Chemical vapor deposition equipment and its gas spray head

Abstract

A chemical vapor deposition apparatus and its gas spray head are disclosed. The gas spray head includes a gas distribution plate and a cooling plate fixed to the top cover of the reaction chamber by fasteners. The cooling plate has multiple gas outlet channels. The gas outlet channels of the cooling plate are reinforced by reinforcing ribs. The position of the reinforcing ribs located in the gas outlet channels is adjusted, and the reinforcing ribs near the fasteners are staggered so that stress is not transmitted to the position of the fasteners, effectively alleviating stress concentration on the cooling plate and effectively reducing the occurrence of cracks in the cooling plate.

Description

Technical Field

[0001] The present invention relates to the field of semiconductors, and in particular to a chemical vapor deposition device and a gas shower head thereof. Prior Art

[0002] In the current deposition equipment, the reaction gas is introduced into the reaction chamber through a gas shower head arranged at the top of the reaction chamber. A rotatable tray is arranged below the gas shower head. The reaction gas performs deposition processing on the substrate arranged on the tray. During the deposition processing, the tray and the substrate placed on the tray are heated by a heater installed below the tray to reach a suitable reaction temperature. The heated tray will generate thermal radiation. The cooling plate at the bottom of the gas shower head will be thermally deformed by the thermal radiation of the tray below, resulting in many stress concentration areas. Under the action of thermal cycles, cracks are easily generated in places with large strains, and the cracks will slowly expand over time, eventually affecting the life of the gas shower head.

[0003] The statements herein merely provide background art related to the present invention and do not necessarily constitute prior art. Summary of the invention

[0004] The object of the present invention is to provide a deposition device and a gas shower head thereof, which can effectively alleviate the stress concentration on the cooling plate of the gas shower head and effectively reduce the generation of cracks on the cooling plate.

[0005] In order to achieve the above object, the present invention provides a gas shower head, comprising: A gas distribution plate having a plurality of gas inlet channels; A cooling plate, which is located below the gas distribution plate, the cooling plate has a plurality of gas outlet channels, the gas outlet channels are connected to the gas inlet channels, and the plurality of gas outlet channels are arranged along a first direction, the cooling plate includes a central axis area and peripheral areas located on both sides of the central axis area along the first direction; A plurality of fasteners, which are located in the central axis area and arranged along a second direction, the second direction being perpendicular to the first direction, the fasteners being used to fix the gas distribution plate and the cooling plate; At least one first reinforcing rib and at least one second reinforcing rib, the first reinforcing rib is arranged in the air outlet channel located in the central axis area, the second reinforcing rib is arranged in the air outlet channel located in the peripheral area, and the first reinforcing rib and the second reinforcing rib are not located on the same straight line along the first direction.

[0006] The air inlet channel includes a first air inlet channel and a second air inlet channel; the air outlet channel includes a first air outlet channel and a second air outlet channel; The first air inlet channel is connected to the first air outlet channel, the second air inlet channel is connected to the second air outlet channel, and the first air inlet channel and the second air inlet channel are arranged at intervals from each other along a first direction, and the first air outlet channel and the second air outlet channel are arranged at intervals from each other along the first direction.

[0007] The first air outlet channel includes a first air outlet upper part and a first air outlet lower part which are interconnected in the vertical direction, the first air outlet upper part is a longitudinal slot-shaped opening, the first air outlet lower part is a trumpet-shaped opening, and the size of the trumpet-shaped opening gradually increases from the first air outlet upper part to the lower surface of the cooling plate; the second air outlet channel is a longitudinal slot-shaped opening; the first air outlet upper part and the second air outlet channel are arranged parallel to each other along the first direction, the adjacent side walls of the longitudinal slot-shaped opening are connected by an arc-shaped transition, and the adjacent side walls of the trumpet-shaped opening are connected by an arc-shaped transition.

