Probe holder and detection method

Abstract

The probe holder of the present invention is used to hold contact probes that are in contact with electrodes at one end along their length. The probe holder has a plurality of seat holes for holding the contact probes. Each seat hole has an opening at one end of the contact probe, and the opening has: a sidewall extending from the opening end of the seat hole along the axial direction of the seat hole; and a bottom portion disposed at the end of the sidewall in the axial direction opposite to the opening end. The present invention aims to provide a probe holder and a detection method that can easily confirm the wear of a hole.

Description

Technical Field

[0001] This invention relates to a probe holder and a detection method. Prior Technology

[0002] Previously, when performing continuity or operational characteristic testing on objects such as semiconductor integrated circuits or liquid crystal display devices, conductive contact probes were used to achieve electrical connection between the object being tested and a signal processing device having a circuit board for outputting test signals (for example, see Patent Document 1). In semiconductor wafer-level inspection, probe cards configured with a plurality of contact probes are generally used. Furthermore, in semiconductor finished product inspection, sockets assembled with probe blocks configured with a plurality of contact probes are generally used.

[0003] [Previous Technical Documents] [Patent Literature] [Patent Document 1] Japanese Patent Application Publication No. 2022-151628 Summary of the Invention

[0004] [The problem the invention aims to solve] In probe holders that hold a plurality of contact probes, the walls of the holes into which the contact probes are inserted gradually wear down due to the sliding of the contact probes during testing. If the wear of the holes intensifies, the position of the contact probes in the probe holder may change, affecting the testing. On the other hand, removing the contact probes from the probe holder to check the wear of the holes is laborious. Therefore, there is a need for a technique that can easily check the wear of the holes.

[0005] The present invention was made in view of the above, and its purpose is to provide a probe holder and detection method that can easily confirm the wear of a hole.

[0006] [Technical means to solve the problem] To solve the above problems and achieve the objective, the probe holder of the present invention is used to hold a contact probe in contact with an electrode that is a contact object at one end side in the length direction. The probe holder is formed with a plurality of seat holes for holding the aforementioned contact probe. The aforementioned seat holes have an opening at one end side of the aforementioned contact probe. The opening has: a sidewall that extends from the opening end of the aforementioned seat hole along the axial direction of the aforementioned seat hole; and a bottom part that is disposed at the end of the aforementioned sidewall in the aforementioned axial direction on the side opposite to the aforementioned opening end.

[0007] Furthermore, in the probe holder of the present invention, the aforementioned bottom surface is formed by a plane perpendicular to the aforementioned axial direction.

[0008] Furthermore, in the probe holder of the present invention, the aforementioned bottom surface is formed by a plane that is inclined relative to the aforementioned axial direction.

[0009] Furthermore, in the probe holder of the present invention, the aforementioned opening portion has a first opening portion and a second opening portion. The first opening portion extends from the opening end of the aforementioned seat hole along the aforementioned axial direction, and the second opening portion extends from the aforementioned first opening portion to the side opposite to the opening end side. The aforementioned first opening portion is composed of a first sidewall and a hollow plate-shaped first bottom portion. The aforementioned first sidewall extends from the opening end along the axial direction of the aforementioned seat hole, and the aforementioned first bottom portion extends inward from the end of the aforementioned first sidewall in the aforementioned axial direction opposite to the opening end. The aforementioned second opening portion is composed of a second sidewall and a hollow plate-shaped second bottom portion. The aforementioned second sidewall extends from the opening end formed by the aforementioned first bottom portion along the axial direction of the aforementioned seat hole, and the aforementioned second bottom portion extends inward from the end of the aforementioned second sidewall in the aforementioned axial direction opposite to the opening end of the aforementioned first bottom portion.

[0010] Furthermore, in the probe holder of the present invention, the aforementioned bottom surface is formed with a hole, and the diameter of the aforementioned hole on the aforementioned bottom surface is set based on the wear limit of the aforementioned seat hole.

