pipelines (not shown) can be connected for connecting to consumption devices (not shown).

[0035] In the embodiment shown, the first inlet channel 306 and the second inlet channel 307 each have an inlet connection 310 implemented as a pneumatic connector. The outlet connection 311 each limits an outlet channel 309 provided, which extends on the carrier plate 301.

[0036] Purely by way of example, five valve modules 304 are mounted on a carrier plate 301, each having a plug section 312, as seen in Figures 2 and 3. The plug section 312 is provided for electrical connection to the valve module 304 and extends through a recess 313 in the carrier plate 301. Each valve module 304 is mounted on the carrier plate 301 using two fixing screws 386 and 388.

[0037] The valve modules 304 are arranged adjacently along an arrangement axis 303 with their largest sides 315 facing each other. The housing 316 of the valve module 304 has two parallel sides 315 connected by a narrow side 318, one of which can be designated as a bottom side 319. In this arrangement, the valve modules 304 are seated with their bottom sides 319 on the upper side 302 of the carrier plate 301. The housing 316 is generally square. A first valve module 304 is fixed by one side 315 to a housing 321 of a supply module 322, which is also fixed to the carrier plate 301. To secure the supply module 322, a carrier plate recess 314 is provided adjacent to the front side 305. This recess can be closed by a shutter 317, and the supply module 322 is partially accommodated in this recess. The shutter 317 is secured to the carrier plate 305 by fixing screws 320.

[0038] The valve module 304 shown in an exploded perspective view in FIG3 , for example, comprises a plurality of boxes 324 (FIGS. 4, 5, and 6) spaced parallel to one another and spaced evenly apart on a front end 323 perpendicular to the bottom end 319. The boxes 324 have a substantially constant cross-section and are used to accommodate valve assemblies 325. The valve module 304 shown, for example, comprises four boxes 324, each housing a valve assembly 325. A first side 328 of the valve assembly 325 is provided in the region of the front end 323 and has a supply connection 326 and an outlet connection 327. Four electrical connectors 330 are formed on a second side 329 of the valve assembly 325, opposite the first side 328, for example, to electrically connect to a supply plate 331. However, the number of boxes 324 may be greater or less, particularly eight boxes.

[0039] The electrical connector 330 has a housing 316 housing 316 extending from a second front end 332 opposite the first front end 323. A sealing ring 335 is provided between a sealing surface 334 of the valve assembly 325 and an inner surface of the housing 316 that faces the box 324 and is not visible. This seals the box 324 against the housing 316 housing 316. A housing chamber 337 is formed within the housing 321 in an outer region 336 opposite the inner surface of the housing 316 housing 316. When the supply plate 331 is connected to the electrical connector 330, it is accommodated therein. In this state, the supply plate 331 partially protrudes from the plug section 312, causing an electrical connector 338 on the supply plate 331 to protrude from the plug section 312. The housing chamber 337 can be closed by a cover 339. A channel plate 340 is provided in the region of the first front end side 333. A first connecting channel 341 and a second connecting channel 342 are formed on the channel plate. The first connecting channel 341 is sealedly connected to a supply connector 326 of each valve assembly 325, while the second connecting channel 342 is sealedly connected to an outlet connector 327. A sealing element 344 is provided between the first side 323 and the channel plate 340 to fluidically seal each valve assembly 325 from the channel plate 340.

[0040] Channel openings 345 are formed on the upper side 302 of the carrier plate 301. Through these openings, an inlet connection 346 of the first connecting channel 341 is sealedly connected to a first inlet channel 306 or a second inlet channel 307, and an outlet connection 347 of the second connecting channel 342 is sealedly connected to one of the outlet channels 309. For this purpose, an additional seal 348 is provided, which can be placed on the bottom side 343 of the channel plate 340. A cover plate 351 is provided on the side 349 of the channel plate 340 facing away from the bottom side 343. This cover plate 351 is sealed by a cover plate seal 350 and can be fixed to the channel plate 340 by fixing screws 386. For example, every two channel openings 345 represent a fluid connection associated with each valve module 304.