[0008] The cooling plate also includes a third air outlet channel, which is arranged at the outermost side of the peripheral area, and the third air outlet channel is connected to the second air inlet channel; the third air outlet channel includes a third air outlet upper part and a third air outlet lower part which are interconnected in the vertical direction, the third air outlet upper part is a longitudinal groove-shaped opening, and the third air outlet lower part is a semi-trumpet-shaped opening extending away from the central axis area, the size of the semi-trumpet-shaped opening gradually increases from the third air outlet upper part to the lower surface of the cooling plate, and the adjacent side walls of the longitudinal groove-shaped opening are transitionally connected by an arc surface, and the part of the semi-trumpet-shaped opening extending away from the central axis area includes an arc.

[0009] The gas shower head also includes a purge gas channel, and the purge gas channel is used to input the purge gas; The purge gas channel includes a plurality of first purge gas channels and a second purge gas channel interconnected in the vertical direction, the first purge gas channel runs through the gas distribution plate and the cooling plate, the plurality of first purge gas channels are arranged along the second direction, the fastener is disposed between adjacent first purge gas channels, and the second purge gas channel is located below the fastener.

[0010] The dome of the second purge gas channel is an arc-shaped surface, and the cross-sectional area of the second purge gas channel gradually increases from the dome to the lower surface of the cooling plate, forming an isosceles trapezoidal trumpet groove-shaped opening, and adjacent side walls of the isosceles trapezoidal trumpet groove-shaped opening are transitionally connected by an arc-shaped surface.

[0011] The second purge gas channel is parallel to the first gas outlet channel and the second gas outlet channel in a length direction thereof.

[0012] At least one of the first reinforcing ribs is arranged in each of the air outlet channels in the central axis area; and at least one of the second reinforcing ribs is arranged in each of the air outlet channels in the peripheral area.

[0013] The cooling plate further comprises at least one cooling liquid channel, wherein the cooling liquid channel is parallel to the upper surface and the lower surface of the cooling plate, and the cooling liquid channel is arranged between the first air outlet channel and the second air outlet channel.

[0014] The cooling plate is made of stainless steel.

[0015] The present invention also provides a deposition device, comprising: A reaction chamber, comprising a reaction chamber side wall and a reaction chamber top cover arranged on the top of the reaction chamber side wall; The gas shower head is fixedly arranged below the top cover of the reaction chamber; A tray, which is arranged below the gas shower head and is used to support the substrate; A heating device, disposed below the tray, for heating the substrate; The rotating mechanism is connected to the tray and is used to drive the tray and the substrate to rotate in a horizontal direction.

[0016] The reaction chamber top cover is provided with a plurality of first through holes, the gas distribution plate is provided with a plurality of second through holes, and the cooling plate is provided with a plurality of connecting holes. The positions of the first through holes, the second through holes and the connecting holes correspond to and match each other, and the fasteners are arranged in the first through holes, the second through holes and the connecting holes.

[0017] The fastener is a screw or a stud, the screw or the stud has an external thread, and the first through hole, the second through hole and the inner wall of the connecting hole have an internal thread matching the screw or the stud.

[0018] The material of the tray is graphite.

[0019] The deposition device further comprises a first gas source and a second gas source, wherein the first gas source is connected to a first gas inlet channel in the gas distribution plate, and the second gas source is connected to a second gas inlet channel in the gas distribution plate.

[0020] The deposition device also includes a purge gas source, which is connected to a purge gas channel in the gas shower head.

[0021] The deposition equipment also includes a coolant circulation pump, which is respectively connected to the inlet and outlet of the coolant channel.

[0022] Compared with the prior art, the technical solution of the present invention has at least the following beneficial effects:

[0023] In the gas shower head provided by the present invention, the first reinforcing rib and the second reinforcing rib are used to reinforce the gas outlet channel of the cooling plate to prevent the gas outlet channel from being deformed due to stress. The cooling plate is divided into a central axis area and peripheral areas located on both sides of the central axis area along the first direction of the arrangement of the gas outlet channel. Since the first reinforcing rib in the gas channel of the central axis area and the second reinforcing rib in the gas channel of the peripheral area are not in a straight line, the stress is interrupted in the process of being transmitted from the second reinforcing rib to the first reinforcing rib, so that the stress will not be transmitted to the position of the fastener, thereby effectively preventing cracks from occurring at the position of the fastener. Simple diagram description

