Processing equipment

Abstract

[Problem] To provide a processing apparatus capable of high-precision information sharing. [Solution] A processing apparatus 1 includes: a holding table 10 for holding a workpiece 200; a processing unit 20 for processing the workpiece 200 held on the holding table 10; a display unit 110 for displaying various information; and a control unit 100, the control unit 100 including: a motion image input unit 101 for inputting motion images captured by a camera device 70; a motion image memory unit 102 for storing the motion images input to the motion image input unit 101; and a motion image playback unit 103 for playing the motion images stored in the motion image memory unit 102. The motion image input unit 101 displays the motion images input from the camera device 70 on the display unit 110, and the motion image playback unit 103 displays the played motion images on the display unit 110.

Description

Technical Field

[0001] This invention relates to a processing apparatus. Prior Technology

[0002] Semiconductor wafers containing multiple devices such as ICs (integrated circuits) and LSIs (large-scale integrations) can be ground to a predetermined thickness using a grinding machine on the back side, and then divided into individual device chips using processing equipment such as dicing equipment and laser processing equipment. The individual device chips can then be used in electrical machines such as mobile phones or personal computers.

[0003] In recent years, the processing equipment used in this series of semiconductor manufacturing processes has become increasingly complex in terms of its functions, as well as the operation, maintenance, and troubleshooting methods related to various processes.

[0004] In the past, under such circumstances, operators of these processing devices, unaware of maintenance or troubleshooting methods, would resort to the following actions to resolve unclear points or problems: rereading several thick manuals to find the corresponding information, or consulting skilled personnel familiar with the processing equipment. However, reading thick manuals and finding the corresponding information not only becomes extremely time-consuming, but even if the information is found, it is often not intuitively understandable. Furthermore, relying on skilled personnel is problematic because they may not always be nearby, resulting in significant time being wasted until the problem is resolved.

[0005] To solve the above problems, the following technologies have been conceived: the processing device can memorize and display pre-made maintenance methods (see, for example, Patent Document 1), or the processing device can be arbitrarily written to or memorized and played to retain memos for other operators (see, for example, Patent Documents 2 and 3), etc. Previous technical documents Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2010-49466 Patent Document 2: Japanese Patent Application Publication No. 2014-231123 Patent Document 3: Japanese Patent Application Publication No. 2020-183001 Summary of the Invention

[0007] The problem the invention aims to solve

[0008] Incidentally, when new functions are added to the processing equipment, since maintenance or troubleshooting methods are not memorized, training must be conducted for each operator to learn them. Furthermore, in information sharing via writing or voice, there are still instances where it is difficult to convey the subtle movements of the equipment.

[0009] The present invention was made in view of the above facts, and its purpose is to provide a processing apparatus capable of high-precision information sharing. The means to solve the problem

[0010] To solve the aforementioned problems and achieve the objective, the processing apparatus of the present invention is a processing apparatus for processing a workpiece, characterized by comprising: a holding worktable for holding the workpiece; a processing unit for processing the workpiece held on the holding worktable; a display unit for displaying various information; and a control unit for controlling each component. The control unit includes: a video input unit for inputting video captured by a camera; a video memory unit for storing video images input to the video input unit; and a video playback unit for playing video images stored in the video memory unit. The video input unit displays the video input from the camera device on the display unit, and the video playback unit displays the video being played on the display unit.

[0011] In the aforementioned processing apparatus, the control unit may also include a dynamic image editing unit, which can edit dynamic images that have been stored in the dynamic image memory unit. Invention Effects

[0012] This invention will have the following effect: it will enable highly accurate information sharing. Simple Explanation of the Diagram

[0013] Figure 1 is a perspective view showing an example of the configuration of the processing apparatus of Embodiment 1. Figure 2 is an example of a display screen of the top menu shown in the display unit of the processing device shown in Figure 1. Figure 3 is an example of a display screen showing the selection screen for dynamic images on the display unit when the button image for "Dynamic Image Data" in the top-level menu shown in Figure 2 has been pressed. Figure 4 is a diagram showing the dynamic image displayed on the display unit when the "Record" button image of the selection screen shown in Figure 3 is pressed. Figure 5 shows the selection screen for dynamic video data displayed on the display unit when the "Play" and "Edit" button images of the selection screen for the dynamic video shown in Figure 3 are pressed. Figure 6 shows the display screen on the display unit when the "Play" button image of the selected image shown in Figure 3 is pressed, and the button image of the selected image data shown in Figure 5 with the image name "Flange Cleaning" is pressed. Figure 7 shows the display screen on the display unit when the "Edit" button image of the selected image shown in Figure 3 is pressed, and the button image of the selected image data shown in Figure 5 with the image name "Flange Cleaning" is pressed. Implementation

[0014] Forms used to implement inventions

[0015] The embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the constituent elements described below include constituent elements that can be readily conceived by those skilled in the art, and substantially the same constituent elements. Moreover, the configurations described below are adaptable combinations. Furthermore, various omissions, substitutions, or modifications to the configurations are possible without departing from the spirit of the present invention.

[0016] [Implementation Form 1] The processing apparatus of Embodiment 1 of the present invention will be described with reference to the drawings. FIG1 is a perspective view showing an example of the configuration of the processing apparatus of Embodiment 1.

[0017] (Workpiece) The processing apparatus 1 shown in FIG1 of Embodiment 1 is a cutting apparatus for cutting the workpiece 200. The workpiece 200 of the processing apparatus 1 shown in FIG1 is a wafer such as a circular plate semiconductor wafer or an optical device wafer with silicon, sapphire, gallium, etc. as a substrate 201. The workpiece 200 has a plurality of intersecting predetermined dividing lines 203 on its front side 202, and a device 204 is formed in the area divided by the predetermined dividing lines 203. The device 204 may be an integrated circuit such as IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), or a memory (semiconductor memory device).

[0018] In Embodiment 1, as shown in FIG1, an adhesive tape 209, which is circular in shape with a diameter larger than the outer diameter of the workpiece 200 and has an annular frame 210 attached to its outer edge, is attached to the back side 206 of the back side of the workpiece 200 on the front side 202, and is supported within the opening of the annular frame 210. The workpiece 200 is cut into individual components 204 by cutting along the predetermined dividing lines 203.

