Automatic baking method for wafer oven

Abstract

An automatic baking method for a wafer baking oven includes: controlling the baking platform to move to a preparatory position; controlling the door to open and placing the wafer on the baking platform; controlling the baking platform to rise to a baking position that is sealed with a quartz cover in the baking space; reading heating parameters and controlling the baking oven to sequentially enter one of a plurality of pre-set baking stages according to the heating parameters; after the target temperature and target time of a baking stage are reached, entering the next baking stage according to the heating parameters; and, after all baking stages are completed, entering a cooling stage to allow the temperature of the baking oven to drop to the unlocking temperature.

Claims

1. An automatic baking method for a wafer baking oven, applied to an oven having a processor, a baking platform, and a human-machine interface, and comprising the following steps: Step a) The processor controls the baking platform to move to a preparatory position in a baking space; Step b) The processor controls an electronic lock for locking a door of the baking space to unlock, so that the door can be opened and a wafer can be placed on the baking platform; Step c) After the door is closed, the processor controls the baking oven to enter a standby state from a stopped state; Step d) When a start button on the human-machine interface is triggered, the baking platform is controlled to rise to a baking position, wherein when the baking platform is in the baking position, the baking platform is sealed with a quartz cover in the baking space, and the wafer on the baking platform is covered by the quartz cover; Step e) After the baking platform moves to the baking position, the processor reads a heating parameter from a storage unit and sequentially enters one of the multiple pre-set baking stages of the baking oven according to the heating parameter. Each baking stage has a corresponding heating parameter, and the processor controls at least one heater in the baking space according to the heating parameter. Step f) After step e), the processor determines whether a target temperature and a target time of the baking stage have been reached. Step g) When the target temperature and the target time of the baking stage have been reached, the processor determines whether the multiple baking stages have been completed. Step h) Before all the multiple baking stages are completed, steps e) to f) are executed again to sequentially enter the next baking stage among the multiple baking stages. Step i) After all the multiple baking stages are completed, a cooling stage is entered.

2. The automatic baking method as described in claim 1, further comprising: Step j) After entering the cooling stage, the processor determines whether the temperature of the oven has reached an unlocking temperature; Step k) If the temperature of the oven has not yet reached the unlocking temperature, continue to wait; and Step l) After the temperature of the oven reaches the unlocking temperature, the processor determines that a first unlocking condition is met, wherein the electronic lock is unlocked when the first unlocking condition is met.

3. The automatic baking method as described in claim 2, wherein step i) includes: The processor shuts down the heater to initiate the cooling phase.

4. The automatic baking method as claimed in claim 3, wherein the heater includes a plurality of heating lamps respectively disposed on both sides of the baking space.

5. The automatic baking method as described in claim 2, wherein step 1) further comprises: Step l1) When the first unlocking condition is met, the processor determines whether an unlocking button on the human-machine interface is triggered; and Step l2) When the unlocking button is triggered, the processor determines that a second unlocking condition is met, wherein the electronic lock is unlocked when both the first unlocking condition and the second unlocking condition are met.

6. The automatic baking method as claimed in claim 5, wherein in step 1), the processor first controls the baking platform to descend to an initial position and then controls the electronic lock to unlock, wherein the baking platform is separated from the quartz cover when it is in the initial position.

7. The automatic baking method as claimed in claim 2, wherein the number of the plurality of baking stages is four, and the four baking stages each have a different target temperature and a target time.

8. The automatic baking method as claimed in claim 7, wherein step e) through step h) sequentially enters one of the four baking stages, and an end temperature of the previous baking stage is equal to an start temperature of the next baking stage.

9. The automatic baking method as claimed in claim 2, wherein the baking oven further includes an indicator light electrically connected to the processor, the processor controlling the indicator light to be constantly lit with a first light signal to represent the standby state, controlling the indicator light to flash with the first light signal to represent the execution of the plurality of baking stages and the cooling stage, and controlling the indicator light to be constantly lit with a second light signal to represent the stop state.

10. The automatic baking method as described in claim 2, wherein step c) includes locking the electronic lock by the processor after the oven enters the standby state.

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