Furnace structure and semiconductor processing equipment

Abstract

This application provides a furnace structure and a semiconductor manufacturing apparatus. The furnace structure includes at least one furnace unit, each furnace unit comprising a heat-insulating support body and an insulating support structure. The heat-insulating support body is annular, and the insulating support structure is fixed and confined to the inner circumference of the heat-insulating support body. The insulating support structure is used to confine and fix a heating wire within the space enclosed by the heat-insulating support body. The heating wire includes multiple arc-shaped segments connected end-to-end, forming a columnar annular structure that surrounds the heat-insulating support body circumferentially. The insulating support structure is configured to insulate and isolate adjacent arc-shaped segments. This solution not only minimizes the deformation of the heating wire and prevents it from collapsing, but also reduces the risk of short circuits in the heating wire, and improves the heating efficiency and service life of the heating wire.

Description

Furnace structure and semiconductor process equipment The present application relates to the field of furnace manufacturing, and in particular, to a furnace structure and semiconductor process equipment. With the rapid development of the solar photovoltaic system industry, the market demand for higher production capacity of solar photovoltaic system equipment has increased. The diameter and length of the diffusion furnace, the core heating component of solar photovoltaic system equipment, have gradually increased. The existing furnace has a maximum outer diameter of 0.66m and a length of 3.3m. The process temperature can reach up to 1050°C. In this situation, if the traditional mechanical structure for installing the heating wire is used, that is, the heating wire is supported by its own weight, there are serious risks such as the heating wire being dislodged, collapsing, short-circuiting and catching fire. It may even crush the quartz tube during the process, causing huge damage to the equipment. Therefore, it is necessary to improve the mechanical structure of the furnace to install the heating wire to meet the needs of high-capacity and high-temperature equipment. The present application aims to solve at least one of the technical problems existing in the prior art, and proposes a furnace structure and semiconductor process equipment, which can solve the problem in the prior art that the heating wire is supported by its own weight, and there are huge hidden dangers such as the heating wire falling out, collapsing, short circuit and fire, and meet the needs of large-capacity and high-temperature equipment. In order to achieve the purpose of the present application, a furnace body structure is provided, which is applied to semiconductor process equipment, including at least one furnace body unit, each of which includes a thermal insulation support body and an insulating support structure, wherein the thermal insulation support body is annular, and the insulating support structure is limited and fixed to the inner circumference of the thermal insulation support body; the insulating support structure is used to limit and fix the heating wire in the space enclosed by the thermal insulation support body, and the heating wire includes a plurality of arc segments connected in series end to end, and the plurality of arc segments are connected in series end to end to form a columnar annular structure surrounding the circumference of the thermal insulation support body, and the insulating support structure is configured to insulate and isolate each adjacent arc segment. In some embodiments, the cylindrical ring structure formed by connecting the multiple arc segments end to end is a cylindrical spiral structure. In some embodiments, the thermal insulation support body comprises an annular ceramic fiber board. In some embodiments, the inner circumference of the thermal insulation support body is provided with a first limiting structure, and the insulating support structure is provided with a second limiting structure; the first limiting structure cooperates with the second limiting structure to limit and fix the insulating support structure to the inner circumference of the thermal insulation support body. In some embodiments, the first limiting structure includes a limiting groove formed on the inner circumference of the thermal insulation support body, and the second limiting structure includes a limiting portion formed on the insulating support structure, which cooperates with the limiting groove to limit and fix the insulating support structure to the inner circumference of the thermal insulation support body. In some embodiments, the limiting groove includes a first groove section and a second groove section arranged in sequence along the direction from the groove bottom to the groove mouth, and the width of the first groove section is greater than the width of the second groove section; the limiting portion includes a first sub-limiting portion and a second sub-limiting portion, the width of the first sub-limiting portion is greater than the width of the second sub-limiting portion, and the first sub-limiting portion cooperates with the first groove section, and the second sub-limiting portion cooperates with the second groove section. In some embodiments, the limiting groove also includes a transition groove section connected between the first groove section and the second groove section, and the width of the transition groove section decreases from the first groove section to the second groove section; the limiting portion also includes a transition sub-limiting portion connected between the first sub-limiting portion and the second sub-limiting portion, and the width of the transition sub-limiting portion decreases from the first sub-limiting portion to the second sub-limiting portion, and the transition sub-limiting portion cooperates with the transition groove section. In some embodiments, the insulating support structures are multiple and are distributed at intervals along the circumference of the thermal insulation support body; the limiting grooves are multiple and are matched with the limiting parts of the multiple insulating support structures in a one-to-one correspondence. In some embodiments, the limiting groove is strip-shaped, and the length direction of the limiting groove is parallel to the axial direction of the thermal insulation support body, and both ends of the limiting groove in the length direction pass through the thermal insulation support body. In some embodiments, the insulating support structure is formed with a plurality of