Visual Measurement of Film Tear-Off Device

Abstract

This invention relates to a visual measurement device for tearing film with a tear, comprising at least a platform assembly, a rotating device, a tear detection device, a thickness detection device, a tear blowing device, and a tearing device. A substrate with a film can be mounted on the platform assembly. When the film is to be torn off, the tear detection device uses the rotating device to rotate the platform assembly and simultaneously detects the tear position. The thickness detection device then detects the film thickness. After confirming the tear position and film thickness, the tear blowing device blows air into the space between the substrate and the film at the tear, causing part of the film to expand and detach from the substrate. Finally, the tearing device tears off the film. In this way, the substrate is not damaged by the precisely positioned blowing tearing process, and the film can be completely torn off without any residue.

Description

Technical Field

[0001] This invention relates to a tear-off film device for visual measurement that does not damage the substrate and has extremely high tear-off efficiency. Prior Technology

[0002] Note that traditional film peeling machines peel off the surface adhesive layer by rolling an embossing wheel on the surface of a double-layer film, followed by a film peeling device to detach the surface adhesive layer. However, during the peeling process, residual film is often left on the film because there is a certain probability of tearing when using a conventional mechanical film peeling device, resulting in incomplete removal.

[0003] Therefore, to solve the above problems, see Certificate No. M659855, "Air-blowing Film-Tearing Device," which includes a conveying module, a detection module, an air-blowing module, and a control module. The conveying module conveys the substrate to the working area. The substrate has holes adjacent to its leading edge, and a thin film covers the substrate, partially covering the holes. The detection module, spatially relative to the working area, detects the position of the holes along the leading edge direction of the substrate when the substrate is input into the working area at its leading edge. The air-blowing module is arranged adjacent to the detection module and moves along the leading edge direction of the substrate, selectively generating airflow towards the leading edge of the film. The control module connects the conveying module, the detection module, and the air-blowing module. A buffer section is set based on the position of the holes sensed by the detection module, and the air-blowing module is controlled to stop generating airflow when passing through the buffer section and the holes, preventing film breakage.

[0004] However, the above-mentioned air-blowing film-tearing device has the following problems and deficiencies that need to be improved during use:

[0005] Although blowing air can be used to tear the film, the accuracy of the operation from the tear to the blowing is not high. Whether there is a chance of damaging the substrate or whether the blowing efficiency meets the standard is still unknown. Even if a detection module is used, it is only used to detect the location of the hole. The specific blowing position, height, depth, etc. cannot be determined. Moreover, the tear may be too small, resulting in poor film blowing effect.

[0006] Therefore, how to solve the aforementioned problems and shortcomings of conventional methods is the direction that the applicant of this invention and related manufacturers in this industry urgently want to study and improve. Summary of the Invention

[0007] The main objective of this invention is to provide a method that combines a tear detection device and a thickness detection device to enable a tear blowing device to be precisely placed between the membrane and the substrate without damaging the substrate.

[0008] Another major objective of this invention is to provide a method that combines a rotating device with a bursting air device to allow the membrane to detach from the substrate quickly and easily without damaging the substrate. In particular, the rotating device can rotate the platform assembly a short distance, thereby increasing the bursting area through the bursting air device, which is more conducive to the expansion and detachment of the membrane.

[0009] The structure of the present invention, which achieves the aforementioned main objectives, includes at least a platform assembly, a rotating device, a tear detection device, a thickness detection device, a tear blowing device, and a film tearing device. The platform assembly supports a substrate. The rotating device is located at the bottom of the platform assembly. The tear detection device is located above the platform assembly. The thickness detection device is located to one side of the tear detection device. The tear blowing device is located to one side of the thickness detection device. The film tearing device is located to one side of the platform assembly. Functionally, the rotating device allows the platform assembly to rotate. The tear detection device detects the location of the tear. The thickness detection device detects the film thickness on the substrate surface. The tear blowing device aligns with the tear location detected by the tear detection device and blows air between the substrate and the film, causing the film to expand and detach. The film tearing device tears off the expanded film.

[0010] When the film on the substrate surface is to be removed, the tear detection device can first detect the correct position of the tear, and then the thickness detection device can detect the overall thickness of the film. After confirming the correct position of the tear and the thickness of the film, the tear blowing device is then placed at the tear and blows air into the space between the substrate and the film, causing part of the film to expand and detach from the substrate. Finally, the film tearing device removes the film.