[0024] Figure 1 is a schematic diagram of the structure of a deposition device provided in an embodiment of the present invention; Figure 2 is a cross-sectional schematic diagram of the gas shower head in Figure 1; Figure 3 is a top view of the cooling plate in Figure 2; Figure 4 is a top view of the cooling plate in Figure 2, showing the location of the reinforcement ribs; Figure 5 is a cross-sectional schematic diagram of the cooling plate in Figure 2; FIG. 6 is a partial schematic diagram of the peripheral area in FIG. 4 . Implementation

[0025] The preferred embodiment of the present invention is described in detail below with reference to FIGS. 1 to 6 .

[0026] As shown in FIG. 1 , the present invention provides a chemical vapor deposition device, comprising a reaction chamber 1, wherein the reaction chamber 1 has a reaction chamber side wall 102 and a reaction chamber top cover 101 arranged on the top of the reaction chamber side wall 102, a gas shower head 2 is fixedly arranged below the reaction chamber top cover 101, a tray 3 is arranged below the gas shower head 2, a plurality of substrates 4 are placed on the tray 3, a rotating mechanism 6 is arranged below the tray 3, and is used to drive the tray 3 and the substrate 4 to rotate along the central axis of the tray 3, and a heating device 5 is arranged below the tray 3, and is used to heat the tray 3 and the substrate 4.

[0027] The gas shower head 2 comprises a gas distribution plate 201 disposed below the reaction chamber top cover 101 and a cooling plate 202 disposed below the gas distribution plate 201. The gas distribution plate 201 and the cooling plate 202 are fixed below the reaction chamber top cover 101 by using a plurality of fasteners 203. Specifically, a plurality of first through holes 103 are disposed on the reaction chamber top cover 101, and the first through holes 103 penetrate the reaction chamber top cover 101. Accordingly, a plurality of second through holes 204 are disposed on the gas distribution plate 201, and the second through holes 204 penetrate the gas distribution plate 201. The cooling plate 202 is also provided with a plurality of connecting holes 205, and the connecting holes 205 extends downward to a certain depth from the upper surface of the cooling plate 202, but does not penetrate the cooling plate 202. The positions of the first through hole 103, the second through hole 204 and the connecting hole 205 correspond to each other. The fastener 203 can be a screw or a stud, and the screw or the stud has an external thread. The inner walls of the first through hole 103, the second through hole 204 and the connecting hole 205 have an internal thread matching the screw or the stud. The fastener 203 passes through the first through hole 103 and the second through hole 204 in turn and is screwed into the connecting hole 205, thereby realizing the fixed connection between the gas distribution plate 201 and the cooling plate 202 and the reaction chamber top cover 101.

[0028] As shown in FIG2 , the gas distribution plate 201 has a plurality of first gas inlet channels 206 and a plurality of second gas inlet channels 207. The first gas inlet channels 206 are connected to a first gas source 701 (as shown in FIG1 ) located outside the reaction chamber 1, and are used to introduce a first gas in the first gas source 701 into the gas shower head 2. The first gas is usually a MO source (high-purity organic metal compound) gas, such as TMGa (trimethyl gallium), TMAl (trimethyl aluminum), TEGa (triethyl gallium), Cp2Mg (P-type dopant) or TMIn (trimethyl indium). The second gas inlet channels 207 are connected to a second gas source 702 (as shown in FIG1 ) located outside the reaction chamber 1, and are used to introduce a second gas in the second gas source 702 into the gas shower head 2. The second gas is usually ammonia. Correspondingly, the cooling plate 202 has a plurality of first gas outlet channels 208 and a plurality of second gas outlet channels 209, the first gas outlet channels 208 are connected to the first gas inlet channels 206 in the gas distribution plate 201, the second gas outlet channels 209 are connected to the second gas inlet channels 207 in the gas distribution plate 201, the first gas outlet channels 208 and the second gas outlet channels 209 both pass through the upper surface and the lower surface of the cooling plate 202, and are used to deliver the reaction gas from the first gas source 701 and the second gas source 702 into the reaction chamber 1.

