Apparatus for charge neutralization

Abstract

An exemplary device for charge neutralization includes: an emitter nozzle comprising an emitter and a housing for holding the emitter, the housing including a plurality of cams located outside the housing; and a nozzle container for being able to insert into and remove from the emitter nozzle, and for holding the emitter nozzle in place during operation of the emitter nozzle, the nozzle container including: a plurality of threads corresponding to the plurality of cams on the emitter nozzle, the plurality of threads having a first thread angle; and a plurality of shelves located at respective distal ends of the plurality of threads, the plurality of shelves having a second thread angle smaller than the first thread angle.

Description

Technical Field

[0001] This disclosure relates generally to ionization, and more specifically to ionizing agent emitter nozzles. Prior Technology

[0002] The ion emitter of the charge neutralizer generates both positive and negative ions and supplies them to the surrounding air or gaseous medium. To generate gaseous ions, the applied voltage must be sufficiently high to produce a corona discharge between at least two electrodes arranged as an ionization cell. In the ionization cell, at least one electrode is the ion emitter, and the other electrode may be a reference electrode. Summary of the Invention

[0003] Methods and apparatus for adaptive charge neutralization are disclosed, substantially as shown in and described in connection with at least one of the accompanying drawings, as set forth more fully in the claims. Simple Explanation of the Diagram

[0004] These and other features, characteristics, and advantages of this disclosure will be better understood when the following detailed description is read with reference to the accompanying drawings in which the same symbols denote the same parts throughout the drawings, wherein:

[0005] Figure 1 illustrates an exemplary AC charge neutralization system according to various embodiments of this disclosure for controlling ionization output based on balanced voltage feedback.

[0006] Figure 2 is an exploded view of the exemplary transmitter component of Figure 1.

[0007] Figure 3 is a perspective view of the exemplary nozzle container of Figure 2.

[0008] Figure 4 is a cross-sectional view of the exemplary nozzle container in Figure 2.

[0009] Figure 5 is a more detailed perspective view of the threads and shelf of the exemplary nozzle container in Figure 2.

[0010] Figure 6 is a cross-sectional view of the exemplary transmitter assembly in Figure 2 in an installation configuration.

[0011] Figure 7 is a cross-sectional view of another exemplary implementation of the nozzle container in Figure 2, including the protrusion between the thread and the shelf.

[0012] Figure 8 is a cross-sectional view of another exemplary implementation of the nozzle container in Figure 2, wherein the shelf has a negative screw angle.

[0013] The accompanying drawings are not necessarily to scale. Where appropriate, similar or identical element symbols are used to refer to similar or identical parts. Implementation

[0014] Ionizing agents or charge neutralizers emit positive and / or negative ions to release static electricity that may be present on surfaces or substrates (such as those located in manufacturing facilities). The disclosed exemplary methods and apparatus for charge neutralization can be used in Class 1 cleanroom production environments and are particularly useful for semiconductor wafer manufacturing.

[0015] Conventional ion emitters are mounted into a housing via a container. Due to the pressurization within the housing, the ion emitter and / or the emitter nozzle holding the emitter are subjected to forces that resist installation and / or facilitate ejection from the housing. Multiple rotations of conventional ion emitters can cause operator fatigue due to frictional forces associated with the sealing element during nozzle installation and replacement. Some other conventional ion emitter nozzles are mounted using bayonet fittings. However, bayonet fittings require substantial insertion force to overcome resistance from the sealing element.

[0016] Compared to conventional ion emitter nozzle assemblies, the disclosed ion emitter nozzle and container have a threaded connection, wherein the thread has multiple segments. In some such examples, the nozzle container has double threads, and the emitter housing includes a cam for screwing into the double threads. A first segment of each thread has a first thread angle (e.g., an angle defined by the pitch relative to a vertical circumference), and each thread terminates in a second segment with a smaller thread angle. In some such examples, the second segment has a zero pitch angle. The smaller thread angle improves the locking of the emitter nozzle in the installed position and reduces the possibility of accidental nozzle deployment or ejection, while also improving ease of installation.

[0017] The terms "ionization" and "charge neutralization" are used interchangeably in this document.

[0018] The disclosed exemplary device for charge neutralization includes: an emitter nozzle having an emitter and a housing for holding the emitter, wherein the housing includes a plurality of cams located outside the housing; and a nozzle container for being able to insert into and remove from the emitter nozzle, and to hold the emitter nozzle in place during operation of the emitter nozzle, the nozzle container including: a plurality of threads corresponding to a plurality of cams on the emitter nozzle, the plurality of threads having a first thread angle; and a plurality of shelves located at respective distal ends of the plurality of threads, the plurality of shelves having a second thread angle smaller than the first thread angle.