[0011] By employing the above-mentioned technology, the conventional air-blowing film-tearing device can overcome the following problems: although it can tear the film by blowing air, the accuracy of the operation from the tear to the blowing process is not high, and there is no guarantee that the substrate will be damaged or that the blowing efficiency will meet the standard. Even if a detection module is used, it can only detect the location of the hole, and the specific blowing position, height, depth, etc. cannot be determined. Moreover, the tear may be too small, resulting in poor film blowing effect. This invention achieves the practical and progressive advantages mentioned above. Simple Explanation of the Diagram

[0012] The first figure is a perspective view of a preferred embodiment of the present invention. The second figure is a perspective view of the platform assembly and rotating device according to a preferred embodiment of the present invention. The third figure is a perspective view of the break detection device according to a preferred embodiment of the present invention. Figure 4 is a perspective view of the thickness detection device according to a preferred embodiment of the present invention. Figure 5 is a perspective view of the air-blowing device according to a preferred embodiment of the present invention. Figure 6 is a perspective view of the film-tearing device according to a preferred embodiment of the present invention. Figure 6A is a schematic diagram of the film-tearing device of a preferred embodiment of the present invention from another angle. Figure 7 is a perspective view of the tape device according to a preferred embodiment of the present invention. Figure 8 is a schematic diagram of the placement of the substrate according to a preferred embodiment of the present invention. Figure 9 is a schematic diagram of edge detection according to a preferred embodiment of the present invention. Figure 10 is a schematic diagram of the placement of the substrate according to a preferred embodiment of the present invention. Figure 11 is a schematic diagram of the break detection according to a preferred embodiment of the present invention. Figure 12 is a schematic diagram of thickness detection according to a preferred embodiment of the present invention. Figure 13 is a schematic diagram of the insertion opening in a preferred embodiment of the present invention. Figure 14 is a schematic diagram of air blowing according to a preferred embodiment of the present invention. Figure 15 is a schematic diagram of the preferred embodiment of the present invention, showing the absorption and cutting of adhesive tape. Figure 16 is a schematic diagram of the tape being attached to the substrate according to a preferred embodiment of the present invention. Figure 17 is a schematic diagram of tape attaching to a substrate according to a preferred embodiment of the present invention. Figure 18 is a schematic diagram of the clamping tape according to a preferred embodiment of the present invention. Figure 19 is a schematic diagram of the film removal process according to a preferred embodiment of the present invention. Implementation

[0013] Please refer to Figures 1 through 7, which are perspective views of a preferred embodiment of the present invention, specifically a perspective view of the tape device. The figures clearly show that the present invention includes:

[0014] At least one platform assembly 1 for supporting a substrate is provided. The platform assembly 1 includes a vacuum rotating platform 11, a vacuum bonding platform 12 disposed at the center of the vacuum rotating platform 11, and a vacuum chamber 13 disposed on one side of the vacuum rotating platform 11. In this embodiment, the platform assembly 1 is composed of components such as the vacuum rotating platform 11, the vacuum bonding platform 12, and the vacuum chamber 13 as an example. Of course, it can also be composed of other types of components, such as using a vacuum suction robot arm to pick up the substrate in a vacuum manner and place it directly on the substrate after precise alignment and positioning.

[0015] A rotating device 2 is located at the bottom of the platform assembly 1 for rotating the platform assembly 1. The rotating device 2 includes a breaking rotating module 21 connected to the vacuum rotating platform 11 to increase the range of the breaking; an alignment rotating module 22 connected to the vacuum bonding platform 12 and located on one side of the breaking rotating module 21 for adjusting and confirming the center position of the substrate; a wafer picking lifting module 23 connected to the vacuum bonding platform 12 and located on one side of the alignment rotating module 22 for lifting the vacuum bonding platform 12; and a wafer picking lifting module 23 connected to the vacuum bonding platform 12 and located on the wafer picking lifting module 23. On one side of module 23, there is a Y-axis moving and rotating module 24 for the vacuum bonding platform 12 to move in the Y-axis direction, and an X-axis moving and rotating module 25 connected to the vacuum bonding platform 12 and located on one side of the Y-axis moving and rotating module 24 for the vacuum bonding platform 12 to move in the X-axis direction. In this embodiment, the rotating device 2 is composed of components such as a breaking rotating module 21, an alignment rotating module 22, a wafer picking and lifting module 23, a Y-axis moving and rotating module 24, and an X-axis moving and rotating module 25 as an example. Of course, it is also possible to use a motor shaft to directly connect to the platform assembly 1 to perform the rotation action.