[0029] As shown in FIG. 2 , the first gas inlet channel 206 and the second gas inlet channel 207 are arranged alternately and spaced apart along the first direction and isolated from each other, and correspondingly, the first gas outlet channel 208 and the second gas outlet channel 209 are also arranged alternately and spaced apart along the first direction and isolated from each other, so that both reaction gases from the first gas source 701 and the second gas source 702 can be uniformly diffused into the reaction chamber 1 through the gas shower head 2 and uniformly deposited on the top of the substrate on the tray 3, thereby obtaining a uniform deposition process effect. As shown in FIG. 2 and FIG. 3 , the second gas outlet channel 209 is a longitudinal slot-shaped opening. The first gas outlet channel 208 further includes a first gas outlet upper portion 2081 and a first gas outlet lower portion 2082 which are interconnected in the vertical direction. The first gas outlet upper portion 2081 is a longitudinal slot-shaped opening, and the first gas outlet lower portion 2082 is an isosceles trapezoidal trumpet-shaped opening. The size of the isosceles trapezoidal trumpet-shaped opening gradually increases from the first gas outlet upper portion 2081 to the lower surface of the cooling plate 202. The trumpet-shaped opening with gradually increasing area slows down the gas flow velocity of the first reaction gas entering the reaction chamber 1 through the first gas outlet channel 208, so that the first reaction gas and the second reaction gas entering the reaction chamber 1 through the second gas outlet channel 209 can be fully mixed.

[0030] As shown in Figures 2 and 3, when the first air outlet channel 208 and the second air outlet channel 209 are arranged alternately and spaced along the first direction to the outermost side of the cooling plate 202, a second air outlet channel 209 should be arranged at this time, and there will still be residual space on the edge of the cooling plate 202, and it is impossible to most efficiently utilize all the space on the cooling plate 202 to obtain the optimal arrangement. In this case, the morphology of the second air outlet channel 209 is modified, that is, the part of the second air outlet channel 209 close to the air outlet end is modified to a structure extending outward, that is, a new air outlet channel having a morphology different from that of the second air outlet channel 209 is formed, that is: a third air outlet channel 215 is formed at the outermost side. The third gas outlet channel 215 is connected to the second gas inlet channel 207. Further, the third gas outlet channel 215 includes a third gas outlet upper portion 2151 and a third gas outlet lower portion 2152 which are interconnected in the vertical direction. The third gas outlet upper portion 2151 is a longitudinal slot-shaped opening, and the third gas outlet lower portion 2152 is a right-angled trapezoidal trumpet-shaped opening extending outward. The size of the right-angled trapezoidal trumpet-shaped opening gradually increases from the third gas outlet upper portion 2151 to the lower surface of the cooling plate. The structure of the right-angled trapezoidal trumpet-shaped opening, the longitudinal slot-shaped opening, and the isosceles trapezoidal trumpet-shaped opening can make reasonable use of the edge position of the cooling plate 202, so that the reaction gas can be more evenly diffused into the reaction chamber 1 through the gas shower head 2, and evenly deposited on the top of the substrate located on the tray 3, thereby obtaining a more uniform deposition process effect.

[0031] As shown in FIG3 , since the first gas outlet channel 208 and the second gas outlet channel 209 are arranged along a first direction, the plurality of fasteners 203 are arranged along a second direction perpendicular to the first direction, and the second direction may be along the diameter direction of the cooling plate 202, so as to avoid the fasteners 203 affecting the arrangement of the first gas outlet channel 208 and the second gas outlet channel 209, thereby causing uneven distribution of the reaction gas entering the reaction chamber 1, and also to avoid the first gas outlet channel 208 and the second gas outlet channel 209 causing insufficient installation space for the fasteners 203, thereby causing unstable connection between the cooling plate 202 and the gas distribution plate 201, or even gas leakage and cross-talk.