[0011] Furthermore, the detection method of the present invention is a detection method for detecting probe holders. The aforementioned probe holder is used to hold a contact probe that is in contact with an electrode that is a contact object at one end side in the length direction. The aforementioned detection method is based on the morphology of the edge portion of the stepped portion in the aforementioned seat hole, which is observed when viewed along the axial direction of the aforementioned seat hole from the opening end of the seat hole that holds the aforementioned contact probe and allows the aforementioned contact probe to extend from the aforementioned end side, to detect the wear degree of the aforementioned seat hole.

[0012] [Benefits of the Invention] According to the present invention, it is possible to easily confirm the wear of the hole. Simple Explanation of the Diagram

[0013] [Figure 1] Figure 1 is a perspective view showing the structure of a probe unit according to one embodiment of the present invention. [Figure 2] Figure 2 is a partial cross-sectional view showing the structure of the main part of the probe unit according to one embodiment of the present invention. [Figure 3] Figure 3 is a cross-sectional view showing the structure of the main parts of the probe holder. [Figure 4] Figure 4 is a diagram used to illustrate the confirmation of hole wear. [Figure 5] Figure 5 is a cross-sectional view showing the structure of the main part of the probe holder of Modification 1 of the present invention. [Figure 6] Figure 6 is a cross-sectional view showing the structure of the main part of the probe holder in Modification 2 of the present invention. [Figure 7] Figure 7 is a cross-sectional view showing the structure of the main part of the probe holder in Modification 3 of the present invention. [Figure 8] Figure 8 is a diagram used to illustrate the confirmation of hole wear. Implementation

[0014] Hereinafter, the methods for carrying out the present invention will be described in detail with reference to the accompanying drawings. Furthermore, the present invention is not limited to the following embodiments. Also, the figures referred to in the following description are only schematic representations of shapes, sizes, and positional relationships to the extent that the content of the present invention can be understood. That is, the present invention is not limited to the shapes, sizes, and positional relationships illustrated in the figures.

[0015] Implementation Figure 1 is a perspective view showing the structure of a probe unit according to one embodiment of the present invention. The probe unit 1 shown in Figure 1 is a device used to detect the electrical characteristics of a semiconductor integrated circuit 100, which is the object to be detected, and is a device for electrically connecting the semiconductor integrated circuit 100 and a circuit board 200 for outputting detection signals to the semiconductor integrated circuit 100.

[0016] The probe unit 1 includes: a conductive contact probe 2 (hereinafter referred to as "probe 2"), which contacts two different contact objects, namely the electrodes of the semiconductor integrated circuit 100 and the circuit board 200, at both ends along its length; a probe holder 3, which houses and holds a plurality of probes 2 according to a predetermined pattern; and a seat member 4, which is disposed around the probe holder 3 to suppress positional displacement of the semiconductor integrated circuit 100 that contacts the plurality of probes 2 during detection. In this embodiment, the electrodes of the semiconductor integrated circuit 100 can be electrodes of known form, such as BGA (Ball Grid Array) or leads formed using solder.

[0017] Figure 2 is a cross-sectional view showing the structure of the main parts of the probe unit 1 according to one embodiment of the present invention. Figure 3 is a cross-sectional view showing the structure of the main parts of the probe holder 3. The probe 2 is formed using a conductive material and includes: a first plunger 21, which contacts the electrodes of the semiconductor integrated circuit 100 when detecting the semiconductor integrated circuit 100; a second plunger 22, which contacts the electrodes of the circuit board 200 having the detection circuit; and a helical spring 23, which is disposed between the first plunger 21 and the second plunger 22, connecting the first plunger 21 and the second plunger 22 in a retractable manner. In Figure 2, the first plunger 21, the second plunger 22, and the helical spring 23 constituting the probe 2 have the same axis. That is, the central axes of the first plunger 21, the second plunger 22, and the helical spring 23 are located on the same straight line. Furthermore, "the same axis" includes offsets caused by deformation of individual components or manufacturing errors. When the probe 2 contacts the semiconductor integrated circuit 100, the helical spring 23 extends and retracts in the axial direction to reduce the impact on the electrodes of the semiconductor integrated circuit 100, while applying a load to the semiconductor integrated circuit 100 and the circuit board 200.