accommodating holes, and the plurality of accommodating holes are arranged at intervals along a direction parallel to the axial direction of the thermal insulation support body; and the plurality of arc segments are provided in a one-to-one correspondence through the plurality of accommodating holes. In some embodiments, the radial size of the accommodating hole of the thermal insulation support body is larger than the radial size of the arc segment of the thermal insulation support body; and / or, the axial size of the accommodating hole of the thermal insulation support body is larger than the axial size of the arc segment of the thermal insulation support body. In some embodiments, the insulating support structure includes a plurality of support blocks, which are stacked in sequence along an axial direction parallel to the thermal insulation support body, and among the plurality of support blocks, the two support blocks located at both ends are first support blocks, and all the support blocks except the two support blocks located at both ends are second support blocks; the first support block is provided with the accommodating hole; the two surfaces of each adjacent two second support blocks stacked on each other are formed with recesses, and together constitute the accommodating hole. In some embodiments, the insulating support structure also includes a through rod, which passes through the multiple support blocks in a direction parallel to the axial direction of the thermal insulation support body; limiting recesses are also provided on the end faces of the two first support blocks facing away from each other, and bending portions are provided at both ends of the through rod, and the two bending portions are respectively limited and cooperated with the two limiting recesses to limit and fix the multiple support blocks. In some embodiments, there are multiple furnace body units, which are arranged in sequence along the axial direction of the insulation support body; each of the furnace body units also includes an annular insulating baffle, which is arranged at one end of the insulation support body in its axial direction, and the inner peripheral edge of the insulating baffle protrudes relative to the inner peripheral surface of the insulation support body, and is used to insulate and isolate the heating wire in the insulation support body from the heating wire in another adjacent insulation support body. In some embodiments, there are multiple furnace body units, which are arranged in sequence along the axial direction of the thermal insulation support body; the thermal insulation support body is also provided with an insulating lead-out piece that passes through its thickness, and a lead-out hole is provided on the insulating lead-out piece, and the lead-out wire of the heating wire extends to the outside of the thermal insulation support body through the lead-out hole; the lead-out hole on the insulating lead-out piece and the lead-out hole on the insulating lead-out piece of another adjacent thermal insulation support body are staggered with each other in the circumferential direction of the thermal insulation support body. In some embodiments, the furnace structure further includes two insulation end covers and a furnace shell, wherein the two insulation end covers are annular and are respectively arranged at both ends of the at least one furnace unit; the furnace shell is arranged around the at least one furnace unit and the outer periphery of the two insulation end covers. As another technical solution, the present application also provides a semiconductor process equipment, including: the above-mentioned furnace body structure provided in the present application; a heating wire arranged in the space enclosed by the thermal insulation support body of the furnace body unit; and a process cavity, arranged in the space enclosed by the thermal insulation support body and located on the inner side of the heating wire, for accommodating a wafer boat. The present application has the following beneficial effects: The furnace body structure provided by the present application, which limits and fixes the insulating support structure to the inner circumference of the insulating support body through the insulating support body, can support and limit the insulating support structure, avoid deformation and position movement, thereby ensuring the reliability of the insulating support structure and avoiding failure of its insulation and support functions. On this basis, the insulating support structure is used in combination to limit and fix the heating wire in the space enclosed by the insulating support body, that is, the heating wire is fixed to the insulating support body by the insulating support structure, and no longer relies on its own weight for support, which makes the heating wire less deformed and not easy to collapse, and the insulating support structure isolates each adjacent arc segment, which can reduce the risk of short circuit of the heating wire. Moreover, by fixing the heating wire to the insulating support body by the insulating support structure, the heating wire can be supported and limited by the insulating support structure while being separated from the insulating support body. Compared with the related art in which the heating wire is half-buried in the insulation cotton or the insulation block, the heating wire can be almost completely exposed to the space enclosed by the insulation support body, thereby improving the heating efficiency and service life of the heating wire. The semiconductor process equipment provided in the present application adopts the above-mentioned furnace body structure provided in the present application, which not only can make the heating wire less deformed and not easy to collapse, and can reduce the risk of short circuit of the heating wire, but also can improve the heating efficiency and service life of the heating wire. In order to enable those skilled in the art to better understand the technical solution of the present application, the furnace structure provided by the present application is described in detail below with reference to the accompanying drawings. In the related art, the heating wire is wound from a single metal wire into a cylindrical spiral structure, with an insulating block positioned between each adjacent coil turn to insulate and isolate the two adjacent coil turns. Furthermore, the heating wire is wrapped with flexible insulation foam, and a shell is provided around the outer periphery of the insulation foam. This inevitably presents the following problems in practical applications: Because the heating wire relies on its own weight for support (i.e., it is independently placed without relying on other supporting