[0032] As shown in FIGS. 2 and 3 , the gas shower head 2 further includes a purge gas channel for inputting a purge gas, the purge gas channel includes a plurality of first purge gas channels 216 (see FIG. 3 ) and a plurality of second purge gas channels 217 (see FIG. 2 ) interconnected in a vertical direction, the plurality of first purge gas channels 216 are connected to a purge gas source 703 (see FIG. 1 ) located outside the reaction chamber 1, and are used to introduce the purge gas in the purge gas source 703 into the gas shower head 2, the first purge gas channels 216 penetrate the gas distribution plate 201 and extend into the cooling plate 202, the plurality of first purge gas channels 216 are arranged along the second direction, the fastener 203 is disposed between adjacent first purge gas channels 216, and the second purge gas channels 217 are located below the fastener 203. As shown in FIG2 , the cooling plate 202 further comprises at least one cooling liquid channel 210, the inlet and outlet of the cooling liquid channel 210 are respectively connected to the cooling liquid circulation pump 8 (as shown in FIG1 ) located outside the reaction chamber 1, and the cooling liquid from the cooling liquid circulation pump 8 flows in the cooling plate 202 through the cooling liquid channel 210. The cooling liquid channel 210 is parallel to the upper surface and the lower surface of the cooling plate 202, and the cooling liquid channel 210 is arranged between the first gas outlet channel 208, the second gas outlet channel 209 and the third gas outlet channel 215 to obtain a better cooling effect.

[0033] As shown in FIG. 3 , the first air outlet channel 208 and the second air outlet channel 209 are longitudinally elongated slot-shaped openings, and the first air outlet channel 208 and the second air outlet channel 209 are arranged parallel to each other along the first direction, so that the air outlet areas of the first air outlet channel 208 and the second air outlet channel 209 are as large as possible, and the first air outlet channels 208 and the second air outlet channels 209 can be arranged as many as possible on the cooling plate 202, so as to obtain a more uniform air outlet effect.

[0034] Since the first air outlet channel 208 and the second air outlet channel 209 are set to be longitudinal, in order to improve the rigidity, reinforcing ribs 23 are usually set in the first air outlet channel 208 and the second air outlet channel 209. The number of reinforcing ribs 23 is determined according to the actual situation. The number of reinforcing ribs 23 is proportional to the length of the air outlet channel. The longer the air outlet channel, the more reinforcing ribs 23 are required. At least one reinforcing rib 23 is required in the first air outlet channel 208 and the second air outlet channel 209. As shown in FIG. 3, the general cognition of the technicians in this field is to set the reinforcing ribs 23 located in different air outlet channels on the same straight line, and it is believed that the effect obtained is equivalent to adding a whole reinforcing rib, which is the best support effect. In addition, since the reinforcing ribs 23 and the air outlet channel are integrally formed when preparing the cooling plate 202, if the reinforcing ribs 23 and the fasteners 203 are set on a straight line during processing, it is only necessary to align the position of the reinforcing ribs 23 with the connection hole 205 for installing the fasteners 203, which is easier to process. However, after many simulation tests, the technicians of the present invention found that, as shown in FIG. 1 , in the deposition process, the tray 3 and the substrate 4 placed on the tray 3 are heated by the heating device 5 to reach a suitable reaction temperature. The tray 3 is usually made of graphite, which has good thermal conductivity. The graphite tray 3 generates a large amount of heat radiation. The cooling plate 202 on the gas shower head 2 is generally made of stainless steel. The cooling plate 202 is thermally deformed by the heat radiation generated by the graphite tray 3 below. The stress generated during the thermal deformation is sequentially transmitted along a plurality of reinforcing ribs 23 arranged in a straight line, and finally the stress is transmitted to the connection hole 205 where the fastener 203 is located, resulting in an increase in the local stress at the connection hole 205, causing cracks to form on the cooling plate 202 at the position where the stress concentration increases, resulting in device damage.