[0018] The first plunger 21 has a front end portion 21a, which has a pointed front end shape for contacting the electrodes of the semiconductor integrated circuit 100. The first plunger 21 can move in the axial direction by the extension and retraction of the helical spring 23, and is forced towards the semiconductor integrated circuit 100 by the elastic force of the helical spring 23, thereby contacting the electrodes of the semiconductor integrated circuit 100. In this embodiment, the front end 21a is described as being in the shape of a crown with a plurality of claws, but it may also be in other shapes such as conical or spherical.

[0019] The second plunger 22 has a pointed front end shape, which contacts the electrodes of the circuit board 200. The second plunger 22 can move in the axial direction by the extension and retraction of the helical spring 23, and is forced towards the circuit board 200 by the elastic force of the helical spring 23, thereby contacting the electrodes of the circuit board 200.

[0020] The helical spring 23 has: a tightly wound portion 23a, which is mounted on the base end side of the first plunger 21; and a sparsely wound portion 23b, which is mounted on the base end side of the second plunger 22, wound at a predetermined interval. The helical spring 23 is, for example, made of a conductive wire wound together.

[0021] The end of the tightly wound portion 23a is pressed into the base end of the first plunger 21, for example. On the other hand, the end of the loosely wound portion 23b is pressed into the base end of the second plunger 22. Furthermore, the first plunger 21 and the second plunger 22 are joined to the helical spring 23 by the winding force of the spring and / or by welding. The probe 2 extends and retracts in the axial direction by the extension and retraction of the loosely wound portion 23b.

[0022] The probe holder 3 is formed using insulating materials such as resin, machinable ceramics, and silicone, and is constructed by laminating a first component 31 located on the upper surface and a second component 32 located on the lower surface, as shown in Figure 2. The first component 31 and the second component 32 each have the same number of mounting holes 33 and 34 for accommodating a plurality of probes 2, and these mounting holes 33 and 34 are aligned with each other. The positions of the mounting holes 33 and 34 depend on the wiring pattern of the semiconductor integrated circuit 100.

[0023] Both the seat hole 33 and the seat hole 34 are stepped holes with varying diameters along the through-path. Specifically, the seat hole 33 consists of a small-diameter portion 33a and a large-diameter portion 33b. The small-diameter portion 33a has an opening on the upper end face of the probe holder 3, and the diameter of the large-diameter portion 33b is larger than that of the small-diameter portion 33a. Similarly, the seat hole 34 consists of a small-diameter portion 34a and a large-diameter portion 34b. The small-diameter portion 34a has an opening on the lower end face of the probe holder 3, and the diameter of the large-diameter portion 34b is larger than that of the small-diameter portion 34a. The shapes of these seat holes 33 and 34 depend on the structure of the probe 2 to be housed.

[0024] Here, the small-diameter portion 33a into which the first plunger 21 is inserted has a hole 331 and an opening 332. The hole 331 extends from the large-diameter portion 33b to the upper surface, and the opening 332 extends from the hole 331, having an opening on the upper end face (see Figure 3). The holes 331 and the opening 332 are aligned on axis N1. The diameters of the holes 331, the opening 332, and the large-diameter portion 33b are in the following order: hole 331 < opening 332 < large-diameter portion 33b. Furthermore, the diameter of the opening 332 may be equal to the diameter of the large-diameter portion 33b, or the diameter of the opening 332 may be larger.

