Optical system integrating two-dimensional and three-dimensional detection functions

Abstract

An optical system integrating two-dimensional and three-dimensional detection functions includes a guiding unit, a two-dimensional unit, and a three-dimensional unit. The guiding unit includes an objective lens and a beam splitter disposed downstream of the objective lens. The two-dimensional unit is disposed downstream of the beam splitter and includes a doublet lens for suppressing chromatic aberration and a first image capture device disposed downstream of the doublet lens. The three-dimensional unit is disposed downstream of the beam splitter in a different orientation than the two-dimensional unit and includes a single lens, a guide member disposed downstream of the single lens for guiding a focused portion of light, a conversion module disposed after the guide member for converting height information based on a wavelength parameter of the focused portion, and a second image capture device disposed downstream of the conversion module.

Claims

1. An optical system integrating two-dimensional and three-dimensional detection functions, comprising: a guiding unit, including an objective lens adapted to guide image light from an object to be measured, and a beam splitter disposed downstream of the objective lens, the beam splitter being used to divide the image light into a first light portion guided in a first direction and a second light portion guided in a second direction different from the first direction. A two-dimensional unit, disposed downstream of the beam splitter along the first direction, includes a doublet lens having a convex lens portion and a concave lens portion made of different materials and superimposed on each other to suppress chromatic aberration of the first light portion, and a first image capturer disposed downstream of the doublet lens; and a three-dimensional unit, disposed downstream of the beam splitter along the second direction, includes a single lens for focusing the second light portion, a guide member disposed downstream of the single lens for guiding a focusing portion of the second light portion, a conversion module disposed after the guide member for converting height information according to a wavelength parameter of the focusing portion, and a second image capturer disposed downstream of the conversion module.

2. The optical system integrating two-dimensional and three-dimensional detection functions as described in claim 1, wherein, The two-dimensional unit also includes a beam splitter for dividing the first light into two branches, and a third image capturer for receiving the branches, respectively, along with the first image capturer.

3. An optical system integrating two-dimensional and three-dimensional detection functions as described in claim 1, wherein, The conversion module of the three-dimensional unit has a grating and at least one light guide lens spaced apart from the grating.

4. An optical system integrating two-dimensional and three-dimensional detection functions as described in claim 1, wherein, The three-dimensional unit also includes a beam splitter for splitting the focused portion of the second optical unit into two branch beams, and a fourth image capturer for receiving the branch beams, respectively, along with the second image capturer.

5. The optical system integrating two-dimensional and three-dimensional detection functions as described in any one of claims 1 to 4 further includes an illumination unit suitable for illuminating the object under test.

6. An optical system integrating two-dimensional and three-dimensional detection functions as described in claim 5, wherein, The guide defines a slit suitable for the passage of the focusing part.

7. An optical system integrating two-dimensional and three-dimensional detection functions as described in claim 6, wherein, The focusing part of the second light section is defined as a focusing area of ​​the object to be measured, and the illumination unit includes two light sources respectively disposed on opposite sides of the focusing area.

8. An optical system integrating two-dimensional and three-dimensional detection functions as described in claim 7, wherein, These light sources are all in the form of linear light.

9. An optical system integrating two-dimensional and three-dimensional detection functions as described in claim 5, wherein, The guide is an optical fiber.

10. An optical system integrating two-dimensional and three-dimensional detection functions as described in claim 9, wherein, The illumination unit includes two light sources located on opposite sides of the port of the optical fiber facing the single lens.

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