[0035] Based on the above findings, the present invention provides a rib arrangement scheme, as shown in FIG4 , the cooling plate 202 is divided into a central axis area 21 and peripheral areas 22 located on both sides of the central axis area 21 along the first direction, and the central axis area 21 covers a plurality of fasteners 203 and purge gas channels arranged along the second direction, as well as part of the first gas outlet channel 208 and part of the second gas outlet channel 209 arranged on both sides of the fastener 203 along the first direction. In this embodiment, the central axis area 21 and the two peripheral areas 22 basically divide the cooling plate 202 into three parts along the first direction. At least one first reinforcing rib 211 is arranged in the first air outlet upper portion 2081 of the first air outlet channel 208 and in the second air outlet channel 209 located in the central axis area 21, and at least one second reinforcing rib 212 is arranged in the first air outlet upper portion 2081 of the first air outlet channel 208, in the second air outlet channel 209 and in the third air outlet upper portion 2151 of the third air outlet channel 215 located in the peripheral area 22. Since the first reinforcing rib 211 is close to the fastener 203 and the second reinforcing rib 212 is relatively far away from the fastener 203, the present invention ensures that the first reinforcing rib 211 and the second reinforcing rib 212 are not located on the same straight line along the first direction. The present invention uses the first reinforcing rib 211 and the second reinforcing rib 212 to reinforce the air outlet channel of the cooling plate 202 to prevent the air outlet channel from being deformed due to stress, and by staggering the reinforcing ribs near the fastener 203, the first reinforcing rib 211 and the second reinforcing rib 212 are not collinear, so that the stress transmission is interrupted to avoid the stress being transmitted to the vicinity of the fastener 203 along a straight line, reduce the stress change near the fastener 203, effectively alleviate the stress concentration on the cooling plate 202, and avoid cracks. Through simulation tests, it can be seen that the plastic strain of the cooling plate after the optimized structure of the present invention is reduced from 0.745% before optimization to 0.356% after optimization, and the plastic strain is reduced by 52.2%, and the optimization effect is very obvious.

[0036] In one embodiment of the present invention, as shown in FIG5 , the dome portion 2171 of the second purge gas channel 217 is set to an arcuate surface, and the curvature radius of the arcuate surface is small, which can effectively alleviate stress concentration. The cross-sectional area of the second purge gas channel 217 gradually increases from the dome portion 2171 to the lower surface of the cooling plate 202, and is an isosceles trapezoidal trumpet groove opening. By setting the shape of the second purge gas channel 217 to be consistent with the shape of the first outlet lower portion 2082 of the first outlet channel 208, the stress difference between the lower portion of the fastener 203 and other areas is reduced. The second purge gas channel 217 is parallel to the first outlet channel 208 and the second outlet channel 209 in its length direction to prevent the second purge gas channel 217 from contacting and penetrating with the first outlet channel 208 or the second outlet channel 209.

[0037] In the embodiment of the present invention, the adjacent side walls of the first gas outlet upper portion 2081 of the first gas outlet channel 208 with a longitudinal groove-shaped opening are transitionally connected by an arc surface 214 (as shown in FIG. 4), the adjacent side walls of the second gas outlet channel 209 with a longitudinal groove-shaped opening are also transitionally connected by an arc surface 214 (as shown in FIG. 4), and the adjacent side walls of the third gas outlet upper portion 2151 of the third gas outlet channel 215 with a longitudinal groove-shaped opening are also transitionally connected by an arc surface 214 (as shown in FIG. 4). Similarly, the The adjacent side walls of the first gas outlet lower portion 2082 of the first gas outlet channel 208, which is an isosceles trapezoidal trumpet-shaped opening, are transitionally connected by an arcuate surface 213 (as shown in FIG. 6 ); the outwardly extending portion of the third gas outlet lower portion 2152 of the third gas outlet channel 215, which is a semi-trumpet-shaped opening, is an arcuate surface 213 (as shown in FIG. 6 ); the adjacent side walls of the second purge gas channel 217 (see FIG. 5 ) which is an isosceles trapezoidal trumpet-shaped opening, are also transitionally connected by an arcuate surface; the curvature radius of the arcuate surface is small, and stress concentration can be effectively alleviated.