[0025] The opening 332 is formed by a bottom portion 3321 and a sidewall portion 3322. The bottom portion 3321 has a hole connected to the hole portion 331 and forms the bottom surface of the opening 332. The sidewall portion 3322 is cylindrical and surrounds the axis N1. The annular bottom surface formed by the bottom portion 3321 is perpendicular to the axis N1. Furthermore, the wall surface of the sidewall portion 3322 extending from the bottom portion 3321 toward the opening extends parallel to the axis N1. Therefore, the opening 332 forms a cylindrical space. Furthermore, the depth of the opening 332 (length in the direction of axis N 1) is set to such a degree that the edge 3323 of the stepped portion formed by the hole 331 and the opening 332 can be confirmed by visual observation using a magnifying glass or microscope.

[0026] The diameter of the hole in the bottom part 3321, i.e., the diameter R1 of the hole 331, is set to be slightly larger than the diameter of the first plunger 21 at the insertion position of the hole 331. Furthermore, the diameter R2 (>R1) of the opening 332 is set, for example, based on a diameter that ensures the positional accuracy of the probe 2. This diameter ensuring positional accuracy is based on a wear limit, which is set within the range where the probe can accurately contact the object being tested even if part or all of the bottom part 3321 (edge ​​3323) or the hole 331 is worn.

[0027] When the semiconductor integrated circuit 100 is tested, the helical spring 23 is compressed along its length due to the contact load from the semiconductor integrated circuit 100 and the circuit board 200. During testing, the test signal supplied from the circuit board 200 to the semiconductor integrated circuit 100 travels from the electrode 201 of the circuit board 200, through the second plunger 22 of the probe 2, the tightly wound portion 23a, and the first plunger 21, to the connection electrode 101 of the semiconductor integrated circuit 100.

[0028] Furthermore, since the front end of the front end 21a is formed into a pointed shape, even if an oxide film is formed on the surface of the connecting electrode 101, the oxide film can be pierced, allowing the front end of the front end 21a to directly contact the connecting electrode 101.

[0029] If repeated testing is performed, the extension and retraction of probe 2 will cause the wall surface of the bore 33 to be sheared off, resulting in wear. Figure 4 is a diagram used to illustrate the confirmation of bore wear. In the example shown in Figure 4, it is shown that probe 2 (first plunger 21) slides on the wall surface on the left side of bore 331, and the wall surface is sheared off. At this time, in the state before wear (see Figure 4(a)), the entire circumference of the edge 3323 of the stepped portion formed by bore 331 and opening 332 can be clearly grasped. After wear, in the edge 3323 of the stepped portion formed by bore 331 and opening 332, the worn portion 3323a is displaced to the side wall 3322 of opening 332 (see Figure 4(b)). Furthermore, the dashed line in Figure 4(b) indicates the position of the edge before wear. Thus, based on the shape of the edge portion of the stepped part (here, edge 3323) observed when viewed from the opening end along the axial direction of the seat hole, the degree of wear of the seat hole 33 can be detected. The user can determine the degree of wear of the seat hole by confirming this unclear part.

[0030] According to the above embodiment, an opening 332, equivalent to a countersunk hole, is formed on the upper end face of the seat hole. A stepped portion is formed near the opening via the hole 331 and the opening 332. Therefore, by checking the edge of the stepped portion, the user can easily check the wear of the hole. In contrast, while previous probe holders may have been chamfered or have an inclined edge shape, they did not have the stepped structure formed by the inner wall surface and the stepped shape as in this embodiment. Therefore, the wear of the edge could not be visually checked, and the wear could not be monitored as effectively as in this embodiment. Furthermore, the maximum diameter of the inclined shape is difficult to manage and process accurately, making it difficult to form an inclined shape that allows for monitoring of wear.

[0031] Variation Example 1 Next, a variation of this embodiment, 1, will be described with reference to FIG5. FIG5 is a cross-sectional view showing the structure of the main part of the probe holder of variation 1 of the present invention. Furthermore, structural elements that are the same as those described in FIG2, etc., are labeled with the same symbols. This variation 1 has an opening 333 instead of the opening 332 of the seat hole 33 in the above embodiment.