[0019] (Processing equipment) The processing device 1 shown in Figure 1 is a cutting device that holds the workpiece 200 on the holding table 10 and performs cutting processing (equivalent to processing) along the predetermined dividing line 203 with the cutting blade 21, thereby dividing the workpiece 200 into individual devices 204.

[0020] As shown in Figure 1, the processing apparatus 1 includes: a holding table 10 for holding a workpiece 200 with a holding surface 11; a cutting unit 20 for cutting the workpiece 200 held on the holding table 10; a camera unit 30 for capturing images of the workpiece 200 held on the holding table 10; and a control unit 100. As shown in Figure 1, the processing apparatus 1 is a dual-spindle cutting machine (dicer) with two cutting units 20, also known as a facing dual-spindle cutting device.

[0021] Furthermore, the machining apparatus 1 includes a moving unit 40 that moves the holding table 10 and the cutting unit 20 relative to each other. The moving unit 40 includes at least: a machining feed unit 41 that feeds the holding table 10 along the X-axis direction parallel to the horizontal direction; an indexing feed unit 42 that indexes the cutting unit 20 along the Y-axis direction parallel to the horizontal direction and orthogonal to the X-axis direction; a cutting feed unit 43 that cuts the cutting unit 20 along the Z-axis direction, a vertical direction orthogonal to both the X-axis and Y-axis directions; and a rotational moving unit 44 that rotates the holding table 10 about an axis parallel to the Z-axis direction. That is, the moving unit 40 moves the holding table 10 and the cutting unit 20 relative to each other in the X-axis, Y-axis, and Z-axis directions and about an axis.

[0022] The machining feed unit 41 moves the cutting unit 20 and the holding table 10 relative to each other along the X-axis by moving the holding table 10 and the rotary traversing unit 44 in the machining feed direction (X-axis). The indexing feed unit 42 moves the cutting unit 20 and the holding table 10 relative to each other along the Y-axis by moving the cutting unit 20 in the indexing feed direction (Y-axis). The infeed feed unit 43 moves the cutting unit 20 and the holding table 10 relative to each other along the Z-axis by moving the cutting unit 20 in the infeed feed direction (Z-axis).

[0023] The rotary moving unit 44 is supported by the machining feed unit 41 and supports the holding table 10, and is arranged in a manner that allows it to move freely in the X-axis direction together with the holding table 10. The rotary moving unit 44 is a unit that causes the cutting unit 20 and the holding table 10 to rotate relative to each other about the axis by rotating the holding table 10 about the axis.

[0024] The machining feed unit 41, indexing feed unit 42, and infeed feed unit 43 include: a conventional ball screw rotatably mounted about an axis; a conventional motor that rotates the ball screw about an axis; and a conventional guide rail that supports the holding table 10 or cutting unit 20 so that it can move freely in the X-axis, Y-axis, or Z-axis directions. Furthermore, the rotary movement unit 44 includes a motor that rotates the holding table 10 about an axis.

[0025] The holding table 10 is disc-shaped, and the holding surface 11 for holding the workpiece 200 is formed by porous ceramic or the like. Furthermore, the holding table 10 is configured to move freely in the X-axis direction via the machining feed unit 41, allowing it to move freely between a machining area covering the area below the cutting unit 20 and a loading / unloading area that moves the workpiece 200 in and out from below the cutting unit 20. The holding table 10 is configured to rotate freely about an axis parallel to the Z-axis direction via the rotary movement unit 44.

[0026] The holding table 10 attracts and holds the workpiece 200 placed on the holding surface 11 by connecting the holding surface 11 to a suction source (not shown) and attracting the holding surface 11 with the suction source. In Embodiment 1, the holding table 10 attracts and holds the back side 206 of the workpiece 200 through the adhesive tape 209. Also, as shown in FIG1, a plurality of clamping ring frames 210 are provided around the holding table 10.

[0027] The cutting unit 20 is a machining unit in which a cutting insert 21 is mounted on the spindle 23 and the workpiece 200 held on the holding table 10 is cut. The cutting unit 20 can be freely moved in the Y-axis direction relative to the workpiece 200 held on the holding table 10 by means of the indexing feed unit 42, and can be freely moved in the Z-axis direction by means of the infeed feed unit 43.

[0028] The cutting unit 20 is installed in a gate-shaped support frame 3 that is erected from the device body 2 via an indexing feed unit 42 and a cutting feed unit 43. The cutting unit 20 is configured to position the cutting insert 21 at any position on the holding surface 11 of the holding table 10 via the indexing feed unit 42 and the cutting feed unit 43.

[0029] The cutting unit 20 includes a cutting insert 21, a spindle housing 22, a spindle 23, and a spindle motor (not shown). The spindle housing 22 is movable in the Y-axis and Z-axis directions by means of an indexing feed unit 42 and a feed unit 43. The spindle 23 is mounted on the spindle housing 22 in a rotatable manner around its axis and the cutting insert 21 is mounted at its front end. The spindle motor causes the spindle 23 to rotate around its axis.

[0030] The cutting insert 21 is an extremely thin cutting abrasive with a generally annular shape. The cutting insert 21 is fixed to the front end of the spindle 23. In Embodiment 1, the cutting insert 21 is a hub blade, having an annular base and an annular cutting edge disposed on the outer periphery of the base to cut the workpiece 200. The cutting edge is formed from abrasive grains such as diamond or CBN (cubic boron nitride) and a binder material such as metal or resin, and is formed to a predetermined thickness. Furthermore, in this invention, the cutting insert 21 may also be a washer blade, consisting only of the cutting edge.

[0031] Furthermore, the cutting insert 21 of the cutting unit 20 and the axis of the spindle 23 are set to be parallel to the Y-axis direction.