[0038] In the gas shower head provided by the present invention, the first reinforcing rib 211 and the second reinforcing rib 212 are used to reinforce the gas outlet channel of the cooling plate 202 to prevent the gas outlet channel from being deformed due to stress. The cooling plate is divided into a central axis area and peripheral areas located on both sides of the central axis area along the first direction of the gas outlet channel arrangement. Since the first reinforcing rib in the gas channel of the central axis area and the second reinforcing rib in the gas channel of the peripheral area are not in a straight line, the stress is interrupted in the process of being transmitted from the second reinforcing rib to the first reinforcing rib, so that the stress will not be transmitted to the position of the fastener, thereby effectively reducing the generation of cracks in the cooling plate. At the same time, a second purge gas channel is arranged below the fastener, thereby reducing the stress difference between the bottom of the fastener and other areas. The adjacent side walls of all gas outlet channels on the cooling plate, the adjacent side walls of the second purge gas channel, and the dome of the second purge gas channel are all connected by a transition of an arc surface, and the curvature radius of the arc surface is small, which can effectively alleviate stress concentration.

[0039] It should be noted that, in the embodiments of the present invention, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0040] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For those with ordinary knowledge in the field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the present invention. After reading the above content, a person with ordinary knowledge in the field will find that various modifications and substitutions of the present invention will be obvious. Therefore, the protection scope of the present invention should be limited by the scope of the attached patent application.

[0042] 1: Reaction chamber 101: Reaction chamber cover 102: reaction chamber side wall 103: first through hole 2: Gas sprinkler head 201: Gas distribution plate 202: Cooling plate 203: Fasteners 204: Second through hole 205:Connection hole 206: First air intake passage 207: Second air intake passage 208: First air outlet channel 2081: The first outlet upper part 2082: First outlet lower part 209: Second air outlet channel 210: Coolant channel 21: Central Axis 211: First reinforcement rib 212: Second reinforcement rib 213,214: curved surface 215: The third outlet channel 2151: The third outlet upper part 2152: The third outlet lower part 216: first purge gas channel 217: Second purge gas channel 2171: Dome 22: Outlying Area 23: Reinforcement 3: Pallet 4: Substrate 5: Heating device 6: Rotating mechanism 701: First gas source 702: Second gas source 703: Purge gas source 8: Coolant circulation pump

Claims

1. A gas spray head, comprising: a gas distribution plate having a plurality of air inlet channels; a cooling plate located below the gas distribution plate, the cooling plate having a plurality of air outlet channels communicating with the air inlet channels, and the plurality of air outlet channels being arranged along a first direction, the cooling plate including a central axis region and peripheral regions located on both sides of the central axis region along the first direction; a plurality of fasteners located in the central axis region and arranged along a second direction perpendicular to the first direction, the fasteners being used to fixably connect the gas distribution plate and the cooling plate; at least one first reinforcing rib and at least one second reinforcing rib, the first reinforcing rib being disposed in the air outlet channel located in the central axis region, the second reinforcing rib being disposed in the air outlet channel located in the peripheral region, and the first reinforcing rib and the second reinforcing rib not being located on the same straight line along the first direction.

2. The gas spray head as described in claim 1, wherein, The air intake channel includes a first air intake channel and a second air intake channel; The air outlet channel includes a first air outlet channel and a second air outlet channel; The first air intake channel is connected to the first air outlet channel, the second air intake channel is connected to the second air outlet channel, and the first air intake channel and the second air intake channel are arranged at intervals along the first direction, and the first air outlet channel and the second air outlet channel are arranged at intervals along the first direction.

3. The gas spray head as described in claim 2, wherein, The first air outlet channel includes a first upper air outlet and a first lower air outlet that are vertically connected to each other. The first upper air outlet is a longitudinally elongated groove-shaped opening, and the first lower air outlet is a trumpet-shaped opening. The size of the trumpet-shaped opening gradually increases from the first upper air outlet to the lower surface of the cooling plate. The second air outlet channel is a longitudinally elongated groove-shaped opening. The first upper air outlet and the second air outlet channel are arranged parallel to each other along the first direction. Adjacent sidewalls of the longitudinally elongated groove-shaped opening are connected by an arc-shaped transition surface, and adjacent sidewalls of the trumpet-shaped opening are connected by an arc-shaped transition surface.

