Positioning device, lithography device and article manufacturing method

Abstract

[The technical problem to be solved] Provides a positioning device that is advantageous in achieving both positioning accuracy and cost or low production time. Technical means to solve the problem A positioning device for positioning a workpiece moving on a stage includes: a reference member movable on the stage; an actuator that drives the reference member; a cylinder that pushes a second side opposite to the first side with a piston rod by abutting a first side of the workpiece on the stage against the reference member; a measuring unit that measures the position of the workpiece on the stage; and a control unit that controls the actuator and the cylinder. The control unit controls the actuator based on the measurement results from the measuring unit, and controls the cylinder to temporarily remove the piston rod from the workpiece between drive controls, and then pushes the second side of the workpiece again with the piston rod.

Description

Technical Field

[0001] The present invention relates to a positioning device, a micro-imaging device and an article manufacturing method. Prior Art

[0002] In manufacturing equipment, quickly positioning workpieces is crucial for improving productivity. Positioning devices utilize a pressing mechanism, such as an air cylinder or counterweight, to push the side of the workpiece on a stage, forcing it against positioning pins. The position of the positioning pins on the stage can be adjusted using an actuator. [Prior Art Literature] [Patent Document]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 59-001032 Summary of the Invention

[0004] [Problems to be solved by the invention]

[0005] In particular, when positioning accuracy below the μm level is required, not only does the positioning pin need to be designed to be driven with high precision, but the pushing mechanism also needs to be designed to always generate a fixed thrust. As a high-precision pushing mechanism, a cylinder is preferred, and in particular, an air bearing cylinder is preferred because it has less thrust variation. However, air bearing cylinders are more expensive than ordinary cylinders. In addition, although a technology has been proposed that uses a counterweight to maintain a fixed thrust for pushing, such as in Patent Document 1, it is difficult to perform positioning with μm-level accuracy using such a mechanism. In addition, if the thrust of the pushing mechanism is unstable, the number of positioning times increases, and the production time becomes longer.

[0006] The present invention provides, for example, a positioning device that is advantageous in achieving both positioning accuracy and cost or short production time. [Means for solving the problem]

[0007] According to one aspect of the present invention, a positioning device is provided for positioning a workpiece moving on a carrier, comprising: a reference member movable on the carrier; an actuator driving the reference member; a cylinder for pushing a second side opposite to the first side with a piston rod in a manner that causes the first side of the workpiece on the carrier to abut against the reference member; a measuring unit for measuring the position of the workpiece on the carrier; and a control unit for controlling the actuator and the cylinder; the control unit controls the drive of the actuator based on the measurement result obtained through the measuring unit, and controls the cylinder so that the piston rod temporarily moves away from the workpiece during the drive control and the piston rod is again pressed against the second side of the workpiece. [Effects of the invention]

[0008] According to the present invention, for example, a positioning device can be provided that is advantageous in achieving both positioning accuracy and cost or short production time. Simple diagram description

[0009] [Figure 1] A diagram illustrating the structure of a positioning device. [Figure 2] A diagram illustrating the structure of the cylinder and piping circuit. [Figure 3] A diagram illustrating changes in cylinder thrust. [Figure 4] Flowchart of positioning operation. [Figure 5] A diagram illustrating the structure of an exposure device. Implementation Method

[0010] The following describes the embodiments in detail with reference to the drawings. The following embodiments do not limit the scope of the claimed invention. While the embodiments describe multiple features, not all of these features are essential to the invention; furthermore, multiple features may be combined in any desired manner. In the drawings, identical or similar components are denoted by the same reference numerals, and repeated descriptions are omitted.

[0011] <First embodiment> Figure 1 illustrates the structure of a positioning device for positioning a workpiece. In this specification and the drawings, directions are expressed in an XYZ coordinate system, where the horizontal plane is the XY plane. Workpiece 1, the object to be positioned, is placed on stage 35 so that its surface is parallel to the horizontal plane (XY plane). Therefore, in the following, directions perpendicular to each other within a plane along the surface of workpiece 1 are referred to as the X-axis and Y-axis, and the direction perpendicular to the X-axis and Y-axis is referred to as the Z-axis. Furthermore, in the following, directions parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate system are referred to as the X-direction, Y-direction, and Z-direction, respectively. The rotational directions about the X-axis, Y-axis, and Z-axis are referred to as the θX-direction, θY-direction, and θZ-direction, respectively.