structures), the thermal expansion and contraction of the heating wire, as well as its post-heating creep, become particularly pronounced as the process temperature rises or falls during high-temperature processes. In particular, significant thermal stress is generated after heating, with nowhere to release it, resulting in severe deformation of the heating wire and significant risks such as wire disengagement, collapse, and short circuit fire. Furthermore, the insulating block positioned between each adjacent coil turn is easily deformed and displaced as the heating wire deforms, making it difficult to maintain a straight line in the axial direction of the furnace body. This can easily cause contact short circuits between the coils, leading to fires. In addition, the inventors found that the above-mentioned flexible thermal insulation cotton not only did not play any supporting role, but also inevitably had a certain degree of contact with the heating wire. There were even some related technologies in which the heating wire was half-buried in the thermal insulation cotton or the thermal insulation block. This made the heating area of ​​the heating wire in the process space smaller after it heated up, and the heating efficiency was low, which could not meet the requirements of high-temperature processes. The present invention provides a furnace structure that can be used in semiconductor processing equipment requiring heating, such as diffusion furnaces and oxidation furnaces, to insulate and secure the heating wires of the semiconductor processing equipment. Specifically, the furnace structure includes at least one furnace unit 100, each of which includes a thermal insulation support body 1 and an insulating support structure 2. The thermal insulation support body 1 is annular, and the insulating support structure 2 is fixedly positioned on the inner circumference of the thermal insulation support body 1. The insulating support structure 2 is used to securely position the heating wire 200 within the space enclosed by the thermal insulation support body 1. The insulating support structure 2 is limited and fixed to the inner circumference of the insulating support body 1 by the insulating support body 1, which can support and limit the insulating support structure 2 to prevent it from deformation and position movement, thereby ensuring the reliability of the insulating support structure 2 and preventing its insulation and support functions from failing. On this basis, the insulating support structure 2 is combined with the use of the insulating support structure 2 to limit and fix the heating wire 200 in the space surrounded by the insulating support body 1, that is, the heating wire 200 is fixed to the insulating support body 1 by the insulating support structure 2, and is no longer supported by its own weight, which makes the heating wire 200 less deformed and not easy to collapse, and can reduce the risk of short circuit of the heating wire 200. Moreover, by fixing the heating wire on the thermal insulation support body 1 using the insulating support structure 2, the heating wire 200 can be supported and limited by the insulating support structure 2 while being separated from the thermal insulation support body 1. That is, due to the presence of the insulating support structure 2, there is a gap between the heating wire 200 and the thermal insulation support body 1. Compared with the related art in which the flexible thermal insulation cotton contacts the heating wire 200, or the heating wire 200 is half buried in the thermal insulation cotton or the thermal insulation block, the heating wire 200 can be almost completely exposed to the space surrounded by the thermal insulation support body 1, effectively increasing the heating area, thereby improving the heating efficiency of the heating wire 200, and also having better maintainability, thereby improving the service life of the heating wire. In some embodiments, as shown in FIG8 , the heating wire 200 includes a plurality of arc segments 200a connected end to end in series, and the plurality of arc segments 200a are connected end to end in series to form a cylindrical ring structure that surrounds the circumference of the thermal insulation support body 1. For ease of processing, the cylindrical ring structure is a cylindrical spiral structure, which can be wound by a single metal wire. The coils that make up the cylindrical spiral structure are the arc segments 200a that extend along the spiral direction. On this basis, the insulating support structure 2 is configured to insulate and isolate each adjacent arc segment 200a to prevent the two from contacting and short-circuiting, thereby preventing fire. However, the embodiments of the present application are not limited to this. In actual applications, the plurality of arc segments 200a can also be connected end to end in series to form other cylindrical ring structures in addition to the cylindrical spiral structure. The structures of the arc segments 200a may also be different depending on the cylindrical ring structure. For example, each arc segment 200a can also be a non-closed arc segment extending along the circumference of the thermal insulation support body 1, and each adjacent arc segment can be connected end to end through a transition section to form a columnar ring structure. The transition section is, for example, a straight line segment extending along the axis of the columnar ring structure. The above-mentioned thermal insulation support body 1 that realizes the functions of heat insulation, limiting and supporting is made of hard thermal insulation material. Since the hard thermal insulation material is hard, it has the characteristics of hardness, not easy to deform, and strong pressure resistance. This enables the thermal insulation support body 1 to reliably support and limit the insulating support structure 2 and the heating wire 200 on the basis of heat insulation, thereby solving the problems of the heating wire falling out, collapsing, short circuit and fire caused by the heating wire being supported by its own weight. In some embodiments, the thermal insulation support body 1 includes, for example, an annular ceramic fiber board, which is one of the above-mentioned hard thermal insulation materials and has both good thermal insulation and pressure resistance. Preferably, the raw materials of the ceramic fiber board may include the following components: 80% to 84% alumina and 15% to 20% silicon dioxide. The minimum compressive strength of the ceramic fiber board can reach more than 0.5 MPa, and it is a hard thermal insulation material with good pressure resistance. Of course, in actual applications, the thermal insulation support body 1 can also be made