Probe insertion method and probe

Abstract

The present invention aims to make it easier for probes to be inserted into two or more guide plates. This invention provides a probe insertion method for a probe card 1. In the probe card 1, two guide plates 301 and 302 are separately configured. A probe 50 is inserted into two guide holes 311 and 312 formed in the two guide plates 301 and 302, respectively. The probe insertion method includes: inserting a traction rod 60 into the two guide holes 311 and 312; connecting the front end of the traction rod 60 inserted into the two guide holes 311 and 312 to a connecting portion 510 provided at the front end of the probe 50 in a detachable manner; pulling the traction rod 60 out of the two guide holes 311 and 312 and inserting the probe 50 into the two guide holes 311 and 312; and separating the traction rod 60 pulled out of the two guide holes 311 and 312 from the probe 50.

Description

Technical Field

[0001] This invention relates to a probe insertion method and a probe, and more specifically, to a method for inserting a probe into two or more guide plates constituting a probe card, and an improvement thereto on the probe used in this method. Prior Technology

[0002] A probe card is an inspection device used to inspect the electrical characteristics of semiconductor devices formed on a semiconductor wafer. A number of probes that make contact with the electrode terminals on the semiconductor wafer are disposed on a wiring board.

[0003] The probe card consists of a guide unit that supports the probes and a wiring board on which the guide unit is mounted. The guide unit consists of two or more guide plates arranged in parallel at predetermined intervals. The probes are sequentially inserted into the guide holes of these guide plates and are supported so as to be able to move up and down. The probe card is manufactured by mounting the guide unit that houses the probes onto the wiring board.

[0004] When inserting a probe sequentially into the guide holes of two or more guide plates, there is a problem that while it is easier to insert the probe into the guide hole of the first guide plate, it is more difficult to insert the probe into the guide holes of the second and subsequent guide plates. In particular, when the probe has a curved portion, it is even more difficult to insert the probe into two or more guide plates.

[0005] Figure 16 shows the state in which the probe 55 is installed on the guide unit 30. The guide unit 30 has an upper guide plate 301 and a lower guide plate 302 that are separately configured. An upper guide hole 311 is provided on the upper guide plate 301 and a lower guide hole 312 is provided on the lower guide plate 302.

[0006] When the probe 55, which is sequentially inserted into the upper guide hole 311 and the lower guide hole 312, has a bent portion 503, the posture of the probe 55 changes as the bent portion 503 passes through the upper guide hole 311, causing a positional shift of the tip of the probe 55. Therefore, it is not easy to insert the tip of the probe 55 into the lower guide hole 312, and if it is forcibly inserted, there is a risk of damage or deformation of the probe. In addition, the same problem occurs not only when the probe 55 has a bent portion 503, but also when warping occurs during the manufacturing process of the probe 55.

[0007] Although prior art has proposed a method of connecting removable tabs to probes and using a gripper to hold the tabs (e.g., Patent Document 1), prior art does not solve the problem of probe posture changes when inserting probes through two or more guide plates. [Existing Technical Documents] [Patent Literature]

[0008] [Patent Document 1] Japanese Patent Application Publication No. 2014-16205 Summary of the Invention

[0009] [The problem the invention aims to solve]

[0010] This invention was made in view of the above facts, with the aim of facilitating the insertion of a probe into two or more guide plates. In particular, it aims to provide a probe insertion method that allows easy insertion into two or more guide plates. Furthermore, it aims to provide a probe that allows easy insertion into two or more guide plates. [Solutions]

[0011] The first embodiment of the present invention is a probe insertion method for a probe card. In the probe card, two guide plates are separately arranged, and a probe is inserted into two guide holes formed in the two guide plates respectively. The probe insertion method includes: inserting a traction rod into the two guide holes; connecting the front end of the traction rod inserted into the two guide holes to a connecting portion provided at the front end of the probe in a detachable manner; pulling the traction rod out of the two guide holes and inserting the probe into the two guide holes; and separating the traction rod from the probe after pulling it out of the two guide holes.

[0012] By employing this configuration, the traction rod is pulled out from the two guide holes, thereby causing the probe to be pulled and moved, inserting into the two guide holes. Therefore, by using the traction rod, which makes insertion into the guide holes easier than insertion of the probe into the guide holes, insertion of the probe into the guide holes becomes easier.

[0013] The probe insertion method in the second embodiment of the present invention, in addition to the above-described configuration, connects the aforementioned traction rod system and the aforementioned connecting portion with a connecting surface parallel to the axial direction. By adopting this configuration, the probe and traction rod can be connected in a manner that prevents them from easily falling off during traction.

[0014] The probe insertion method of the third embodiment of the present invention, in addition to the above-described configuration, further includes a step of removing the connecting portion from the probe after the aforementioned traction rod has been separated. By adopting this configuration, the shape of the connecting portion can be prevented from affecting the inspection.

[0015] The probe of the fourth embodiment of the present invention comprises: an elastically deformable probe body inserted into two guide holes formed in two separately arranged guide plates; and a connecting portion protruding from one end of the probe body in the axial direction; and a traction rod for inserting the guide plates can be mounted and detached relative to the connecting portion.

[0016] By employing this configuration, the probe is connected to a traction rod that extends into two guide holes. When the traction rod is pulled out of the two guide holes, the probe is pulled by the traction rod and moves to extend into the two guide holes. Therefore, by using a traction rod that makes it easier for the probe to extend into the guide holes than for the probe to extend into the guide holes, the extension of the probe into the guide holes can be made easier.