[0041] The aforementioned pneumatic circuit can be particularly seen in the first circuit diagram of FIG4 . A fluid source 308 is connected to the mass flow control system 300, for example, via a first inlet channel 306, and supplies a fluid mass flow rate to the system. In the illustrated embodiment, the fluid mass flow rate enters the first inlet channel 306 in the carrier plate 301, exits through a channel opening 345, enters the first connecting channel 341 of the channel plate 340 via an inlet connector 346, and is directed through this connecting channel to the supply connector 326 of the valve assembly 325, shown by way of example in FIG4 . From there, the fluid mass flow rate passes through the supply connector 326 of the valve assembly 325, through a supply channel 352, and reaches a pressure chamber 353 within the valve assembly 325. Like the two outlet channels 354, the supply channel 352 is formed in a nozzle carrier 355 provided in the valve assembly 325. The pressure chamber-side opening 356 of each outlet channel 354 has a valve seat 357, which can be sealed closed by a valve element 358 of an actuator 359 of the valve assembly 325, which is implemented as a piezoelectric bender. Alternatively, the cross section of the outlet channel 354 can be varied by the actuator 359. Preferably, the actuator 359 releases the maximum cross section of the outlet channel 354 in an open position and completely closes the outlet channel 354 in a closed position. Depending on the adjusted cross section of each outlet channel 354, a portion of the fluid mass flow passes through each outlet channel 354, via the associated outlet connection 327, to the second connecting channel 342, the outlet connection 327, and via the channel opening 345 into an outflow channel 309, from where it can be conveyed to a consumer. To measure the mass flow of the fluid guided through outlet channel 309, a flow resistor 201, embodied as a throttle, is provided in outlet channel 309, for example. As can be seen in Figures 6 and 7, the resulting pressure loss is measured by a first pressure sensor 361 and a second pressure sensor 362 on main plate 363 and each is assigned to a sensor port 364, which opens onto a second side 365 of carrier plate 301. In the illustrated embodiment, first pressure sensor 361 and second pressure sensor 362 are embodied as absolute pressure sensors, and first sensor port 364 is located upstream of flow resistor 201 in the direction of flow. Second sensor port 364 has a first inlet channel 366 and a second inlet channel 367, and is located downstream of flow resistor 201 in the direction of flow.

[0042] In an embodiment not shown, the second sensor port 364 may have only one inlet channel, which is located after the flow resistor 201. Alternatively, in an embodiment not shown, both the first pressure sensor 361 and the second pressure sensor 362 may be implemented as relative pressure sensors. In this embodiment, another pressure sensor implemented as an absolute pressure sensor is provided on the mainboard 363 to measure ambient pressure.

[0043] A processing unit 368 on the main board 363, implemented as a microcontroller, for example, is electrically connected to the first and second pressure sensors 361 and 362, as well as to a supply interface 369 and a control interface 370. The supply interface 369 of the main board 363 is configured to connect to the valve module 322. Through the supply interface, the main board 363 receives voltage and, for example, enables communication with an overall system (not shown) in which the mass flow control system 300 is integrated. To this end, the supply interface 369 has a data and electrical interface. When the supply module 322 is inserted into the supply interface 369, as previously described, the connection between the supply interface 369 and the supply module 322 is established via these interfaces. The control interface 370 is configured to receive the electrical connector 338 of the supply board 331 and allows voltage to be supplied to the valve assembly 325 via the main board 363, as well as transmission of control signals from the processing unit 368 to the actuator 359 of the valve assembly 325. Therefore, only the high-voltage circuit is present on the supply board 331 , and the remaining control of the valve assembly 325 is carried out via the processing unit 368 .

[0044] The control interface 370, supply interface 369, and first and second pressure sensors 361, 362 are located on a top side 372 of the mainboard 363. Each outlet channel 309 of the carrier plate 301 is equipped with a pair of first and second pressure sensors 361, 362. The processing unit 368 is also located on the top side 372, but may also be located on a bottom side 373 of the mainboard 363, opposite the top side 372.