[0019] Some exemplary devices further include a power source, wherein the nozzle container is used to conduct power from the power source to the transmitter nozzle when the transmitter nozzle is mounted in the nozzle container. In some exemplary devices, the housing of the transmitter nozzle includes two cams, and the nozzle container contains double threads.

[0020] In some exemplary devices, the plurality of threads include rotations ranging from half a turn to a full turn to mount the emitter nozzle into the nozzle container. In some exemplary devices, the nozzle container includes a base for abutting against the exterior of the emitter nozzle housing to provide a seal, and the emitter nozzle includes a seal located outside the housing such that the seal abuts the base. Some such exemplary devices further include an ionizing agent housing having a plurality of nozzle containers. In some exemplary devices, the interior of the ionizing agent housing is pressurized with air, and the base is used to seal against the air pressure. In some exemplary devices, a shelf is used to prevent the emitter nozzle from unfolding from the nozzle container due to air pressure.

[0021] In some exemplary devices, the nozzle container is injection molded. In some exemplary devices, at least one of the shelves has a second thread angle of 0 degrees. In some exemplary devices, at least one of the shelves has a protrusion located between the thread and the shelf, such that at least one cam must pass through the protrusion to reach the corresponding shelf from the thread and from the shelf to the corresponding thread. In some exemplary devices, at least one of the shelves has a second thread angle of less than 0 degrees.

[0022] Figure 1 illustrates an exemplary AC charge neutralization system 100 for controlling ionization output based on balanced voltage feedback. The exemplary AC charge neutralization system 100 outputs positive and negative ions 102 to neutralize the charge on a target device or substrate 104.

[0023] To generate ions 102, the exemplary system 100 includes one or more ion emitter nozzles 106 coupled to one or more power sources providing high-voltage, high-frequency AC signals to generate ions 102. The system 100 may include any number of emitter nozzles 106 to disperse ions 102 to a desired area or size of a target device or substrate 104. By alternating positive and negative ions, the exemplary system 100 effectively neutralizes static charge present on the target device or substrate 104 while reducing or avoiding charging of the target device or substrate 104 by the ions 102.

[0024] The system 100 in Figure 1 alternates between positive and negative ions by controlling the output voltage at nozzle 106 to output continuous pulses of positive and negative ions. The durations of the continuous positive and negative pulses can be controlled based on a desired balance. Compared to conventional charge neutralization systems, the exemplary system 100 achieves a balance voltage within + / - 5 V by measuring the balance voltage via antenna 108 and adjusting the ion balance based on the measured value. For example, the system 100 can adjust the number or duration of the continuous positive and negative pulses to adjust the output balance. Antenna 108 can be positioned near target 104 such that antenna 108 measures the balance voltage representing the output of system 100. By using feedback from antenna 108, system 100 repeatedly (e.g., continuously) adjusts the balance of positive and negative ions.

[0025] The exemplary system 100 includes a housing 110, which contains a power supply, a nozzle 106, and any other components in the system. The nozzle 106 can be installed into and removed from the system 100 to facilitate replacement of the nozzle 106 due to wear, contamination, and / or damage.

[0026] Figure 2 is an exploded view of an exemplary emitter assembly 200 that can be used to implement the nozzle 106 of Figure 1. In operation, the emitter assembly 200 receives a high-voltage, high-frequency signal from the power supply of system 100 and outputs positive and negative ions based on the received voltage.

[0027] The transmitter assembly 200 includes a transmitter nozzle 202 for mounting into a nozzle container 204. The nozzle container 204 may be integral with the housing 110 of the system 100, and the transmitter nozzle 202 is mounted in and detached from the nozzle container 204. An exemplary nozzle container 204 may further facilitate the conduction of electrical signals to and / or from the transmitter nozzle 202.

[0028] The emitter nozzle 202 includes an emitter 206 and an emitter housing 208. An exemplary emitter 206 is removably mounted into the emitter housing 208, which positions the emitter 206 for proper mounting into the nozzle container 204. The emitter housing 208 and / or the nozzle container 204 may include one or more O-rings, gaskets, and / or other seals to prevent gas leakage between the emitter housing 208 and the nozzle container 204.

[0029] As disclosed in more detail below, the exemplary emitter nozzle 202 is screwed into a nozzle container 204, which includes internal threads and a shelf to prevent accidental loosening of the emitter nozzle 202 from the container 204. The emitter housing 208 includes two cams 210 screwed into the internal threads of the container 204. Compared to conventional emitter nozzles, the exemplary emitter nozzle 202 and container 204 resist accidental thread disengagement due to air pressure from inside the housing 110 on the emitter nozzle 202.