[0017] The probe in the fifth embodiment of the present invention, in addition to the above-described configuration, is configured such that a first connecting surface parallel to the axial direction is provided at the aforementioned connecting portion, and the aforementioned traction rod can be attached to and detached relative to the aforementioned first connecting surface. By adopting this configuration, the probe and the traction rod can be connected in a manner that prevents them from easily falling off during traction.

[0018] The probe of the sixth embodiment of the present invention, in addition to the above-described configuration, is configured such that the first connecting surface is located at a position retracted from the side of the probe body; and the second connecting surface of the traction rod connected to the first connecting surface can be configured on the side closer to the first connecting surface than the side of the probe body.

[0019] By adopting this configuration, the combined thickness of the probe and the traction rod, which are connected by the first and second connecting surfaces facing each other, can be suppressed, making it easier for the probe to be inserted into the two guide holes.

[0020] The probe of the seventh embodiment of the present invention, in addition to the above-described configuration, has solder or thermoplastic adhesive formed on the aforementioned first or second connecting surface. With this configuration, the probe and the traction rod can be connected or separated by heating the probe or the traction rod.

[0021] The probe in the eighth embodiment of the present invention, in addition to the above-described configuration, has an engaging portion on the first connecting surface for engaging with the aforementioned traction rod. By adopting this configuration, the first connecting surface and the second connecting surface can be connected.

[0022] The probe of the ninth embodiment of the present invention, in addition to the above-described configuration, has a hook-shaped engagement portion that protrudes from the first connecting surface and is shaped such that the front end faces the probe body. This configuration allows for a connection that is less likely to detach during traction.

[0023] The probe of the tenth embodiment of the present invention, in addition to the above-described configuration, has an engagement portion formed in an engagement hole on the first connecting surface. By employing this configuration, a connection can be made that is not easily dislodged during traction.

[0024] The probe of the 11th embodiment of the present invention, in addition to the above-described configuration, has a connecting portion that is wedge-shaped with a cross-sectional area decreasing towards the front end opposite to the probe body. This configuration allows for easy insertion of the probe into the guide hole. Furthermore, the sharpened front end allows for use of the probe in inspection situations without removing the connecting portion. [Invention Effects]

[0025] According to the present invention, it is easier to insert a probe into two or more guide plates. In particular, a probe insertion method that enables easy insertion into two or more guide plates is provided. Furthermore, a probe that enables easy insertion into two or more guide plates is provided. Simple Explanation of the Diagram

[0026] [Figure 1] is a schematic diagram showing the probe insertion method of Embodiment 1 of the present invention. [Figure 2] is a diagram illustrating one example of the detailed steps of the insertion method of probe 50. [Figure 3] is a diagram illustrating one example of the detailed steps of the insertion method of probe 50. [Figure 4] is a diagram showing the guide unit 30 with the probe 50 installed. [Figure 5] shows the probe card 1 with the guidance unit 30 of Figure 4 installed. [Figure 6] is a diagram showing an example of the detailed structure of the connecting parts 510 and 610 in Figure 1. [Figure 7] is a diagram showing in detail the state after the probe 50 and the traction rod 60 are connected. [Figure 8] is a diagram illustrating one example of a manufacturing method for probe 50. [Figure 9] is a diagram showing other configuration examples of probe 50. [Figure 10] is a diagram showing the status when the probe 50 in Figure 9 is used for inspection. [Figure 11] is a diagram showing an example of the probe insertion method of Embodiment 2 of the present invention. [Figure 12] is a diagram showing other configuration examples of the probe 51 in Embodiment 2 of the present invention. [Figure 13] is a diagram showing another configuration example of the probe 51 in embodiment 2 of the present invention. [Figure 14] is a diagram showing an example of the probe insertion method of Embodiment 3 of the present invention. [Figure 15] is a diagram showing an example of the insertion method of probe 53 in embodiment 4 of the present invention. [Figure 16] is a diagram showing the state in which the conventional probe 55 is installed in the guidance unit 30. Implementation

[0027] In this specification, the axial direction of the probe refers to the direction of the long side of the probe, the width direction of the probe is any direction orthogonal to the axial direction, and the thickness direction of the probe is set to a direction orthogonal to both the axial direction and the width direction.

[0028] Implementation Form 1. Figure 1 is a schematic diagram of the probe insertion method according to Embodiment 1 of the present invention, showing an example of a state in which the probe 50 is installed in the guide unit 30 using the traction rod 60.

[0029] The traction rod 60 is a fixture used to insert the probe 50 into the guide holes 311 and 312 of the guide unit 30. The traction rod 60 is inserted into the guide holes 311 and 312 before the probe 50. Subsequently, if the traction rod 60 connected to the probe 50 is pulled out from the guide holes 311 and 312, the probe 50 is pulled by the traction rod 60 and inserted into the guide holes 311 and 312. Subsequently, if the traction rod 60 is separated from the probe 50, the probe 50 installed in the guide unit 30 can be obtained.

[0030] (1) Guiding unit 30 The guide unit 30 includes two guide plates 301 and 302 that support the probe 50, and a connecting spacer 303 that connects the guide plates 301 and 302 to each other.

[0031] The upper guide plate 301 is a plate-shaped component with two or more upper guide holes 311, such as a ceramic plate. The upper guide holes 311 are holes that penetrate the upper guide plate 301 in the thickness direction, allowing the probe 50 to be inserted and supporting the upper end of the probe 50.