[0032] The opening 333 is composed of a bottom surface 3331 and a side wall 3332. The bottom surface 3331 forms a hole connected to the hole 331 and constitutes the bottom surface of the opening 333. The side wall 3332 is cylindrical, surrounding the axis N1. The bottom surface formed by the bottom surface 3331 is conical, inclined relative to the axis N1. Specifically, the bottom surface 3331 is conical, tending towards the opening side as it moves inward. Therefore, the angle of the edge 3333 of the step formed by the bottom surface of the bottom surface 3331 and the wall surface of the hole 331, that is, the angle of the seat structure side (the side opposite to the hollow space side), is an acute angle. Furthermore, the wall surface of the side wall 3332 extending from the bottom surface 3331 toward the opening extends parallel to the axis N1. Therefore, the opening 333 forms a cylindrical space. Furthermore, the depth of the opening 333 (length in the direction of axis N1) is set to such a degree that the stepped portion formed by the hole 331 and the opening 333 can be visually confirmed.

[0033] The diameter of the hole in the bottom part 3331, that is, the diameter of the opening 333 (equivalent to the aforementioned diameter R2), is the same as that of the aforementioned opening 332. Furthermore, if repeated testing is performed, the extension and retraction of probe 2 will cause the wall of the seat hole to be sheared away, resulting in wear. After wear, the worn part of the edge 3333 of the step formed by the hole 331 and the opening 333 will become unclear. The user can determine the degree of wear of the seat hole by checking the unclear part.

[0034] According to the above-described modified example 1, similar to the above embodiment, an opening 333 equivalent to a countersunk hole is formed on the upper end face of the seat hole. By means of the hole 331 and the opening 333, a step portion is formed near the opening. Therefore, by checking the edge portion of the step portion, the user can easily check the wear of the hole.

[0035] Furthermore, according to this modified example 1, by employing a bottom surface that is inclined relative to the axis N1, the reflection of the observed light can be changed compared to the above embodiment, thereby making it easier to observe.

[0036] Variation Example 2 Next, a modified example 2 of this embodiment will be described with reference to FIG6. FIG6 is a cross-sectional view showing the structure of the main part of the probe holder of the modified example 2 of the present invention. Furthermore, structural elements that are the same as those described in FIG2, etc., are labeled with the same symbols. This modified example 2 has an opening 334 instead of the opening 332 of the seat hole 33 in the above embodiment.

[0037] The opening 334 is composed of a bottom surface 3341 and a side wall 3342. The bottom surface 3341 forms a hole connected to the hole 331 and constitutes the bottom surface of the opening 334. The side wall 3342 is cylindrical, surrounding the axis N1. The bottom surface formed by the bottom surface 3341 is a hollow cone inclined relative to the axis N1. Specifically, the bottom surface 3341 tends to be cone-shaped towards the opposite side (hole 331 side) towards the opening side as it moves inward. Therefore, the angle 3343 of the edge of the step formed by the bottom surface of the bottom surface 3341 and the wall surface of the hole 331, i.e., the angle on the seat structure side, is an obtuse angle. Furthermore, the wall surface of the side wall 3342 extending from the bottom surface 3341 toward the opening extends parallel to the axis N1. Therefore, the opening 334 forms a cylindrical space. Furthermore, the depth of the opening 334 (length in the direction of axis N 1) is set to such a degree that the stepped portion formed by the hole 331 and the opening 334 can be visually confirmed.

[0038] The diameter of the hole in the bottom part 3341, that is, the diameter of the opening 334 (equivalent to the aforementioned diameter R2), is the same as that of the aforementioned opening 332. Furthermore, if repeated testing is performed, the extension and retraction of probe 2 will cause the wall of the seat hole to be sheared away, resulting in wear. After wear, the worn part of the edge 3343 of the stepped part formed by the hole 331 and the opening 334 will become unclear. The user can determine the degree of wear of the seat hole by checking the unclear part.