of other hard thermal insulation materials, as long as it can reliably support the insulating support structure 2 and the heating wire 200. The embodiments of the present application are not limited to this. In some embodiments, the insulating support structure 2 is made of ceramic. Of course, it can also be made of other high-temperature resistant insulating materials with a certain strength to insulate, support and limit the heating wire 200. There are many ways to position and fix the insulating support structure 2 to the inner circumference of the thermal insulation support body 1. For example, the inner circumference of the thermal insulation support body 1 is provided with a first limiting structure, and the insulating support structure 2 is provided with a second limiting structure; the first limiting structure cooperates with the second limiting structure to position and fix the insulating support structure 2 to the inner circumference of the thermal insulation support body 1. Further, as shown in Figure 2, the above-mentioned first limiting structure, for example, includes a limiting groove 11 formed on the inner circumference of the thermal insulation support body 1, and as shown in Figure 3, the above-mentioned second limiting structure, for example, includes a limiting portion 22 formed on the insulating support structure 2, and the limiting portion 22 cooperates with the limiting groove 11 to position and fix the insulating support structure 2 to the inner circumference of the thermal insulation support body 1. Specifically, the shape and size of the limiting portion 22 are adapted to the shape and size of the limiting groove 11, so that the limiting portion 22 is fixed in the limiting groove 11. The first limiting structure and the second limiting structure that realize the above-mentioned limiting and fixing functions may also adopt other limiting structures, as long as they can limit and fix the insulating support structure 2 to the inner circumference of the thermal insulation support body 1. In some embodiments, the furnace body structure provided in the embodiments of the present application is applied to a horizontal diffusion furnace. In this case, the axial direction of the thermal insulation support body 1 is parallel to the horizontal plane. At this time, under the action of the limiting portion 22 cooperating with the limiting groove 11, the insulating support structure 2 is equivalent to being suspended on the thermal insulation support body 1. In other words, the limiting portion 22 cooperates with the limiting groove 11 in such a way that the limiting portion 22 will not detach from the limiting groove 11 due to the gravity of the insulating support structure 2. Of course, in actual applications, the furnace body structure provided in the embodiments of the present application can also be applied to a vertical diffusion furnace. In this case, the axial direction of the thermal insulation support body 1 is perpendicular to the horizontal plane. At this time, on the basis of the cooperation between the limiting portion 22 and the limiting groove 11, a limiting element needs to be additionally provided to lock the limiting portion 22 at a corresponding height in the limiting groove 11. Alternatively, a limiting groove 11 with a blind end at the lower end can also be used to lock the limiting portion 22 at a corresponding height. In some embodiments, in order to facilitate the installation of the heating wire 200 and reduce the difficulty of processing the insulating support structure 2, as shown in Figure 3, the insulating support structure 2 includes a plurality of support blocks 21, and the plurality of support blocks 21 are stacked in sequence along a direction parallel to the axial direction of the thermal insulation support body 1. In this case, the above-mentioned limiting portion 22 is composed of a sub-limiting portion 221 provided at one end of the plurality of support blocks 21. The sub-limiting portions 221 on the plurality of support blocks 21 are stacked in sequence parallel to the axial direction of the thermal insulation support body 1, and the cross-sectional profile shape on the radial section of the thermal insulation support body 1 is the same. In actual application, the sub-limiting portion 221 provided at one end of the support block 21 can be connected as a whole. Furthermore, in some embodiments, in order to ensure that the limiting portion 22 will not detach from the limiting groove 11 due to the gravity of the insulating support structure 2, as shown in Figure 4, the limiting groove 11 includes a first groove section 11a and a second groove section 11c arranged in sequence from the bottom of the groove to the groove mouth, and the width B1 of the first groove section 11a is greater than the width B2 of the second groove section 11c. The widths B1 and B2 are respectively the dimensions of the first groove section 11a and the second groove section 11c on the radial cross-section of the thermal insulation support body 1, perpendicular to the groove depth direction. Furthermore, as can be seen from Figures 3 and 5 , the limiting portion 22 includes a first sub-limiting portion and a second sub-limiting portion. The first sub-limiting portion is composed of a plurality of first sub-limiting blocks 221a on the support blocks 21, which are stacked in sequence along a direction parallel to the axial direction of the thermal insulation support body 1. The second sub-limiting portion is composed of a plurality of second sub-limiting blocks 221c on the support blocks 21, which are stacked in sequence along the axial direction parallel to the thermal insulation support body 1. Furthermore, the width of the first sub-limiting portion (i.e., the width of the first sub-limiting block 221a) is greater than the width of the second sub-limiting portion 22 (i.e., the width of the second sub-limiting block 221c). The first sub-limiting portion (composed of the plurality of first sub-limiting blocks 221a) cooperates with the first slot segment 11a, and the second sub-limiting portion (composed of the plurality of second sub-limiting blocks 221c) cooperates with the second slot segment 11c. As shown in FIG6 , by making the width of the first slot segment 11a greater than the width of the second slot segment 11c, and the width of the first sub-limiting portion greater than the width of the second sub-limiting portion, the first sub-limiting portion cannot be directly removed through the second slot segment 11c, thereby confining the limiting portion 22 within the limiting groove 11 and preventing the limiting portion 22 from escaping from the limiting groove 11 due to the gravity of the insulating support structure 2. On this basis, the insulating support