[0032] The lower guide plate 302 is a plate-shaped member, such as a ceramic plate, with two or more lower guide holes 312, and is configured to face the lower surface of the upper guide plate 301 by means of a connecting spacer 303. The lower guide plate 302 is arranged below the upper guide plate 301 in a parallel manner with a predetermined distance between it and the upper guide plate 301. The lower guide holes 312 are holes that pass through the lower guide plate 302 in the thickness direction, through which the probe 50 is inserted, and support the lower end of the probe 50 so that it can move up and down.

[0033] While it is preferable that the upper guide hole 311 and the lower guide hole 312, which are arranged opposite each other in a direction orthogonal to the guide plates 301 and 302, make it easier to insert the traction rod 60, the present invention is not limited to such a configuration.

[0034] (2) Probe 50 Probe 50 is a vertical probe extending in a direction approximately orthogonal to guide plates 301 and 302. Probe 50 is constructed from a conductive material with an elongated shape, for example, by plating. The material for probe 50 can be a metallic material with good elasticity and conductivity, such as nickel (Ni) alloy or palladium (Pd) alloy. While probe 50 may be constructed from a single conductive material, it can also be constructed from two or more conductive materials. For example, a portion may be made of gold (Au) or copper (Cu), which have extremely high conductivity.

[0035] The probe 50 includes a probe body 500, a first connecting portion 510, and a stop portion 520. The probe body 500 is composed of an upper rod 501, a lower rod 502, and a bending portion 503. The upper rod 501 and the lower rod 502 are connected via the bending portion 503. The first connecting portion 510 is located on the lower rod 502, and the stop portion 520 is located on the upper rod 501.

[0036] The upper rod 501 is generally straight and is inserted into the upper guide hole 311, supported by the upper guide plate 301. The upper end of the upper rod 501 protrudes upward from the guide unit 30, and the lower end of the upper rod 501 is connected to the curved part 503 inside the guide unit 30.

[0037] The lower rod 502 is generally straight and extends through the lower guide hole 312, supported by the lower guide plate 302. The lower end of the lower rod 502 protrudes downwards from the guide unit 30, and the upper end of the lower rod 502 is connected to the curved portion 503 within the guide unit 30. Although the figures show the lower rod 502 and the upper rod 501 coaxial, the present invention is not limited to this configuration.

[0038] The curved portion 503 is formed by a curved shape and elastically deforms under pressure from the object being inspected during inspection. The curved portion 503 bends and deforms under external force from the object being inspected, thereby allowing the probe 50 to elastically contact the object being inspected. Furthermore, by providing the curved portion 503, the deformation portion or direction of the probe 50 can be predetermined, thus suppressing contact between adjacent probes 50.

[0039] The first connecting part 510 is a connecting means for detachably connecting the traction rod 60. The first connecting part 510 is formed as a protrusion that protrudes from the lower end of the probe body 500 in the axial direction, that is, from the front end of the lower rod 502 in a generally vertical direction. The traction rod 60 is connected in such a way that it faces the side of the first connecting part 510.

[0040] The stop 520 is a protrusion on the side of the upper rod 501. The stop 520 is locked onto the upper guide plate 301, thereby preventing the probe 50 from falling off the guide unit 30.

[0041] (3) Traction rod 60 The traction rod 60 is a fixture that pulls the probe 50 through the guide holes 311 and 312 before the probe 50 is inserted into them. The traction rod 60 can be made of the same material as the probe 50 or a different material. The traction rod 60 includes a rod body 600, a second connecting part 610, and a handle 620.

[0042] The rod body 600 is composed of a generally straight shape, with a second connecting part 610 at its upper end and a handle 620 at its lower end.

[0043] The second connecting part 610 is a connecting means that can be detachably connected to the probe 50. The second connecting part 610 is formed to protrude from the upper end of the rod body 600 in the axial direction, and the probe 50 is connected to the side of the second connecting part 610.

[0044] The handle 620 is a gripping part held by an operator or assembly robot. The handle 620 has a larger cross-sectional area than the rod body 600, making it easy to grip.

[0045] (4) Probe insertion method Figures 2 and 3 illustrate one example of the detailed steps of the insertion method for probe 50. In (a) to (f) of the figures, the steps of installing probe 50 onto guide unit 30 using traction rod 60 are shown in sequence. The probe installation steps shown in the figures are part of the probe card manufacturing process, and may also be part of the repair process for replacing a damaged probe 50.

[0046] Figure (a) shows the same state as in Figure 1, focusing on the probe 50 and the traction rod 60, indicating that the traction rod 60 is inserted into the lower guide hole 312 and then into the upper guide hole 311. The traction rod 60 is inserted into the guide holes 312 and 311 from the bottom. Since the traction rod 60 is composed of a generally straight shape, it can be easily inserted into the guide holes 311 and 312 compared to the probe 50 which has a curved portion 503.

[0047] Figure (b) shows the state in which the probe 50 is connected to the traction rod 60 with the second connecting part 610 of the traction rod 60 protruding further upward than the upper guide plate 301. The first connecting part 510 of the probe 50 and the second connecting part 610 of the traction rod 60 are connected in a detachable manner.

[0048] Figure (c) shows the state in which the traction rod 60 is pulled out from the guide holes 311 and 312. When the traction rod 60 is moved downward, the probe 50 is also pulled downward by the traction rod 60. Therefore, the probe 50 is inserted into the upper guide hole 311 and then into the lower guide hole 312.

