Probe

Abstract

The probe of the present invention comprises: a front end portion; a spring portion, which is formed by connecting a plurality of coil spring portions along the axial direction via a non-elastic connecting portion; a base end portion; and a current path member disposed inside the spring portion, such that the front end portion and the base end portion are electrically connected. Viewed from the axial direction, the probe has four rectangular sides; at least one of the front end portion, the base end portion, and the connecting portion has a recess, which is used to insert the end of the current path member when the spring portion contracts along the axial direction.

Description

[Technical Field]

[0001] This invention relates to a probe used for inspecting the electrical characteristics of an object. [Previous Technology]

[0002] To inspect the electrical characteristics of semiconductor integrated circuits and other objects under inspection in a wafer state, an electrical connection device including probes is used. In probe-based inspection, one end of the probe contacts the electrodes of the object under inspection, and the other end contacts terminals (hereinafter also referred to as "pads") disposed on a substrate included in the electrical connection device. The pads are electrically connected to inspection equipment such as a testing machine. [Prior Art Documents] [Patent Documents]

[0003] Patent Document 1: Japanese Patent Publication No. 2018-4260 [Summary of the Invention]

[0004] [Problem to be Solved by the Invention] In order to accurately perform electrical characteristic checks on an object, the object to be checked must be stably electrically connected to the pads via a probe. Therefore, using a probe that includes a spiral coil spring portion that is elastic along the axial direction is very effective. However, since current flows through the coil spring portion, the current path of the probe becomes longer. As a result, the resistance of the probe increases, causing a decrease in the accuracy of electrical characteristic measurement. In addition, there is also the problem of the coil spring portion bending.

[0005] In view of the above-mentioned problems, the object of the present invention is to provide a probe having a coil spring portion that can suppress the increase of resistance and the occurrence of buckling. [Means for solving the problem]

[0006] A probe system according to the present invention comprises: a front end portion; a spring portion, which is formed by connecting a plurality of coil spring portions along the axial direction via a non-elastic connecting portion; a base end portion; and a current path member disposed inside the spring portion, such that the front end portion and the base end portion are electrically connected. Viewed from the axial direction, the probe system has four rectangular sides; at least one of the front end portion, the base end portion, and the connecting portion has a recess formed therein, which is used for the end portion of the current path member to be inserted when the spring portion contracts along the axial direction. [Effects of the Invention]

[0007] According to the present invention, a probe having a coil spring portion and capable of suppressing the increase of resistance and the occurrence of buckling can be provided.

Implementation Method

[0009] Next, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same or similar symbols are used for the same or similar parts. However, each drawing is only a schematic diagram, and it should be noted that the thickness ratios of each part may differ from the actual object. Furthermore, the drawings may naturally contain differences in dimensional relationships, ratios, etc. The embodiments shown below are examples of apparatuses and methods used to embody the technical concept of the present invention; the embodiments of the present invention do not specifically specify the materials, shapes, structures, and arrangements of the constituent parts as described below.

[0010] (First Embodiment) The probe 10 of the first embodiment shown in FIG1 is used for inspecting the electrical characteristics of an object. One end of the probe 10 in the axial direction is provided with a front end portion 11 to contact the object being inspected, and the other end is provided with a base end portion 13 to contact the pads. Between the front end portion 11 and the base end portion 13 of the probe 10, a first coil spring portion 1211 to a fourth coil spring portion 1214 with elasticity are connected along the axial direction via a non-elastic connecting portion 122. In the following description, the first coil spring portion 1211 to the fourth coil spring portion 1214 are not distinguished and are referred to only as "coil spring portion 121". In the probe 10, the portion located between the front end portion 11 and the base end portion 13 and including the coil spring portion 121 and the connecting portion 122 is referred to as the spring portion 12.

[0011] The probe 10 is cylindrical with a front end 11 and a base end 13 at both ends. As shown in FIG1, the axial direction of the probe 10 is defined as the Z direction, the left-right direction in FIG1 is defined as the X direction, and the direction perpendicular to the plane of the paper in FIG1 is defined as the Y direction. Furthermore, when viewed from the base end 13 along the Z direction, the direction of the position of the front end 11 is defined as upward, and when viewed from the front end 11 along the Z direction, the direction of the position of the base end 13 is defined as downward. In addition, for each part of the probe 10, the surface facing upward is defined as the upper surface, the surface facing downward is defined as the lower surface, and the surface connecting the upper surface and the lower surface is defined as the side surface.