[0016] A breach detection device 3 is installed above the platform assembly 1 to detect the location of breaches. The breach detection device 3 includes an X-axis moving detection module 31, a Z-axis moving detection module 32 movably mounted on the X-axis moving detection module 31, a camera module 33 mounted on the Z-axis moving detection module 32, and a light source module 34 mounted on the Z-axis moving detection module 32 and located below the camera module 33. In this embodiment, the breach detection device 3 is exemplified by the X-axis moving detection module 31, the Z-axis moving detection module 32, the camera module 33, and the light source module 34. Of course, a multi-axis robotic arm can also be used in conjunction with the camera module 33 and the light source module 34 for illumination detection, or a laser module can be used for detection.

[0017] A thickness detection device 4 is provided on one side of the break detection device 3 for detecting the film thickness on the substrate surface. The thickness detection device 4 has a circumferential moving module 41, a connecting rod 42 connected to the circumferential moving module 41, and a laser detection module 43 provided at one end of the connecting rod 42. In this embodiment, the thickness detection device 4 is composed of components such as the circumferential moving module 41, the connecting rod 42, and the laser detection module 43. Of course, it can also be a non-contact technology that uses an optical film thickness meter, a vertical light source incident on the substrate, and detects the reflection spectrum.

[0018] A tear blowing device 5 is provided on one side of the thickness detection device 4 to align with the tear position of the film detected by the tear detection device 3 and blow air between the substrate and the film to expand the film. The tear blowing device 5 has an X-axis moving blowing module 51, a Z-axis moving blowing module 52 movably disposed on the X-axis moving blowing module 51, a tilt angle adjustment module 53 disposed on the Z-axis moving blowing module 52, and a tear blowing module 54 disposed on the tilt angle adjustment module 53. The tear blowing module 54 has a connection to the tilt angle adjustment module 53. A base 541, an air supply channel 542 formed within the base 541, an air inlet 543 located at one end of the air supply channel 542, and a needle 544 located at the other end of the air supply channel 542. The needle 544 has a blowing channel 5441 communicating with the air supply channel 542. In this embodiment, the breach blowing device 5 is exemplified by a component consisting of an X-axis moving blowing module 51, a Z-axis moving blowing module 52, a tilt adjustment module 53, and a breach blowing module 54. Alternatively, a multi-axis robotic arm can be used in conjunction with the breach blowing module 54 to perform the blowing action.

[0019] A film-tearing device 6, located on one side of the platform assembly 1, is used to tear off the expanded film. The film-tearing device 6 includes an X-axis movable film-tearing module 61, a Y-axis movable film-tearing module 62 movably mounted on the X-axis movable film-tearing module 61, a Z-axis movable film-tearing module 63 movably mounted on the Y-axis movable film-tearing module 62, a pressure roller module 64 connected to the Z-axis movable film-tearing module 63, and a device pivotally connected to the Z-axis movable film-tearing module 63. The device includes a tape fixing element 65 that rotates and moves, and a clamping arm 66 disposed on one side of the tape fixing element 65. In this embodiment, the film tearing device 6 is composed of components such as an X-axis moving film tearing module 61, a Y-axis moving film tearing module 62, a Z-axis moving film tearing module 63, a pressure roller module 64, a tape fixing element 65, and a clamping arm 66. Of course, a multi-axis robotic arm can also be used in conjunction with the pressure roller module 64 and the clamping arm 66 to tear the film.

[0020] A tape device 7 is provided on one side of the film-tearing device 6. The tape device 7 has a tape roll 71, a cutter 72 provided on one side of the tape roll 71 for cutting the tape, and a fixing member 73 provided on one side of the cutter 72 for clamping the tape.

[0021] Among them, the blade 72 can be a pneumatic scissor.

[0022] The fixing component 73 can be a pneumatic clamping mechanism.

[0023] The vacuum rotating platform 11 has multiple holes 111 on its surface, and the vacuum bonding platform 12 also has multiple holes 121 on its surface. These holes 111 and 121 are connected to the vacuum chamber 13 to pick up the substrate by vacuuming.

[0024] The breaking rotation module 21 and the alignment rotation module 22 are driven by a drive motor and multiple gears to enable the vacuum rotation platform 11 to rotate.