[0032] The camera unit 30 is fixed to the cutting unit 20 and moves integrally with it. The camera unit 30 includes an image sensor that captures images of a segmented area of ​​the workpiece 200 held on the holding table 10 before cutting. The image sensor can be, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary Metal-Oxide-Semiconductor) image sensor. The camera unit 30 captures images of the workpiece 200 held on the holding table 10 to obtain images for calibration and other purposes, and outputs the obtained images to the control unit 100. The aforementioned calibration involves aligning the workpiece 200 with the cutting blade 21.

[0033] Furthermore, the machining apparatus 1 includes an X-axis position detection unit (not shown), a Y-axis position detection unit (not shown), and a Z-axis position detection unit. The X-axis position detection unit detects the position of the holding table 10 in the X-axis direction, the Y-axis position detection unit detects the position of the cutting unit 20 in the Y-axis direction, and the Z-axis position detection unit detects the position of the cutting unit 20 in the Z-axis direction. The X-axis and Y-axis position detection units can be constructed using a linear scale parallel to the X-axis or Y-axis direction and a reading head. The Z-axis position detection unit uses motor pulses to detect the Z-axis position of the cutting unit 20. The X-axis, Y-axis, and Z-axis position detection units output the X-axis position of the holding table 10 and the Y-axis or Z-axis position of the lower end of the cutting edge of the cutting unit 20 to the control unit 100.

[0034] Furthermore, in Embodiment 1, the positions of the holding table 10 and the cutting unit 20 in the X-axis, Y-axis, and Z-axis directions of the machining apparatus 1 are determined based on a predetermined reference position (not shown). In Embodiment 1, the positions in the X-axis, Y-axis, and Z-axis directions are determined by the distances in the X-axis, Y-axis, and Z-axis directions measured from the reference position. In Embodiment 1, the XY coordinates of the machining apparatus 1, represented by the X-axis and Y-axis directions (coordinates represented by the distance in the X-axis direction from the reference position representing the X-axis position and the distance in the Y-axis direction from the reference position representing the Y-axis position), sometimes indicate any position of the workpiece 200 held on the holding surface 11 of the holding table 10.

[0035] Furthermore, the processing apparatus 1 includes a cassette lift 60 and a conveying unit (not shown). The aforementioned cassette lift 60 is used to hold a cassette 50 containing multiple workpieces 200 before and after cutting, and to move the cassette 50 up and down in the Z-axis direction. The aforementioned conveying unit moves the workpieces 200 in and out of the cassette 50, and moves the workpieces 200 between the cassette 50 and the holding table 10.

[0036] The control unit 100 is a unit that controls each component of the processing apparatus 1, thereby enabling the processing apparatus 1 to perform processing operations on the workpiece 200. Furthermore, the control unit 100 is a computer having a processing unit, a memory unit, and an input / output interface device. The aforementioned processing unit has a microprocessor such as a CPU (central processing unit), and the aforementioned memory unit has memory such as ROM (read-only memory) or RAM (random access memory). The processing unit of the control unit 100 performs calculations according to a computer program stored in the memory unit, and outputs control signals for controlling the processing apparatus 1 to each component of the processing apparatus 1 through the input / output interface device.

[0037] Furthermore, the control unit 100 can be connected to a camera device 70, which is separate from the camera unit 30. The camera device 70 can be positioned at any location on the processing apparatus 1. The camera device 70 has an image sensor capable of capturing images at any location on the processing apparatus 1. The image sensor can be, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary Metal-Oxide-Semiconductor) image sensor. The camera device 70 captures dynamic images of any location on the processing apparatus 1 and outputs the captured dynamic images to the control unit 100.

[0038] Specifically, it is desirable for the camera device 70 to capture dynamic images of the faulty parts, maintenance parts, and functional addition parts of the processing device 1 from the outside to the inside. Furthermore, the so-called dynamic image is an image formed by, for example, 30 still images captured continuously per second, and by sequentially displaying, for example, 30 still images per second, it displays the operational state of any position of the processing device 1. The camera device 70 can be, for example, a conventional USB (Universal Serial Bus) camera or a stereo camera.

[0039] Furthermore, the processing apparatus 1 includes: a display unit 110, connected to the control unit 100, configured with a liquid crystal display device or the like that displaying various information such as the status or images of the processing operation; and an input unit 120, used when the operator registers processing conditions, etc. The display unit 110 is controlled by the arithmetic processing unit or the like of the control unit 100, and displays various information stored in the memory device of the control unit 100. The display unit 110 includes a display panel such as a liquid crystal display or an organic EL display, and a touch panel superimposed on the display panel. The input unit 120 can be configured using an external input device such as the touch panel provided on the display unit 110 and a keyboard.

[0040] The control unit 100 includes a video input unit 101, a video memory unit 102, a video playback unit 103, and a video editing unit 104. When a camera device 70 is connected to the control unit 100, the video input unit 101 receives and displays the video captured by the camera device 70 on the display unit 110.

[0041] The motion image memory unit 102 stores the motion images that have been input into the motion image input unit 101. The motion image playback unit 103 plays the motion images stored in the motion image memory unit 102. The motion image playback unit 103 displays the played motion images on the display unit 110. The motion image editing unit 104 is configured to edit the motion images stored in the motion image memory unit 102.

[0042] Furthermore, the functions of the video input unit 101, video playback unit 103, and video editing unit 104 are achieved by the processing unit performing calculations according to the computer program stored in the memory device. The function of the video memory unit 102 can be achieved by the aforementioned memory device.

[0043] Next, the display screen that can be displayed on the display unit 110 will be explained according to the figures. Figure 2 is an example of the display screen of the top menu displayed on the display unit of the processing device shown in Figure 1. Figure 3 is an example of the display screen of the dynamic image selection screen displayed on the display unit when the "Dynamic Image Data" button image of the top menu shown in Figure 2 has been pressed. Figure 4 is a diagram of the dynamic image, etc., displayed on the display unit when the "Record" button image of the dynamic image selection screen shown in Figure 3 has been pressed. Figure 5 is a diagram of the dynamic image data selection screen displayed on the display unit when the "Play" and "Edit" button images of the dynamic image selection screen shown in Figure 3 have been pressed. Figure 6 is a diagram of the display screen displayed on the display unit when the "Play" button image of the dynamic image selection screen shown in Figure 3 has been pressed, and the button image of the dynamic image data selection screen shown in Figure 5 with the dynamic image name "Flange Cleaning" has been pressed. Figure 7 shows the display screen on the display unit when the "Edit" button image of the selected image shown in Figure 3 is pressed, and the button image of the selected image data shown in Figure 5 with the image name "Flange Cleaning" is pressed.