[0012] As shown in Figure 2, when viewed from the axial direction, the probe 10 has four sides and is rectangular. The side viewed from the Y direction is designated as the first side 101, and the side facing the opposite direction of the first side 101 is designated as the second side 102. Furthermore, the side viewed from the X direction is designated as the third side 103, and the side facing the opposite direction of the third side 103 is designated as the fourth side 104. Here, as will be described later, the coil spring portion 121 of the probe 10 is constructed by combining the first component 111, the second component 112, and the third component 113. As shown in Figure 2, the first side 101 is the surface of the first component 111, the second side 102 is the surface of the third component 113, and the third side 103 and the fourth side 104 are the surfaces of the second component 112.

[0013] In the probe 10 shown in FIG1, the first coil spring portion 1211, the second coil spring portion 1212, the third coil spring portion 1213, and the fourth coil spring portion 1214 are sequentially connected from the front end portion 11 to the base end portion 13 via the connecting portion 122. FIG1 illustrates that the probe 10 includes four coil spring portions 121, but the number of coil spring portions 121 included in the probe 10 can be arbitrarily set.

[0014] Figure 3 shows the first component 111 constituting the probe 10. Figure 4 shows the second component 112 constituting the probe 10. Figure 5 shows the third component 113 constituting the probe 10. The first component 111 and the third component 113 have a structure in which beams extending obliquely relative to the X direction (hereinafter also referred to as "oblique beams") are arranged along the Z direction. The second component 112 has a structure in which beams parallel to the Y direction (hereinafter also referred to as "parallel beams") are arranged along the Z direction.

[0015] The coil spring portion 121 of the probe 10 is constructed by sequentially stacking the third component 113, the second component 112, and the first component 111 along the Y direction. That is, the coil spring portion 121 is constructed by connecting the inclined beam of the first component 111 and the inclined beam of the third component 113 with the parallel beam of the second component 112.

[0016] Figure 6 shows the configuration of the coil spring portion 121. When viewed from the normal direction of the first side surface 101, the first component 111 presented on the first side surface 101 includes a diagonal beam extending from the upper left to the lower right in the figure. When viewed from the normal direction of the first side surface 101, the third component 113 presented on the second side surface 102 includes a diagonal beam extending from the upper right to the lower left in the figure. That is, the diagonal beams of the first component 111 and the diagonal beams of the third component 113 are symmetrically arranged with respect to the central axis of the probe 10. In other words, the third component 113 is a mirror image of the first component 111. As shown in Figure 6, the coil spring portion 121 has a double helix structure. Figure 7 shows a perspective view of the coil spring portion 121.

[0017] Furthermore, the probe 10 includes a current path member 114A disposed inside the coil spring portion 121. The current path member 114A is a conductive columnar member. As shown in FIG1, the current path member 114A of the probe 10 bridges the front end portion 11 with the connecting portion 122, the two connecting portions 122, and the base end portion 13 with the connecting portion 122. The current path member 114A is conductive, and the front end portion 11 and the base end portion 13 are electrically connected via the current path member 114A and the connecting portion 122.

[0018] For example, regarding the coil spring portion 121, which is connected at one end to the front end portion 11 and at the other end to the connecting portion 122, the current path member 114A bridges the connecting portion 122 with the front end portion 11. In this way, the connecting portion 122, which is closest to the front end portion 11, is electrically connected to the front end portion 11.

[0019] Furthermore, regarding the coil spring portion 121, which is connected at one end to the base end portion 13 and at the other end to the connecting portion 122, the current path member 114A bridges the connecting portion 122 and the base end portion 13. In this way, the connecting portion 122, which is closest to the base end portion 13, is electrically connected to the base end portion 13.

[0020] Furthermore, the current path member 114A bridges the two connecting portions 122, which are respectively connected to both ends of a coil spring portion, to each other. In this way, the two connecting portions 122 are electrically connected.

[0021] Figure 8 shows a fourth component 114 including a current path member 114A. The fourth component 114 is a configuration in which a plurality of current path members 114A extending along the Z direction are arranged along the Z direction. In the manufacture of the probe 10, the fourth component 114 is disposed before the first component 111 is laminated on the second component 112, thereby manufacturing a probe 10 in which the current path members 114A are disposed inside the spring portion 12.