[0012] The workpiece 1 is movable on the stage 35. In one example, a workpiece holder 36 is disposed on the stage 35 to hold the workpiece 1. The workpiece 1 is placed on the workpiece holder 36. The workpiece holder 36 holds the workpiece 1, thereby fixing the position of the workpiece 1 relative to the stage 35. In this case, the position of the workpiece 1 is adjusted by a positioning device while the workpiece holder 36 is unclamped from the workpiece 1. The workpiece holder 36 can use any method to hold the workpiece 1. In one example, the workpiece holder 36 is configured to, when clamping, attract the lower surface of the workpiece 1 to the clamping surface of the workpiece holder 36 by suction. Furthermore, when not clamping, the workpiece holder 36 is configured to eject gas toward the lower surface of the workpiece 1, causing the workpiece 1 to float from the clamping surface of the workpiece holder 36.

[0013] The positioning device includes a plurality of air cylinders 2 configured to press against the side surfaces of a workpiece 1. In the example shown in Figure 1, the plurality of air cylinders 2 may include two air cylinders that press against the workpiece 1 in the X direction and two air cylinders that press against the workpiece 1 in the Y direction. Movement of the workpiece 1 on the stage 35 is achieved by operating these air cylinders separately. Furthermore, the positioning device includes a plurality of stoppers 3 that limit the range of movement of the workpiece 1 at a predetermined position on the stage 35. The plurality of stoppers 3 may include one or more stoppers that limit movement of the workpiece 1 in the X direction and one or more stoppers that limit movement of the workpiece 1 in the Y direction. The number and placement of the plurality of air cylinders 2 and the plurality of stoppers 3 are appropriately determined based on the size and shape of the workpiece 1, the required positioning accuracy, and other factors. The stopper 3 may include a positioning pin 3a as a reference member movable in the XY directions on the stage 35 and an actuator 3b for driving the positioning pin 3a in the XY directions. The actuator 3b may be, for example, a pulse motor driven by a pulse signal.

[0014] The positioning device includes a control device 5 (control unit). The control device 5 controls the actuators 3b of the plurality of stoppers 3 and the plurality of air cylinders 2. The control device 5 supplies air to the plurality of air cylinders 2 via the piping circuit 4. The control device 5 can be composed of, for example, a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), a programmable general-purpose computer, or a combination of all or part of these.

[0015] The positioning device may include a measuring device 6 (measuring unit) for measuring the position of the workpiece 1 on the stage 35. Although not shown, the measuring device 6 may include an X-measuring unit for measuring the X-direction position of the workpiece 1 and a Y-measuring unit for measuring the Y-direction position of the workpiece 1. The X-measuring unit and the Y-measuring unit may each be, for example, a linear encoder. Alternatively, instead of a linear encoder, a combination of an interferometer disposed in the main structure of the positioning device and a reflective mirror disposed on the workpiece 1 may be used to measure the position of the workpiece 1 in various directions.

[0016] Measuring device 6 is connected to computing device 7, and measurement data obtained by measuring device 6 is transmitted to computing device 7. Computing device 7 calculates the drive amount of actuator 3b used to position workpiece 1 at the target position. The functions of computing device 7 can also be implemented by control device 5.

[0017] Referring to FIG2 , the configuration of the cylinder 2 and the piping circuit 4 will be described. FIG1 shows multiple cylinders 2, but FIG2 shows only one cylinder 2 as a representative example for simplicity of description. The other cylinders 2 can also be configured similarly to that shown in FIG2 .

[0018] The cylinder 2 may include a cylinder tube 21, a piston 22, and a piston rod 23. The piston 22 is disposed within the cylinder tube 21, dividing the interior of the cylinder tube 21 into left and right chambers A and B, and reciprocates within the cylinder tube 21 in the horizontal direction of the drawing. One end of the piston rod 23 is supported by the piston 22, and the other end of the piston rod 23 can contact the workpiece 1 to press the workpiece 1. The piping circuit 4 may include a solenoid valve 41 that switches the supply and exhaust of air to the cylinder 2. By controlling the solenoid valve 41 via the control device 5, the positioning device can execute the action of separating the piston rod 23 from the workpiece 1 and the action of pressing the workpiece 1 with the piston rod 23.