[0025] Among them, the wafer picking and lifting module 23 is a lifting motor to provide the vacuum wafer receiving platform 12 for lifting and lowering.

[0026] The Y-axis moving and rotating module 24 and the X-axis moving and rotating module 25 are driven by a drive motor to move multiple sets of sliders, thereby causing the vacuum bonding platform 12 to move in the X-axis and Y-axis directions.

[0027] Among them, the X-axis motion detection module 31 is a track, the Z-axis motion detection module 32 is composed of multiple sliders driven by a drive motor, the camera module 33 is an image vision lens (CCD), and the light source module 34 is a light box.

[0028] The circumferential moving module 41 is driven by a drive motor connected to a pulley to move the connecting rod 42 circumferentially, while the laser detection module 43 is a laser rangefinder.

[0029] The X-axis moving air blowing module 51 is a track, the Z-axis moving air blowing module 52 is composed of multiple sliders 522 driven by a drive motor 521, and the tilt adjustment module 53 is fixed by an arc-shaped through hole 531 on the base 541 and a screw 532 on the Z-axis moving air blowing module 52. That is, the screw 532 passes through the arc-shaped through hole 531, and loosening the screw 532 can make the base 541 move circumferentially (i.e., change the tilt angle), and tightening the screw 532 can fix the base 541.

[0030] The air inlet 543 can be connected to an air tube to provide the necessary gas, while the needle 544 has a beveled surface 5442 at the front end, exposing the air blowing channel 5441.

[0031] The X-axis moving film-tearing module 61 is a track, the Y-axis moving film-tearing module 62 is a track that can move in the X-axis direction on the X-axis moving film-tearing module 61, the Z-axis moving film-tearing module 63 is composed of multiple sets of sliders driven by a drive motor, so that the pressure roller module 64 can move vertically up and down, the tape fixing element 65 is composed of a drive motor 651, a pivot seat 652 connected to the drive motor 651 and rotated by the drive motor 651, and an end 653 provided on the lower surface of the pivot seat 652 for attaching tape, and the clamping arm 66 is composed of a drive motor 661 connected to an arm 662 pivotally mounted to the pivot seat 652.

[0032] Please also refer to Figures 1 through 19, which are perspective views and tear-off diagrams of preferred embodiments of the present invention. As can be clearly seen from the figures, this invention can be carried out in the following manner:

[0033] (A) The vacuum bonding platform 12 of platform group 1 is lifted and lowered by the wafer pick-up lifting module 23. At this time, the wafer pick-up lifting module 23 raises the vacuum bonding platform 12 to a height higher than the vacuum rotating platform 11. Then, the wafer robotic arm picks up the substrate A (wafer) and places it on the vacuum bonding platform 12. At the same time, the vacuum chamber 13 sucks up the substrate A by evacuation, so that the substrate A is basically fixed. Finally, the wafer robotic arm leaves the substrate A. This action can be seen in Figures 2 and 8.

[0034] (B) The camera module 33 and the light source module 34 of the break detection device 3 are moved in the X-axis direction to above the edge of the substrate A by the X-axis movement detection module 31, and then moved towards the substrate A in the Z-axis direction by the Z-axis movement detection module 32. At the same time, the rotating device 2 rotates in the circumferential direction through the alignment rotation module 22, and the Y-axis movement rotation module 24 moves the vacuum bonding platform 12 in the Y-axis direction, and the X-axis movement rotation module 25 moves the vacuum bonding platform 12 in the X-axis direction to find the edge and center point of the substrate A. This action can be seen in Figures 2, 3 and 9.

[0035] (C) Once the center point of substrate A is confirmed, the wafer lifting module 23 will lower its height and change the substrate A from being supported on the vacuum bonding platform 12 to being supported by the vacuum rotating platform 11. This action can be seen in Figure 10.

[0036] (D) The rotating device 2 uses the rupture rotating module 21 to rotate the vacuum rotating platform 11. At the same time, the camera module 33 and the lamp source module 34 of the rupture detection device 3 work together to find the rupture location of the membrane B. This action can be seen in Figure 11.