[0045] FIG5 shows a second circuit, which includes the aforementioned first circuit and an additional second inlet channel 307 connected to another fluid source 308. For this circuit, a channel plate 340 is used. In addition to connecting channels 341 and 342, it has another first connecting channel 341 with another inlet opening 346 and another second connecting channel 342 with an outlet opening 347. The fluid mass flow provided by the additional fluid source 308 enters the carrier plate 301 through the second inlet channel 307, exits through another channel opening 345, enters another first supply channel 341 of the additional channel plate 340 through another inlet connection 346, and is thereby directed to the supply connection 326 of a valve assembly 325. From there, the additional fluid mass flow reaches another outlet channel 309 of the carrier plate 301. This outlet channel also includes all the components required to measure the fluid mass flow, in particular, another flow resistor 201, another first pressure sensor 361, another second pressure sensor 362, another sensor port 364, etc. Since the mass flow controller system shown in the example includes multiple first pressure sensors 361 and multiple second pressure sensors 362, these are enclosed by a dashed box in FIG. 2 .

[0046] For example, in the assembled state, the main board 363 is accommodated in a board receiving space 375 formed on a bottom side 374 of the carrier plate 301 and is fixed to a storage section 377 by fixing elements 376. The board receiving space 375 is bounded by a shield 390 and a shield 317. The shield 390 is parallel to the bottom side 374 and can be mounted in a groove 389 formed in the carrier plate 305.

[0047] To seal the first and second pressure sensors 361 and 362, two sleeves 378 are provided. These are mounted between the main plate 363 and the carrier plate 301 and each have a first sealing groove 379 and a second sealing groove 380 for accommodating first and second annular sealing elements 381 and 382. The first sealing groove 379, located on the side of the sleeve 378 facing away from the main plate 363, accommodates a first annular sealing element 381. This sealing element seals the sleeve 378 from the environment between the sleeve 378 and the second side 365 of the carrier plate 301. The second annular sealing element 382 seals the main plate 363 from the outlet passage 309. A second sealing groove 380, which accommodates the second annular sealing element 382, is formed in the sleeve 378 so that the second annular sealing element 382 is attached to a cylindrical portion 383 of each of the first and second pressure sensors 361 and 362.

[0048] In order to seal the second inlet channel 367 , a teardrop-shaped sealing element 384 is provided in a sealing groove 383 of the carrier plate 301 .

[0049] As can be seen from FIG. 6 , the valve modules 304 are each fixed by a fixing screw 386 extending through a fixing groove 385 in the channel plate 340 , and a fixing screw 388 extending through a fixing groove 387 in the cover shell 339 .

[0050] FIG8 further details the throttle valve 201 located in the outlet passage 309 shown in FIG7 . The throttle valve 201 is designed as an independent component, allowing for independent installation and functional testing without interference from other components of the mass flow control system 300. The throttle valve 201 comprises, purely by way of example, a tubular throttle sleeve 203 that is rotationally symmetrical about a central axis 202 and extends along the central axis 202.

[0051] For example, the outer surface 204 of the throttle sleeve 203 is divided into three adjacent sections along the central axis 202: a first guide section 205, a flow section 206, and a second guide section 207. The first guide section 205 and the second guide section 207 each have an outer diameter (not shown) that substantially corresponds to the inner diameter of a throttle section 391 that accommodates the throttle valve 201. The flow section 206, located between the first guide section 205 and the second guide section 207, has an outer diameter smaller than that of the two guide sections 205 and 207. When the throttle valve 201 is assembled within the throttle section 391 of the outlet passage 309, the flow section 206 and the throttle section 391 form an annular channel 392.

[0052] The second inlet channel 367 opens into the annular channel 391 , and the second inlet channel 367 is configured to be connected to the second pressure sensor 362 shown in detail in FIG. 7 .

[0053] Purely by way of example, the groove 208 of the throttle sleeve 203, which is rotationally symmetrical about the center axis 202, can be divided into an inlet section 209, a retaining section 210, and an outlet section 211. The diameters of the inlet section 209 and the outlet section 211 are larger than those of the retaining section 210. Purely by way of example, the inlet section 209 and the outlet section 211 each expand slightly conically from the retaining section 210 to an inlet 212 and an outlet 213.

[0054] A plurality of flow-guiding elements are provided in the inlet section 209 to produce the desired turbulence-throttling function when the gaseous fluid flows through the turbulence-throttling device 201. Starting from the inlet 212, the inlet section 209 includes an inlet plate 214, a throttle plate 215 directly adjacent to the throttle plate 215 axially along the center axis 202, and an outlet plate 216 directly adjacent to the throttle plate 215 axially along the center axis 202.