structure 2, composed of a plurality of support blocks 21, is located outside the limiting groove 11, that is, within the space enclosed by the thermal insulation support body 1, so as to limit and fix the heating wire 200. On this basis, since the heating wire 200 is indirectly fixed to the thermal insulation support body 1 through the insulating support structure 2, the heating wire 200 is almost entirely exposed within the space enclosed by the thermal insulation support body 1, effectively increasing the heating area, thereby improving the heating efficiency of the heating wire 200, and also providing better maintainability, thereby increasing the service life of the heating wire. In some embodiments, in order to avoid stress concentration at the connection between the first sub-limiting portion (composed of multiple first sub-limiting blocks 221a) and the second sub-limiting portion (composed of multiple second sub-limiting blocks 221c), the limiting groove 11 also includes a transition groove section 11b connected between the first groove section 11a and the second groove section 11c, and the width of the transition groove section 11b decreases from the first groove section 11a to the second groove section 11c; the limiting portion 22 also includes a transition sub-limiting portion connected between the first sub-limiting portion and the second sub-limiting portion (composed of multiple third sub-limiting blocks 221b stacked in sequence along the axial direction parallel to the thermal insulation support body 1), the width of the transition sub-limiting portion decreases from the first sub-limiting portion to the second sub-limiting portion, and the transition sub-limiting portion cooperates with the transition groove section 11b. It should be noted that the shape of the above-mentioned transition groove segment 11b on the radial cross-section of the thermal insulation support body 1 is, for example, an isosceles trapezoid, that is, the side surface of the transition groove segment 11b is a plane, but the embodiment of the present application is not limited to this. In actual applications, the side surface of the above-mentioned transition groove segment 11b can also be an arc-shaped surface, which can also solve the above-mentioned stress concentration problem. In some embodiments, in order to evenly fix the heating wire 200 in the circumferential direction of the heating wire 200 and ensure that the heating wire 200 does not produce large deformation at various positions in the circumferential direction, as shown in Figures 1, 2 and 6, there are multiple insulating support structures 2, and they are distributed at intervals along the circumference of the thermal insulation support body 1; and there are multiple limiting grooves 11, and they correspond one-to-one with the limiting parts 22 of multiple insulating support structures 2. In some embodiments, in order to facilitate the installation of the limiting portion 22 in the limiting groove 11, as shown in Figure 2, the limiting groove 11 is strip-shaped, and the length direction of the limiting groove 11 is parallel to the axial direction of the thermal insulation support body 1, and the two ends of the limiting groove 11 in the length direction pass through the thermal insulation support body 1, that is, the limiting groove 11 has openings at both ends in the length direction, and the limiting portion 22 can be moved into the limiting groove 11 from the opening. In some embodiments, the insulating support structure 2 can be used to position and secure the heating wire 200 within the space enclosed by the insulation support body 1 in various ways. For example, as shown in Figures 3, 5, and 7, the insulating support structure 2 is formed with a plurality of accommodating holes 23, which are spaced apart and arranged parallel to the axial direction of the insulation support body 1. As shown in Figure 8, a plurality of arcuate segments 200a are disposed one-to-one through the plurality of accommodating holes 23. The positioning and securing effects of the accommodating holes 23 ensure that the heating wire 200 does not deform significantly, preventing it from falling out or collapsing. Furthermore, the insulation between adjacent arcuate segments 200a is maintained, preventing contact and short circuits between them, which could cause fire. Furthermore, the heating wire 200 is almost entirely exposed within the space enclosed by the insulation support body 1. This improves the heating efficiency and service life of the heating wire 200, compared to related art methods in which the heating wire 200 is partially buried in insulation cotton or insulation blocks. In some embodiments, to allow for thermal expansion of the arcuate segment 200a after heating and to reduce thermal stress caused by the insulating support structure 2 restraining the heating wire 200, the radial dimension of the accommodating hole 23 is larger than the radial dimension of the arcuate segment 200a; and / or the axial dimension of the accommodating hole 23 is larger than the axial dimension of the arcuate segment 200a. Depending on the amount of thermal expansion of the arcuate segment 200a in different directions after heating, the accommodating hole 23 may be an oblong hole or an elliptical hole, with the length of the accommodating hole 23 being, for example, parallel to the radial direction of the thermal insulation support body 1. In some embodiments, to facilitate the installation of the heating wire 200 and reduce the difficulty of processing the insulating support structure 2, the insulating support structure 2 includes a plurality of support blocks 21, which are stacked in sequence along a direction parallel to the axial direction of the thermal insulation support body 1. Furthermore, as shown in FIG3 , among the plurality of support blocks 21, the two support blocks 21 located at the two ends are first support blocks 21a, and all support blocks 21 other than the two support blocks 21 located at the two ends (i.e., the first support blocks 21a) are second support blocks 21b; as shown in FIG5 , the first support blocks 21a are provided with a receiving hole 23; and as shown in FIG3 and FIG7 , recesses 231 are formed on both surfaces of two adjacent second support blocks 21b that overlap each other, and the two adjacent recesses 231 together constitute the receiving hole 23. Because the process temperature of the heating wire 200 at the location of the outermost arc-shaped segment 200a in its axial direction varies significantly, the outermost arc-shaped segment 200a is susceptible to significant deformation and collapse. To address this issue, by providing complete accommodating holes 23 in the two support blocks 21 at both ends (i.e., the first support