[0022] For example, as shown in FIG9, in the current path member 114A disposed inside the first coil spring portion 1211, its first end faces the first opening 110 of the recess formed on the lower surface of the front end portion 11, and its second end is connected to the upper surface of the connecting portion 122. Furthermore, when the probe 10 retracts along the axial direction, the first end of the current path member 114A inserts into the first opening 110, thereby electrically connecting the front end portion 11 to the connecting portion 122. Thus, when the spring portion 12 extends or retracts, the first end of the current path member 114A slides in contact with the interior of the first opening 110.

[0023] Furthermore, as shown in FIG10, in the current path member 114A disposed inside the second coil spring portion 1212, its first end faces the second opening 120 of the recess formed on the lower surface of a connecting portion 122, and its second end is connected to the upper surface of another connecting portion 122. When the probe 10 retracts along the axial direction, the first end of the current path member 114A inserts into the second opening 120, thereby electrically connecting the two connecting portions 122. Thus, when the spring portion 12 extends or retracts, the first end of the current path member 114A slides in contact with the interior of the second opening 120.

[0024] Similar to the current path member 114A disposed inside the second coil spring portion 1212, the current path member 114A disposed inside the third coil spring portion 1213 also electrically connects the two connecting portions 122. In the current path member 114A disposed inside the fourth coil spring portion 1214, its first end faces the second opening 120 of the recess formed on the lower surface of the connecting portion 122, and its second end is connected to the upper surface of the base end portion 13. Furthermore, when the probe 10 retracts along the axial direction, the first end of the current path member 114A is inserted into the second opening 120, thereby electrically connecting the connecting portion 122 and the base end portion 13.

[0025] As described above, when the coil spring portion 121 extends or retracts, the end of the current path member 114A slides in contact with the interior of the first opening portion 110 and the second opening portion 120. Therefore, even if the probe 10 extends or retracts along the axial direction, the current path member 114A will not bend and protrude outside the coil spring portion 121.

[0026] The first component 111, the second component 112, the third component 113, and the current path member 114A are made of conductive materials such as metal, for example, formed by processing a metal sheet. The probe 10 is manufactured by stacking metal sheets in the order of the third component 113, the second component 112, the current path member 114A, and the first component 111. The inclined beams of the first component 111 and the third component 113 function as springs, and the second component 112 connects the inclined beams of the first component 111 and the third component 113. In other words, the various wire systems of the coil spring section 121 are constructed by beams connecting the first component 111, the second component 112, and the third component 113.

[0027] The probe 10 is able to extend and retract freely along the axial direction by means of the coil spring portion 121 of the spring portion 12. Since the probe 10 itself has elasticity in the axial direction, the probe 10 does not need to be held in a bent state at the probe tip.

[0028] Furthermore, in the probe 10, the current path member 114A disposed inside the coil spring portion 121 functions as a current path between the front end portion 11 and the base end portion 13. Therefore, even if the coil spring portion 121 has a longer path, resulting in higher resistance, the current path of the probe 10 can be shortened. In other words, the current path member 114A functions as a component that shortens the current path. Thus, the resistance of the current path of the probe 10 can be reduced by means of the current path member 114A.

[0029] As shown in FIG8, the current path member 114A can be disposed in a bent state inside the coil spring portion 121. At this time, the bending directions of the plurality of current path members 114A disposed along the axial direction can be different, for example, the bending directions can be different from each other along the axial direction. In addition, the first end of the current path member 114A can be slightly arc-shaped. That is, the first end of the current path member 114A can also have a conical or approximately spherical shape. By making the first end slightly arc-shaped, when the current path member 114A is inserted into the first opening portion 110, it can be easily guided to the first opening portion 110 by moving along the inner wall of the first opening portion 110. In addition, since the current path member 114A has this shape, when the first end contacts the inside of the first opening portion 110 and slides, damage to the first end or the inner wall of the first opening portion 110 can be suppressed.