[0049] Figure (d) shows the state after the traction rod 60 is separated. When the traction rod 60 is moved downwards, after the traction rod 60 is completely pulled out from the guide holes 311 and 312, the stop portion 520 of the probe 50 is locked above the upper guide plate 301, and the traction rod 60 stops. At this time, the first connecting portion 510 and the second connecting portion 610 are located below the lower guide plate 302 through the lower guide hole 312. Therefore, if the traction rod 60 is separated from the probe 50, the probe 50, which has been inserted into the guide holes 311 and 312, can be obtained.

[0050] Figure (e) shows the state in which the first connecting portion 510 is removed from the probe 50. The first connecting portion 510 is removed as needed. For example, the first connecting portion 510 can be removed by rubbing the lower end of the probe 50 with a cleaning sheet 70 having an abrasive layer formed on it.

[0051] Figure (f) shows the state after the first connecting portion 510 is removed. A probe 50 is obtained that is inserted through the guide holes 311 and 312 and does not have the first connecting portion 510. In addition, although this embodiment describes an example of removing the first connecting portion 510, the grinding step in (e) above can also be omitted and the first connecting portion 510 can be retained, so that the front end of the first connecting portion 510 contacts the object to be inspected.

[0052] (5) Probe Card 1 Figure 4 shows the guide unit 30 with all the necessary probes 50 installed. Figure 5 shows the probe card 1 with the guide unit 30 of Figure 4 installed, and shows a cross-section of the probe card 1, which is horizontally arranged in the wafer spot tester, when cut vertically.

[0053] The probe card 1 is mounted on the card holder 20 with the mounting surface of the probe 50 facing the semiconductor wafer 211 on the stage 21. The probe 50 can be brought into contact with the electrode pad 212 on the semiconductor wafer 211 by moving the stage 21 up and down. The probe card 1 is composed of a main substrate 10, a reinforcing plate 103, a guiding unit 30, and two or more probes 50.

[0054] The main substrate 10 is a wiring substrate that can be detachably mounted on a wafer dot tester. Its lower outer periphery is supported by the wafer dot tester's holder 20 and is horizontally positioned. A reinforcing plate 103 is mounted on the central part of the upper surface of the main substrate 10, and two or more external terminals 101 for connecting signal terminals of a test device (not shown) are provided on the outer periphery. Furthermore, two or more probe electrodes 102 for connecting probes 50 are provided on the central part of the lower surface. The probe electrodes 102 and the external terminals 101 are interconnected through the main substrate 10.

[0055] The guide unit 30 is a support member that supports two or more probes 50, which can move up and down and be positioned in the horizontal plane. It is mounted facing the lower surface of the main substrate 10 through the mounting spacer 40. That is, the upper guide plate 301 is arranged below the main substrate 10 in a parallel manner with a predetermined distance between it and the main substrate 10.

[0056] The probe 50 has a shape that extends in a direction intersecting with the main substrate 10. Its upper and lower ends both protrude from the guide unit 30. The upper end of the probe 50 is connected to the probe electrode 102, and the lower end of the probe 50 can contact the electrode pad 212 on the object being inspected.

[0057] (6) Connecting parts 510, 610 Figure 6 shows an example of the detailed configuration of the connecting parts 510 and 610 in Figure 1. Furthermore, in figures (a) to (c), the connection of probe 50 and traction rod 60 is shown in sequence. Additionally, Da, Dt, and Dw in the figure represent the axial direction, thickness direction, and width direction of probe 50, respectively. The axial direction Da is the vertical direction, while the thickness direction Dt and width direction Dw are horizontal directions that are orthogonal to each other.

[0058] A first connecting portion 510 is provided at the front end of the probe body 500 and has a first connecting surface 515. The first connecting surface 515 is the side surface of the first connecting portion 510, and is formed, for example, as a plane parallel to the axial direction Da. A locking protrusion 550 is provided on the first connecting surface 515. The locking protrusion 550 is a locking means that can be detachably locked with the traction rod 60, and is formed, for example, as a hook-shaped protrusion that protrudes from the first connecting surface 515 in the thickness direction Dt and whose front end faces the probe body 500.

[0059] The second connecting portion 610 is provided at the front end of the rod body 600 and has a second connecting surface 615. The second connecting surface 615 is the side surface of the second connecting portion 610, for example, it is a plane parallel to the axial direction Da. A locking hole 650 is provided on the second connecting surface 615. The locking hole 650 is a locking means that can be detachably locked with the locking protrusion 550, for example, it is formed as a through hole that penetrates the second connecting surface 615 of the second connecting portion 610 in the thickness direction Dt.

[0060] The probe 50 is connected to the traction rod 60 by aligning the first connecting surface 515 and the second connecting surface 615, so that the engaging protrusion 550 on the first connecting surface 515 engages with the engaging hole 650 on the second connecting surface 615. By connecting the sides of the probe 50 and the traction rod 60 together, the connection can be made in a way that prevents them from easily falling off during traction. Furthermore, since the engaging protrusion 550 has a hook shape with its front end facing the opposite side of the traction rod 60, the connection can be made in a way that prevents them from easily falling off during traction.

[0061] Figure (a) shows the state before connection. The probe 50 and the traction rod 60 are separately configured with the first connection surface 515 and the second connection surface 615 facing each other.