block 21a), that is, providing a complete accommodating hole 23 on one support block 21, the outermost arc-shaped segment 200a can be more reliably positioned and fixed. Furthermore, the recess 231 of the support block 21 other than the two support blocks 21 at both ends (i.e., the second support block 21b) is connected to the recess 231 of the adjacent second support block 21b to form the accommodating hole 23, which not only simplifies the installation of the heating wire 200 but also reduces the difficulty of manufacturing the insulating support structure 2. Preferably, in order to further simplify the installation of the heating wire 200 , as shown in FIG3 , the receiving hole 23 formed by the butting of the recesses 231 between adjacent second support blocks 21 b has a gap at the butting location. In some embodiments, to secure the multiple support blocks 21 together and maintain them in a straight line in the axial direction of the insulation support body 1, the insulation support structure 2 further includes a through-rod that extends through the multiple support blocks 21 in a direction parallel to the axial direction of the insulation support body 1. Specifically, as shown in FIG7 , each of the multiple support blocks 21 (including the first support block 21a and the second support block 21b) is provided with a corresponding through-hole 25 for the through-rod to pass through. The through-rod connects all the support blocks 21 together via these through-holes 25. Furthermore, as shown in FIG3 and FIG5 , the end faces of the two first support blocks 21a facing away from each other are each provided with a limiting recess 24. Each end of the through-rod is provided with a bent portion 26, which engages with the two limiting recesses 24 to secure the multiple support blocks 21. The provision of the two bent portions 26 prevents the support blocks 21 from dislodging from one end of the through-rod and confines the multiple support blocks 21 between the two bent portions 26. Specifically, as shown in Figure 3, the limiting recess 24 is formed with an opening on the sub-limiting portion 221, and the bent portion 26 extends from the opening. It should be noted that by limiting and fixing the insulating support structure 2 to the inner circumference of the thermal insulation support body 1, the thermal insulation support body 1 can effectively prevent deformation of the through-rod caused by thermal expansion and contraction, and reduce the probability of the through-rod becoming thinner and longer due to friction, thereby reducing the probability of fire caused by the heating wire 200. In some embodiments, as shown in Figures 2, 8 and 9, there are multiple furnace body units 100, which are arranged in sequence along the axial direction of the thermal insulation support body 1; and each furnace body unit 100 also includes a ring-shaped insulating baffle 4, which is arranged at one end of the thermal insulation support body 1 in its axial direction, and the inner peripheral edge of the insulating baffle 4 protrudes relative to the inner peripheral surface of the thermal insulation support body 1, and is used to insulate and isolate the heating wire 200 in the thermal insulation support body 1 from the heating wire 200 in another adjacent thermal insulation support body 1. With the help of the above-mentioned insulating baffle 4, it is possible to avoid the heating wires 200 between two adjacent furnace body units 100 from contacting and short-circuiting after thermal expansion occurs during heating. In some embodiments, the material of the insulating baffle 4 includes a hard ceramic plate, the main component of which is, for example, a material with a density greater than 820 kg / m 3 The hard ceramic plate has greater strength, so that adjacent heating wires 200 can be more reliably kept apart when thermal expansion occurs, avoiding overlapping contact between the two and the occurrence of fire. In some embodiments, as shown in Figures 1, 2, and 9, the thermal insulation support body 1 is further provided with an insulating lead-out member 3 extending through its thickness. The insulating lead-out member 3 is provided with a lead-out hole 32. The lead-out wire of the heating wire 200 extends to the outside of the thermal insulation support body 1 through the lead-out hole 32 so as to be connected to the power supply. Specifically, a connection terminal 31 is provided in the lead-out hole 32. The connection terminal 31 is used to electrically connect the power supply to the lead-out wire of the heating wire 200. In addition, each insulating lead-out member 3 can be provided with two lead-out holes 32 for respectively leading out the positive lead-out wire and the negative lead-out wire of the heating wire 200, while limiting the lead-out position to reduce welding errors. In this case, as shown in FIG2 , the insulating lead-out member 3 is strip-shaped, and the thermal insulation support body 1 is provided with a mounting hole 12 extending through the thickness thereof. The mounting hole 12 is strip-shaped and extends in a direction parallel to the axial direction of the thermal insulation support body 1. The insulating lead-out member 3 is embedded in the mounting hole 12, and the shape of the insulating lead-out member 3 and the mounting hole 12 are adapted. In addition, the two lead-out holes 32 on each insulating lead-out member 3 are respectively provided at both ends of the insulating lead-out member 3 in the axial direction of the thermal insulation support body 1, so as to correspond to the positions of the positive lead-out wire and the negative lead-out wire of the heating wire 200, respectively. In some embodiments, the material of the connecting terminal 31 is the same as that of the heating wire 200, for example, an electric heating alloy. Furthermore, when there are multiple furnace units 100, as shown in FIG9 , the lead-out holes 32 on the insulating lead-out piece 3 and the lead-out holes 32 on the insulating lead-out piece 3 of another adjacent thermal insulation support body 1 are staggered relative to each other in the circumferential direction of the thermal insulation support body 1. That is, adjacent insulating lead-out pieces 3 are staggered relative to each other in the circumferential direction of the thermal insulation support body 1. This can prevent voltage breakdown between adjacent connecting terminals 31 of adjacent insulating lead-out pieces 3 from igniting the air due to the proximity between the connecting terminals 31. Preferably, the staggered angle between adjacent insulating lead-out pieces 3 relative to each other in the circumferential direction of the thermal insulation support body 1 is greater than or equal to 20°. In some embodiments, as