[0019] When the solenoid valve 41 is de-energized, as shown in Figure 2(a), its first port p1 is connected to a compressed air supply source 45 (at the original pressure) via pipe 42, and its second port p2 is connected to chamber A of the cylinder 2 via pipe 43. This connects pipes 42 and 43. Furthermore, at this time, the third port p3 of the solenoid valve 41 is connected to chamber B of the cylinder 2 via pipe 44, which in turn connects to the fourth port p4 of the solenoid valve 41, serving as an exhaust port. In this state, compressed air from the supply source 45 is supplied to chamber A, causing the piston rod 23 to retract (toward the left side of the drawing), and the gas within chamber B is exhausted.

[0020] The control device 5 electromagnetically drives the coil C by supplying power to it. While the control device 5 is supplying power to the coil C, as shown in Figure 2(b), the fifth port p5 of the solenoid valve 41 is connected to the supply source 45 via the pipe 42, and the sixth port p6 is connected to the chamber B of the cylinder 2 via the pipe 44. This connects the pipes 42 and 44. Furthermore, the seventh port p7 of the solenoid valve 41 is connected to the chamber A of the cylinder 2 via the pipe 43, which in turn connects to the eighth port p8 of the solenoid valve 41, which serves as the exhaust port. In this case, compressed air from the supply source 45 is supplied to the chamber B, causing the piston rod 23 to protrude (to the right in the drawing), and the gas in the chamber A is exhausted.

[0021] The positioning device of this embodiment uses an air cylinder 2 to push the side of the workpiece 1, forcing it against the positioning pin 3a of the stopper 3, thereby achieving positioning. For example, when positioning accuracy below the micrometer level is required, the actuator 3b must be designed to drive the positioning pin 3a with high precision. From this perspective, a pulse motor driven by a pulse signal (such as a stepping motor) is suitable as the actuator 3b. Furthermore, when positioning accuracy below the micrometer level is required, the mechanism for pushing the workpiece 1 must generate a constant thrust regardless of the stroke position. From this perspective, an air cylinder is preferably used as the mechanism for pushing the workpiece 1.

[0022] In this embodiment, the positioning device continuously applies pressure to the side of the workpiece 1 using the air cylinder 2 while adjusting the position of the positioning pin 3a using the actuator 3b. Specifically, to adjust the position, the workpiece 1 is released from the workpiece clamp 36. In this state, as shown in Figures 3(a) and 3(b), the air cylinder 2 uses the piston rod 23 to push the second side surface 1b of the workpiece 1, opposite the first side surface 1a, so that the first side surface 1a of the workpiece 1 contacts the positioning pin 3a. The positioning device then measures the position of the workpiece 1 using the measuring device 6. To improve measurement accuracy, measurement can be performed while the workpiece 1 is clamped by the workpiece clamp 36. The control device 5 controls the drive of the actuator 3b based on the measurement results obtained by the measuring device 6. For example, during drive control, the control device 5 adjusts the position of the positioning pin 3a using the actuator 3b so that the measured position falls within the allowable range.

[0023] During the drive control of positioning pin 3a, the direction of the positioning pin 3a driven by actuator 3b may reverse. This reversal of the direction of the positioning pin 3a causes a change in the thrust of cylinder 2 (piston rod 23). When positioning accuracy below the μm level is required, such a change in the thrust of cylinder 2 cannot be ignored. This point will be explained with reference to Figures 3(a) and (b).

[0024] In Figures 3(a) and 3(b), the cylinder tube 21 and the piston rod 23 are covered by a rod cover 24. Furthermore, a packing 25 is provided inside the cylinder tube 21. This packing 25 is a sealing member used to prevent leakage of compressed air. The packing 25 seals the outer circumference of the piston rod 23 with the inner circumference of the cylinder tube 21. The packing 25 is fixed to the inner circumference of the cylinder tube 21, but is not fixed to the piston rod 23 but only slidably contacts it. As the piston rod 23 moves, the packing 25 elastically deforms. The thrust 10 of the cylinder 2 is the sum of the force 12 generated by the pressure applied to the piston rod 23 and the force of the packing 25 to restore its deformation tendency (hereinafter referred to as the elastic force 11 of the packing 25).