[0037] (E) When the break location is found, the laser detection module 43 of the thickness detection device 4 moves to the area including the film B, the substrate A, and the break location using the circumferential moving module 41 and the connecting rod 42. The laser detection module 43 performs laser ranging on the film B and the substrate A respectively to calculate the thickness of the film B. After the thickness detection is completed, the circumferential moving module 41 drives the connecting rod 42 to move the laser detection module 43 away from the substrate A. This action can be seen in Figure 12.

[0038] (F) The rupture blowing module 54 of the rupture blowing device 5 is moved to the position above the substrate A and in front of the rupture using the X-axis moving blowing module 51 and the Z-axis moving blowing module 52, and then the camera module 33 and the light source module 34 of the rupture detection device 3 assist the rupture blowing module 54 in slowly moving towards the rupture until the tip of the beveled surface 5442 of the needle 544 pierces between the substrate A and the membrane B and stops moving forward. In addition, the tilt angle adjustment module 53 is set to the optimal angle in advance. Of course, if the user wants to change the tilt angle of the needle 544, the screw 532 can be loosened to move it within the arc-shaped perforation 531, thereby adjusting the tilt angle. This action can be seen in Figures 3, 5 and 13.

[0039] (G) The rupture rotation module 21 rotates the vacuum rotation platform 11 slightly to initially separate the substrate A and the membrane B using the needle 544, increasing the rupture area. Then, the air tube C supplies the necessary gas sequentially through the air inlet 543, the air supply channel 542, and the air blowing channel 5441 on the needle 544 into the space between the substrate A and the membrane B. Due to the gas filling pressure, the membrane B generates an outward pushing pressure, thus separating the membrane B from the substrate A. After the membrane B separates, the needle 544 moves away from the space above the substrate A using the X-axis moving air blowing module 51 and the Z-axis moving air blowing module 52. This action can be seen in Figures 5 and 14.

[0040] (H) The film-tearing device 6 moves the pressure roller module 64, tape fixing element 65, and clamping arm 66 together to the top of the tape device 7 via the X-axis moving film-tearing module 61 and the Y-axis moving film-tearing module 62. At this time, the tape has been pulled out from the tape roll 71 and is fixed at one end by the fixing member 73. Therefore, the tape fixing element 65 can be moved towards the tape by the Z-axis moving film-tearing module 63 and the tape is connected by adsorption at the end 653. The cutter 72 cuts the tape. Finally, after the fixing member 73 releases the tape, the Z-axis moving film-tearing module 63 lifts the tape fixing element 65 to move the tape away from the tape device 7. This action can be seen in Figures 6, 6A, 7, and 15.

[0041] (I) The film-tearing device 6 moves the pressure roller module 64, the tape fixing element 65, and the clamping arm 66 together to the top of the substrate A by moving the film-tearing module 61 along the X-axis and the film-tearing module 62 along the Y-axis. Then, the film-tearing module 63 moves towards the substrate A along the Z-axis, so that the tape on the tape fixing element 65 is attached to the edge of the film body B. This action can be seen in Figure 6, Figure 6A, and Figure 16.

[0042] (J) After the tape is attached to the edge of the film body B, the pressure roller module 64 then uses the Z-axis to move the film-tearing module 63 to perform the second stage of moving in the Z-axis direction, so that it is tightly attached to the tape. This action can be seen in Figures 6 and 17.

[0043] (K) The tape fixing element 65 uses the drive motor 651 to drive the pivot seat 652 to rotate, causing one end of the tape to bend, and the drive motor 661 of the clamping arm 66 drives the arm 662 to clamp the bent part. This action can be seen in Figures 6 and 18.

[0044] (L) The X-axis moving film-tearing module 61 drives the pressure roller module 64, the tape fixing element 65, and the clamping arm 66 to move together in the X-axis direction to tear the film B from the substrate A. This action can be seen in Figure 6, Figure 6A, and Figure 19.

[0045] Therefore, based on the above steps, it can be seen that this case has the following advantages:

[0046] First, by combining the tear detection device 3 and the thickness detection device 4, the tear blowing device 5 can be accurately placed between the film B and the substrate A without damaging the substrate A.

[0047] Secondly, through the combined operation of the rotating device 2 and the bursting air device 5, the membrane B can be quickly and easily separated from the substrate A without any chance of damaging the substrate A. In particular, the rotating device 2 can rotate the platform assembly 1 a short distance, so that the bursting air device 5 can increase the bursting range, which is more conducive to the expansion and separation of the membrane B.

[0048] Third, the film B can be quickly detached and removed from the substrate A through the film-tearing device 6, achieving the advantage of full automation.