[0030] The probe 10 can be made of materials such as nickel (Ni), nickel alloys, gold (Au), silver (Ag), copper (Cu), palladium (Pd), palladium alloys, rhodium (Rh), rhodium alloys, or other precious metals. The current path component 114A can be made of a material with lower mechanical strength but higher conductivity compared to the first component 111, the second component 112, and the third component 113. For example, the first component 111 and the third component 113 can be made of Ni alloys, while the current path component 114A can be made of gold or copper.

[0031] Here, when viewed from the first side 101 and the second side 102, each line of the coil spring portion 121 also includes curved portions rather than straight lines. For example, as shown in FIG11, the direction of travel of each line can also change midway along the side. The coil spring portion 121 shown in FIG11 includes a structure in which a first portion 121A and a second portion 121B are connected. The first portion 121A extends at a first angle relative to the axial direction. The second portion 121B extends at a second angle different from the first angle relative to the axial direction. In the example shown in FIG11, the second portion 121B is disposed between the first portion 121A and the first portion 121A. Since each line of the coil spring portion 121 includes curved portions rather than simply straight lines, the load applied to the probe 10 can be easily transmitted along the axial direction, and when the axial pressing force is applied to the probe 10, the probe 10 can be prevented from bending and buckling from the central axis.

[0032] The elastic force of the plurality of coil spring portions 121 included in the probe 10 can also be different from each other. For example, the number of turns of the coils in some of the first coil spring portion 1211, the second coil spring portion 1212, the third coil spring portion 1213, and the fourth coil spring portion 1214 can be different from each other, or all of the coil spring portions 121 can have different numbers of turns. As described above, two coil spring portions 121 with different elastic forces can be formed by having different numbers of turns for one coil spring portion 121 than for another coil spring portion 121. Here, the number of turns of the coils in the coil spring portions 121 included in the probe 10 can be arbitrarily selected according to each coil spring portion 121.

[0033] As explained above, the probe 10 of the first embodiment has a coil spring portion 121 and can extend and retract freely along the axial direction. Furthermore, since the probe 10 with the current path member 114A is electrically connected to the front end portion 11 and the base end portion 13 via the current path member 114A, which has a shorter current path than the spiral coil spring portion 121, the increase in the resistance of the probe 10 can be suppressed, thereby improving the measurement accuracy of the electrical characteristics.

[0034] Furthermore, since the probe 10, which has the current path member 114A disposed inside the coil spring portion 121, can suppress the occurrence of buckling of the coil spring portion 121 by contacting the current path member 114A with the coil spring portion 121. In addition, since the probe 10 is formed by stacking multiple metal plates to form the spring portion 12, the current path member 114A, which serves as a core rod, can be easily disposed inside the spring portion 12.

[0035] Furthermore, when the probe 10 extends or retracts in the spring portion 12, the end of the current path member 114A will contact the interior of the first opening portion 110 and the second opening portion 120 and slide. Therefore, even if the probe 10 extends or retracts along the axial direction, the current path member 114A will not bend and expose the outside of the coil spring portion 121, and can operate stably.

[0036] (Second Embodiment) As shown in FIG12, in the probe 10 of the second embodiment, a single current path member 114B extending to the front end 11 and the base end 13 is disposed inside the coil spring portion 121. In the probe 10 of the second embodiment, the current path member 114B bridges the front end 11 and the base end 13 by passing through the inside of a through hole in the connecting portion 122 along the axial direction. The difference between the probe 10 shown in FIG12 and the probe 10 of FIG1, which electrically connects the front end 11 and the base end 13 via a plurality of current path members 114A, is that the front end 11 and the base end 13 are electrically connected by a single current path member 114B. In other aspects, the probe 10 of the second embodiment is the same as that of the first embodiment shown in FIG1.

[0037] Figure 13 shows the structure of the first component 111 of the probe 10 shown in Figure 12. Figure 14 shows the structure of the second component 112 of the probe 10 shown in Figure 12. Figure 15 shows the structure of the third component 113 of the probe 10 shown in Figure 12. Figure 16 shows the current path component 114B of the probe 10 shown in Figure 12.

[0038] The probe 10 shown in FIG12 is constructed by forming a coil spring portion 121 using the first component 111, the second component 112, and the third component 113 shown in FIG13 to FIG15 respectively, and the current path member 114B shown in FIG16 is disposed inside the coil spring portion 121. The probe 10 shown in FIG12 includes two coil spring portions 121.