[0044] The display unit 110 is controlled by the control unit 100 to display the top-level menu 130 shown in Figure 2. The top-level menu 130 is displayed on the display unit 110 after the power of the processing device 1 has been turned on and before processing operations are performed. In the central main area 111 of the top-level menu 130 shown in Figure 2, button images 131, 132, 133, 134, 135, 136, 137, and 138 for various modes such as "Fully Automatic", "Manual Operation", "Parts Information", "Blade Maintenance", "Operator Maintenance", "Machine Maintenance", "Engineering Maintenance", and "Dynamic Image Data" are displayed in a selectable manner. In the software keyboard area 112 below it, button images for items such as "Blade Setup" and "Parts Information" are displayed in a selectable manner. Nothing is displayed in the input area 113.

[0045] After the control unit 100 receives the press of the "Motion Image Data" button image 138 in the top-level menu 130 shown in FIG2, the display unit 110 is controlled by the control unit 100 to display the motion image selection screen 140 as shown in FIG3. This motion image selection screen 140 is a screen for selecting from the following: memorizing (i.e. recording) motion images input from the camera device 70, playing motion images memorized in the motion image memory unit 102, or editing motion images memorized in the motion image memory unit 102.

[0046] The video selection screen 140 displays the "Record" button image 141, the "Playback" button image 142, and the "Edit" button image 143 in a selectable manner on the main area 111. The "Record" button image 141 is used to select to memorize (i.e., record) the video input from the camera device 70. The "Playback" button image 142 is used to select to play the video already memorized in the video memory unit 102. The "Edit" button image 143 is used to edit the video already memorized in the video memory unit 102. Furthermore, the video selection screen 140 displays the "Back" button image 144, used to return to the top-level menu 130, on the input area 113.

[0047] When the dynamic image input unit 101 of the control unit 100 accepts the press of the "Record" button image 141 on the dynamic image selection screen 140 shown in FIG3, the display unit 110 is controlled by the dynamic image input unit 101 of the control unit 100, and the dynamic image 151 captured by the camera device 70 is displayed in the main area 111 as shown in FIG4. Furthermore, as shown in Figure 4, the main area 111 displays a screen 150 showing the moving image 151 input from the camera device 70. The input area 113 displays a "Record" button image 152, a "Stop" button image 153, and a "Motion Image Name Input" button image 154. The "Record" button image 152 is used to store the moving image 151 in the moving image memory unit 102. The "Stop" button image 153 is used to stop recording the moving image 151. The "Motion Image Name Input" button image 154 is used to link the "Motion Image Name" to the moving image already stored in the moving image memory unit 102 and store it in the moving image memory unit 102. Also, the screen 150 in Figure 4 displays a "Return" button image 155 in the input area 113 for returning to the moving image selection screen 140.

[0048] Thus, after the "Record" button image 141 on the video selection screen 140 shown in FIG3 is pressed, the video input unit 101 will display the video 151 input from the camera device 70 on the main area 111 of the display unit 110. Furthermore, after the "Return" button image 144 on the input area 113 of the video selection screen 140 of the control unit 100 is pressed, the display unit 110 will display the top-level menu 130.

[0049] Furthermore, when the "Record" button image 152 of the input area 113 of the display screen 150 (shown in FIG. 4, which displays the video 151 input from the camera device 70 in the main area 111) of the video input unit 101 of the control unit 100 is pressed, the video memory unit 102 will begin to memorize (i.e., record) the video 151 input from the camera device 70. If the "Stop" button image 153 is pressed, the memorization (i.e., recording) of the video 151 input from the camera device 70 will stop. If the video memory unit 102 stops memorizing (i.e., recording) the video 151 input from the camera device 70 after the "Stop" button image 153 is pressed in the video input unit 101 of the control unit 100, and then the "Video Name Input" button image 154 is pressed, the video memory unit 102 will establish a link between the video name input from the input unit 120 and the memorized video 151 to memorize it.

[0050] In this way, the video memory unit 102 will remember the video 151 input to the video input unit 101, and will establish a link between the video name input from the input unit 120 and the video 151 for memorization. Furthermore, after the "Return" button image 155 of the input area 113 of the display screen 150 shown in FIG4, which displays the video 151 input from the camera device 70 in the main area 111, is pressed, the display unit 110 will display the video selection screen 140.

[0051] Furthermore, the moving image 151 displayed in the main area 111 of the display screen 150 shown in Figure 4 includes the text "LIVE" 156 indicating that the moving image 151 input from the camera device 70 is being displayed in real time. Also, the moving image 151 displayed in the main area 111 of the display screen 150 shown in Figure 4 is a moving image obtained by the camera device 70 capturing the operation of changing the holding workbench 10. Therefore, the moving image name associated with the moving image 151 displayed in the main area 111 of the display screen 150 shown in Figure 4 when it is stored in the moving image memory unit 102 can be, for example, "Holding Workbench Change". Furthermore, in this invention, it is desirable that the dynamic image 151 stored in the dynamic image memory unit 102 by the processing apparatus 1 be a dynamic image that promotes attention, is not present in the manual of the processing apparatus 1 which deteriorates over time, a dynamic image explaining a novel function, a dynamic image showing the situation when a fault occurs, or a dynamic image showing the operation of inspection or assembly.

[0052] After the control unit 100 receives the press of the "Play" button image 142 on the video selection screen 140 shown in FIG3, the display unit 110 will be controlled by the control unit 100 to display the video selection screen 160 as shown in FIG5. The video selection screen 160 displays the button images 161 and 162 that have been linked to the video images 151 and 171 (shown in FIG4 and FIG6) stored in the video memory unit 102 as "video names".