[0055] As shown in FIG9 , the inlet plate 214 is disc-shaped and designed as a plane-parallel plate, and has a plurality of inlet holes 217, which are arranged, for example, on a common partial circle 220 and at equal angular intervals. For example, the inlet plate 214 is made of a metal plate, and the inlet holes 217 are provided by a laser cutting device or an etching process. Alternatively, the inlet plate can be made of a plastic material, particularly by a plastic injection molding method.

[0056] Preferably, the inflow plate 214 and the outflow plate 216 are constructed identically.

[0057] Compared to the inlet plate 214 and the outlet plate 216, the throttle plate 215 has a significantly greater axial extension along the central axis 202. Functionally, the throttle plate 215 can be divided into a throttle disc 221, a preceding distance ring 222, and a trailing distance ring 223. The throttle disc 221 is annular in shape and has an outer diameter (not shown) that is slightly smaller than the inner diameter of the inlet section 209 (also not shown). The throttle disc 221 has a throttle orifice 218 coaxial with the outer diameter of the throttle disc 221. Purely by way of example, the throttle orifice 218 is circular in shape. As shown in FIG8 , the throttle disc 221 has an axial extension along the central axis 202 that is approximately seven times the axial extension of the inlet plate 214 and the outlet plate 216. On the opposite axial end surfaces 224 and 225, distance rings 222 and 223 protrude from the throttle disc 221, serving as axial distance maintainers between the inlet plate 214 and the outlet plate 216. The distance rings 222 and 223 each have an inner diameter (not shown) selected so that the inlet opening 217 of the inlet plate 214 and the outlet opening 219 of the outlet plate 216 are not obstructed. Furthermore, the distance rings 222 and 223 are merely provided to maintain distance between the inlet plate 214 and the outlet plate 216, and do not contribute significantly to the throttling function of the turbulator throttle 201 described below.

[0058] The retaining section 210 has an inner diameter slightly smaller than the inflow plate 214, the throttle plate 215, and the outflow plate 216 of the lower structural group. Its purpose is only to axially support this lower structural group. When the throttling function of the turbulent throttle 201 is further explained below, it has no significant effect.

[0059] The outflow section 211 has an axial extension along the central axis that is substantially the same as that of the inflow section 209, and functions to stabilize the fluid after the fluid flows through the aforementioned flow-guiding elements (inflow plate 214, throttle plate 215, outflow plate 216).

[0060] In addition, a radial hole 226 is formed in the outflow section 211 to ensure fluid communication between the outflow section 211 and the aforementioned annular channel between the fluid section 206 and the outlet channel 309, and thus allow detection of the fluid pressure prevailing in the outflow section 211 for pressure differential measurement.

[0061] As shown in Figure 9, the projection 227 of the throttle hole 218 on the inlet plate 214 does not overlap with the inlet hole 217. This ensures that a fluid, particularly a pressurized fluid or a process fluid, undergoes multiple flow direction changes while flowing through the throttle 201. This results in the desired turbulent flow in the throttle 201. The advantage of this turbulent flow is that the streamlined structure of the throttle 201 allows for differential pressure measurement. The pressure value upstream or before the throttle 201, particularly in the area of the inlet 212, is significantly different from the pressure value downstream or after the throttle 201, particularly in the radial holes 226, thereby allowing for precise pressure differential measurement. This differential pressure measurement allows for highly accurate detection of the mass flow rate of the fluid flowing through the throttle 201.

[0062] As previously mentioned, the turbulence throttle 201 is housed in the throttle section 391, which has a diameter (not shown) that is larger than the remaining outlet channel 309. The throttle section 391 extends from the front end 305 of the carrier plate 301 into the outlet channel 309 in the opposite direction of flow. A throttle section base (not shown) is located in the flow direction between the first inlet channel 366 and the second inlet channel 367, limiting the throttle section 391 at an end facing away from the front end 305. Due to its enlarged diameter, the throttle section base forms a circular sealing seat 400. In the assembled state, a throttle seal 393, for example, designed as an O-ring, is located between the sealing seat 400 and a throttle end face 228 ( FIG. 8 ). In order to fix the turbulence throttle 201 and to provide a sealing force on the throttle seal 393, a fixing sleeve 394 is provided between the outlet connection 311 and the turbulence throttle 201, each of which is connected to the turbulence throttle 201 and the outlet connection 311 by an annular surface not shown in the figure.