[0025] Consider the case where the driving direction of the locating pin 3a is reversed while the locating pin 3a and the piston rod 23 are being squeezed against each other, sandwiching the workpiece 1. This occurs when the state in Figure 3(a) changes to the state in Figure 3(b), or vice versa. In this case, the movement direction of the piston rod 23 also reverses as the driving direction of the locating pin 3a reverses. Consequently, the deformation direction of the gasket 25 also changes, and the direction of the elastic force 11 of the gasket 25 is reversed. As a result, the thrust 10 of the cylinder 2 decreases. When the driving direction of the locating pin 3a reverses, the elastic deformation of the stopper 3 and the workpiece 1, both of which are pushed by the cylinder, changes, causing a mismatch between the driving amount of the locating pin 3a and the movement amount of the workpiece 1.

[0026] On the other hand, as shown in Figure 3(c), if the positioning pin 3a is continuously driven in the same direction (without reversal), the deformation of the gasket 25 reaches its maximum. If the piston rod 23 is continuously driven in the same direction in this state, the gasket 25 maintains its maximum deformation, and the elastic force 11 of the gasket 25 is kept constant.

[0027] Due to the above phenomenon, if the driving direction of the positioning pin 3a is reversed, the workpiece 1 cannot be moved by the intended amount in the area before the deformation of the pad 25 reaches its maximum, and positioning drive and measurement are repeated. This increases the number of positioning drives and the production time. As a solution, the use of an air bearing cylinder without a pad can eliminate the change in the cylinder's thrust. However, air bearing cylinders are more expensive than ordinary cylinders. In addition, although Japanese Patent Application Laid-Open No. 59-001032 (Patent Document 1) proposes a technology that uses a counterweight to maintain a constant thrust for pushing, this mechanism cannot be controlled with micron-level accuracy.

[0028] Therefore, in this embodiment, the control device 5 controls the air cylinder 2 so that, during the drive control of the positioning pin 3a, the piston rod 23 is pressed against the workpiece 1 only when the elastic force 11 of the spacer 25 acts in the same direction. To achieve this control, the control device 5 repeatedly moves the piston rod 23 away from the workpiece 1 and then presses the workpiece 1 again with the piston rod 23 during the drive control of the positioning pin 3a. In the first example, the control device 5 controls the air cylinder 2 so that the piston rod 23 is temporarily moved away from the workpiece 1 and then presses the second side surface 1b of the workpiece 1 again with the piston rod 23 each time the actuator 3b is driven. In the second example, the control device 5 determines whether the drive direction has reversed each time the actuator 3b is driven. If the drive direction has reversed, the control device 5 controls the air cylinder 2 so that the piston rod 23 is temporarily moved away from the workpiece 1 and then presses the second side surface 1b of the workpiece 1 again with the piston rod 23.

[0029] 4, an example of the control sequence of the positioning operation of the workpiece 1 according to the second example described above through the control device 5 will be described in detail. This control sequence begins after the workpiece 1 is placed on the clamping surface of the workpiece clamp 36.

[0030] In S1, the control device 5 controls the workpiece clamp 36 to release the workpiece 1. In one example, the workpiece clamp 36 releases the workpiece 1 by blowing gas toward the lower surface of the workpiece 1, thereby floating the workpiece 1 from the clamping surface of the workpiece clamp 36.

[0031] In S2, the control device 5 drives the actuator 3b according to the target position of the positioning pin 3a, which is determined based on the target position of the workpiece 1. In S3, the control device 5 controls the air cylinder 2 so that the piston rod 23 presses against the workpiece 1. Specifically, the control device 5 supplies power to the coil C. While power is supplied to the coil C, the coil C is electromagnetically driven, causing the piston rod 2 to protrude (Figure 2(b)), pressing against the workpiece 1.

[0032] In S4, the control device 5 controls the workpiece clamp 36 to clamp the workpiece 1. In one example, the workpiece clamp 36 can achieve the clamped state by suctioning the lower surface of the workpiece 1, thereby adsorbing the workpiece 1 onto the clamping surface of the workpiece clamp 36. The clamping in S4 is performed to accurately measure the position of the workpiece 1 in the subsequent S5. If the accuracy of the position measurement is guaranteed, the clamping in S4 is not essential.

[0033] In S5, the control device 5 causes the measuring device 6 to measure the position of the workpiece 1 on the stage 35. The measurement data obtained by the measuring device 6 is transmitted to the computing device 7. The computing device 7 calculates the error between the position of the workpiece 1 indicated by the measurement data and the target position of the workpiece 1. In S6, the computing device 7 determines whether the error falls within the allowable range based on the required accuracy. If the error falls within the allowable range, the process ends. If the error does not fall within the allowable range, the process proceeds to S7.