[0062] Figure (b) shows the state during connection. Move the probe 50 or the traction rod 60 shown in (a) horizontally until they are close together until the second connection surface 615 contacts the first connection surface 515, thereby inserting the engagement protrusion 550 into the engagement hole 650.

[0063] Figure (c) shows the connected state. Moving the probe 50 or the traction rod 60 shown in (b) vertically separates them, thereby engaging the hook-shaped engaging protrusion 550 with the engaging hole 650. Through the engagement of the engaging protrusion 550 and the engaging hole 650, the probe 50 and the traction rod 60 are connected, enabling the traction of the probe 50 by the traction rod 60.

[0064] The separation of the traction rod 60 from the probe 50 is performed in the reverse order of steps (a) to (c) above. That is, the probe 50 or the traction rod 60 shown in (c) is moved vertically to bring them closer together, thereby releasing the engagement between the engaging protrusion 550 and the engaging hole 650, resulting in the state shown in (b). Next, the probe 50 or the traction rod 60 is moved horizontally to move them apart, thereby pulling the engaging protrusion 550 out of the engaging hole 650, resulting in the state shown in (a), and the traction rod 60 is separated from the probe 50.

[0065] Figure 7 shows in detail the state after the probe 50 and the traction rod 60 are connected. A perspective view is shown in (a) and a side view is shown in (b). Also, a side view of probe 56, which is a comparative example, is shown in (c).

[0066] As shown in (a) and (b) of the figures, the thickness of the first connecting portion 510 is thinner than that of the probe body 500, and the first connecting surface 515 is formed as a surface that is further recessed from the side surface 505 of the probe body 500. Therefore, when viewed from the axial direction, a connecting space 560 is formed within the outline of the cross-section of the probe body 500. That is, the connecting space 560 is adjacent to the first connecting surface 515 and is formed in a space that is further inward than the side surface 505. By arranging the second connecting surface 615 within such a connecting space 560, the combined thickness of the first connecting portion 510 and the second connecting portion 610 after connection can be suppressed. Therefore, the probe 50 can be easily inserted into the guide holes 311 and 312.

[0067] Similarly, the thickness of the second connecting portion 610 is thinner than that of the rod body 600, and the second connecting surface 615 is formed as a surface that is further recessed from the side surface 605 of the rod body 600. Therefore, the first connecting surface 515 can be positioned further inward than the side surface 605, which can suppress the combined thickness of the first connecting portion 510 and the second connecting portion 610 after connection. Therefore, the probe 50 can be easily inserted into the guide holes 311 and 312.

[0068] Furthermore, the width of the first connecting portion 510 is less than the width of the probe body 500, and the first connecting portion 510 is disposed within the outline of the cross-section of the probe body 500 when viewed from the axial direction. Therefore, the first connecting portion 510 does not obstruct the probe 50 from being inserted into the guide holes 311 and 312.

[0069] Figure (c) shows a comparative example of a probe 56 with a locking protrusion 550 formed on the side 505 of the probe body 500. This probe 56 does not have a first connecting portion 510 and does not have a connecting space 560. Therefore, the combined thickness of the connected probe 56 and the second connecting portion 610 is too large, making it difficult for the probe 56 to pass through the guide holes 311 and 312 compared to the probe 50 shown in figures (a) and (b).

[0070] Furthermore, although Figures 7(a) and (b) show the second connecting portion 610 completely contained within the connecting space 560 when viewed from the axial direction, and not exposed outward from the profile of the probe body 500, the present invention is not limited to this situation. That is, it is also possible for a portion of the second connecting portion 610 to be exposed outward from the connecting space 560 when viewed from the axial direction.

[0071] Figure 8 illustrates one example of a manufacturing method for probe 50. In the figure, (a) to (e) show the main steps of the manufacturing process that constitute probe 50 in chronological order. Probe 50 is manufactured using an electroplating method.

[0072] First, a conductive layer 701 is formed on the substrate 700 for forming the probe by electroplating (Fig. 8(a)). The conductive layer 701 is patterned as a series of regions corresponding to the probe body 500 and the first interconnect layer 510. The patterning is achieved by exposure and development using a photoresist.

[0073] Next, a conductive layer 702 is formed on a portion of the conductive layer 701 by electroplating (Fig. 8(b)). The conductive layer 702 is patterned as two separate regions corresponding to the probe body 500 and the engaging protrusion 550.

[0074] Next, a sacrificial layer 703 is formed on the conductive layer 701 where the conductive layer 702 is not formed by electroplating, and the surface is planarized by polishing (Fig. 8(c)). The sacrificial layer is formed during the fabrication of the three-dimensional structure by plating and is removed by subsequent etching. The sacrificial layer 703 uses a different material than the conductive layers 701, 702, and 704, such as copper (Cu).

[0075] Next, a conductive layer 704 is formed by electroplating on the exposed area of ​​the conductive layer 702 and a portion of the sacrificial layer 703 (Fig. 8(d)). The conductive layer 704 is patterned as two separate areas corresponding to the probe body 500 and the engaging protrusion 550. The area corresponding to the engaging protrusion 550 is formed across the conductive layer 702 and the sacrificial layer 703.

[0076] Finally, by etching away the sacrificial layer 703, the conductive layer 704 formed on the sacrificial layer 703 becomes the front end of the engagement protrusion 550, and the probe 50 can be obtained.