[0053] Furthermore, in the example shown in Figure 5, the selection screen 160 for dynamic image data displays, in a selectable manner, a button image 161 with the dynamic image name "Keep Worktable Changing" and a button image 162 with the dynamic image name "Flange Cleaning" in the main area 111. The button image 161 with the dynamic image name "Keep Worktable Changing" is used to select the dynamic image 151 with the dynamic image name "Keep Worktable Changing" and is linked to the dynamic image 151 with the dynamic image name "Keep Worktable Changing". The button image 162 with the dynamic image name "Flange Cleaning" is used to select the dynamic image 171 with the dynamic image name "Flange Cleaning" (displayed in Figure 6) and is linked to the dynamic image 171 with the dynamic image name "Flange Cleaning".

[0054] Furthermore, the dynamic image 151, titled "Table Replacement," is a dynamic image captured by the camera device 70 during the replacement of the table 10. The dynamic image 171, titled "Flange Cleaning," is a dynamic image captured by the camera device 70 during the following operation: cleaning the end face 25 of the flange 24 (shown in Figure 6) that supports the cutting blade 21 and is mounted at the front end of the spindle 23 of the cutting unit 20 for fixing the cutting blade 21. Additionally, the dynamic image data selection screen 160 displays a "Return" button image 163 in the input area 113 for returning to the dynamic image selection screen 140.

[0055] After the display unit 110 receives a press of any one of the button images 161 and 162 on the dynamic image data selection screen 160 shown in FIG5 in the dynamic image playback unit 103 of the control unit 100, the dynamic images 151 and 171 that are linked to the pressed button images 161 and 162 will be played by the dynamic image playback unit 103 and displayed in the main area 111. For example, after the display unit 110 receives a press of the button image 162 with the name "Flange Cleaning" on the dynamic image data selection screen 160 shown in FIG5 in the dynamic image playback unit 103 of the control unit 100, it is controlled by the dynamic image playback unit 103 of the control unit 100, and as shown in FIG6, the dynamic image 171 with the name "Flange Cleaning" that has been memorized in the dynamic image memory unit 102 is displayed in the main area 111. Furthermore, as shown in Figure 6, the main area 111 displays a screen 170 showing a video 171 named "Flange Cleaning" that has been stored in the video memory unit 102. The input area 113 displays a "Play" button image 172 for playing the video 171 and a "Stop" button image 173 for stopping playback of the video 171. Also, the screen 170 in Figure 6 displays a "Return" button image 174 in the input area 113 for returning to the video data selection screen 160.

[0056] Thus, when the video playback unit 103 receives a press of either of the button images 161 and 162 displaying the video name on the video selection screen 160 shown in FIG. 5, it will display the beginning of the video images 151 and 171 stored in the video memory unit 102 that are associated with the pressed button image 161 or 162 on the main area 111 of the display unit 110. For example, if the video playback unit 103 receives a press of the button image 162 with the video name "Flange Cleaning" on the video selection screen 160 shown in FIG. 5, it will display the beginning of the video image 171 of "Flange Cleaning" stored in the video memory unit 102 that is associated with the pressed button image 162 on the main area 111 of the display unit 110. Furthermore, after the control unit 100 accepts the press of the "Return" button image 163 in the input area 113 of the dynamic image data selection screen 160 shown in FIG5, the display unit 110 will display the dynamic image selection screen 140.

[0057] Furthermore, after the "Play" button image 172 of the input area 113 of the display screen 170, which displays still images at the beginning of moving images 151 and 171 in the main area 111, is pressed, the moving image playback unit 103 begins playing moving images 151 and 171 and displays moving images 151 and 171 in the main area 111. The aforementioned moving images 151 and 171 are moving images that are linked to either of the pressed button images 161 and 162 and are stored in the moving image memory unit 102. After the "Stop" button image 173 of the input area 113 of the display screen 170 is pressed, the moving image playback unit 103 stops playing moving images 151 and 171 and displays a still image of the moving images 151 and 171 at the time the "Stop" button image 173 was pressed in the main area 111.

[0058] For example, when the "Flange Cleaning" button image 162 on the selection screen 160 for receiving video data is pressed, the video playback unit 103 will display the still image at the beginning of the "Flange Cleaning" video 171 stored in the video memory unit 102 on the main area 111. When the "Play" button image 172 on the input area 113 of the receiving display screen 170 is pressed, the video playback of the video 171 named "Flange Cleaning" will begin and the video 171 will be displayed on the main area 111. When the "Stop" button image 173 on the input area 113 of the receiving display screen 170 is pressed, the video playback unit 103 will stop the playback of the video 171 named "Flange Cleaning" and display the still image of the video 171 named "Flange Cleaning" when the "Stop" button image 173 was pressed on the main area 111.

[0059] After the control unit 100 receives the press of the "Edit" button image 143 on the dynamic image selection screen 140 shown in FIG3, the display unit 110 will be controlled by the control unit 100 to display the dynamic image data selection screen 160 as shown in FIG5. After the dynamic image editing unit 104 of the control unit 100 receives the press of any one of the button images 161 and 162 on the dynamic image data selection screen 160 shown in FIG5, the dynamic images 151 and 171 that are linked to any one of the pressed button images 161 and 162 will be controlled by the dynamic image editing unit 104 and displayed in the main area 111.

[0060] For example, after the button image 162 with the name "Flange Cleaning" on the dynamic image data selection screen 160 shown in FIG5 is pressed in the dynamic image editing unit 104 of the control unit 100, the display unit 110 is controlled by the dynamic image editing unit 104 of the control unit 100, and as shown in FIG7, the dynamic image 171 with the name "Flange Cleaning" that has been memorized in the dynamic image memory unit 102 is displayed in the main area 111. Furthermore, the display screen 180 shown in FIG7, which displays the dynamic image 171 with the name "Flange Cleaning" that has been memorized in the dynamic image memory unit 102 in the main area 111, displays the button image 181 for playing the dynamic image 171, the button image 182 for stopping the playback of the dynamic image 171, and the button image 183 for reversing the playback of the dynamic image 171 in the input area 113. Furthermore, so-called reverse playback means playing the moving image 171 towards the still image at the beginning of the moving image 171.