[0063] The section of outlet passage 309 upstream of turbulator restriction 201 preferably has a through section 395 that is fluidically connected to passage opening 345 and parallel to front end 305. Through section 395 opens into a connecting section 396 of outlet passage 309 at an entry point 397. Connecting section 396 is perpendicular to front end 305 and concentric with restriction section 391. In the illustrated embodiment, entry point 397 of through section 395 is located between restriction section 391 and passage base 398, which is a blind front end surface.

[0064] Based on this design, there is essentially no or very little fluid flow in the area of connecting section 396 between entry point 397 and channel base 398, leading to this area being referred to as a dead chamber 399. To ensure minimal interference with pressure measurement before throttling restriction 201, first sensor port 364 is located in the area of connecting section 396 that forms dead chamber 399. "No interference" here means that the measured pressure has no or only a minimal dynamic pressure component caused by fluid flow.

[0065] In a design not shown, the second sensor port 364 and the first inlet channel 366 of the second sensor port 364 are constructed in the area where the connecting section 396 forms the dead water chamber 399.

[0066] 201: Flow resistance 202: Middle axis 203:Throttle sleeve 204: outer surface 205: Guide segment 206: Fluid section 207: Guide 208: Groove 209: Inflow segment 210: Maintain segment 211: Outflow interruption 212: Inlet 213: Outlet 214: Inflow plate 215: Throttle plate 216: Outflow board 217: Inflow hole 218: throttle hole 219: Outflow hole 220: Partial Circle 221: Throttle disc 222: Distance Ring 223: Distance Ring 224: Shaft end face 225: Shaft end face 226: Radial hole 227: Projection 228: throttling end face 300:Mass flow control system 301: Loading plate 302: Upper side 303: Arrange axis 304: Valve module 305: front end side 306: Import Channel 307: Import Channel 308: Fluid Source 309: Exit Channel 310: Import Link 311: Exit Link 312: Plug section 313: Groove 314: Groove 315: Side 316: Shell 317: Shield 318: narrow side 319: bottom side 320:Fixing screw 321: Shell 322: Supply module 323: front end 324: Box 325: Valve combination 326: Supply connector 327: outlet connector 328: First side 329: Second side 330: Connector 331: Supply Board 332: Second front end side 333: Storage rack 334: Box 335: Sealing ring 336: outside 337: Accommodation Room 338: Connector 339: Covering Shell 340: Channel plate 341:Connection Channel 342: Connection Channel 343: bottom side 344: Sealing element 345: Passageway 346: Channel connector 347: Exit Opening 348: Sealing element 349: (above the channel plate) side 350: Cover seal 351: Cover 352: Supply Channel 353: Pressure Chamber 354: Exit Channel 355: Nozzle carrier 356: Opening 357: Valve seat 358:Valve 359: Actuator 361:Pressure sensor 362: Pressure sensor 363: Motherboard 364:Sensor port 365: Second side 366: First inlet channel 367: Second inlet channel 368: Processing Unit 369: Supply Interface 370:Control interface 372: Upper side 373: bottom side 374: bottom side 375: Board accommodation space 376:Fixing element 377: Storage segment 378: Sleeve 379: First sealing groove 380: Second sealing groove 381: Sealing element 382: Sealing element 383: Sealing groove 384: Sealing element 385:Fixed groove 386:Fixing screw 387:Fixed groove 388:Fixing screw 389:Fixing screw 390: Shield 391:Throttling section 392: Ring Channel 393:Throttle seal 394:Fixed sleeve 395: Crossing Section 396:Connection segment 397: Access point 398: Channel base 399: Dead Water Room 400: Sealing seat