[0039] According to the above-described modified example 2, similarly to the above embodiment, an opening 334 equivalent to a countersunk hole is formed on the upper end face of the seat hole. By means of the hole 331 and the opening 334, a step portion is formed near the opening. Therefore, by checking the edge portion of the step portion, the user can easily check the wear of the hole.

[0040] Furthermore, according to this modified example 2, by using a bottom surface that is inclined relative to the axis N1, the reflection of the observed light can be changed compared to the above embodiment, making it easier to observe.

[0041] Variation Example 3 Next, a variation of this embodiment, 3, will be described with reference to Figures 7 and 8. Figure 7 is a cross-sectional view showing the structure of the main part of the probe holder of variation 3 of the present invention. Furthermore, structural elements that are the same as those described in Figures 2, etc., are labeled with the same symbols. This variation 3 has an opening 335 instead of the opening 332 of the seat hole 33 in the above embodiment.

[0042] The opening 335 is composed of a first opening 335a and a second opening 335b. The first opening 335a is located on the upper end face (opening end) side, and the second opening 335b extends from the first opening 335a toward a side opposite to the upper end face side and connects to the hole 331. The first opening 335a and the second opening 335b each have a side portion extending along the axial direction and a bottom portion forming the hole. Furthermore, the bottom portion can also adopt the configuration of variations 1 and 2. Furthermore, the depth of the opening 335 is set to such a degree that the stepped portion of the opening 335, or the stepped portion formed by the hole 331 and the opening 335, can be visually confirmed.

[0043] The diameter formed by the sidewall portion of the first opening 335a is the same as the diameter R2 of the opening 332 (see Figure 3). Furthermore, the diameter formed by the sidewall portion of the second opening 335b, which is also the diameter R3 of the hole at the bottom of the first opening, is set to be slightly larger than the diameter R1 of the hole 331, and smaller than the diameter (diameter R2) of the first opening 335a. Diameter R2 is set, for example, based on the amount of wear when the probe holder needs to be replaced, and diameter R3 is set, for example, based on the amount of wear when it is recommended to replace the probe holder, such as the amount of wear recommended for the next use. Moreover, the diameter of the hole at the bottom of the second opening 335b is the same as the diameter R1 of the hole 331 (see Figure 3).

[0044] If repeated testing is performed, the extension and retraction of probe 2 will cause the wall surface of the borehole to be sheared off, resulting in wear. Figure 8 is a diagram used to illustrate the confirmation of borehole wear. In the example shown in Figure 8, it is shown that probe 2 (first plunger 21) slides on the wall surface on the left side of borehole 331, and the wall surface is sheared off. At this time, in the state before wear (see Figure 8(a)), the entire circumference of the edge 3351 of the stepped portion formed by the first opening 335a and the second opening 335b, and the entire circumference of the edge 3352 of the stepped portion formed by the second opening 335b and borehole 331 can be clearly determined. After wear, the worn portion 3352a of the edge 3351 is displaced to the side wall of the second opening 335b (see Figure 8(b)). Furthermore, the dashed line in Figure 8(b) indicates the position of the edge before wear. Users can determine the degree of wear of the probe seat by identifying the unclear area. In variation 3, the condition that a portion of the edge 3351 is on the same plane as the wall of the first opening 335a can be used as an indicator for replacing the probe seat during the next use.

[0045] According to the above-described modified example 3, similarly to the above embodiment, an opening 335 equivalent to a countersunk hole is formed on the upper end face of the seat hole. A stepped portion is formed near the opening by means of the hole portion 331 and the opening portion 335. Therefore, by checking the edge portion of the stepped portion, the user can easily check the wear of the hole.

[0046] Furthermore, according to this modified example 3, since two stepped portions are formed at the opening, the user can grasp the degree of wear in two stages. Therefore, compared with the implementation method, the degree of wear and the timing of replacement can be grasped more precisely.