[0061] Furthermore, the display screen 180 shown in Figure 7 displays the following button images in the input area 113: a "Partial Deletion" button image 184 for deleting a portion of the video 171, a "Start Point Setting" button image 185 for setting the starting point of the portion of the video 171 to be deleted, a "End Point Setting" button image 186 for setting the ending point of the portion of the video 171 to be deleted, a "Text Input" button image 187 for inputting text, etc., into the video 171, and a "Back" button image 188 for returning to the video data selection screen 160.

[0062] Thus, when the video editing unit 104 receives a press of either of the button images 161 or 162 on the video selection screen 160 shown in FIG. 5, which displays the video name, it will display the beginning of the video 151 or 171 stored in the video memory unit 102 that is associated with the pressed button image 161 or 162 on the main area 111 of the display unit 110. For example, when the video playback unit 103 receives a press of the button image 162 on the video selection screen 160 shown in FIG. 5, which displays the video name "Flange Cleaning", it will display the beginning of the video 171 stored in the video memory unit 102 that is associated with the pressed button image 162 on the main area 111 of the display unit 110.

[0063] Furthermore, after the "Play" button image 181 of the input area 113 of the display screen 180, which displays still images at the beginning of moving images 151 and 171 in the main area 111, is pressed, the moving image editing unit 104 begins playing the moving images 151 and 171 and displays them in the main area 111. The moving images 151 and 171 are moving images that are linked to either of the pressed button images 161 and 162 and are stored in the moving image memory unit 102. After the "Stop" button image 182 of the input area 113 of the display screen 180 is pressed, the moving image editing unit 104 stops playing the moving images 151 and 171 and displays the still image of the moving images 151 and 171 at the time the "Stop" button image 182 was pressed in the main area 111. When the "Reverse Playback" button image 183 in the input area 113 of the receiving display screen 180 is pressed, the video editing unit 104 will reverse play the video 151 and 171 and display the reversed video 151 and 171 in the main area 111.

[0064] For example, after the "Flange Cleaning" button image 162 on the selection screen 160 for receiving video data is pressed, the video editing unit 104 will display the beginning still image of the "Flange Cleaning" video 171 stored in the video memory unit 102 on the main area 111. After the "Play" button image 181 on the input area 113 of the receiving display screen 180 is pressed, the video editing unit 104 will start playing the video 171 named "Flange Cleaning" and display the video 171 on the main area 111. After the "Stop" button image 182 on the input area 113 of the receiving display screen 180 is pressed, the video editing unit 104 will stop playing the video 171 named "Flange Cleaning" and display the still image of the video 171 named "Flange Cleaning" when the "Stop" button image 182 was pressed on the receiving display screen 180. When the "Reverse Playback" button image 183 in the input area 113 of the receiving display screen 180 is pressed, the video editing unit 104 will reverse play the video 171 named "Flange Cleaning" and display the reverse-played video 171 named "Flange Cleaning" in the main area 111.

[0065] Furthermore, if the motion image editing unit 104 is in a state where motion images 151 and 171 or still images of motion images 151 and 171 are displayed in the main area 111, after sequentially accepting the press of the "partial deletion" button image 184, the "start point setting" button image 185 and the "end point setting" button image 186, it will delete between the still images of motion images 151 and 171 displayed in the main area 111 when the "start point setting" button image 185 is pressed and the still images of motion images 151 and 171 displayed in the main area 111 when the "end point setting" button image 186 is pressed. If the motion image editing unit 104 is in a state where motion images 151 and 171 or still images of motion images 151 and 171 are displayed in the main area 111, and the button image 187 for accepting "text input" is pressed, the text entered from the input unit 120 will be inserted into the predetermined position of the motion images 151 and 171, and the motion images 151 and 171 with inserted text will be saved in the motion image memory unit 102.

[0066] Furthermore, in Embodiment 1, although the video editing unit 104 performs "partial deletion" (deleting a portion of the video 151 and 171) and "text input" (inserting text into predetermined positions in the video 151 and 171) as editing of the video 151 and 171, this invention is not limited to these. Any editing action, such as inserting other video or still images, can be performed on the video 151 and 171. Also, in this invention, the video editing unit 104 can allow the operator to insert desired handwritten text or graphics into the video 151 and 171 while the video 151 and 171 are displayed in the main area 111.

[0067] In this way, the video editing unit 104 is configured to edit the video images 151 and 171 already stored in the video memory unit 102. Furthermore, after the "Return" button image 188 on the input area 113 of the display screen 180 shown in FIG. 7 is pressed in the video editing unit 104 of the control unit 100, the display unit 110 will display the video image data selection screen 160. In this way, the display unit 110 of the processing apparatus 1 can display the video images 151 and 171 captured by the camera device 70 in real time, and can also record and play back the video images 151 and 171 captured by the camera device 70 for the control unit 100.

[0068] If the processing conditions are set in the control unit 100, the film cassette 50 containing the workpiece 200 is placed in the film cassette lift 60, and the control unit 100 receives the start instruction of the processing action, the aforementioned processing device 1 will start the processing action.

[0069] When the processing operation begins, the processing device 1, controlled by the control unit 100, removes a workpiece 200 from the cassette 50 and places it on the holding surface 11 of the holding table 10 in the transfer-in / transfer-out area via adhesive tape 209. During the processing operation, the processing device 1 attracts and holds the workpiece 200 on the holding surface 11 via the adhesive tape 209, and clamps the annular frame 210 with the clamping part 12.

[0070] The machining apparatus 1 is configured such that the control unit 100 rotates the spindle 23 around its axis, and the control unit 100 controls the moving unit 40 to move the holding table 10 below the camera unit 30. The camera unit 30 then captures an image of the workpiece 200 held on the holding table 10 for calibration. During machining, the control unit 100 controls the moving unit 40 and other components according to the machining conditions. While moving the cutting blade 21 relative to the workpiece 200 along the predetermined dividing line 203, the cutting blade 21 cuts into the workpiece 200 along the predetermined dividing line 203 until it reaches the adhesive tape 209.