[0030] Figure 3 is a perspective view of the exemplary nozzle container 204 of Figure 2. Figure 4 is a cross-sectional view of the exemplary nozzle container of Figure 2. The nozzle container 204 has threads to allow the emitter housing 208 to be screwed in via the cam 210. In the examples of Figures 3 and 4, the nozzle container 204 has double threads. Threads 302a and 302b have a first thread angle that can be selected to allow the emitter nozzle 202 to be installed into the container 204 in quarter turns, half turns, three-quarter turns, full turns, and / or any other number of turns.

[0031] At the distal end of each of threads 302a and 302b, threads 302a and 302b include shelf portions 304a and 304b with a reduced screw pitch angle. Figure 5 is a more detailed perspective view of the threads 302a and 302b and shelf 304b of the exemplary nozzle container 204 of Figure 2. In the examples of Figures 3 and 4, the screw pitch angle is reduced to zero at shelf portions 304a and 304b. During installation, any outward pressure on the emitter housing 208 from the nozzle container 204 will not result in a thread release force, even when combined with vibrations or other effects that could cause detachment from the base.

[0032] Figure 6 is a cross-sectional view of the exemplary transmitter assembly 200 of Figure 2 in an installation configuration. As shown in Figure 6, the cam 210 is positioned against the shelf portions 304a, 304b of the threads 302a, 302b. In the installed position, the transmitter 206 extends through the nozzle container 204 to make electrical contact with a power source.

[0033] Figure 6 also shows exemplary seals 602 and 604, which are positioned on the exterior of the transmitter housing 208. Seals 602 and 604 are adjacent to the base 606 of the nozzle container 204 and / or other locations within the nozzle container. Seals 602 and 604 reduce gas leakage around the exterior of the transmitter housing 208.

[0034] Figure 7 is a cross-sectional view of another exemplary nozzle container 700 that can be used to implement the nozzle container 204 of Figure 2. Similar to the nozzle container 204 of Figure 2, the nozzle container 700 includes threads 302a, 302b having shelf portions 304a, 304b. The exemplary nozzle container 700 further includes a protrusion 702 located between a first portion of the thread 302b and the shelf 304b. One or both of the threads 302a, 302b may include the protrusion.

[0035] The exemplary protrusion 702 further increases the movement and / or energy required for the cam 210 to move from the shelf portion 304b to the thread 302b. Therefore, the protrusion 702 further reduces the likelihood of the emitter nozzle 202 accidentally disengaging from the container 204 without substantially increasing the difficulty of installation and removal.

[0036] Figure 8 is a cross-sectional view of another exemplary nozzle container 800 that can be used to implement the nozzle container 204 of Figure 2. Similar to the nozzle container 204 of Figure 2, the nozzle container 800 includes threads 302a, 302b having shelf portions 304a, 304b. In the exemplary container 800, the shelf portion 304b has a negative thread angle, wherein the shelf portion 304a reverses the thread direction. The exemplary shelf portion 304b with a negative thread angle can have a similar effect to the protrusion 702 of Figure 7, which is to increase the movement and / or energy required for the cam 210 to move from the shelf portion 304b to the thread 302b. Therefore, the shelf portion 304b further reduces the possibility of the emitter nozzle 202 accidentally disengaging from the thread of the container 204 without substantially increasing the difficulty of installation and removal.

[0037] In the example of Figure 8, both shelf portions 304a and 304b include negative screw angles for aligning the transmitter 206. Shelf portions 304a and 304b may have negative screw angles for a portion or all of their length.

[0038] Any of the exemplary nozzle containers 204, 700, and 800 shown can be constructed using any suitable technology. Exemplary construction or manufacturing techniques may involve, but are not limited to, injection molding and / or additive manufacturing.

[0039] This method and system can be implemented in hardware, software, and / or a combination of hardware and software. This method and / or system can be implemented centrally in at least one computing system or distributed (where different components are distributed across several interconnected computing systems). Any kind of computing system or other device suitable for performing the methods described herein is appropriate. A typical combination of hardware and software may include a general-purpose computing system having a program or other code that, when loaded and executed, controls the computing system to perform the methods described herein. Another typical implementation may include dedicated integrated circuits or chips. Some implementations may include a non-transitory machine-readable (e.g., computer-readable) medium (e.g., a FLASH drive, optical disc, magnetic storage disk, etc.) on which one or more lines of machine-executable code are stored, thereby enabling the machine to execute the program as described herein. As used herein, the term "non-transitory machine-readable medium" is defined to include all types of machine-readable storage media and excludes propagating signals.