[0047] The above describes the methods for implementing the present invention, but the present invention should not be limited to the above embodiments. For example, although the above embodiments and variations describe the method of visually confirming the wear of the edge portion and determining the amount of wear, it is also possible to photograph the opening of the hole in the axial direction and calculate the amount of wear of the edge portion by image processing to determine whether the probe holder needs to be replaced.

[0048] As described above, the probe holder and detection method of the present invention can be used to easily confirm the wear of holes.

[0049] 1: Probe Unit 2: Contact probe (probe) 3: Probe mount 4: Seat components 21: First plunger 21a: Front end 22: Second plunger 23: Coil spring 23a: Tightly wound section 23b: Sparse winding section 31: First component 32: Second component 33, 34: seat hole 33a, 34a: Small diameter portion 33b, 34b: Large diameter part 100: Semiconductor integrated circuits 200: Circuit board 331: Hole 332, 333, 334, 335: Openings 335a: First opening 335b: Second opening 3321, 3331, 3341: Bottom surface 3322, 3332, 3342: Side wall portion 3323, 3333, 3343, 3351, 3352: Edge 3323a, 3352a: The worn parts N 1: Axis R1, R2, R3: Diameter

Claims

1. A probe holder for holding a contact probe in contact with an electrode as a contact object at one end in the longitudinal direction, characterized in that it has a plurality of seat holes, each seat hole having: a small diameter portion for insertion of the contact probe; a large diameter portion having a diameter larger than the small diameter portion; and a bottom portion connecting the small diameter portion and the large diameter portion, wherein each seat hole has an opening at one end of the contact probe, the opening having a sidewall extending from the opening end of the seat hole along the axial direction of the seat hole; the bottom portion is disposed at the end of the sidewall in the axial direction opposite to the opening end.

2. The probe holder as claimed in claim 1, wherein the aforementioned bottom surface is formed by a plane perpendicular to the aforementioned axial direction.

3. The probe holder as claimed in claim 1, wherein the aforementioned bottom surface is formed by a plane inclined relative to the aforementioned axial direction.

4. The probe holder of claim 1, wherein the aforementioned opening has a first opening and a second opening, the first opening extending from the opening end of the aforementioned seat hole along the aforementioned axial direction, and the second opening extending from the aforementioned first opening to the side opposite to the opening end; the aforementioned first opening is composed of a first sidewall and a hollow plate-shaped first bottom portion, the aforementioned first sidewall extending from the opening end along the axial direction of the aforementioned seat hole, and the aforementioned first bottom portion extending inward from the end of the aforementioned first sidewall in the aforementioned axial direction opposite to the opening end; the aforementioned second opening is composed of a second sidewall and a hollow plate-shaped second bottom portion, the aforementioned second sidewall extending from the opening end formed by the aforementioned first bottom portion along the axial direction of the aforementioned seat hole, and the aforementioned second bottom portion extending inward from the end of the aforementioned second sidewall in the aforementioned axial direction opposite to the opening end of the aforementioned first bottom portion.

5. The probe holder of claim 1, wherein the aforementioned bottom surface is formed with a hole, the diameter of the aforementioned hole on the aforementioned bottom surface being set based on the wear limit of the aforementioned seat hole.

6. A detection method for detecting a probe holder, wherein the probe holder is used to hold a contact probe at one end in the length direction in contact with an electrode that is a contact object, the detection method being characterized in that the wear degree of the seat hole is detected based on the shape of the edge portion of the stepped portion in the seat hole as observed when viewed along the axial direction of the seat hole, at the opening end of the seat hole for the contact probe to extend from the aforementioned end side, the seat hole having: a small diameter portion for the insertion of the contact probe; a large diameter portion having a diameter larger than the small diameter portion; and a bottom portion connecting the small diameter portion and the large diameter portion.

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