[0071] The processing device 1 cuts the predetermined dividing lines 203 of the workpiece 200 according to the processing conditions, thereby dividing the workpiece 200 into individual components 204. After cutting all the predetermined dividing lines 203 of the workpiece 200, the processing device 1 moves the holding table 10 from the processing area toward the loading / unloading area.

[0072] The processing device 1 stops moving the holding table 10 in the loading / unloading area, stops the holding table 10 from attracting and holding the workpiece 200, and releases the clamping part 12. The processing device 1 is controlled by the control unit 100 to move the workpiece 200 after cutting from the holding table 10 into the cartridge 50. The processing device 1 ends the processing operation after cutting all the workpieces 200 in the cartridge 50.

[0073] The processing apparatus 1 of Embodiment 1 described above comprises a control unit 100 including: a motion image input unit 101 for displaying motion images 151 and 171 captured by the camera device 70 on the display unit 110; a motion image memory unit 102 for storing the motion images 151 and 171 that have been input to the motion image input unit 101; and a motion image playback unit 103 for playing the motion images 151 and 171 stored in the motion image memory unit 102 and displaying them on the display unit 110.

[0074] Therefore, when new functions are added, the processing device 1 can simultaneously view and memorize the dynamic images 151 and 171 of maintenance methods or troubleshooting methods captured by the imaging device 70 in the dynamic image memory unit 102, thus allowing the appropriate maintenance methods or troubleshooting methods to be stored in the dynamic image memory unit 102. Furthermore, by viewing the dynamic images already stored in the dynamic image memory unit 102, the processing device 1 becomes easier for operators to grasp the fine movements of the processing device 1 during maintenance or troubleshooting, which is difficult to achieve with information sharing based on text or sound.

[0075] Accordingly, the processing device 1 will achieve the following effect: it will become capable of high-precision information sharing.

[0076] In particular, since processing device 1 can use dynamic images to share actions such as requesting additional functions or handling malfunctions, it makes it easier to communicate the needs or concerns of users of processing device 1 to others, thus facilitating better proposals or problem-solving. Furthermore, by pre-memorizing dynamic images of inspections or operations during the assembly of processing device 1, it can aid in identifying the causes of malfunctions. Additionally, processing device 1 also has the effect of recording the actions of functions under development, making it easier for others unfamiliar with the function to visualize troubleshooting or adding functions by viewing the dynamic images.

[0077] Furthermore, the processing device 1 offers a high degree of freedom because it can capture moving images from any position using the camera device 70. Also, when the camera device 70 is a stereo camera, the processing device 1 can obtain easily understandable moving images using a wider field of view than a single-lens reflex camera.

[0078] Furthermore, the present invention is not limited to the embodiments described above. That is, various modifications can be made without departing from the essential points of the present invention. In embodiment 1, although the processing apparatus 1 is a cutting apparatus, it is not limited to a cutting apparatus in the present invention, and can also be various processing apparatuses such as: a grinding apparatus having a processing unit for grinding the workpiece 200, a grinding apparatus having a processing unit for polishing the workpiece 200, a laser processing apparatus having a processing unit for laser processing the workpiece 200, a laser irradiation unit, etc. Also, in the present invention, the workpiece 200 is not limited to a wafer, and can also be a plate-shaped structure such as various packaging substrates, ceramic substrates, and glass substrates.

[0079] Furthermore, although the above-described embodiment describes an example where the "moving image data" button image 138 is displayed in the main area 111 of the top-level menu 130, this invention is not limited to this. For example, even when the "fully automatic" button image 131 or the "manual operation" button image 132 is selected, the "moving image data" button image 138 is still displayed as an operable option in an area different from the main area 111 (e.g., input area 113 or soft keyboard area 112).

[0080] Furthermore, in this invention, the control unit 100 may confirm the operator's ID and set the display target or editing permissions for each ID, i.e., the operator. Additionally, the playable and editable dynamic images 151 and 171 may also contain various information such as text or sound, still images, graphics, and the date and time of recording.

[0081] Furthermore, the processing device 1 can also use a camera to capture the operator's ID (identification) and use image recognition to parse the ID, or use a camera to capture the operator's face for authentication. In this way, for example, a screen for skilled personnel can be displayed for skilled personnel, and a screen for beginners can be displayed for beginners, so as to adapt to the change of the screen displayed for the operator.

[0082] Furthermore, the processing device 1 is used to read the ID of the cartridge 50 and set the corresponding receipt data by setting up a barcode reader or the like. Therefore, in this invention, the processing device 1 can also read the ID of the cartridge 50 at a specified time point using an attached camera and set the corresponding receipt data to be set automatically. Although there are multiple types of barcodes, such as one-dimensional barcodes and QR codes (registered trademarks), the same camera can still be used even if the application is changed. Furthermore, when the processing device 1 reads the ID of the ring frame 210 using an attached camera, the same camera can be used as an additional device, without having to prepare barcodes for each application.

[0083] Furthermore, in this invention, since the file size of the moving images 151 and 171 captured by the camera device 70 will increase if the images are frequently memorized, a certain action within the field of view of the camera device 70, or a certain action in the processing device 1 (such as changing to a pre-specified screen, or a screen action performed by the operator, etc.) can be used as a trigger to start or stop recording.

[0084] For example, as a first solution, the processing apparatus 1 can also set up a camera device 70, which is already connected to the control unit 100, in a transport unit or the like to record, and use the start and end of the processing action as triggers to start and stop the recording of the camera device 70. In this case, the processing apparatus 1 can analyze the problem with dynamic images and take countermeasures when a problem occurs.

[0085] For example, as a second option, the processing device 1 can also use the detection results of sensors that detect the moving speed of each unit 41, 42, 43, and 44, and sensors that detect the falling of the workpiece 200 as triggers to start and stop the recording of the camera device 70. In this case, the processing device 1 can automatically stop the processing operation by generating an alarm if the action delay becomes longer than a certain time.