[0077] Figure 9 shows another configuration example of probe 50. Compared with probe 50 in Figure 6, this probe 50 is different in that the first connecting part 510 has a wedge shape with a cross-sectional area that decreases as it faces the front end.

[0078] Although the thickness of the first connecting portion 510 is fixed, the wedge-shaped surface 513 intersecting the first connecting surface 515 is inclined relative to the axial direction Da, and the width of the first connecting portion 510 becomes narrower towards the front end. Therefore, its cross-sectional area decreases as it moves towards the front end.

[0079] By making the front end of the first connecting surface 515 wedge-shaped, it is easier for the probe 50 to be inserted into the guide holes 311 and 312.

[0080] Figure 10 illustrates the inspection state using the probe of Figure 9. In Figure (a), the inspection state is shown using a probe 50 with a first connecting portion 510. When inspecting by contacting the probe 50 with the electrode pad 212 on the semiconductor wafer, it is preferable to perform a brushing action upon contact to remove the oxide film on the electrode pad 212; a sharpened tip of the probe 50 is more advantageous. Therefore, in this case, it is preferable to use a probe 50 that retains the wedge-shaped first connecting portion 510 at its tip for inspection.

[0081] Figure (b) shows the state of inspection using a probe 50 with the first connector 510 removed. When the first connector 510 is removed using a cleaning plate 70, the front end of the probe body 500 exhibits a flat cross-section. When inspecting by contacting the probe 50 with the bump electrode 213 on the semiconductor wafer, a flat front end is advantageous in terms of ensuring stable contact and reducing the unevenness or roughness on the bump electrode 213 formed by the contact. Therefore, in this case, it is preferable to use a probe 50 with the first connector 510 removed for inspection.

[0082] Implementation Form 2. In Embodiment 1, an example of a probe insertion method connecting a probe 50 with an engaging protrusion 550 to a traction rod 60 with an engaging hole 650 was described. In contrast, in this embodiment, a probe insertion method connecting a probe 51 with an engaging hole 551 to a traction rod 61 with an engaging protrusion 651 will be described.

[0083] Figure 11 is a diagram illustrating an example of the probe insertion method according to Embodiment 2 of the present invention, showing a detailed example of the configuration of the first connecting portion 510 of the probe 51 and the second connecting portion 610 of the traction rod 61. Comparing the probe 51 and traction rod 61 with the probe 50 and traction rod 60 in Figure 6 (Embodiment 1), the configurations of the first connecting portion 510 and the second connecting portion 610 are different. Since other configurations are the same as those of the probe 50 and traction rod 60, repeated descriptions are omitted.

[0084] A first connecting portion 510 is provided at the front end of the probe body 500, and has a first connecting surface 515 and a connecting back surface 516. The first connecting surface 515 is the side surface of the first connecting portion 510, and for example, is formed as a plane parallel to the axial direction Da. The connecting back surface 516 is the side surface of the first connecting portion 510 facing the first connecting surface 515. A locking hole 551 is provided on the first connecting surface 515. The locking hole 551 is a locking means that can be detachably locked with the traction rod 61, and for example, it is formed as a through hole that penetrates the first connecting surface 515 of the first connecting portion 510 in the thickness direction Dt.

[0085] The second connecting portion 610 is provided at the front end of the rod body 600 and has a second connecting surface 615. The second connecting surface 615 is the side surface of the second connecting portion 610, for example, it is a plane parallel to the axial direction Da. In addition, a locking protrusion 651 is provided on the second connecting surface 615. The locking protrusion 651 is a locking means that can be detachably locked with the locking hole 551, for example, it is formed as a hook-shaped protrusion that protrudes from the second connecting surface 615 in the thickness direction Dt and whose front end faces the rod body 600 side.

[0086] The probe 51 is connected to the traction rod 61 by aligning the first connecting surface 515 and the second connecting surface 615, thereby engaging the engaging hole 551 with the engaging protrusion 651. By connecting the sides of the probe 51 and the traction rod 61 together, the connection can be made in a way that prevents them from easily falling off during traction. Furthermore, since the engaging protrusion 651 has a hook shape with its front end facing the side opposite to that of the probe 51, the connection can be made in a way that prevents them from easily falling off during traction.

[0087] Furthermore, the thickness of the first connecting portion 510 is thinner than that of the probe body 500, and the first connecting surface 515 and the connecting back surface 516 are formed as surfaces that are further back than the corresponding sides 505 and 506 of the probe body 500. Therefore, the second connecting surface 615 can be positioned further inside than the side surface 505, which can suppress the combined thickness of the first connecting portion 510 and the second connecting portion 610 after connection. Also, at least a portion of the engaging protrusion 651 protruding from the connecting back surface 516 can be positioned further inside than the side surface 506, which can suppress the length of the engaging protrusion 651 protruding outward from the side surface 506. Therefore, the probe 51 can be easily inserted into the guide holes 311 and 312.

[0088] Similarly, the thickness of the second connecting portion 610 is thinner than that of the rod body 600, and the second connecting surface 615 is formed as a surface that is further recessed from the side surface 605 of the rod body 600. Therefore, the first connecting surface 515 can be positioned further inward than the side surface 605, which can suppress the combined thickness of the first connecting portion 510 and the second connecting portion 610 after connection. Therefore, the probe 51 can be easily inserted into the guide holes 311 and 312.