[0049] Fourth, the vacuum rotating platform 11 and the vacuum bonding platform 12 utilize the vacuum chamber 13 to provide vacuum suction kinetic energy, which can effectively and firmly hold the substrate A above without any shaking problem and without damaging the substrate A.

[0050] Fifth, the tearing rotation module 21 enables the vacuum rotation platform 11 to rotate, effectively increasing the tearing range. It also works with the tearing detection device 3 to quickly and automatically detect the tearing location. The alignment rotation module 22, also equipped with the tearing detection device 3, can quickly confirm the center position of substrate A for subsequent processes. The wafer lifting module 23 allows the vacuum bonding platform 12 to be lifted, enabling seamless transfer of substrate A from the vacuum bonding platform 12 to the vacuum rotation platform 11 without damaging it. Furthermore, the design of the Y-axis moving rotation module 24 and the X-axis moving rotation module 25 allows the vacuum bonding platform 12 to move along the X and Y axes, facilitating the confirmation of the center position of substrate A and achieving full automation.

[0051] Sixth, through the design of the X-axis movement detection module 31 and the Z-axis movement detection module 32, the camera module 33 and the light source module 34 can move smoothly without lag. Moreover, the camera module 33 can capture images more clearly thanks to the lighting effect of the light source module 34. In addition, the camera module 33 can perform confirmation work at the center of substrate A and confirmation work at the edge of substrate A, which has multiple functional advantages.

[0052] Seventh, by using the circumferential moving module 41 to drive the connecting rod 42, the laser detection module 43 can move its position and avoid collisions with other components. Furthermore, the laser detection module 43 can detect the thickness of the membrane B quickly and accurately.

[0053] Eighth, the air blowing module 54 can quickly move in and out of the area above the substrate A through the X-axis moving air blowing module 51 and the Z-axis moving air blowing module 52. The tilt angle adjustment module 53 allows the user to manually adjust the tilt angle of the air blowing module 54 to achieve the best angle and avoid the air blowing module 54 damaging the substrate A due to excessive or insufficient tilt angle.

[0054] Ninth, the gas flows directly from the air inlet 543 and the air supply channel 542 to the needle 544, so that the gas can be supplied to the needle 544 in a more complete state and there will be no insufficient gas pressure.

[0055] Tenth, the X-axis moving film-tearing module 61, the Y-axis moving film-tearing module 62, and the Z-axis moving film-tearing module 63 can quickly drive the pressure roller module 64, the tape fixing element 65, and the clamping arm 66. The pressure roller module 64 can firmly adhere the tape to the film body B, the tape fixing element 65 can firmly stick the tape and make it warp, and the clamping arm 66 can ensure that the tape can be clamped and drive the film body B to detach from the substrate A during the film-tearing action.

[0056] Eleventh, the tape device 7 can hold the tape roll 71, and together with the cutter 72 and the fixing element 73, the tape can be cut and carried away by the tape fixing element 65, achieving the advantage of full automation.

[0057] However, while various embodiments of the invention have been shown and described herein, these embodiments are provided by way of example only, and any operational theories or benefits provided herein are intended only as aids in illustrating the invention; such theories and explanations do not bind or limit the scope of any patent application relating to organizational restructuring achieved by practicing the invention. Those skilled in the art will now conceive of numerous variations, modifications, or substitutions without departing from the invention. It should be understood that various alternatives to the embodiments of the invention described herein can be employed in the practice of the invention. The scope of the invention, the methods and structures within the scope of the invention, are intended to include equivalent forms.

[0058] In conclusion, the visual measurement tearing device of this invention can reliably achieve its function and purpose when in use. Therefore, this invention is indeed a highly practical invention. In order to meet the application requirements for an invention patent, this application is hereby filed in accordance with the law. I hope that the Examination Board will grant this invention as soon as possible to protect the applicant's hard work. If the Examination Board has any questions, please do not hesitate to write to me for guidance. The applicant will do its best to cooperate. I would appreciate your help.