[0034] In S7, the computing device 7 calculates the drive amount of the actuator 3b used to position the workpiece 1 at the target position based on the above error. The calculated drive amount data is transmitted to the control device 5. In S8, the control device 5 determines whether the drive direction of the actuator 3b will reverse based on the drive amount calculated in S7. Specifically, the control device 5 determines whether the drive direction calculated in S7 is opposite to the drive direction of the actuator 3b in S2. If the two drive directions are opposite, the drive direction is determined to have reversed; if the two drive directions are the same, the drive direction is determined to have not reversed. If the drive direction is determined to have not reversed, the process returns to S1. If the drive direction is determined to have reversed, the process proceeds to S9. In S9, the control device 5 controls the air cylinder 2 to separate the piston rod 23 from the workpiece 1. Specifically, the control device 5 stops supplying power to the coil C. By stopping supplying power to the coil C, the electromagnetic drive of the coil C is stopped, and the piston rod 23 retracts (Figure 2(a)). As a result, the piston rod 23 is separated from the workpiece 1. After that, the process returns to S1.

[0035] As described above, the positioning pin 3a and the air cylinder 2 are each driven and controlled until the error between the target position and the measured position of the workpiece 1 falls within the allowable range. During this drive control, when the driving direction of the actuator 3b is reversed ("Yes" in S8), the piston rod 23 temporarily moves away from the workpiece 1 (S9). The air cylinder 2 is then controlled so that the piston rod 23 contacts the workpiece 1 again (S3). This allows the air cylinder 2 to always push the workpiece 1 in the same direction, eliminating any changes in the elastic force 11 of the pad 25 during positioning. This ensures that the cylinder's thrust 10 remains constant, improving positioning accuracy. Furthermore, the number of positioning drives is reduced, shortening production time.

[0036] <Modification> In the first embodiment described above, the positioning device positions the workpiece 1 in the unclamped state on the workpiece holder 36. Alternatively, the positioning may be performed by driving the workpiece holder 36 on the stage 35.

[0037] In the first embodiment, the case where the number of drive axes of the actuator 3b is one has been described. However, the number of drive axes of the actuator 3b may be two or more.

[0038] In the first embodiment, a pulse motor is described as suitable for the actuator 3b, but the present invention is not limited thereto. As the actuator 3b, for example, a piezoelectric actuator capable of precise driving on the order of several μm may be used.

[0039] In the first embodiment, the workpiece holder 36 is described as being configured to release the workpiece 1 from its clamping surface by ejecting gas toward the lower surface of the workpiece 1, but the present invention is not limited thereto. For example, a mechanism that electromagnetically releases the workpiece 1 from the clamping surface may also be employed.

[0040] <Second embodiment> The positioning device described above can be applied to a lithography apparatus that transfers the pattern of an original plate onto a substrate. The lithography apparatus may include an exposure apparatus, an imprinting apparatus, a charged particle beam drawing apparatus, and the like. The exposure apparatus is an apparatus that exposes a photoresist supplied to a substrate via the original plate, thereby forming a latent image corresponding to the pattern of the original plate on the photoresist. The imprinting apparatus is an apparatus that forms a pattern on the substrate by curing the imprinting material supplied to the substrate while the mold (original plate) is in contact with the imprinting material. The charged particle beam drawing apparatus is an apparatus that draws a pattern on the photoresist supplied to the substrate via a charged particle beam, thereby forming a latent image on the photoresist. In the following, in order to provide a specific example, an example in which the lithography apparatus is configured as an exposure apparatus is described.

[0041] Referring to FIG5 , an exposure device 131 employing the positioning device of the first embodiment will be described. The exposure device 131 includes an illumination optical system 115, a mask stage 116, a projection optical system 117, a substrate stage 118, and a control unit 119. The exposure device 131 is housed in an exposure chamber 126. Here, the Y direction is the scanning direction of the mask M and substrate P, and the X direction is the non-scanning direction.