[0089] Furthermore, the width of the first connecting portion 510 is less than the width of the probe body 500, and the first connecting portion 510 is disposed within the outline of the cross-section of the probe body 500 when viewed from the axial direction. Therefore, the first connecting portion 510 does not obstruct the probe 51 from being inserted into the guide holes 311 and 312.

[0090] Figure 12 is a diagram showing another configuration example of the probe 51 of Embodiment 2 of the present invention, illustrating the detailed configuration of the connecting portions 510 and 610. The probe 51 in Figure 12 differs from the probe 51 in Figure 11 only in that it is composed of a wedge shape whose cross-sectional area decreases as it faces the front end.

[0091] Although the thickness of the first connecting portion 510 is fixed, the wedge-shaped surface 513 intersecting the first connecting surface 515 is inclined relative to the axial direction Da, and the width of the first connecting portion 510 becomes narrower towards the front end. Therefore, the cross-sectional area decreases as it moves towards the front end.

[0092] By making the front end of the first connecting surface 515 wedge-shaped, it is easier for the probe 51 to be inserted into the guide holes 311 and 312.

[0093] Figure 13 is a diagram showing another configuration example of the probe 51 in Embodiment 2 of the present invention, illustrating the detailed configuration of the connecting portions 510 and 610. The probe 51 in Figure 13 differs from the probe 51 in Figure 11, which has a circular engaging hole 551, in that it has a rectangular engaging hole 551, and a portion of the engaging hole 551 is open.

[0094] The engaging hole 551 can be circular, rectangular, or any other shape. Furthermore, the engaging hole 551 does not need to be completely surrounded by an edge; for example, an open portion 517 can be provided that breaks off a portion in the horizontal direction. Alternatively, the engaging hole 551 shown in the figure can also be a hook shape formed within the surface intersecting the engaging protrusion 651.

[0095] Implementation Form 3. In the above embodiment, an example of connecting probes 50 and 51 and traction rods 60 and 61 using engaging protrusions 550 and 651 and engaging holes 650 and 551 was described. In contrast, in this embodiment, other methods for connecting probes and traction rods are described.

[0096] Figure 14 illustrates an example of the probe insertion method according to Embodiment 3 of the present invention, showing a detailed example of the configuration of the first connecting portion 510 of the probe 52 and the second connecting portion 610 of the traction rod 62. Figure (a) shows the state before connection, and (b) shows the state after connection. Compared with the probe 50 and traction rod 60 in Figure 6 (Embodiment 1), the configurations of the first connecting portion 510 and the second connecting portion 610 of the probe 52 and traction rod 62 are different. Since other configurations are the same as those of the probe 50, repeated descriptions are omitted.

[0097] A solder layer 552 is formed on the first connection surface 515. Since the solder layer 552 can be formed by plating, it can be formed during the manufacturing process of the probe 52.

[0098] The probe 52 and the pull rod 62 can be detachably connected by joining the first connecting surface 515 and the second connecting surface 615 through the solder layer 552. For example, by heating the pull rod 62 while the second connecting surface 615 is in contact with the solder layer 552, the solder layer 552 is melted, and the probe 52 and the pull rod 62 can be connected. The insertion of the probe 52 into the guide holes 311 and 312 is performed after the temperature of the pull rod 62 has decreased. Furthermore, by reheating the pull rod 62 after the probe has been inserted, the solder layer 552 is melted again, and the probe 52 and the pull rod 62 can be separated.

[0099] The first connecting surface 515 is formed further back than the side surface 505 of the probe body 500, and the second connecting surface 615 is formed further back than the side surface 605 of the rod body 600. This aspect is the same as that of the probe 50 and the traction rod 60 in Figure 6.

[0100] Furthermore, although this embodiment describes an example of connection using solder layer 552, the present invention is not limited to this configuration. For example, an adhesive layer using a thermoplastic adhesive can also be used for connection.

[0101] Furthermore, although this embodiment has been described in the case where a solder layer 552 is formed on the first connecting surface 515 and the traction rod 62 is heated, the present invention is not limited to this configuration. For example, a solder layer 552 and a heating probe 52 may also be formed on the second connecting surface 615.

[0102] Implementation Form 4. Although the above embodiment described an example of a probe 50 inserted into the guide unit 30 from the upper guide plate 301 side, in this embodiment, a probe 53 inserted into the guide unit 30 from the lower guide plate 302 side will be described.

[0103] Figure 15 illustrates an example of the insertion method of probe 53 according to embodiment 4 of the present invention. In (a) to (c) of the figure, the steps of installing probe 53 onto guide unit 30 using traction rod 60 are shown in sequence. The probe installation steps shown in the figure are part of the probe card manufacturing steps, and may also be part of the probe card repair steps for replacing damaged probe 53.

[0104] Compared with probe 50 (Embodiment 1) in FIG2, probe 53 differs in that the first connecting part 510 is provided at the upper end of probe body 500, and the stop part 520 can pass through guide holes 311 and 312 from the lower side to the upper side. Since other components are the same as probe 50, repeated descriptions are omitted.

[0105] The first connecting part 510 is a connecting means for detachably connecting the traction rod 60. The first connecting part 510 is formed as a protrusion that protrudes from the upper end of the probe body 500 in the axial direction, that is, from the front end of the upper rod 501 in a generally vertical direction. The traction rod 60 is connected in such a way that it faces the side of the first connecting part 510.