shown in Figures 10 and 11 , the furnace structure further includes two insulating end covers 5 and a furnace shell 6 . The two insulating end covers 5 are annular and are disposed at both ends of at least one furnace unit 100 . The furnace shell 6 surrounds the at least one furnace unit 100 and the outer periphery of the two insulating end covers 5 . The two insulating end covers 5 are used to insulate the ends of the at least one furnace unit 100 , while the furnace shell 6 is used to accommodate multiple furnace units 100 within the structure. Furthermore, as shown in Figure 11 , each connection terminal 31 extends through the furnace shell 6 to the exterior of the furnace shell 6 for electrical connection to an external power supply. To sum up, the furnace body structure provided in the embodiment of the present application limits and fixes the insulating support structure 2 on the inner circumference of the insulating support body 1 through the insulating support body 1, which can support and limit the insulating support structure 2 to prevent it from deformation and position movement, thereby ensuring the reliability of the insulating support structure 2 and avoiding the failure of its insulation and support functions. On this basis, the insulating support structure 2 is used in combination to limit and fix the heating wire 200 in the space enclosed by the insulating support body 1, that is, the heating wire 200 is fixed on the insulating support body 1 by using the insulating support structure 2, and no longer relies on its own weight for support, which makes the heating wire 200 less deformed and not easy to collapse, and can reduce the risk of short circuit of the heating wire 200. Moreover, by fixing the heating wire 200 on the thermal insulation support body 1 using the insulating support structure 2, the heating wire 200 can be supported and limited by the insulating support structure 2 while being separated from the thermal insulation support body 1. Compared with the related art in which the heating wire 200 is half-buried in the thermal insulation cotton or the thermal insulation block, the heating wire 200 can be almost completely exposed to the space surrounded by the thermal insulation support body 1, thereby improving the heating efficiency and service life of the heating wire 200. As another technical solution, as shown in FIG12 , an embodiment of the present application further provides a semiconductor process equipment, such as a diffusion furnace, an oxidation furnace, etc., and includes a furnace structure, a heating filament 200 disposed in the space enclosed by the heat-insulating support body 1 in each furnace unit 100 of the furnace structure, and a process chamber 300. The process chamber 300 is disposed in the space enclosed by the heat-insulating support body 1 in the multiple furnace units 100 and is located inside the heating filament 200, forming a process space and accommodating a wafer boat 400. The process chamber 300 is, for example, a quartz tube. The above-mentioned furnace structure adopts the above-mentioned furnace structure provided in the present application. In some embodiments, the heating wire 200 is made of, for example, an electrothermal alloy, and is configured to convert electrical energy into thermal energy when supplied with power by a power supply, so as to heat the wafer boat 400 in the process chamber 300 . In addition, by setting up multiple furnace body units 100, the heating power of the heating wire 200 corresponding to each furnace body unit 100 can be individually controlled to achieve zoned control of the process space temperature, thereby improving the temperature uniformity in the process space and further improving the process uniformity. The semiconductor process equipment provided in the present application adopts the above-mentioned furnace body structure provided in the present application, which not only can make the heating wire 200 less deformed and not easy to collapse, and can reduce the risk of short circuit of the heating wire 200, but also can improve the heating efficiency and service life of the heating wire 200. It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present application, and such modifications and improvements are also considered to be within the scope of protection of the present application. 1: Insulation support body 2: Insulation support structure 3: Insulation lead-out member 4: Insulation baffle 5: Insulation end cover 6: Furnace shell 11: Limiting groove 11a: First groove section 11b: Transition groove section 11c: Second groove section 12: Mounting hole 21: Support block 21a: First support block 21b: Second support block 22: Limiting portion 23: Accommodating hole 24: Limiting recess 25: Through hole 26: Bend portion 31: Connecting terminal 32: Lead-out hole 100: Furnace unit 200: Heating wire 200a: Arc segment 221: Sub-limiting portion 221a: First sub-limiting block 221b: Third sub-limiting block 221c: Second sub-limiting block 231: Recess 300: Process chamber 400: Wafer boat B1: Width B2: Width Figure 1 is a structural diagram of a furnace body unit of the furnace body structure provided in an embodiment of the present application; Figure 2 is a structural diagram of the heat-insulating support body adopted in an embodiment of the present application; Figure 3 is a structural diagram of the insulating support structure adopted in an embodiment of the present application; Figure 4 is a cross-sectional view of the limiting groove adopted in an embodiment of the present application; Figure 5 is a structural diagram of the first insulating block adopted in an embodiment of the present application; Figure 6 is an end side view of a furnace body unit of the furnace body structure adopted in an embodiment of the present application; Figure 7 is a structural diagram of the second insulating block adopted in an embodiment of the present application; Figure 8 is a partial cross-sectional view of two adjacent furnace body units of the furnace body structure provided in an embodiment of the present application; Figure 9 is an assembly drawing of multiple furnace body units of the furnace body structure provided in an embodiment of the present application; Figure 10 is a cross-sectional view of multiple furnace body units of the furnace body structure provided in an embodiment of the present application; Figure 11 is an overall structural diagram of the furnace body structure provided in an embodiment of the present application; Figure 12 is a cross-sectional view of the semiconductor process equipment provided in an embodiment of the present application. 1: Insulation support body 2: Insulation support structure 11: Limiting groove 31: Connection terminal 100:Furnace unit 200: Heating wire