[0039] As shown in FIG. 14, the probe 10 of the second embodiment has a second through hole 152 extending along the axial direction formed in the connecting portion 122. The current path member 114B is disposed inside the second through hole 152 of the coil spring portion 121 and the connecting portion 122, bridging the front end portion 11 and the base end portion 13. For example, the first end of the current path member 114B is inserted into the first through hole 151 formed in the front end portion 11 as shown in FIG. 14, and its second end is inserted into the third through hole 153 formed in the base end portion 13. When the coil spring portion 121 extends or retracts, the end of the current path member 114B slides in contact with the interior of the first through hole 151 and the third through hole 153.

[0040] For example, as shown in FIG17, the current path member 114B can be connected to the inner wall surface of the second through hole 152 via the connecting member 115. The connecting member 115 connects the current path member 114B to the connection portion 122 between the first member 111 and the third member 113. A support plate 116 is disposed on the inner side of the second through hole 152. The connecting member 115 is disposed between the support plate 116 and the current path member 114B, thereby engaging the support plate 116 and the current path member 114B.

[0041] Compared to the probe 10 shown in FIG1, which uses a plurality of current path components 114A, the probe 10 shown in FIG12 can further reduce the resistance of the current path. This increases the allowable current flowing through the probe 10. Apart from this, the second embodiment is substantially the same as the first embodiment, therefore repeated descriptions are omitted.

[0042] <Modified Example> Figure 18 shows a modified example of a probe 10 using a current path member 114B formed as a single columnar member. In the probe 10 shown in Figure 18, the connecting portion 122 connected to the front end portion 11 via the first coil spring portion 1211 and the connecting portion 122 connected to the base end portion 13 via the second coil spring portion 1212 are arranged opposite to each other and isolated along the axial direction. In other words, the spring portion 12 is divided into two segments.

[0043] The probe 10 shown in FIG18 is formed by stacking the first component 111 shown in FIG19, the second component 112 shown in FIG20 and the third component 113 shown in FIG21 to form a coil spring portion 121. Furthermore, the probe 10 shown in FIG18 has the current path member 114B shown in FIG16 disposed inside the coil spring portion 121.

[0044] The probe 10 shown in FIG18 is similar to the probe 10 shown in FIG12, in that the current path member 114B is disposed inside the second through hole 152 of the coil spring portion 121 and the connecting portion 122, bridging the front end portion 11 and the base end portion 13. The first end of the current path member 114B is inserted into the first through hole 151 formed in the front end portion 11, and the second end is inserted into the third through hole 153 formed in the base end portion 13.

[0045] The current path member 114B is connected to the connection portion 122 between the first member 111 and the third member 113 by means of the connecting member 115. For example, as shown in FIG22, a support plate 116 is disposed inside the second through hole 152 of the connection portion 122, and the connecting member 115 is disposed between the support plate 116 and the current path member 114B to join the support plate 116 and the current path member 114B.

[0046] Figure 18 shows a probe 10 comprising two coil spring portions 121. However, the number of coil spring portions 121 of the probe 10 is not limited to two. It can also be a connecting portion 122 electrically connected to the front end portion 11 via at least one coil spring portion 121 and another connecting portion 122 electrically connected to the base end portion 13 via at least one coil spring portion 121, which are arranged separately along the axial direction. In other words, the spring portion 12 can be divided into any number of segments, two or more.

[0047] (Other Embodiments) As described above, the present invention has been illustrated by way of embodiments; however, it should be understood that the discussion and drawings disclosed herein are not intended to limit the invention. Those skilled in the art will be able to learn of various alternative embodiments, examples, and applications from the disclosure.

[0048] For example, the above description illustrates that the first opening 110, the second opening 120, the first through hole 151, the second through hole 152, and the third through hole 153 are shaped to form openings perpendicularly to the upper or lower surface of the front end portion 11, the base end portion 13, or the connecting portion 122. However, the opening shape of these openings and through holes may also be a conical shape in which the area of ​​the opening gradually decreases from the outside to the center.

[0049] Figures 23 and 24 show that the cross-sectional shape of the second opening 120 along the axial direction is tapered. Because the opening shape is tapered, the end of the current path member 114A can be easily inserted into the first opening 110 and the second opening 120, and the end of the current path member 114B can be easily inserted into the first through hole 151 and the third through hole 153.