[0106] The stop portion 520 is configured to allow upward passage through the guide holes 311 and 312, but not downward passage. For example, the stop portion 520 is a deformable member extending diagonally downward from the side of the upper rod 501. If the guide holes 311 and 312 are inserted from below, the member can elastically deform while reducing the amount of protrusion, allowing passage through the guide holes 311 and 312. However, if the member is inserted from above, the member will elastically deform while increasing the amount of protrusion, preventing passage through the guide holes 311 and 312. Therefore, the stop portion 520, which passes through the guide holes 311 and 312 from below to above, is locked onto the upper guide plate 301. Furthermore, although this embodiment describes an example in which the stop portion 520 is engaged with the upper guide plate 301, it is also possible to use a configuration in which the stop portion 520, which passes through the lower guide hole 312 from the lower side to the upper side, is engaged with the upper guide plate 302.

[0107] Figure (a) shows the state after the traction rod 60 is inserted into the upper guide hole 311, and then into the lower guide hole 312. The traction rod 60 is inserted into the guide holes 311 and 312 from the top.

[0108] Figure (b) shows the state when the second connecting part 610 of the traction rod 60 protrudes further downward than the lower guide plate 302, and the probe 53 is connected to the traction rod 60, and the traction rod 60 is then pulled out from the guide holes 311 and 312. When the traction rod 60 is moved upward, the probe 53 is also pulled upward by the traction rod 60. Therefore, the probe 53 is inserted into the lower guide hole 312, and then into the upper guide hole 311.

[0109] Figure (c) shows the state after the traction rod 60 is separated. When the traction rod 60 is moved upward, it is completely pulled out from the guide holes 311 and 312, and the first connecting part 510 and the second connecting part 610 also protrude above the upper guide plate 301 through the upper guide hole 311. In this state, if the traction rod 60 is separated from the probe 53, the stop part 520 is locked on the upper guide plate 301, and the probe 53 can be inserted through the guide holes 311 and 312.

[0110] Alternatively, a cleaning pad can be used to rub the upper end of the probe 53 to remove the first connecting part 510, as needed.

[0111] 1: Probe Card 10: Main base board 20: Card holder 21: Platform 30: Guidance Unit 40: Install spacers 50~53: Probe 55, 56: Probes 60~62: Tow bar 70: Cleaning tablets 101:External terminal 102: Probe electrode 103: Reinforcing plate 211: Semiconductor wafers 212: Electrode pad 213: Bump electrode 301: Upper guide plate 302: Lower guide plate 303: Connecting spacer 311: Upper guide hole 312: Lower guide hole 500: Probe body 501: Upper rod 502: Lower rod 503: Bending section 505, 506: Side of the probe body 510: First connecting section 513: Wedge-shaped surface 515: First Connecting Surface 516: Connect to the back 517: Open Department 520: Stop section 550: Snap-fit ​​protrusion 551: Engagement Hole 552: Solder layer 560: Link Space 600: Rod body 605: Side of the rod body 610: Second connecting section 615: Second connecting surface 620: Handle 650: Engagement Hole 651: Clamping protrusion 700:Substrate 701, 702, 704: Conductive layer 703: Sacrifice Layer Da: Axial direction Dt: Thickness direction Dw: Width direction

Claims

1. A probe insertion method for a probe card, wherein two guide plates are separately configured, and a probe is inserted into two guide holes formed in the two guide plates respectively. The probe insertion method comprises: inserting a traction rod into the two guide holes; connecting the front end of the traction rod inserted into the two guide holes to a connecting portion provided at the front end of the probe in a detachable manner; pulling the traction rod out of the two guide holes and inserting the probe into the two guide holes; and separating the traction rod from the probe after pulling it out of the two guide holes.

2. The probe insertion method as described in claim 1, wherein, The aforementioned traction rod system and the aforementioned connecting part are connected by a connecting surface parallel to the axial direction.

3. The probe insertion method as described in claim 1 or 2, comprising the step of removing the connecting portion from the probe after the aforementioned traction rod is separated.

4. A probe comprising: an elastically deformable probe body inserted into two guide holes respectively formed in two separately arranged guide plates; and a connecting portion protruding from one end of the probe body in an axial direction; a traction rod for inserting the guide plates being detachable relative to the connecting portion.

5. The probe as described in claim 4, wherein, The aforementioned connecting part has a first connecting surface parallel to the aforementioned axial direction, and the aforementioned traction rod can be mounted and detached relative to the aforementioned first connecting surface.

6. The probe as described in claim 5, wherein, The first connecting surface is located at a position retracted from the side of the probe body; the second connecting surface of the aforementioned traction rod, which is connected to the first connecting surface, can be configured on the side closer to the first connecting surface than the side of the probe body.

7. The probe as described in claim 6, wherein, Solder or thermoplastic adhesive is formed on the first or second connecting surface. The solder or thermoplastic adhesive is heated to melt it, so as to load and unload the traction rod relative to the connecting part.

8. The probe as described in claim 6, wherein, On the aforementioned first connecting surface, there is a locking part for engaging with the aforementioned traction rod.

9. The probe as described in claim 8, wherein, The aforementioned engaging portion is formed by protruding from the aforementioned first connecting surface and is a hook shape formed by the shape of the front end facing the aforementioned probe body side.

10. The probe as described in claim 8, wherein, The aforementioned engaging portion is the engaging hole formed on the aforementioned first connecting surface.

11. The probe as described in any one of claims 4 to 10, wherein, The aforementioned connecting portion is composed of a wedge shape whose cross-sectional area decreases as it faces the front end opposite to the aforementioned probe body.

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