[0040] As used herein, the terms "circuits" and "circuitry" refer to physical electronic components (i.e., hardware) and any software and / or firmware ("code") that is configurable to, executed by, and / or otherwise associated with the hardware. As used herein, for example, a particular processor and memory may be included in a first "circuit" when executing one or more lines of code and in a second "circuit" when executing one or more second lines of code. As used herein, "and / or" means any one or more items in a list connected by "and / or". As one example, "x and / or y" means any element in the three-element set {(x), (y), (x, y)}. In other words, "x and / or y" means "one or both of x and y". As another example, "x, y and / or z" means any element in the seven-element set {(x), (y), (z), (x, y), (x, z), (y, z), (x, y, z)}. In other words, "x, y, and / or z" means "one or both of x, y, and z". As used herein, the term "exemplary" means as a non-limiting example, instance, or illustration. As used herein, the term "for example (eg and for example)" lists one or more non-limiting examples, instances, or illustrations. As used herein, the circuit is "operable" to perform the function, provided that the circuit contains the necessary hardware and code (if required) to perform the function, regardless of whether the function's execution (e.g., by user-configurable settings, factory tuning, etc.) is disabled or not enabled.

[0041] Although this method and / or system has been described with reference to certain embodiments, those skilled in the art will understand that various changes can be made and equivalents can be substituted without departing from the scope of this method and / or system. For example, the blocks and / or components of the disclosed examples can be combined, divided, rearranged, and / or otherwise modified. Furthermore, many modifications can be made to suit specific situations or materials to the teachings of this disclosure without departing from the scope of this method and / or system. Therefore, this method and / or system is not limited to the specific embodiments disclosed. Rather, this method and / or system will include all embodiments falling within the scope of the appended patent applications, whether literally or under the principle of equivalents.

[0042] 100:AC charge neutralization system 102: Ions 104: Target device or substrate 106: Ion emitter nozzle 108: Antenna 202: Launcher Nozzle 204: Nozzle container 206: Launcher 208: Transmitter casing 210: Outer shell 302a: Thread 302b: Thread 304a: Shelf section 304b: Shelf section 602: Seals 604: Seals 606: Base 700: Nozzle container 702: Protrusion 800: Nozzle container

[0043] Domestic storage information (please note in order of storage institution, date, and number) none Overseas storage information (please note in the order of storage country, institution, date, and number) none

Claims

1. A device for charge neutralization, the device comprising: an emitter nozzle including: an emitter; and a housing for holding the emitter, the housing including a plurality of cams located on an outer surface of the housing; and a nozzle container for being able to insert into and remove from the emitter nozzle, and for holding the emitter nozzle in place during operation of the emitter nozzle, the nozzle container including: a plurality of threads corresponding to the plurality of cams on the emitter nozzle, the plurality of threads having a first thread angle; and a plurality of shelves located at respective distal ends of the plurality of threads, the plurality of shelves having a second thread angle smaller than the first thread angle.

2. The device according to claim 1 further includes a power source, the nozzle container for transmitting power from the power source to the transmitter nozzle when the transmitter nozzle is mounted in the nozzle container.

3. The device according to claim 1, wherein the housing of the transmitter nozzle includes two cams and the nozzle container includes a double thread.

4. The device according to claim 1, wherein the plurality of threads comprises rotating from half a turn to a full turn to install the emitter nozzle into the nozzle container.

5. The device according to claim 1, wherein the nozzle container includes a base for abutting against an exterior of the housing of the emitter nozzle to provide a seal, and the emitter nozzle includes a seal located on an exterior of the housing such that the seal abuts the base.

6. The apparatus according to claim 5 further comprises an ionizing agent housing having a plurality of nozzle containers.

7. The device according to claim 6, wherein an interior of the ionizing agent housing is pressurized by air, and the base is used to seal against the air pressure.

8. The device according to claim 6, wherein the shelves are used to prevent the emitter nozzle from unfolding from the nozzle container due to the air pressure.

9. The apparatus according to claim 1, wherein the nozzle container is injection molded.

10. The device according to claim 1, wherein at least one of the shelves has a second spiral angle of 0 degrees.

11. The device according to claim 10, wherein at least one of the shelves has a protrusion located between the threads and the shelves, such that one of the cams must pass through the protrusion to reach the corresponding shelf from the thread and from the shelf to the corresponding thread.

12. The device according to claim 1, wherein at least one of the shelves has a second spiral angle of less than 0 degrees.

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