[0050] Thus, the present invention also includes various embodiments not described in the above description. [Simplified Explanation of the Diagram]

[0008] Figure 1 is a schematic side view showing the configuration of the probe according to the first embodiment. Figure 2 is a schematic plan view showing the configuration of the probe according to the first embodiment. Figure 3 is a schematic diagram showing the first component constituting the probe shown in Figure 1. Figure 4 is a schematic diagram showing the second component constituting the probe shown in Figure 1. Figure 5 is a schematic diagram showing the third component constituting the probe shown in Figure 1. Figure 6 is a schematic diagram showing the configuration of the coil spring portion of the probe according to the first embodiment. Figure 7 is a schematic perspective view showing the coil spring portion of the probe according to the first embodiment. Figure 8 is a schematic diagram showing the fourth component including the current path member constituting the probe shown in Figure 1. Figure 9 is a schematic diagram showing the connection between the front end of the probe shown in Figure 1 and the current path member. Figure 10 is a schematic diagram showing the connection between the connecting portion of the probe shown in Figure 1 and the current path member. Figure 11 is a schematic diagram showing the shape of each line in the coil spring portion of the probe according to the first embodiment. Figure 12 is a schematic side view showing the configuration of the probe according to the second embodiment. Figure 13 is a schematic diagram showing the first component constituting the probe shown in Figure 12. Figure 14 is a schematic diagram showing the second component constituting the probe shown in Figure 12. Figure 15 is a schematic diagram showing the third component constituting the probe shown in Figure 12. Figure 16 is a schematic diagram showing the current path member constituting the probe shown in Figure 12. Figure 17 is a schematic diagram showing the connection method of the current path member of the probe shown in Figure 16. Figure 18 is a schematic side view showing the configuration of a modified example of the second embodiment of the probe. Figure 19 is a schematic diagram showing the first component constituting the probe shown in Figure 18. Figure 20 is a schematic diagram showing the second component constituting the probe shown in Figure 18. Figure 21 is a schematic diagram showing the third component constituting the probe shown in Figure 18. Figure 22 is a schematic diagram showing the connection method of the current path member of the probe shown in Figure 18. Figure 23 is a schematic cross-sectional view showing an example of the opening shape of the connection portion of the probe in another embodiment. Figure 24 is a schematic cross-sectional view showing another example of the opening shape of the connection portion of the probe in another embodiment.

Claims

1. A probe for inspecting the electrical characteristics of an object, the probe comprising: a front end portion that contacts the object; a spring portion, one end of which is connected to the front end portion and is formed by connecting a plurality of elastic coil spring portions along an axial direction via a non-elastic connecting portion; a base end portion that is connected to the other end of the spring portion; and a current path member disposed inside the spring portion, such that the front end portion and the base end portion are electrically connected; when viewed from the axial direction, the probe has four rectangular sides; the spring portion has a structure formed by stacking a plurality of metal plates; at least one of the front end portion, the base end portion, and the connecting portion is formed with a recess for the end of the current path member to be inserted when the spring portion contracts along the axial direction.

2. The probe as described in claim 1, wherein, One end of the aforementioned current path member is connected to any one of the aforementioned front end, the aforementioned connecting portion, and the aforementioned base end; the other end of the aforementioned current path member is opposite to the aforementioned recess; the aforementioned current path member bridges at least one of the aforementioned front end and the aforementioned connecting portion, the two aforementioned connecting portions, and the aforementioned base end and the aforementioned connecting portion.

3. The probe as described in claim 1, wherein, The single aforementioned current path component bridges the aforementioned front end and the aforementioned base end by passing through the inside of the through hole of the aforementioned connecting portion along the aforementioned axial direction.

4. The probe as described in claim 3 further comprises a connecting member that connects the inner wall surface of the aforementioned through hole to the aforementioned current path member.

5. The probe as described in any one of claims 1 to 4, comprising at least two aforementioned coil spring portions with different elastic forces.

6. The probe as described in claim 5, wherein, The number of turns of one of the two aforementioned coil spring sections with different elastic forces is different from the number of turns of the other aforementioned coil spring section.

7. A probe as described in any one of requests 1 to 4, wherein, When viewed from a direction perpendicular to the aforementioned axial direction, each of the wires in the aforementioned coil spring section includes a curved portion.

Images