[0042] The illumination optical system 115 illuminates the mask M using light from a light source such as an ultra-high-pressure mercury lamp. As an example of this embodiment, the illumination optical system 115 irradiates the mask M with illumination light formed into a slit shape. The mask M is, for example, a glass master plate on which a pattern (e.g., a circuit pattern) to be transferred to the substrate P is formed. The mask stage 116 is a stage that moves in the X and Y directions to hold the mask M.

[0043] The projection optical system 117 maintains an optically conjugate relationship between the mask M held by the mask stage 116 and the substrate P held by the substrate mounting portion 120 within the substrate stage 118, projecting an image of the pattern present in the illumination area of ​​the mask M onto the substrate P. In this embodiment, the projection optical system 117 includes a first parallel plate 121, a trapezoidal mirror 122, a concave mirror 123, a convex mirror 124, and a second parallel plate 125. In the projection optical system 117, light from the mask M passes through the first parallel plate 121, the trapezoidal mirror 122, the concave mirror 123, the convex mirror 124, the concave mirror 123, the trapezoidal mirror 122, and the second parallel plate 125 in this order before reaching the substrate P. The projection area (exposure area) onto the substrate of the light from the projection optical system 117 is set to a predetermined shape, such as an arc.

[0044] The substrate P is, for example, a glass plate with a resist layer (photosensitive agent) formed on its surface. The substrate stage 118 is a stage that moves, for example, in the X, Y, and Z directions (more specifically, in the θX, θY, and θZ directions), by vacuum-absorbing the substrate P using a substrate mounting portion 120.

[0045] The control unit 119, comprised of a computer including a CPU and memory, performs control and computational processing of various components of the exposure device 131 according to programs stored in the memory. In this embodiment, the control unit 119 controls the substrate stage 118, but a dedicated stage control unit may also be provided to control the substrate stage 118. In this case, the stage control unit controls the substrate stage 118 based on commands from the control unit 119. Furthermore, the control unit 119 may be integral with the other components of the exposure device 131 (within a common housing) or may be separate from the other components of the exposure device 131 (within a separate housing).

[0046] The exposure chamber 126 has an opening 127 that communicates with an interface chamber 128 housing a robot 129. The substrate P is transferred (handed over) between the exposure device 131 and the robot 129 via the opening 127. In this embodiment, when the robot 129 holding the substrate P enters the exposure chamber 126 through the opening 127, the substrate stage 118 is moved to a predetermined position near the opening 127 (the substrate P transfer position). The substrate transport unit 130 is then driven (raised) to the vicinity of the robot 129 and receives the substrate P from the robot 129. The substrate transport unit 130 then places the received substrate P on the substrate placement unit 120.

[0047] As described above, in the exposure device 131, the mask M and the substrate P are scanned synchronously using the mask stage 116 for moving the mask M and the substrate stage 118 for moving the substrate P, thereby projecting the pattern drawn on the mask M onto the substrate P. To achieve this, the direction of the pattern drawn on the mask M must be aligned with the scanning direction.

[0048] The pattern drawn on the mask M is not drawn parallel or perpendicular to the outer shape of the mask M. Furthermore, the orientation and arrangement of the pattern drawn on each mask M differ. Therefore, the mask M placed on the mask stage 116 must be aligned using the pattern as a reference. In this embodiment, the positioning device described in the first embodiment is incorporated into the mask stage 116. In this case, the workpiece 1 to be positioned is the mask M. Alignment of the mask M is performed using the positioning device. The exposure device 131 transfers the pattern of the positioned mask M to the substrate P. Furthermore, the functions of the control device 5 described in the first embodiment can also be implemented by the control unit 119.

[0049] As described above, by applying the positioning device described in the first embodiment to the mask stage 116, the positioning accuracy of the mask M is improved. In addition, the number of positioning drives of the mask M is reduced, and the production time can be shortened, thereby improving the productivity of the exposure device.

[0050] The above example shows an example in which the positioning device positions the mask M and transfers the pattern of the positioned mask M to the substrate. Similarly, the exposure device 131 can also be configured so that the positioning device positions the substrate P and transfers the pattern of the mask M to the positioned substrate P.

[0051] <Embodiment of the Article Manufacturing Method> The article manufacturing method according to an embodiment of the present invention is suitable for manufacturing articles such as microdevices such as semiconductor devices and components with fine structures. The article manufacturing method according to this embodiment includes: a process for transferring an original pattern onto a substrate using the aforementioned lithography apparatus (exposure apparatus, imprint apparatus, drawing apparatus, etc.); and a process for processing the substrate to which the pattern has been transferred in this process. Furthermore, the manufacturing method includes other well-known processes (oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). Compared to conventional methods, the article manufacturing method according to this embodiment offers advantages in at least one of the following: article performance, quality, productivity, and production cost.