[0059] 1: Platform Group 11: Vacuum Rotary Platform 111, 121: Holes 12: Vacuum bonding platform 13: Vacuum Chamber 2: Rotating device 21: Breaking Rotation Module 22: Alignment Rotation Module 23: Film Retrieval Lifting Module 24: Y-axis moving and rotating module 25: X-axis moving and rotating module 3: Breakage detection device 31: X-axis movement detection module 32: Z-axis movement detection module 33: Camera Module 34: Light source module 4: Thickness detection device 41: Circumferential Movement Module 42: Linkage 43: Laser Detection Module 5: Air blowing device for breaking the opening 51: X-axis moving air blowing module 52: Z-axis moving air blowing module 521, 651, 661: Drive motor 522: Slider 53: Tilt Adjustment Module 531: Arc-shaped perforation 532: Screw 54: Inflatable Module 541: Base 542: Gas supply channel 543: Air intake 544: Needle 5441: Air blowing channel 5442: Beveled surface 6: Film tearing device 61: X-axis moving film-tearing module 62: Y-axis moving film-tearing module 63: Z-axis moving film-tearing module 64: Pressure Roller Module 65: Tape fixing element 652: Pivot 653: End cap 66: Clamping Arm 662: Arm 7: Tape device 71: Tape Roll 72: Knives 73: Fasteners A:Substrate B: Membrane C: Trachea

Claims

1. A visual measurement device for tearing film, comprising: At least one platform assembly for supporting a substrate is provided at the bottom with a rotating device for rotating the platform assembly, and the platform assembly includes a vacuum rotating platform, a vacuum bonding platform located at the center of the vacuum rotating platform, and a vacuum chamber located on one side of the vacuum rotating platform; a tear detection device located above the platform assembly for detecting the location of the tear; and a thickness detection device located on one side of the tear detection device for detecting the film thickness on the surface of the substrate. A tear-blowing device located on one side of the thickness detection device aligns with the tear location detected by the tear detection device and blows air between the substrate and the film to expand the film; a film-tearing device located on one side of the platform assembly tears off the expanded film; the rotating device includes a tear-blowing rotating module connected to the vacuum rotating platform to increase the tear area, and a tear-blowing rotating module connected to the vacuum bonding platform and located on one side of the tear-blowing rotating module for adjustment and confirmation. The substrate includes a center alignment rotation module, a wafer picking lifting module connected to the vacuum bonding platform and located on one side of the alignment rotation module for lifting the vacuum bonding platform, a Y-axis moving rotation module connected to the vacuum bonding platform and located on one side of the wafer picking lifting module for displacement in the Y-axis direction, and an X-axis moving rotation module connected to the vacuum bonding platform and located on one side of the Y-axis moving rotation module for displacement in the X-axis direction.

2. The tear-off film detection device for visual measurement as described in claim 1, wherein the tear detection device comprises an X-axis movement detection module, a Z-axis movement detection module movably disposed on the X-axis movement detection module, a camera module disposed on the Z-axis movement detection module, and a light source module disposed on the Z-axis movement detection module and located below the camera module.

3. The tear film tearing device for visual measurement as described in claim 1, wherein the thickness detection device comprises a circumferential moving module, a connecting rod connected to the circumferential moving module, and a laser detection module disposed at one end of the connecting rod.

4. The visual measurement tearing film device as described in claim 1, wherein the tearing air blowing device comprises an X-axis moving air blowing module, a Z-axis moving air blowing module movably disposed on the X-axis moving air blowing module, an angle adjustment module disposed on the Z-axis moving air blowing module, and a tearing air blowing module disposed on the angle adjustment module.

5. The visual measurement tearing film device as described in claim 4, wherein the tearing air blowing module has a base connected to the tilt adjustment module, an air supply channel formed in the base, an air inlet provided at one end of the air supply channel, and a needle provided at the other end of the air supply channel, the needle having an air blowing channel communicating with the air supply channel.

6. The visual measurement tearing film device as described in claim 1, wherein the tearing film device comprises an X-axis movable tearing film module, a Y-axis movable tearing film module movably disposed on the X-axis movable tearing film module, a Z-axis movable tearing film module movably disposed on the Y-axis movable tearing film module, a pressure roller module connected to the Z-axis movable tearing film module, a tape fixing element pivotally disposed with the Z-axis movable tearing film module for rotational movement, and a clamping arm disposed on one side of the tape fixing element.

7. The tear-off film device for visual measurement as described in claim 1, wherein an adhesive tape device is provided on one side of the tear-off film device.

8. The visual measurement tearing film device as described in claim 7, wherein the tape device has a tape roll, a cutter disposed on one side of the tape roll for cutting the tape, and a fastener disposed on one side of the cutter for clamping the tape.

Images