Claims

1. A mass flow control system (300) for providing fluid mass flow under control, having a support plate (301) having a fluid interface on a first side (302) for connection of a valve module (304), wherein each fluid interface is equipped with a plurality of channels (345), each channel (345) being connected to one of an inlet channel (306, 307) constructed on the support plate (301), or to a plurality of outlet channels (304, 305) constructed on the support plate (301). 9) is a connection, and has a plurality of valve modules (304), each having at least one valve assembly (325), the valve assembly being designed to affect at least one fluid mass flow rate, and each valve module (304) having an inlet connector (346) which is sealed to the inlet channel (306, 307) via a channel port (345), and an outlet connector (347) which is sealed to one of the outlet channels (309) via the channel port (345), and has A motherboard (363) carries an electronic processing unit (368), a power supply interface (369), and a power control interface (370) for connecting the valve module (304). Each outlet channel (309) is provided with a flow resistance (201), and each outlet channel (309) is equipped with a sensor port (364) in the area of ​​the flow resistance (201), which leads to a second side (365) of the support plate (301) away from the first side (302) of the support plate (301). The pressure sensors (361, 362) on the motherboard (363) are configured to a sensor port (364), and the electronic processing unit (368) is electrically connected to the pressure sensors (361, 362), the supply interface (369), and the control interface (370). It is constructed to interpret the pressure signal of the pressure sensors (361, 362) and control the valve module (304) connected to the control interface (370) to perform a mass flow control.

2. The mass flow control system of claim 1, characterized in that a first sensor port (364) is disposed upstream of the flow resistance (201) along the flow direction, and a second sensor port (364) is disposed downstream of the flow resistance (201) along the flow direction; a first pressure sensor (361) disposed at the first sensor port (364) and a second pressure sensor (362) disposed at the second sensor port (364) are both designed as absolute pressure sensors, or wherein... The first pressure sensor (361) and the second pressure sensor (362) are designed as relative pressure sensors, and an environmental pressure sensor is provided on the motherboard (363) to measure the environmental pressure.

3. The mass flow control system of claim 1, characterized in that a first sensor port (364) is disposed upstream of the flow resistance (201) in the flow direction, and a second sensor port (364) has a first inlet channel (366) and a second inlet channel (367), wherein the first inlet channel (366) flows into the outlet channel (309) upstream of the flow resistance (201) in the flow direction, and the second inlet channel (367) flows into the outlet channel (309) downstream of the flow resistance (201) in the flow direction; a first pressure sensor (361) disposed at the first sensor port (364) is designed as an absolute pressure sensor, and a second pressure sensor (362) disposed at the second sensor port (364) is designed as a differential pressure sensor, or wherein, The first pressure sensor (361) is designed as a relative pressure sensor, the second pressure sensor (362) is designed as a differential pressure sensor, and an environmental pressure sensor is provided on the motherboard to measure the environmental pressure.

4. The mass flow control system of claim 1, characterized in that the valve module (304) has a plurality of outlet connectors (347) and includes a plurality of valve assemblies (325) connected to the inlet connector (346) and to an outlet connector (347) or to a plurality of outlet connectors (347).

5. The mass flow control system of claim 4, characterized in that a channel plate (340) is provided on the valve module (304), which is designed to connect a plurality of valve assemblies (325) provided in the valve module (304).

6. The mass flow control system of claim 1, characterized in that the supply interface (369) has a data and current interface for connecting to a supply module (322), wherein one of the supply modules (322) designed to be interchangeable is inserted into the supply interface (369) and connected to the supply interface (369) via the data and current interface.

7. The mass flow control system of claim 1, characterized in that the support plate (301) has a plurality of grooves (313), each of the grooves (313) being able to accommodate a plug segment (312) of the valve module (304) for inserting and connecting the valve module (304) and the main board (363) in an inserted state.

8. The mass flow control system of claim 1, characterized in that each valve assembly (325) has an actuator (359) connected to a valve element (358), and the actuator (359) of the valve assembly (325) is designed as a piezoelectric bender.

9. The mass flow control system of claim 8, characterized in that the valve module (304) includes a supply board (331) having a high-voltage circuit responsible for providing electrical power to the actuator (359).

10. The mass flow control system of claim 8, characterized in that the processing unit (368) is designed to individually control each of the actuators (359).

11. The mass flow control system of claim 1, characterized in that the flow resistance (201) is implemented as a throttling flow.

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