[0052] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the scope of the invention is disclosed by drafting the patent application.

[0053] 1: Workpiece 2: Cylinder 3: Stopper 3a: Positioning sheath 3b: Actuator 4:Piping circuit 5: Control device 6: Measuring device 7: Computing device 35: Carrier 36: Workpiece clamping parts

Claims

1. A positioning device for positioning a workpiece moving on a stage, comprising: a reference member movable on the stage; an actuator driving the reference member; a cylinder that pushes a second side opposite to the first side with a piston rod such that a first side of the workpiece on the stage abuts against the reference member; a measuring unit measuring the position of the workpiece on the stage; and a control unit controlling the actuator and the cylinder; wherein the control unit, based on the measurement result from the measuring unit, drives the actuator and controls the cylinder such that, between drives, the piston rod temporarily leaves the workpiece and then pushes the second side of the workpiece again with the piston rod.

2. The positioning device as described in request item 1, wherein, The aforementioned control unit controls the aforementioned cylinder to drive the aforementioned actuator each time, causing the aforementioned piston rod to temporarily leave the aforementioned workpiece, and then push the aforementioned second side of the aforementioned workpiece again with the aforementioned piston rod.

3. The positioning device as described in request item 1, wherein, The aforementioned control unit: Each time the aforementioned actuator is driven, it determines whether the driving direction is reversed, and controls the aforementioned cylinder to temporarily remove the aforementioned piston rod from the aforementioned workpiece if the driving direction is determined to be reversed, and then pushes the aforementioned second side of the aforementioned workpiece again with the aforementioned piston rod.

4. The positioning device as described in request item 1, wherein, The aforementioned cylinder includes: a cylinder tube; a piston that supports one end of the aforementioned piston rod and reciprocates inside the aforementioned cylinder tube; and a sealing member that seals the outer peripheral surface of the aforementioned piston with the inner peripheral surface of the aforementioned cylinder tube.

5. The positioning device as described in claim 1, wherein, The aforementioned actuator is a pulse motor that is driven by a pulse signal.

6. The positioning device of claim 1, further comprising a solenoid valve for controlling the supply of air to the aforementioned cylinder, wherein the aforementioned control unit controls the aforementioned solenoid valve to perform the action of disengaging the aforementioned piston rod from the aforementioned workpiece and the action of pushing the aforementioned workpiece with the aforementioned piston rod.

7. The positioning device of claim 1, further comprising a workpiece clamping member disposed on the aforementioned platform and clamping the aforementioned workpiece, wherein the aforementioned control unit controls the aforementioned workpiece clamping member to unclamp the aforementioned workpiece when the position of the aforementioned workpiece is measured by the aforementioned measuring unit, and to clamp the aforementioned workpiece when the aforementioned cylinder pushes the aforementioned workpiece.

8. The positioning device as described in claim 7, wherein, The aforementioned workpiece clamping member is configured such that, during unclamping, gas is ejected onto the lower surface of the aforementioned workpiece, causing the aforementioned workpiece to float from the clamping surface of the aforementioned workpiece clamping member; and during clamping, the lower surface of the aforementioned workpiece is attracted, thereby causing the aforementioned workpiece to adhere to the aforementioned clamping surface.

9. A lithography apparatus, configured to: have a positioning device as described in any one of claims 1 to 8, perform positioning of a copy through the positioning device, and transfer the pattern of the positioned copy onto a substrate.

10. A lithography apparatus, configured to: have a positioning device as described in any one of claims 1 to 8, position a substrate through the positioning device, and transfer a pattern of the original onto the positioned substrate.

11. A method for manufacturing an article, comprising: a procedure for transferring a pattern onto a substrate using a lithography apparatus as described in claim 9; a procedure for processing the substrate onto which the pattern has been transferred; and a procedure for manufacturing an article from the processed substrate.

12. A method for manufacturing an article, comprising: a procedure for transferring a pattern onto a substrate using a lithography apparatus as described in claim 10; a procedure for processing the substrate onto which the pattern has been transferred; and a procedure for manufacturing an article from the processed substrate.

Images