4. The gas spray head as described in claim 3, wherein, The cooling plate also includes a third air outlet channel, which is located on the outermost side of the peripheral area and is connected to the second air inlet channel. The third air outlet channel includes an upper third air outlet and a lower third air outlet that are vertically connected to each other. The upper third air outlet is a longitudinally elongated groove-shaped opening, and the lower third air outlet is a semi-flame-shaped opening that extends away from the central axis area. The size of the semi-flame-shaped opening gradually increases from the upper third air outlet to the lower surface of the cooling plate, and the adjacent sidewalls of the longitudinally elongated groove-shaped opening are connected by an arc-shaped surface. The outwardly extending portion of the semi-flame-shaped opening includes an arc-shaped surface.

5. The gas spray head as described in claim 2, wherein, The gas spray head also includes a purge gas channel for inputting purge gas; the purge gas channel includes a plurality of interconnected first purge gas channels and a plurality of second purge gas channels, the first purge gas channels passing through the gas distribution plate and the cooling plate, the plurality of first purge gas channels being arranged along the second direction, the fasteners being disposed between adjacent first purge gas channels, and the second purge gas channels being located below the fasteners.

6. The gas spray head as claimed in claim 5, wherein, The dome of the second purge gas channel is an arc-shaped surface, and the cross-sectional area of ​​the second purge gas channel gradually increases from the dome to the lower surface of the cooling plate, forming an isosceles trapezoidal horn-shaped opening. The adjacent sidewalls of the isosceles trapezoidal horn-shaped opening are connected by an arc-shaped transition.

7. The gas spray head as claimed in claim 6, wherein, The second purge gas passage is parallel to the first outlet passage and the second outlet passage in its length direction.

8. The gas spray head as claimed in claim 1, wherein, Each of the air outlet channels in the central axis region is provided with at least one first reinforcing rib; each of the air outlet channels in the peripheral region is provided with at least one second reinforcing rib.

9. The gas spray head as claimed in claim 2, wherein, The cooling plate also includes at least one coolant channel, which is parallel to the upper and lower surfaces of the cooling plate and is arranged between the first air outlet channel and the second air outlet channel.

10. The gas spray head as claimed in claim 1, wherein, The cooling plate is made of stainless steel.

11. A chemical vapor deposition apparatus, comprising: a reaction chamber including a reaction chamber sidewall and a reaction chamber top cover disposed on top of the reaction chamber sidewall; a gas spray head as described in any one of claims 1 to 10, fixedly disposed below the reaction chamber top cover; a tray disposed below the gas spray head for supporting a substrate; a heating device disposed below the tray for heating the substrate; and a rotating mechanism connected to the tray for driving the tray and the substrate to rotate in a horizontal direction.

12. The chemical vapor deposition apparatus as claimed in claim 11, wherein, The top cover of the reaction chamber has multiple first through holes, the gas distribution plate has multiple second through holes, and the cooling plate has multiple connecting holes. The positions of the first through holes, the second through holes, and the connecting holes are matched accordingly, and the fasteners are installed in the first through holes, the second through holes, and the connecting holes.

13. The chemical vapor deposition apparatus as claimed in claim 12, wherein, The fastener is a screw or stud, the screw or stud has external threads, and the inner walls of the first through hole, the second through hole and the connecting hole have internal threads that match the screw or stud.

14. The chemical vapor deposition apparatus as claimed in claim 11, wherein, The tray is made of graphite.

15. The chemical vapor deposition apparatus of claim 11 further includes a first gas source and a second gas source, the first gas source being connected to a first inlet channel in the gas distribution plate, and the second gas source being connected to a second inlet channel in the gas distribution plate.

16. The chemical vapor deposition apparatus of claim 15 further includes a purge gas source connected to a purge gas passage in the gas spray head.

17. The chemical vapor deposition apparatus of claim 11 further includes a coolant circulation pump connected to the inlet and outlet of the coolant passage.

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