[0086] Furthermore, as a third option, the machining device 1 can also designate a screen during operations that may result in errors such as tool mark inspection mistakes or tool replacement errors, and use the display of this screen as a trigger to start and stop the camera 70's recording. In this case, the machining device 1 can determine the difference between the images before and after recording and generate an alarm. Specifically, this can prevent problems such as forgetting to install the cutting tool 21 or leaving the replacement fixture inside the machining device 1, which could lead to damage to the workpiece 200 or the machining device 1.

[0087] Furthermore, as a fourth option, the processing device 1 can also use the opening and closing of the cover of the covering device body 2 as a trigger to start and stop the camera 70's recording. In this case, the processing device 1 can determine the difference between the images before and after recording and generate an alarm. Specifically, although the processing device 1 can open the device cover and remove the workpiece 200 to restart mass production due to the workpiece 200 falling or a vacuum abnormality in the conveying unit, there is a problem that restarting while the workpiece 200 is still inside the processing device can result in damage to the workpiece 200. By determining the difference between the images before and after recording, the problem of forgetting to remove the workpiece 200 can be prevented.

[0088] Furthermore, as a fifth option, the processing apparatus 1 can also be equipped with multiple camera devices 70 located in positions where the operator can see and within the processing apparatus. The camera devices 70 can start and stop recording when the touch panel switches to a specific display unit 110 screen (e.g., a pre-defined screen for changing the cutting blade 21, error recovery, etc.). In this case, the processing apparatus 1 can record who performed the operation and the circumstances surrounding it, should an operator error occur. Moreover, by automatically editing the recorded video footage into a single video feed preceding the video footage from the first, second, third, and fourth options described above, it becomes possible to record "who did what."

[0089] 1: Processing equipment 2:Device body 3: Supporting Frame 10: Keep the workbench 11: Keep the surface 12: Fixtures Section 20: Cutting Unit (Machining Unit) 21: Cutting inserts 22: Spindle housing 23: Spindle 24: Flange 25: End face 30: Camera Unit 40: Moving Unit 41: Machining feed unit 42: Indexing feed unit 43: Cut-in feed unit 44: Rotational Moving Unit 50: Disc Box 60: Disc Lid Lift 70: Camera device 100: Control Unit 101: Moving Image Input Unit 102: Dynamic Image Memory Department 103: Moving Image Playback Department 104: Moving Image Editing Department 110: Display Unit 111: Main Area 112: Software Keyboard Area 113: Input Area 120: Input Unit 130: Top-level menu Button images 131~138, 141~144, 152~155, 161~163, 172~174, 181~188 140, 160: Select screen 150, 170, 180: Display screen 151,171: Moving images 156:Text 200: Workpiece 201:Substrate 202: Front 203: Pre-defined dividing line 204: Devices 206: Back 209: Tape 210: Circular framework X, Y, Z: Direction

Claims

1. A processing apparatus for processing a workpiece, characterized in that: the processing apparatus comprises: a holding table for holding the workpiece; a processing unit for processing the workpiece held on the holding table; a display unit for displaying various information; and a control unit for controlling each component, the control unit comprising: a motion image input unit for inputting motion images captured by a camera; a motion image memory unit for storing the motion images input to the motion image input unit; and a motion image playback unit for playing the motion images stored in the motion image memory unit, wherein the motion image input unit displays the motion images input from the camera on the display unit, and the motion image playback unit displays the played motion images on the display unit, and the motion image memory unit begins storing the motion images input from the camera after receiving a press of a "record" button image displayed on the display unit.

2. A processing apparatus for processing a workpiece, characterized in that: the processing apparatus comprises: a holding table for holding the workpiece; a processing unit for processing the workpiece held on the holding table; a display unit for displaying various information; and a control unit for controlling each component, the control unit comprising: a motion image input unit for inputting motion images captured by a camera; a motion image memory unit for storing the motion images input to the motion image input unit; and a motion image playback unit for playing the motion images stored in the motion image memory unit, wherein the motion image input unit displays the motion images input from the camera on the display unit, and the motion image playback unit displays the played motion images on the display unit, and the motion image memory unit initiates the storage of motion images by using an action within the field of view of the camera or a pre-specified action in the processing apparatus as a trigger.

3. The processing apparatus of claim 1 or 2, wherein the control unit includes a motion image editing unit, which is capable of editing motion images stored in the motion image memory unit.

4. The processing apparatus of claim 3, wherein after the moving image editing unit sequentially accepts the pressing of a button image for deleting a portion of the moving image displayed on the display unit, the pressing of a button image for setting the starting point of the portion of the moving image to be deleted, and the pressing of a button image for setting the ending point of the portion of the moving image to be deleted, it deletes between the still image of the moving image displayed when the "starting point setting" button image is pressed and the still image of the moving image displayed when the "end point setting" button image is pressed.

5. The processing apparatus of claim 3, wherein after the motion image editing unit receives the press of the "text input" button image for inputting text into the motion image displayed on the display unit, it inserts the text input from the input unit into a predetermined position of the motion image and stores the motion image with the inserted text in the motion image memory unit.

6. The processing apparatus as requested in item 1 or 2, wherein the control unit starts and stops the recording of the camera apparatus by triggering the start and end of the processing action.

7. The processing apparatus of claim 1 or 2, wherein the control unit uses the detection result of a sensor that detects the moving speed of the unit that holds the worktable and the processing unit relative to each other as a trigger to start the camera recording.

8. The processing apparatus as requested in item 1 or 2, wherein the control unit uses the detection result of a sensor that detects the drop of the workpiece as a trigger to start the recording of the camera device.

9. The processing apparatus as requested in item 1 or 2, wherein the control unit starts and stops recording by the camera device by triggering the display of a screen that can be considered an operation error.

10. The processing apparatus of claim 1 or 2, wherein the control unit uses the opening and closing of the cover as a trigger to start and stop the recording of the camera device.

11. The processing apparatus of claim 1 or 2, wherein the control unit starts and stops recording by means of a specific screen operation that is converted into a display unit.

Images