Claims

1. A furnace structure applied in a semiconductor manufacturing process apparatus, comprising at least one furnace unit, each furnace unit including a thermal insulation support body and an insulating support structure, wherein, The thermal insulation support body is ring-shaped, and the insulating support structure is fixed to an inner circumference of the thermal insulation support body. The insulating support structure is used to fix a heating wire in the space enclosed by the thermal insulation support body. The heating wire includes multiple arc-shaped segments connected end to end. The multiple arc-shaped segments are connected end to end to form a columnar ring structure that surrounds the thermal insulation support body in the circumference. The insulating support structure is configured to separate and insulate each adjacent arc-shaped segment from each other. The insulating support structure includes multiple support blocks. Among the multiple support blocks, the two support blocks at both ends are each a first support block. Each support block other than the two support blocks at both ends is a second support block. Each pair of adjacent second support blocks is separated by a gap to expose the heating wire.

2. The furnace body structure as described in claim 1, wherein the columnar annular structure formed by the series connection of the plurality of arc-shaped segments is a columnar spiral structure.

3. The furnace structure as claimed in claim 1, wherein the insulation support body comprises an annular ceramic fiber plate.

4. The furnace body structure as described in claim 1, wherein a first limiting structure is provided on an inner peripheral surface of the heat insulation support body, and a second limiting structure is provided on the insulation support structure; the first limiting structure and the second limiting structure cooperate to limit and fix the insulation support structure to the inner peripheral side of the heat insulation support body.

5. The furnace body structure as claimed in claim 4, wherein the first limiting structure includes a limiting groove, and the second limiting structure includes a limiting portion formed on the insulating support structure, the limiting portion cooperating with the limiting groove to limit and fix the insulating support structure to the inner circumferential side of the heat insulation support body.

6. The furnace body structure as described in claim 5, wherein the limiting groove includes a first groove segment and a second groove segment arranged sequentially along a direction from the bottom of a groove to the opening of a groove, the width of the first groove segment being greater than the width of the second groove segment; the limiting part includes a first sub-limiting part and a second sub-limiting part, the width of the first sub-limiting part being greater than the width of the second sub-limiting part, and the first sub-limiting part cooperating with the first groove segment, and the second sub-limiting part cooperating with the second groove segment.

7. The furnace body structure as claimed in claim 6, wherein the limiting groove further includes a transition groove connecting the first groove segment and the second groove segment, the width of the transition groove segment decreasing from the first groove segment to the second groove segment; the limiting portion further includes a transition sub-limiting portion connecting the first sub-limiting portion and the second sub-limiting portion, the width of the transition sub-limiting portion decreasing from the first sub-limiting portion to the second sub-limiting portion, and the transition sub-limiting portion cooperating with the transition groove segment.

8. The furnace body structure as claimed in claim 5, wherein there are multiple insulating support structures, which are distributed at intervals along the circumference of the heat-insulating support body; there are multiple limiting grooves, which correspond one-to-one with the multiple limiting portions of the multiple insulating support structures.

9. The furnace body structure as claimed in claim 8, wherein the limiting groove is strip-shaped, and a length direction of the limiting groove is parallel to an axial direction of the insulation support body, and both ends of the limiting groove in the length direction penetrate the insulation support body.

10. The furnace body structure as claimed in claim 9, wherein the insulating support structure forms a plurality of receiving holes, the plurality of receiving holes being spaced apart along the axial direction parallel to the heat-insulating support body; the plurality of arc-shaped segments are correspondingly inserted through the plurality of receiving holes.

11. The furnace body structure as claimed in claim 10, wherein the size of the receiving hole in a radial direction of the insulation support body is greater than the size of the arcuate segment in the radial direction of the insulation support body; and / or, the size of the receiving hole in the axial direction of the insulation support body is greater than the size of the arcuate segment in the axial direction of the insulation support body.

12. The furnace body structure as claimed in claim 10, wherein the plurality of support blocks are stacked sequentially along the direction parallel to the axial direction of the heat-insulating support body; the first support block is provided with the receiving hole; and each of the two surfaces on which two adjacent second support blocks are stacked together forms a recess, which together constitutes the receiving hole.

13. The furnace body structure as described in claim 12, wherein the insulating support structure further includes a through rod that passes through the plurality of support blocks in a direction parallel to the axial direction of the insulating support body; a limiting recess is provided on each of the two end faces of the first support blocks facing away from each other; a bent portion is provided at each end of the through rod; and the two bent portions respectively engage with the two limiting recesses for limiting and fixing the plurality of support blocks.

14. The furnace body structure as claimed in claim 9, wherein the furnace body unit is a plurality of units and is arranged sequentially along the axial direction of the heat insulation support body; each furnace body unit further includes an annular insulating baffle, the insulating baffle being disposed at one end of the heat insulation support body along its axial direction, and the inner peripheral edge of the insulating baffle protruding relative to an inner peripheral surface of the heat insulation support body, for insulating and isolating the heating wire in the heat insulation support body from the heating wire in another adjacent heat insulation support body.

15. The furnace body structure as described in claim 9, wherein the furnace body unit comprises a plurality of units and is arranged sequentially along the axial direction of the heat insulation support body; the heat insulation support body is further provided with an insulating lead-out member extending through its thickness, the insulating lead-out member having a lead-out hole, through which a lead-out wire of the heating wire extends to the outside of the heat insulation support body; the lead-out hole on the insulating lead-out member and the lead-out hole on the insulating lead-out member of another adjacent heat insulation support body are offset from each other in the circumferential direction of the heat insulation support body.

16. The furnace body structure as described in any one of claims 1 to 9, wherein the furnace body structure further comprises two insulated end caps and a furnace shell, wherein, Both heat-insulating end caps are annular and are respectively disposed at both ends of the at least one furnace body unit; the furnace shell is disposed around the at least one furnace body unit and the two heat-insulating end caps.

17. A semiconductor manufacturing apparatus, comprising: The furnace body structure as described in any one of claims 1 to 16; A heating wire is installed in the space enclosed by the heat-insulating support body of the furnace unit; And a process cavity, disposed in the space enclosed by the thermal insulation support body and located inside the heating wire, for accommodating a crystal boat.

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